Title: Fundamentals of microfabrication
First published: 1997
Subjects: Microelectromechanical systems, Industrial applications, Microelectronic packaging, Microelectronics, Machining, Lasers, Design and construction, Integrated circuits, Microstructure, Lasers, industrial applications, TECHNOLOGY & ENGINEERING, Mechanical, Microelectronics--design and construction, Lasers--industrial applications, Integrated circuits--design and construction, Microelectromechanical systems--design and construction, Tk7836 .m33 1997, 621.3815/2