2001 IEEE International Symposium on Semiconductor Manufacturing conference proceedings
Subtitle: October 8-10, 2001, San Jose, California.
Contributors: Institute of Electrical and Electronics Engineers.
Publisher: Institute of Electrical and Electronics Engineers
Published: 2001
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 525
Subjects: Electronic industries -- Congresses; Semiconductors -- Design and construction -- Congresses; Computer integrated manufacturing systems -- Congresses
Genres: Congresses.
Other titles: International Symposium on Semiconductor Manufacturing.; ISSM 2001.; Semiconductor Manufacturing Symposium, 2001 IEEE International.
Notes: "IEEE catalog number 01CH37203"--T.p. verso.

Includes bibliographical references and author index.

Also available via the World Wide Web with additional title: Semiconductor Manufacturing Symposium, 2001 IEEE International.