Title: Tribology in chemical-mechanical planarization
First published: 2005
Subjects: Tribology, Grinding and polishing, Technology: General Issues, Power Tools, Science, Home Improvement / Construction, Science/Mathematics, Engineering - General, Material Science, Technology / Material Science, Chemistry - General, Chemical mechanical planarization, Tribologie (Technologie), Planarisation chimicomécanique, HOUSE & HOME
LC classification: TJ1075 .L49 2005