Device and process technologies for MEMS· microelectronics· and photonics III
Subtitle: 10-12 December 2003· Perth· Australia
By: Jung-Chih Chiao ... [et al.]· chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by The University of Western Australia (Australia)· Defence Science and Technology (Australia).
Publisher: SPIE·
Published: 2003
Place of publication: Bellingham· WA
Language: eng
Number of pages: 566