Angular sensitivity of controlled implanted doping profiles
By: Robert G. Wilson ... [et al.].
Contributors: Wilson, Robert G.
Series: Semiconductor measurement technology; NBS special publication ; 400-49; NBS special publication ;; 400-49.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
Published: 1978
Place of publication: [Washington]
Language: eng
Number of pages: 54
Subjects: Semiconductor doping.; Ion implantation.; Integrated circuits.
Notes: Includes bibliographical references.