Title: Beam technologies for integrated processing
Description: xii, 89 p. : 28 cm
Subjects: Industrial applications, Materials, Microelectronics, Microelectronics industry, Molecular beams, Plasma-enhanced chemical vapor deposition, Particle beams, Molecular beams -- Industrial applications, Microelectronics -- Materials, Plasma-enhanced chemical vapor deposition -- Industrial applications, Integrated optics, Beam optics