Title: Fabrication and characterization of single-crystal diamond photonic cavities
Description: Cavity quantum electrodynamics provide a platform to form a quantum network which connects individual quantum bits (qubits) via photon. Optical cavity, a device which traps photons in a confined volume can enhance the interaction between photons and the qubits serves as fundamental building block for a quantum network. Nitrogen vacancy (NV) centers in diamond has emerged as one of the leading solid-state qubits because of its long spin coherence time and single photon emission properties at room temperature. Diamond optical micro-cavities are highly sought after for coupling with NV centers. Fabrication of optical cavities from nano-crystalline diamond film has been demonstrated previously. The quality factor (Q) of such devices was limited by the material properties of the nano-crystalline diamond film. Fabrication of single-crystal diamond photonic cavities is challenging because there is no trivial way to form thin diamond film with optical isolation. In this thesis, we describe an approach to fabricate high quality single-crystal diamond optical cavities for coupling to NV centers in diamond.