Simulation and design of microsystems and microstructures
By: editors, R.A. Adey, A. Lahrmann, C. Lessmölmann.
Contributors: Adey, R. A.; Lahrmann, A.; Lessmöllmann, C.
Publisher: Computational Mechanics Publications
Published: 1995
Place of publication: Southampton; Boston
Language: eng
Number of pages: 337
Subjects: Microelectronics -- Design -- Congresses.; Microelectronics -- Simulation methods -- Congresses.; Masks (Electronics) -- Congresses.; Micromechanics -- Congresses.; Computer-aided design -- Congresses.
Notes: Includes bibliographical references and index.
"First International Conference on Simulation and Design of Microsystems and Microstructures, MicroSIM 95."
Conference held in Southampton, UK, Sept. 1995.