Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines
Contributors: David A. Lavan (Editor); Arturo A. Ayon (Editor); Thomas E. Buchheit (Editor); Marc J. Madou (Editor)
Series: Materials Research Society Symposium Proceedings (Book 741)
Publisher: Materials Research Society
Published: May 27, 2003
Language: eng
Format: Hardcover
Number of pages: 298
ISBN-13: 9781558996786
Subjects: Electronics - General; Science/Mathematics; Technology & Industrial Arts