Title: Nanopatterning--from ultralarge-scale integration to biotechnology
Description: xiii, 338 p. : 24 cm
Subjects: Biotechnology, Congresses, Integrated circuits, Microlithography, Nanostructures, Nanotechnology, Ultra large scale integration, Integrated circuits, very large scale integration, Materials, Nanostructures -- Congresses, Nanotechnology -- Congresses, Microlithography -- Congresses, Integrated circuits -- Ultra large scale integration -- Congresses, Biotechnology -- Congresses