Multilevel interconnect technology
Subtitle: 1-2 October 1997, Austin, Texas
By: Divyseh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.
Contributors: Patel, Divyesh N.; Graef, Mart.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Electrochemical Society.
Series: SPIE proceedings series,; v. 3214; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3214.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 132
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Notes: Includes bibliographic references and author index.