Title: Microlithography fundamentals in semiconductor devices and fabrication technology
First published: 1998
Description: Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.
Subjects: Microlithography, Photoresists, Semiconductors, Industrial applications, Manufacturing processes, Design and construction, Microlithographie, Applications industrielles, Fabrication, Résines photosensibles, Manufacturing, TECHNOLOGY & ENGINEERING, Mechanical, Semiconductors--design and construction, Microlithography--industrial applications, Tk7871.85 .n66 1998, 621.3815/2
LC classification: TK7871.85 .N66 1998