Proceedings of the Symposium on Patterning Science and Technology
By: edited by Robert Gleason, George J. Hefferon, L.K. White ; [sponsored by the] Dielectrics and Insulation and Electronics divisions and Luminescence and Display Materials Group.
Contributors: Gleason, Robert.; Hefferon, George J.; White, L. K.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Luminescence and Display Materials Group.
Series: Proceedings / Electrochemical Society ;; v. 90-1; Proceedings (Electrochemical Society) ;; v. 90-1.
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 248
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.; Photoresists -- Congresses.; Masks (Electronics) -- Congresses.
Other titles: Patterning science and technology.
Notes: Includes bibliographical references and indexes.
Spine title: Patterning science and technology.
"The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--P. iii.