Title: Solid State Physics in Microfabrication and Nanotechnology
First published: January 26, 2009
Subjects: Microelectromechanical systems, Solid state physics, SCIENCE / Solid State Physics, Nanoelectromechanical systems, Microfluidics, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS, Nanotechnology, Solid-state physics, TECHNOLOGY & ENGINEERING, Nanotechnology & MEMS, Electronics, Microelectronics, SCIENCE, Solid State Physics, Nanotechnologie, Mikrofertigung