ARPA/NBS Workshop V, moisture measurement technology for hermetic semiconductor devices
Subtitle: proceedings of the ARPA/NBS Workshop V, held at the National Bureau of Standards, Gaithersburg, MD, March 22-23, 1978
By: edited by Harry A. Schafft, Stanley Ruthberg, and Elaine C. Cohen.
Contributors: Schafft, Harry A.; Ruthberg, Stanley.; Cohen, Elaine C.; United States. National Bureau of Standards.; United States. Advanced Research Projects Agency.
Series: Semiconductor measurement technology; NBS special publication ;; 400-69
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1981
Place of publication: Washington, D.C
Language: eng
Number of pages: 196
Subjects: Semiconductors -- Testing -- Congresses.; Moisture -- Measurement -- Congresses.
Notes: Includes bibliographical references.
"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
"This activity was supported by Defense Advanced Research Projects Agency and National Bureau of Standards."
"Issued May 1981."
S/N 003-003-02326-4