Modeling MEMS and NEMS
By: John A. Pelesko and David H. Bernstein
Contributors: Bernstein, David H.
Publisher: Chapman & Hall/CRC
Published: 2003
Place of publication: Boca Raton, FL
Language: eng
Format: [electronic resource] /
ISBN-13: 9781420035292
Subjects: Microelectromechanical systems; Mathematical models
Other titles: ENGnetBASE.
Notes: Includes bibliographical references (p. 325-340) and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.