Microprocesses and nanotechnology 2003
Subtitle: 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers
By: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
Contributors: IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.; American Vacuum Society.
Publisher: Business Center for Academic Societies Japan
Published: 2003
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 349
Subjects: Microlithography -- Congresses.; Nanotechnology -- Congresses.; Microelectronics -- Congresses.; Microfabrication -- Congresses.
Genres: Congresses.
Other titles: Digest of papers, Microprocesses and nanotechnology 2003
Notes: Includes bibliographical references and author index.
"JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso.