Testing, reliability, and application of micro- and nano-material systems II
Subtitle: 15-17 March, 2004, San Diego, California, USA
By: Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Meyendorf, Norbert.; Baaklini, George Y.; Michel, Bernd, 1949-; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5392; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5392.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 272
Subjects: Electrooptical devices -- Materials -- Testing -- Congresses.; Photonics -- Materials -- Testing -- Congresses.; Nanostructured materials -- Testing -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.