Ultra Clean Processing of Silicon Surfaces 2000 (Solid State Phenomena)
Contributors: Marc Heyns (Editor); Paul Mertens (Editor); Marc Meuris (Editor)
Publisher: Scitec Publications
Published: December 2000
Language: eng
Format: Paperback
Number of pages: 321
ISBN-13: 9783908450573
Subjects: Condensed matter physics (liquids & solids); Materials science; Semi-conductors & super-conductors; Technology & Industrial Arts; Material Science; Technology; Science/Mathematics; General