Title: Gate dielectric integrity
Description: xi, 169 p. : 23 cm
Subjects: Wafer-scale integration, Dielectrics, Semiconductor wafers, Testing, Gate array circuits, Reliability, Integrated circuits, Materials, Silicon oxide films, Semiconductor wafers -- Reliability, Integrated circuits -- Wafer-scale integration -- Reliability, Gate array circuits -- Materials, Silicon oxide films -- Testing, Dielectrics -- Testing