Title: The Physics of Submicron Lithography
Description: This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
Subjects: Computer engineering, Crystallography, Physics, Optical materials, Electrical engineering, Solid state physics, Spectroscopy and Microscopy, Condensed Matter Physics, Optical and Electronic Materials