Title: IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
First published: 1998
Subjects: Congresses, Actuators, Detectors, Electromechanical devices, Microelectronics, Communications engineering / telecommunications, Electronic devices & materials, Science/Mathematics, Electronic Apparatus And Devices, Technology, Technology & Industrial Arts, Industrial Design - General, Reference, Electronics - Microelectronics, Engineering - Electrical & Electronic, Microelectromechanical systems, Microactuators
LC classification: TK153 .M468 1998