Title: Numerical Simulation of Mechatronic Sensors and Actuators
Subjects: Microelectromechanical systems, Mechatronics, Structural Mechanics, RF and Optical Engineering Microwaves, Feld <Physik>, Instrumentation Electronics and Microelectronics, Micromachines, Aktor, Optics and Electrodynamics, Continuum Mechanics and Mechanics of Materials, Simulation, Sensor, Mechatronik, Numerisches Verfahren, Mécatronique, Finite element method, Mathematics, Number systems