Title: Materials and process characterization for VLSI, 1988 (ICMPC '88)
First published: 1988
Subjects: Congresses, Materials, Silicon, Very large scale integration, Microelectronics, Integrated circuits, Applied physics & special topics, Chemistry, Condensed matter physics (liquids & solids), Very-Large-Scale Integration (Vlsi), Integrated circuits, very large scale integration
LC classification: TK7871.15.S55 I58 1988