Laser chemical processing for microelectronics
By: edited by K.G. Ibbs, R.M. Osgood.
Contributors: Ibbs, K. G.; Osgood, R. M.
Series: Cambridge studies in modern optics ;; 7
Publisher: Cambridge University Press
Published: 1989
Place of publication: Cambridge [England]; New York
Language: eng
Number of pages: 172
Subjects: Integrated circuits -- Design and construction.; Lasers -- Industrial applications.
Notes: Includes bibliographies and index.