Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
Subtitle: 21-23 January 2008, San Jose, California, USA
Publisher: SPIE
Published: 2008
Language: eng
Number of pages: 302
ISBN-13: 9780819470584
Subjects: Nanotechnology; Optoelectronics; Photonics; Microelectromechanical systems