Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I
Subtitle: and Interconnect and Contact Metallization--Materials, Processes, and Reliability
By: editors, P.C. Andricacos ... [et al.] ; Dielectric Science and Technology, Electronics, and Electrodeposition Divisions [of the Electrochemical Society].
Contributors: Andricacos, Panayotis C., 1951-; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Electrodeposition Division.; Electrochemical Society. Meeting; Electrochemical Society. Meeting; Symposium on Electrochemical Processing in ULSI Fabrication (1st : 1998 : San Diego, Calif.); Symposium on Interconnect and Contact Metallization--Materials, Processes, and Reliability (1998 : Boston, Mass.)
Series: Proceedings ;; v. 98-6; Proceedings (Electrochemical Society) ;; v. 98-6.
Publisher: Electrochemical Society
Published: 1999
Place of publication: Pennington, New Jersey
Language: eng
Number of pages: 274
Subjects: Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Electric contacts -- Congresses.; Electrochemistry -- Congresses.
Genres: Congresses.
Other titles: Electrochemical processing in ULSI fabrication; Interconnect and contact metallization: materials, processes, and reliability
Notes: Includes bibliographic references and indexes.
"The Symposium on Electrochemical Processing in ULSI Fabrication I was held on May 4 and 5, 1998 in San Diego, California in the context of the 193th[sic] meeting of the Electrochemical Society ... This symposium on Interconnect and Contact Metallization: Materials, Processes, and Reliability was held in Boston during the 194th meeting of The Electrochemical Society, November 1-6, 1998."--Preface.