IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Subtitle: July 19-20, 1993, San Francisco, CA USA.
Contributors: Semiconductor Equipment and Materials Institute.; IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1993
Place of publication: New York, N.Y
Language: eng
Number of pages: 152
Subjects: Semiconductors -- Design and construction -- Congresses.
Other titles: ISMSS.; 1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.; 1993 Proceedings, International Semiconductor Manufacturing Science Symposium (ISMSS)
Notes: "ISMSS."

"IEEE Catalog Number 93CH3280-5."

On cover and spine: 1993 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Co-sponsored by Semiconductor Equipment and Materials International (SEMI), The Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology (CHMT) Society.

Includes bibliographical references.