Silicon nitride and silicon dioxide thin insulating films
Subtitle: proceedings of the fifth international symposium
By: edited by K.B. Sundaram ... [et al.].
Contributors: Sundaram, K. B.
Series: Proceedings / Electrochemical Society ;; v. 99-6; Proceedings (Electrochemical Society) ;; v. 99-6.
Publisher: Electrochemical Society)
Published: 1999
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2696
Language: eng
Number of pages: 284
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silica -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"This proceedings volume contains the papers presented at the symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films held May 2-7, 1999 in Seattle, Washington, USA" -- preface.