Plasma-Surface Interactions and Processing of Materials (NATO Science Series E:)
Contributors: O. Auciello (Editor); Alberto Gras-Martí (Editor); Jose Antonio Valles-Abarca (Editor); Daniel L. Flamm (Editor)
Edition: 1 edition
Publisher: Springer
Published: January 31, 1990
Language: eng
Format: Hardcover
Number of pages: 576
ISBN-13: 9780792305842
Subjects: Industrial chemistry; Surfaces (Technology); Materials; Physical Properties Of Materials; Technology & Industrial Arts; Technology; Science/Mathematics; Microelectronics; Chemistry - Physical & Theoretical; Material Science; Nanotechnology; Science-Chemistry - Physical & Theoretical; Technology / Material Science; Technology / Nanotechnology; Technology-Material Science; Congresses; Effect of radiation on