Substrate surface preparation handbook
Subtitle: Max Robertson
Publisher: Artech House
Published: 2012
Place of publication: Norwood, MA
Language: eng
Number of pages: 195
ISBN-13: 9781608072132
Subjects: Surfaces; Semiconductors; Epitaxy
Notes: Includes bibliographical references (p. 157-158) and index.
Table of contents: title: Introduction; title: Preparation : before the start; title: Lapping; title: Polishing; title: Specific processes and materials; title: Specialized techniques; title: Surface finish; title: Optics; title: Semiconductor device Deconstruction; title: Metallurgical Polishing and Microscopy; title: Laboratory Setup; title: Using Interferometry.