Optical characterization techniques for high-performance microelectronic device manufacturing II
Subtitle: 25-26 October 1995, Austin, Texas
By: John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Lowell, John.; Chen, Ray T.; Mathur, Jagdish P.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2638; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2638.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 302
Subjects: Integrated circuits industry -- Congresses.; Manufacturing processes -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Testing -- Optical methods -- Congresses.; Optical detectors -- Congresses.
Notes: Includes bibliographical references and index.