IEEE Micro Electro Mechanical Systems: Proceedings 1994 
Subtitle: Oiso, Japan January 25-28, 1994/94Ch3404-1
Publisher: Ieee
Published: June 1994
Language: eng
Format: Paperback
Number of pages: 360
ISBN-13: 9780780318335
Subjects: Electronics & Communications Engineering; Automation; Microelectronics; Actuators; Science/Mathematics; Congresses; Detectors; Electromechanical devices