Plasma Processing
Subtitle: Symposium on Plasma Etchins and Deposition, Proceedings
Contributors: R. G. Frieser (Editor); C. J. Mogab (Editor); June Sochen (Editor)
Publisher: Books on Demand
Published: December 1991
Language: eng
Format: Paperback
Number of pages: 348
ISBN-13: 9780608106304
Subjects: Chemistry - General; Science