Etching in microsystem technology
By: Michael Köhler ; translated by Antje Wiegand.
Publisher: Wiley-VCH
Published: 1999
Place of publication: Weinheim; New York
Language: eng
Number of pages: 368
Subjects: Masks (Electronics); Microlithography.; Plasma etching.
Notes: Includes bibliographical references ([345]-360) and index.