Handbook of Semiconductor Wafer Cleaning Technology
Subtitle: Science, Technology, and Applications (Materials Science and Process Technology Series)
Publisher: Noyes Publications
Published: August 1, 1993
Language: eng
Format: Hardcover
Number of pages: 623
ISBN-13: 9780815513315
Subjects: Semi-conductors & super-conductors; Semiconductor wafers; Semiconductors; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - Electrical & Electronic; Electronics - Circuits - General; Handbooks & Manuals; Cleaning
First sentence: The importance of clean substrate surfaces in the fabrication of semiconductor microelectronic devices has been recognized since the dawn of solid-state device technology in the 1950s.