Title: Manufacturing Techniques for Microfabrication and  Nanotechnology
First published: January 26, 2009
Subjects: TECHNOLOGY & ENGINEERING / Manufacturing, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Microfabrication, Nanotechnology, Microelectronics, Integrated circuits, Electromechanical devices, TECHNOLOGY & ENGINEERING, Engineering (General), Reference