Microelectronic Applications of Chemical Mechanical Planarization
Publisher: Wiley-Interscience
Published: October 19, 2007
Language: eng
Format: Hardcover
Number of pages: 734
ISBN-13: 9780471719199
Subjects: Circuits & components; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Chemical & Biochemical; Electronics - Microelectronics; Engineering - Chemical & Biochemical; Industrial Technology; Technology / Engineering / Chemical & Biochemical; Chemical mechanical planarization; Design and construction; Integrated circuits; Materials; Microelectronics