Title: Microsystem technology and microrobotics
First published: 1997
Subjects: Microfabrication, Robotics, Electromechanical devices, Design and construction, Computer architecture & logic design, Reference - General, Technology, Automation, Microelectronics, Computers - Other Applications, Miscellaneous Software, Computer Books: General, Engineering - Mechanical, Computer Architecture - General, Computers / Artificial Intelligence, Computers / Computer Architecture, Computers-Miscellaneous Software, Computers-Reference - General, Microrobots
LC classification: TJ163 .F38 1997