CleanRooms '95 West
Subtitle: the Conference on Advanced Microcontamination Control and Ultrapure Manufacturing October 30-November 1, 1995, Santa Clara Convention Center, Santa Clara, CA : proceedings.
Publisher: PennWell Pub. Co.
Published: 1995
Place of publication: Nashua, NH
Language: eng
Number of pages: 376
Subjects: Clean rooms -- Congresses.; Contamination (Technology) -- Congresses.
Other titles: CleanRooms '95 West proceedings
Notes: Includes bibliographical references and index.