Materials and device characterization in micromachining
Subtitle: 21-22 September, 1998, Santa Clara, California
By: Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Friedrich, Craig.; Vladimirsky, Yuli.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series,; v. 3512; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3512.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 442
Subjects: Micromachining -- Congresses.; Electromechanical devices -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.