Plasma Processing
Subtitle: Symposium Held April 15-18, 1986, Palo Alto, California, USA (Materials Research Soc Symposia Proceedings, Vol 68)
Publisher: Materials Research Society
Published: July 1986
Language: eng
Format: Hardcover
Number of pages: 463
ISBN-13: 9780931837340
Subjects: Physical Properties Of Materials; Plasma engineering; Congresses