Integrated circuit metrology, inspection, and process control IX
Subtitle: 20-22 February 1995, Santa Clara, California
By: Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Contributors: Bennett, Marylyn Hoy.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2439; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2439.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 514
Subjects: Integrated circuits -- Inspection -- Congresses.; Integrated circuits -- Measurement -- Congresses.; Process control -- Congresses.; Optical measurements -- Congresses.; Scanning electron microscopes -- Congresses.
Notes: Includes bibliographical references and author index.