Silicon microstructures for biomedical sensor systems
By: by Lars Rosengren
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 54
Publisher: Acta Universitatis Upsaliensis; Distributor, Almqvist & Wiksell International
Published: 1994
Place of publication: Uppsala; Stockholm
Language: eng
Number of pages: 36
Subjects: Microelectronics; Silicon crystals; Micromechanics; Biosensors
Notes: Thesis (doctoral)--Uppsala University, 1994.

Includes bibliographical references (p. 33-36)