Title: The Science and Engineering of Microelectronic Fabrication
First published: 1996
Subjects: Semiconductors, Design and construction, Semiconductors--design and construction, Tk7871.85 .c25 1996, 621.3815/2, Microélectronique, Microfabrication, Semiconducteur, Halbleitertechnologie, Tk7871.85 .c25 2001, 53.55, Zn 4100
LC classification: TK7871.85 .C25 1996