Title: Lon-stimulated mass transport in nanoscale morphology evolution
Description: We observe temporal evolution of two distinct lateral length scales in surface topography following low energy, E , argon ion (Ar + ) irradiation of Si(001). From real-space AFM topographs, we observe that the short-wavelength, λ (high-wavenumber, q ) evolve as nearly isotropic dots while the longer-λ (low- q ) features appear as isotropic "rings" at normal incidence and as anisotropic ripples at off-normal incidence with their wavevector orthogonal to the ion beam. We explain our results in terms of an interplay between smoothening by ion-enhanced viscous flow and roughening driven by ion sputtering (for high- q features) or elastic strain energy relief (for low- q features). Our proposed mechanisms also explain the weak temperature and flux dependence of both wavelengths. We also observe stable flat surfaces following irradiation at incidence angles greater than 20° from normal, E > 500 eV and temperature > 300°C. To explain non-diverging wavelengths as the smoothening boundary is approached, we present evidence that non-local terms are needed in the height evolution equation.

We report the influence of pre-patterned boundaries in guiding ripples appearing during uniform irradiation at high temperatures. Compared to untemplated samples, we observe that the long-range order of the guided ripples is significantly enhanced. We develop a scalar figure of merit to characterize the degree of order of the patterns. We observe that templating is most efficient when the boundaries are separated by an integer multiple of the spontaneously arising wavelength. We report new observations following ion sculpting of nanopores. Among these are: (1) The formation of nanopores is not limited to insulators: we successfully close pores in other materials including silicon dioxide, amorphous silicon (semiconductor) and palladium silicide (metallic glass). (2) Pores retain "memory" of their initial radius: at the same instantaneous radius, pores that started off smaller require less argon fluence for closure. (3) In some cases the closure rate increases strongly with temperature but saturates at higher temperatures. As a partial explanation to these observations, we propose that anisotropic strain deformation is not limited to MeV irradiation of amorphous materials but plays an important role even in the keV regime.