Methods and materials in microelectronic technology
By: edited by Joachim Bargon.
Contributors: Bargon, Joachim.
Series: The IBM research symposia series
Publisher: Plenum Press
Published: 1984
Place of publication: New York
Language: eng
Number of pages: 367
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Photolithography -- Congresses.; Ion beam lithography -- Congresses.; X-ray lithography -- Congresses.
Other titles: Microelectronic technology.
Notes: Includes bibliographies and index.
"Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.