Thin film materials technology
Subtitle: sputtering of compound materials
By: by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
Contributors: Kitabatake, Makoto; Adachi, Hideaki
Publisher: William Andrew Pub.; Springer-Verlag
Published: 2004
Place of publication: Norwich, N.Y; Heidelberg
Language: eng
Number of pages: 518
Subjects: Cathode sputtering (Plating process); Thin films
Description: "This book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. It contains the newest experimental and technological information about ceramic thin films, a key technology for nanomaterials in high-speed information applications and large-area functional coatings. This book is an invaluable resource for scientists, engineers, and graduate students in the semiconductor, energy, environment, vehicle, medical, and food industries."--BOOK JACKET.
Notes: Includes bibliographical references and index