Title: X-ray metrology in semiconductor manufacturing
First published: 2006
Subjects: Fluroscopy, X-rays, Semiconductor wafers, Semiconductors, Diffraction, Design and construction, Quality control, Measurement, Inspection, Integrated circuits, X-rays, diffraction, Plaquettes à gravure en semi-conducteurs, Rayons X, X-ray diffraction, TECHNOLOGY & ENGINEERING, Electronics, Solid State
LC classification: TK7874.58 .B69 2006