Silicon-on-insulator technology
Subtitle: materials to VLSI
By: by Jean-Pierre Colinge.
Series: The Kluwer international series in engineering and computer science ;; SECS 132.; VLSI, computer architecture, and digital signal processing; Kluwer international series in engineering and computer science ;; SECS 132.; Kluwer international series in engineering and computer science.
Publisher: Kluwer Academic Publishers
Published: 1991
Place of publication: Boston
Language: eng
Number of pages: 228
Subjects: Semiconductors.; Silicon-on-insulator technology.; Integrated circuits -- Very large scale integration -- Materials.
Notes: Includes bibliographical references (p. 203-224) and index.