1st MicroProcess Conference
Subtitle: July 4-6, 1988, Tokyo : digest of papers 1988
By: sponsored by the Japan Society of Applied Physics, in cooperation with American Vacuum Society, IEEE Electron Devices Society.
Contributors: Ōyō Butsuri Gakkai.; American Vacuum Society.; IEEE Electron Devices Society.
Publisher: Business Center for Academic Societies Japan
Published: 1988
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 179
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Lithography -- Congresses.; Microprocessors -- Congresses.
Other titles: MicroProcess Conference :; Digest of papers 1988 1st Microprocess Conference; First MicroProcess Conference :
Notes: Includes bibliographical references.