Title: Physics of High Frequency Capacitive Discharge
Subjects: Electric discharges through gases, Plasma (Ionized gases), Mathematical physics, Semiconductors, Fluids, Physical and theoretical Chemistry, Chemistry, Physics, Plasma (Gaz ionisés), Physique mathématique, Semi-conducteurs, Fluides, Chimie physique et théorique, Chimie, Physique, Semiconductor, Physical chemistry, SCIENCE, Electricity, Electromagnetism