Title: The physics of micro/nano-fabrication
Description: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Subjects: Microelectronics, Thin-film circuits, Thin films, Manufacturing processes, Electrical engineering, Crystallography, Solid state physics, Physics, Computer engineering, Optical materials, Spectroscopy and Microscopy, Condensed Matter Physics, Optical and Electronic Materials