Workshop on Mass Flow Measurement and Control for the Semiconductor Industry
By: Robert F. Berg, David S. Green, and George E. Mattingly
Contributors: Berg, Robert Frank, 1955-; Green, David S; Mattingly, G. E; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-101
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 2001
Place of publication: Gaithersburg, Md; Washington, DC
Language: eng
Format: Microform
Number of pages: 86
Subjects: Semiconductor production equipment industry -- Congresses; Semiconductor industry -- Congresses
Genres: Congresses
Other titles: Workshop on Mass Flow Measurement and Control for the Semiconductor Industry
Notes: "February 2001."

Shipping list no.: 2002-0266-M

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2002. 1 microfiche : negative