Optical micro- and nanometrology in microsystems technology
Subtitle: 5-7 April 2006, Strasbourg, France
By: Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, editors ; sponsored by SPIE Europe ; cosponsored by Conseil General Du Bas-Rhin (France) ... [et al.] ; cooperating organizations CNOP--Comité National d'Optique et de Photonique (France) ... [et al.].
Contributors: Gorecki, Christophe.; Asundi, Anand.; Osten, Wolfgang.; SPIE Europe.; Bas-Rhin (France). Conseil général.; Comité National d'Optique et de Photonique (France); Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE -- v. 6188; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6188.
Publisher: SPIE
Published: 2006
Place of publication: Bellingham, Wash
Language: eng
Subjects: Optical measurements -- Congresses; Microscopy -- Congresses; Photonics -- Congresses; Metrology -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.