Introduction to microelectronic fabrication
By: Richard C. Jaeger.
Series: Modular series on solid state devices ;; v. 5
Publisher: Addison-Wesley Pub. Co.
Published: 1988
Place of publication: Reading, Mass
Language: eng
Number of pages: 232
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Textbooks.
Genres: Textbooks.
Notes: Includes bibliographical references and index.