Plasma synthesis and etching of electronic materials
Subtitle: symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
By: editors, R.P.H. Chang, B. Abeles.
Contributors: Chang, R. P. H. 1941-; Abeles, B.; Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)
Series: Materials Research Society symposia proceedings ;; v. 38
Publisher: Materials Research Society
Published: 1985
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 522
Subjects: Plasma engineering -- Congresses.; Plasma etching -- Congresses.; Electronics -- Materials -- Congresses.
Notes: Includes bibliographies and indexes.
Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.