IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC 96 proceedings : theme, Innovative approaches to growth in the semiconductor industry, November 12-14, 1996, Cambridge, Massachusetts
By: [sponsored jointly by Semiconductor Equipment and Materials International (SEMI) and the Institute of Electrical and Electronics Engineers (IEEE)].
Contributors: Semiconductor Equipment and Materials International.; Institute of Electrical and Electronics Engineers.
Publisher: Institute of Electrical and Electronics Engineers; SEMI
Published: 1996
Place of publication: [New York, N.Y.]; Mountain View, Calif
Language: eng
Number of pages: 479
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: 1996 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; Innovative approaches to growth in the semiconductor industry.; 1996 Proceedings, IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC); ASMC 96.; 1996 Advanced Semiconductor Manufacturing Conference and Workshop.
Notes: "IEEE catalog number 96CH35953"--T.p. verso.

Includes bibliographical references.