Micro System Technologies 90
Subtitle: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990
By: edited by Herbert Reichl
Publisher: Springer Berlin Heidelberg
Published: 1990
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
Number of pages: 858
ISBN-13: 9783642456800; 9783642456787
Subjects: Engineering; Electronics
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Also available in print.

Mode of access: World Wide Web.
Table of contents: title: Contents: Simulation and Design: Design of Micro Systems; title: CAD of Optical Devices; title: Simulation and Design - Electrical and Thermal Properties; title: Simulation and Design of Sensors; title: Measurement and Testing: Testing; title: Material Characterization - Physical Properties; Semiconductor Characteristics; Optical Methods; title: Materials: Materials for Packaging and Passivation; title: Integrated Optics Materials and Technologies; title: Technologies: Pattern Generation and Image Transfer; title: Laser Supported Deposition; title: Reactive Etching and Deposition; title: Contact Methods; title: Packaging; title: Optical Assembly and Interconnection Technologies; title: Sensor and Actuator Technologies; title: Basic Components and Applications: Sensors for Physical Parameters; title: Gas and Ionic Sensors; title: Sensors for Biological and Medical Application; title: Optical Sensors. Optical Components; title: Actuators; title: Author Index.