Title: Crystal Growth and Evaluation of Silicon for VLSI and ULSI
Subjects: Silicon, Integrated circuits, very large scale integration, Integrated circuits, ultra large scale integration, Crystal growth, Materials, Semiconductor wafers, Ultra large scale integration, Silicon crystals, Testing, Integrated circuits, Electric properties, Very large scale integration, Silicium cristallisé, Cristaux, Croissance, Circuits intégrés à très grande échelle, Circuits intégrés à ultra-grande échelle, TECHNOLOGY & ENGINEERING, Chemical & Biochemical