Title: Digest of papers
Subtitle: Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan
First published: 2007
Subjects: Congresses, Nanotechnology, Microelectronics, Microlithography
LC classification: TK7875 .I585 2007