Title: Semiconductor devices, physics and technology
Description: "This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices."--Publisher's description.
Subjects: Semiconductors, Tk7871.85 .s9883 2002, 621.3815/2