Title: Adhesion aspects in MEMS-NEMS
Subjects: Nanoelectromechanical systems, Microelectromechanical systems, Surfaces (Technology), Adhesion, Surfaces (technology), Nanostructures, Micro-Electrical-Mechanical Systems, Adhesiveness, Microsystèmes électromécaniques, Nanosystèmes électromécaniques, Adhésion (Physique), Surfaces (Technologie), TECHNOLOGY & ENGINEERING, Electronics, Digital, Microelectronics