Title: Introduction to microelectronic fabrication
First published: 1988
Subjects: Textbooks, Very large scale integration, Integrated circuits, Design and construction, Microelectronics, Solid state electronics, Integrated circuits--very large scale integration--design and construction, Integrated circuits--very large scale integration--design and construction--textbooks, Tk7874 .j33 2002, 621.39/5, Congresses