Vlsi Electronics Microstructure Science
Subtitle: Vlsi Metallization (V L S I Electronics)
Contributors: Gennady Sh Sildenblat (Editor)
Publisher: Academic Pr
Published: August 1987
Language: eng
Format: Hardcover
Number of pages: 480
ISBN-13: 9780122341151
Subjects: Very-Large-Scale Integration (Vlsi); Science/Mathematics; Very large scale integration; Circuits & components; Design and construction; Integrated circuits; Metallic films; Metallizing