Science and technology of microfabrication
Subtitle: symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.
By: editors, R.E. Howard ... [et al.].
Contributors: Howard, R. E. 1948-; Materials Research Society. Meeting; Symposium on the Science and Technology of Microfabrication (1986 : Boston, Mass.)
Series: Materials Research Society symposia proceedings,; v. 76
Publisher: Materials Research Society
Published: 1987
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 373
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Microfabrication -- Congresses.
Notes: Includes bibliographies and indexes.
Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.