Microsystems engineering
Subtitle: metrology and inspection III : 23-25 June 2003, Munich, Germany
By: Christophe Gorecki, chair/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by EOS European Optical Society,  WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, WA
Language: eng
Number of pages: 210