Fotomasuku
Subtitle: denshi buhin seizō no kikan gijutsu = Photomask technology
By: Tanabe Isao, Takehana Yōichi, Hōga Morihisa kyōcho
Contributors: Takehana, Yōichi; Hōga, Morihisa
Edition: Dai 1-han
Publisher: Tōkyō Denki Daigaku Shuppankyoku
Published: 2011
Place of publication: Tōkyō
Language: jpn
Number of pages: 323
ISBN-13: 9784501328207
Subjects: Integrated circuits; Masks (Electronics); Microlithography; Large scale integration; Industrial applications
Other titles: Photomask technology
Notes: Includes bibliographical references and indexes.