Chemical physics of thin film deposition processes for micro- and nano-technologies
By: edited by Yves Pauleau.
Contributors: Pauleau, Y.
Series: NATO science series -- v. 55.
Publisher: Kluwer Academic Publishers
Published: 2002
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 363
Subjects: Thin films -- Congresses; Nanotechnology -- Congresses
Genres: Congresses.
Notes: "Published in cooperation with NATO Scientific Affairs Division."

"Proceedings of the NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano- Technologies, Kaunas, Lithuania, 3-14 September 2001"--T.p. verso.

Includes bibliographical references and index.