Title: The MEMS handbook
Subjects: Microelectromechanical systems, Handbooks, manuals, Microeletrônica - manuais, Nanotechnology, Microelectronics, Microsystèmes électromécaniques, Microélectronique, Mechanical engineering, Génie mécanique, Guides, manuels, TECHNOLOGY / Electronics / Microelectronics, TECHNOLOGY / Engineering / Civil