Title: Novel Advances in Microsystems Technologies and Their Applications
Subjects: Microelectromechanical systems, Microelectronics, TECHNOLOGY & ENGINEERING / Electronics / General, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS, Miniaturization, Microélectronique, TECHNOLOGY & ENGINEERING, Electronics, General, Nanotechnology & MEMS, Digital