Micromachined ultrasound-based proximity sensors
By: Mark R. Hornung, Oliver Brand.
Contributors: Brand, Oliver, 1964-
Series: Microsystems -- 4.; Microsystems (series) -- 4.
Publisher: Kluwer Academic
Published: 1999
Place of publication: Boston
Language: eng
Number of pages: 120
Subjects: Proximity detectors; Ultrasonic transducers; Microelectromechanical systems; Proximity detectors; Ultrasonic transducers; Microelectromechanical systems
Notes: Includes bibliographical references (p. [111]-118) and index.