Nitrid kremnii͡a︡ v ėlektronike
By: otvetstvennyĭ redaktor A.V. Rzhanov ; [avtory V.I. Belyĭ ... et al.].
Contributors: Rzhanov, Anatoliĭ Vasilʹevich.; Belyĭ, V. I. 1938-; Institut fiziki poluprovodnikov (Akademii͡a︡ nauk SSSR); Institut neorganicheskoĭ khimii (Akademii͡a︡ nauk SSSR)
Publisher: Izd-vo "Nauka," Sibirskoe otd-nie
Published: 1982
Place of publication: Novosibirsk
Language: rus
Number of pages: 197
Subjects: Microelectronics -- Materials.; Silicon nitride.
Notes: Bibliography: p. 186-[198]
At head of title: Akademii͡a︡ nauk SSSR. Sibirskoe otdelenie. Institut fiziki poluprovodnikov. Institut neorganicheskoĭ khimii.