Ultraclean semiconductor processing technology and surface chemical cleaning and passivation
Subtitle: symposium held April 17-19, 1995, San Francisco, California, U.S.A.
By: editors, Michael Liehr ... [et al.].
Contributors: Liehr, Michael.
Series: Materials Research Society symposium proceedings,; v. 386; Materials Research Society symposia proceedings ;; v. 386.
Publisher: Materials Research Society
Published: 1995
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 411
Subjects: Integrated circuits -- Design and construction -- Congresses.; Manufacturing processes -- Congresses.; Semiconductors -- Cleaning -- Congresses.; Surface preparation -- Congresses.
Notes: Includes bibliographical references and indexes.