ASMC 2002 proceedings
Subtitle: 2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : advancing the science of semiconductor manufacturing excellence, April 30 - May 2, 2002, Boston, Massachusetts
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: Institute of Electrical & Electronics Engineers
Published: 2002
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 430
Subjects: Semiconductors -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Genres: Congresses.
Other titles: Advancing the science of semiconductor manufacturing excellence; ASMC 2002 proceedings :; 2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Notes: "IEEE cat. no. 02CH37259"--T.p. verso.

"ISSN 1078-8743"--T.p. verso.

Includes bibliographical references.