Studies of thin film plasma processes for microelectronic device manufacturing
By: by Anna M. Barklund
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 406
Publisher: Uppsala University; Distributor, Almqvist & Wiksell International
Published: 1992
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 43
Subjects: Plasma etching; Vapor-plating; Thin films; Microelectronics; Semiconductors; Etching; Semiconductor doping
Notes: Thesis (doctoral)--Uppsala University, 1992.

Includes bibliographical references (p. 42-43)