Title: Micromachining using electrochemical discharge phenomenon
Subtitle: fundamentals and application of spark assisted chemical engraving
First published: 2009
Subjects: Micromachining, Electrochemical cutting, Industrial applications, Plasma etching, Electric discharges, Electrochemistry, Microelectromechanical systems, Electric metal-cutting, TECHNOLOGY & ENGINEERING, Nanotechnology & MEMS
LC classification: TJ1191.5 .W83 2009