Proceedings of the Seventh Symposium on Plasma Processing
By: edited by G.S. Mathad, G.C. Schwartz, D.W. Hess
Contributors: Mathad, G. S.; Schwartz, G. C.; Hess, Dennis W.
Series: Proceedings / The Electrochemical Society, Inc -- v. 88-22; Proceedings (Electrochemical Society) -- v. 88-22
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 400
Copyright date: 1988
Subjects: Plasma engineering; Congresses
Other titles: Plasma processing.
Notes: Spine title: Plasma processing.

Includes bibliographies and indexes.