Advanced techniques for integrated circuit processing II
Subtitle: 21-23 September 1992, San Jose, California
By: James Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Bondur, James.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- vol. 1803; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1803.
Publisher: SPIE, the International Society for Optical Engineering; SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 404
Subjects: Integrated circuits -- Design and construction -- Congresses.
Notes: Includes bibliographical references and index.