Microlithography
Subtitle: Science and Technology, Second Edition (Opitcal Science and Engineering)
Contributors: Kazuaki Suzuki (Editor); Bruce W. Smith (Editor)
Edition: 2 edition
Publisher: CRC
Published: May 11, 2007
Language: eng
Format: Hardcover
Number of pages: 864
ISBN-13: 9780824790240
Subjects: Circuits & components; Science/Mathematics; Technology; Technology & Industrial Arts; Electronics - Microelectronics; Engineering - Electrical & Electronic; Manufacturing; Technology / Lasers; Lasers; Engineering - General; Design and construction; Industrial applications; Integrated circuits; Masks; Metal oxide semiconductors, Complementary; Microlithography