MicroProcess 91
Subtitle: proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan
By: edited by S. Namba, T. Tsurushima ; sponsored by the Japan Society of Applied Physics (JSAP).
Contributors: Namba, Susumu, 1928-; Tsurushima, T.; Ōyō Butsuri Gakkai.
Series: JJAP series -- 5
Publisher: Publication Office, Japanese Journal of Applied Physics
Published: 1992
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 442
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.; Plasma engineering -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.