Title: Thin-film deposition
First published: 1995
Subjects: Vapor-plating, Thin films, Thin film devices, Technologie industrielle, Ingénierie, Depositie (scheikunde), Dunne films, Chemical vapour deposition, Plasma's, Elektronenbundels, Epitaxie, Materiais e dispositivos semicondutores, Deposicao de vapor (engenharia eletrica), Couches minces
LC classification: TA418.9.T45 S65 1995