CleanRooms '94 West
Subtitle: the show of contamination control technology : proceedings.
Publisher: PennWell Pub. Co.
Published: 1994
Place of publication: Nashua, NH
Language: eng
Number of pages: 236
Subjects: Clean rooms -- Congresses.; Contamination (Technology) -- Congresses.
Other titles: CleanRooms '94 West proceedings
Notes: Includes bibliographical references and index.