Technical digest of the 16th International Vacuum Microelectronics Conference
Subtitle: July 7-11, 2003, Senri Life Science Center, Toyonaka, Osaka, Japan
By: editors, Mikio Takai, Yasuhito Gotoh, Junzo Ishikawa
Contributors: Takai, Mikio; Gotoh, Yasuhito; Ishikawa, Junzo; Institution of Electrical Engineers; IEEE Electron Devices Society; American Vacuum Society
Publisher: IEEE; Electron Devices Society; AVS Science & Technology
Published: 2003
Place of publication: [Piscataway, N.J.]; [Place of publication not identified]
Language: eng
Number of pages: 314
Copyright date: 2003
Subjects: Microelectronics; Congresses; Vacuum technology
Other titles: IVMC 2003; 16th International Vacuum Microelectronics Conference
Notes: "IEEE Catalogue Number 03TH8703"--T.p. verso.

Includes bibliographical references and author index.