Title: Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
First published: 2002
Subjects: Polishing, Semiconductors, Grinding and polishing, Interconnects (Integrated circuit technology), Plastics & polymers technology, Science/Mathematics, Integrated Circuits, Technology, Technology & Industrial Arts, Chemistry - Organic, Electronics - Semiconductors, Engineering - Electrical & Electronic, Science-Chemistry - Organic, Technology / Electronics / Semiconductors, Technology / Engineering / Industrial, Technology-Engineering - Electrical & Electronic, Electronics - Circuits - Integrated, Interconnects (Integrated circ, Chemical mechanical planarization
LC classification: TK7874.53 .B67 2002, TK7874.53 .B67 2002