Title: Kijun ninshō kenkyū kaihatsu jigyō (MEMS debaisu kikō zairyō no jumyō kasoku shikenhō, narabi ni sono tokusei hyōka shikenʼyō kōsei shiryō no hyōjunka) seika hōkokusho
Subjects: Microelectromechanical systems, Testing, Standards
Places: Japan