Title: Optical characterization techniques for high-performance microelectronic device manufacturing
Description: vii, 202 p. : 28 cm
Subjects: Optical methods, Congresses, Optical pattern recognition, Semiconductors, Testing, Integrated circuits, Design and construction, Semiconductors -- Design and construction -- Congresses, Integrated circuits -- Design and construction -- Congresses, Semiconductors -- Testing -- Optical methods -- Congresses, Integrated circuits -- Testing -- Optical methods -- Congresses, Optical pattern recognition -- Congresses