Optical laser microlithography III
Subtitle: 7-9 March 1990, San Jose, California
By: Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Pol, Victor.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1264; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1264.
Publisher: SPIE
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 586
Subjects: Lasers -- Industrial applications -- Congresses.; Optical instruments -- Congresses.; Microlithography -- Congresses.
Other titles: Optical/laser microlithography three.; Optical/laser microlithography 3.
Notes: Includes bibliographical references and index.