Silicon processing
Subtitle: a symposium
By: sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.
Contributors: Gupta, D. C.; ASTM Committee F-1 on Electronics.; United States. National Bureau of Standards.; Stanford University.; Symposium on Silicon Processing (1982 : San Jose, Calif.)
Series: ASTM special technical publication ;; 804
Publisher: ASTM
Published: 1983
Place of publication: Philadelphia, Pa. (1916 Race St., Philadelphia 19103)
Language: eng
Number of pages: 559
Subjects: Silicon -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references and index.
Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982.
"ASTM publication code number (PCN) 04-804000-46."