Title: Silicon micromachining
First published: 1998
Subjects: Silicon, Micromachining, Etching, Electronic devices & materials, Technology, Microelectronics, Semiconductor Physics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - General, Engineering - Electrical & Electronic, Material Science, Technology / Engineering / Electrical, Electronics - Microelectronics, Semiconductors, Etching, technique
LC classification: TK7871.15.S55 E49 1998