Selected papers on optical methods in surface metrology
By: David J. Whitehouse, editor.
Contributors: Whitehouse, D. J.
Series: SPIE milestone series ;; v. MS 129
Publisher: SPIE Optical Engineering Press
Published: 1996
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 638
Subjects: Surfaces (Technology) -- Measurement.; Optical measurements.
Other titles: Optical methods in surface metrology
Notes: Includes bibliographical references and indexes.