Title: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
First published: 1997
Subjects: Standards, Calibration, Spectra, Masks, Microscopes, Measurement, Chromium, Integrated circuits
LC classification: QC100 .U57 no. 260-129, no. 260-129 .U57 no. 260-129