III-V Nitrides Semiconductors and Ceramics
Subtitle: from Material Growth to Device Applications (European Materials Research Society Symposia Proceedings)
Publisher: Elsevier Science
Published: June 1, 1998
Language: eng
Number of pages: 330
ISBN-13: 9780444205186
First sentence: As GaN-based materials switched from research to industrial production of short wavelength optoelectronics [1] and high temperature electronics [2] the demand for MOVPE-multiwafer systems with high yield and throughputs as well as low costs of ownership increased.