Feedback control of MEMS to atoms
By: Jason J. Gorman, Benjamin Shapiro, editors
Publisher: Springer
Published: 2012
Place of publication: New York
Language: eng
Number of pages: 384
ISBN-13: 9781441958310; 9781441958327
Subjects: Feedback control systems; Microelectromechanical systems; Microelectronics
Notes: Includes bibliographical references and index.
Table of contents: title: Introduction / Jason J. Gorman and Benjamin Shapiro; title: Feedback control of particle size distribution in nanoparticle synthesis and processing / Mingheng Li and Panagiotis D. Christofides; title: In situ optical sensing and state estimation for control of surface processing / Rentian Xiong and Martha A Grover; title: Automated tip-based 2-D mechanical assembly of micro/nonparticles / Cagdas D. Onal, Onur Ozcan, and Metin Sitti; title: Atomic force microscopy : principles and systems viewpoint enabled methods / Srinivasa Salapaka and Murti Salapaka; title: Feedback control of optically trapped particles / Jason J. Gorman, Arvind Balijepalli, and Thomas W. LeBrun; title: Position control of MEMS / Michael S.-C. Lu; title: Dissecting tuned MEMS vibratory Gyros / Dennis Kim and Robert T. M'Closkey; title: Feedback control of microflows / Mike Armani ... [et al.]; title: Problems in control of quantum systems / Navin Khaneja; title: Common threads and technical challenges in controlling micro- and nanoscale systems / Benjamin Shapiro and Jason J. Gorman.