Title: Technology of integrated circuits
Description: "This book provides expert and comprehensive coverage of current technologies used in the manufacture of VLSI circuits, for process integration up to the Gigabit memory level. It is aimed at advanced students, and also at engineers and scientists working in research, development and production."--BOOK JACKET.
Subjects: Complementary Metal oxide semiconductors, Digital integrated circuits, Design and construction, Metal oxide semiconductors, complementary, Digital integrated circuits--design and construction, Tk7874.65 .w5313 2000, 621.815