Synchrotron radiation technology
Subtitle: spectroscopic studies of its application to lithography and deposition, and the evaluation, modeling, and design of beamline instrumentation
By: Derrick C. Mancini
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 40
Publisher: Acta Universitatis Upsaliensis; Distributor, Almqvist & Wiksell International
Published: 1994
Place of publication: Uppsala; Stockholm
Language: eng
Number of pages: 26
ISBN-13: 9789155432836
Subjects: Synchrotron radiation; X-ray lithography; Chemical vapor deposition
Notes: Thesis (doctoral)--Uppsala universitet, 1994.

Includes bibliographical references (p. 25-26)