Micro- and nanoelectronics 2005
Subtitle: 3-7 October 2005, Zvenigorod, Russia
By: Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology (Russia) [and] SPIE Russia Chapter ; sponsored by Ministry of Education and Science of the Russian Federation (Russia) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
Contributors: Valiev, Kamilʹ Akhmetovich.; Orlikovskiĭ, A. A.; Society of Photo-optical Instrumentation Engineers.; Society of Photo-optical Instrumentation Engineers. Russian Chapter.; Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk); Russia (Federation). Ministerstvo nauki, vyssheĭ shkoly i tekhnicheskoĭ politiki.
Series: Proceedings of SPIE -- v. 6260; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6260.
Publisher: SPIE
Published: 2006
Place of publication: Bellingham, Wash., USA
Language: eng
Subjects: Microelectronics -- Congresses.; Nanotechnology -- Congresses.; Lithography -- Congresses.; Photonics -- Materials -- Congresses.
Genres: Congresses.
Other titles: ICMNE-2005; Micro- and nanotechnologies 2005
Notes: "This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--P. xv.

Includes bibliographical references and author index.