ALE-3
Subtitle: proceedings of the third International Symposium on Atomic Layer Epitaxy and Related Surface Processes, Sendai, Japan, 25-27 May 1994
By: edited by Masashi Ozeki ... [et al.].
Contributors: Ozeki, Masashi.
Series: Applied surface science -- vol.82-83
Publisher: North-Holland
Published: 1994
Place of publication: Amsterdam; Oxford
Language: eng