Polymers in Microlithography
Subtitle: Materials and Processes (Acs Symposium Series)
Contributors: Elsa Reichmanis (Editor); Scott A. MacDonald (Editor); Takao Iwayanagi (Editor)
Publisher: An American Chemical Society Publication
Published: April 21, 1998
Language: eng
Format: Hardcover
Number of pages: 433
ISBN-13: 9780841217010
Subjects: Art techniques & materials; Planographic processes (eg lithography, screen printing, stencilling); Plastics & polymers technology; Science/Mathematics; Microlithography; Polymer Engineering; Textiles & Polymers; Technology; Science; Polymers; Photoresists; Chemistry - General; Electronics - Circuits - Printed; Technology / Textiles & Polymers; Congresses; Materials