Title: An introduction to microelectromechanical systems engineering
Description: "Here's a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications."--BOOK JACKET.
Subjects: Microelectromechanical systems