Advanced fabrication technologies for micro/nano optics and photonics VI
Subtitle: 5-6 February 2013, San Francisco, California, United States
By: Georg von Freymann, Winston V. Schoenfeld, Raymond C. Rumpf, editors
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- volume 8613
Publisher: SPIE
Published: 2013
Place of publication: Bellingham, Washington
Language: eng
ISBN-13: 9780819493828
Subjects: Nanotechnology; Congresses; Optoelectronics; Photonics; Microelectromechanical systems
Notes: "SPIE Photonics West" --cover.

Includes bibliographical references and author index.