Optical/laser microlithography IV
Subtitle: 6-8 March 1991, San Jose, California
By: Victor Pol, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Pol, Victor.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1463; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1463.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 754
Subjects: Lasers -- Industrial applications -- Congresses.; Optical instruments -- Congresses.; Microlithography -- Congresses.
Other titles: Optical/laser microlithography four.; Optical/laser microlithography 4.
Notes: Includes bibliographical references and index.