Rapid thermal and laser processing
Subtitle: 24-25 September 1992, San Jose, California
By: Dim-Lee Kwong, Heinrich G. Müller, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Kwong, Dim-Lee.; Müller, Heinrich G.
Series: Proceedings / Spie--The International Society for Optical Engineering ;; v. 1804; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1804.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 167
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.; Semiconductor industry -- Laser use in -- Congresses.; Plasma-enhanced chemical vapor deposition -- Congresses.; Multichip modules (Microelectronics) -- Design and construction -- Congresses.; Rapid thermal processing -- Congresses.
Notes: Includes bibliographical references and index.