Title: Electron Beam Testing Technology
Description: This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Subjects: Computer engineering, Condensed Matter Physics, Spectroscopy and Microscopy, Optical and Electronic Materials, Optical materials, Solid State Physics, Electrical Engineering, Crystallography, Physics, Particle beams