Title: CMOS Integration of Single-Molecule Field-Effect Transistors
Description: Point functionalized carbon nanotubes have recently demonstrated the ability to serve as single-molecule biosensors. Operating as single-molecule Field-Effect Transistors (smFET), the sensors have been used to explore activity ranging in scope from DNA hybridization kinetics to DNA polymerase functionality. High signal levels and an all-electronic label-free transduction mechanism make the smFET an attractive candidate for next-generation medical diagnostics platforms and high-bandwidth basic science research studies. In this work, carbon nanotubes are integrated onto a custom designed CMOS chip. Integration enables arraying many devices for measurement, providing the requisite scale-up for any commercial application of smFETs. Integration also provides substantial benefits towards achieving high bandwidths through the reduction of electrical parasitics. In a first exploitation of these high-bandwidth measurement capabilities, integrated devices are electrically characterized over a 1-MHz bandwidth.

Functionalization through electrochemical oxidation of the devices is observed with microsecond temporal resolution, revealing complex reaction pathways with resolvable scattering signatures. High rate random telegraph noise (RTN) is observed in certain oxidized devices, further illustrating the temporal resolution of the integrated sensing platform.