Title: Modeling MEMS and NEMS
Subjects: Mathematical models, Microelectromechanical systems, Electronics engineering, Mathematical modelling, Technical design, Technology, Mechanical Engineering (Specific Aspects), Microelectronics, Technology & Industrial Arts, Science/Mathematics, Applied, Engineering - Electrical & Electronic, Engineering - Mechanical, Technology / Electronics / Microelectronics, Electronics - General, Electronics - Microelectronics, Electromechanical devices