Title: Reactive Sputter Deposition
Subjects: Physical organic chemistry, Surfaces (Physics), Chemical engineering, Condensed matter, Sputtering (physics), Thin films, Plating, Cathode sputtering (Plating process), Pulvérisation cathodique, Applications industrielles, Couches minces, Magnetronsputtern, PVD-Verfahren, Reaktives Sputtern