Sputtering by Particle Bombardment I
Subtitle: Physical Sputtering of Single-Element Solids
Publisher: Springer
Published: Sep 10, 1981
Format: hardcover
Number of pages: 284
ISBN-13: 9783540105213
Notes: Source title: Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids (Topics in Applied Physics)