Ion implantation technology--98
Subtitle: 1998 International Conference on Ion Implantation Technology proceedings, Kyoto, Japan, June 22-26, 1998
By: editors J. Matsuo, [et al.]...
Contributors: Matsuo, J.; IEEE Electron Devices Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1999
Place of publication: Piscataway, N.J
Language: eng
Subjects: Ion implantation -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Congresses.
Genres: Congresses.
Other titles: iit '98 Kyoto; 1998 International Conference on Ion Implantation Technology proceedings.
Notes: "98EX144"--Cover.

Cosponsors : Electron Devices Society, the IEEE...

Description based on: 11th (June 16-21, 1996).

Includes bibliographical references and index.