Silicon micromachining
Subtitle: methodological aspects and applications in biomedical pressure sensors
By: by Ylva Bäcklund
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 404
Publisher: Uppala University; Distributor, Almqvist & Wiksell International
Published: 1992
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 40
Subjects: Biosensors; Micromechanics; Microelectronics; Silicon crystals
Notes: Thesis (doctoral)--Uppsala University, 1992.

Includes bibliographical references (p. 37-40)