Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XVII
Subtitle: 23-26 January 2012, San Francisco, California, United States
By: Guido Hennig ... [et al.], editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 8243; Proceedings of SPIE--the International Society for Optical Engineering -- v. 8243.
Publisher: SPIE
Published: 2012
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819488862
Subjects: Photonics; Photons; Congresses; Microelectronics
Other titles: LAMOM XVII
Notes: Includes bibliographical references and index.