Title: Micro mechanical systems
Subjects: Microelectromechanical systems -- Handbooks, manuals, etc, Microelectromechanical systems, Handbooks, manuals, Electromechanical devices, Microelectronics, Microsystèmes électromécaniques, Guides, manuels, TECHNOLOGY & ENGINEERING, Mechanical, Mikromechanik, Mikrosystemtechnik, Tecnologia, Engenharia eletrônica, Microactionneurs, Microtechniques, Micromécanique (ingénierie)