Title: Physical Chemistry of, in and on Silicon
Description: This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.
Subjects: Physical organic chemistry, Surfaces (Physics), Optical materials, Chemistry, physical and theoretical, Silicon