Early stages of oxygen precipitation in silicon
By: edited by R. Jones.
Contributors: Jones, R., Ph. D.; North Atlantic Treaty Organization. Scientific Affairs Division.; NATO Advanced Research Workshop on Early Stages of Oxygen Precipitation in Silicon (1996 : Exeter, England)
Series: NATO ASI series. Partnership sub-series 3. High technology ;; vol. 17; NATO ASI series.; vol. 17.
Publisher: Kluwer Academic
Published: 1996
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 530
Subjects: Silicon crystals -- Defects -- Congresses.; Silicon -- Oxygen content -- Congresses.; Semiconductors -- Defects.
Notes: Includes bibliographical references and index.
"Proceedings of the NATO Advanced Research Workshop on Early Stages of Oxygen Precipitation in Silicon, Exeter, UK, March 26-29, 1996"--T.p. verso.
"Published in cooperation with NATO Scientific Affairs Division."