50nm-kŭp chʻa sedae lisogŭraepʻi kisul kaebal saŏp =
Subtitle: Development of basic technology for 50nm next generation lithography.
Contributors: Hanʼguk Chŏnja Tʻongsin Yŏnʼguwŏn.; Korea (South). Chŏngbo Tʻongsinbu.
Publisher: ETRI; Chŏngbo Tʻongsinbu
Published: 2005
Place of publication: [Taejŏn Kwangyŏksi]; [Seoul]
Language: kor
Number of pages: 259
Subjects: Microlithography
Other titles: Development of basic technology for 50nm next generation lithography
Notes: "2005-yŏn 3-wŏl."

"04MB2800-01-1300P."

"8/70."

Summary and table of contents also in English.