MOEMS and miniaturized systems X
Subtitle: 24-26 January 2011, San Francisco, California, United States
By: Harald Schenk, Wibool Piyawattanametha, editors ; sponsored ... by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7930; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7930.
Publisher: SPIE
Published: 2011
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819484673
Subjects: Microelectromechanical systems; Micromechanics; Miniature electronic equipment; Optical scanners; Congresses
Other titles: MOEMS and miniaturized systems 10; MOEMS and miniaturized systems ten
Notes: Includes bibliographical references and author index.