Thin Film Processes, Volume 2
Contributors: John L. Vossen (Editor)
Publisher: Academic Press
Published: April 28, 1991
Language: eng
Number of pages: 888
ISBN-13: 9780127282510
First sentence: The processes selected for review fall into the same four general categories as in the volume [1]: (1) physical methods of film deposition, (2) chemical methods of film deposition, (3) hybrid (i.e., physical-chemical) methods of film deposition, and (4) pattern delineation processes.