Title: Thin film piezoelectric elements for active devices
Description: Piezoelectric materials have had widespread application since their discovery both in bulk crystal and thin film applications, but thin film piezoelectrics have unlocked key applications like acoustic filtering and energy harvesting. [1] This work investigates a small subset including energy harvesting, multifunctional nanocomposites, acoustic wave resonators, and gravimetric and infrared sensing. Electroactive polymers such as PVDF-TrFE have a unique combination of characteristics including a high dielectric constant, piezoelectricity, pyroelectricity, biocompatibility, and mechanical flexibility. [2, 3, 4, 5, 6] This unique combination gives them a wide potential application space including energy harvesting, biomedical devices, drug delivery, flexible electronics, and tactile sensing. [7] In recent years, there has been significant work investigating potential composite materials based on electroactive polymers and nanoparticles. [8] This interest has been primarily driven by the increased commercial availability, tunability, and available functionalities of nanoparticles.

In this work, nanocomposites of PVDF-TrFE, barium titanate (BTO), and europium barium titanate (EBTO) are investigated. EBTO is an optically active material which can add optical functionality to these active polymer composites. [9] Acoustic wave resonators including bulk acoustic wave resonators and surface acoutstic wave resonators are widely used for front end filtering technologies, but their high quality factor, small size, and low power makes them good candidates for sensing technologies. [10, 11, 12] In this work, FBARs are applied to VOC sensing and infrared sensing sucessfully.