Title: Workshop on temperature measurement of semiconductor wafers using thermocouples
Description: Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy.
Subjects: Congresses, Thermocouples, Semiconductor wafers, Measurement, Industrial applications, Thermal properties