Instrumentation, metrology, and standards for nanomanufacturing II
Subtitle: 10 August 2008, San Diego, California, USA
By: Michael T. Postek, John A. Allgair, editors ; sponsored and published by SPIE ; cosponsored by NIST--National Institute of Standards and Technology (United States)
Contributors: Society of Photo-optical Instrumentation Engineers; National Institute of Standards and Technology (U.S.)
Series: Proceedings of SPIE -- v. 7042; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7042.
Publisher: SPIE; Society of Photo Optical
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 200
ISBN-13: 9780819472625
Notes: Includes bibliographical references and index.