Dopant clustering and diffusion in silicon
By: Kilian Vollenweider
Edition: 1st ed.
Series: Series in microelectronics -- v. 212
Publisher: Hartung-Gorre
Published: 2010
Place of publication: Konstanz
Language: eng
Number of pages: 91
ISBN-13: 9783866283541
Subjects: Semiconductor doping; Silicon; Microclusters; Simulation methods; Molecular dynamics; Diffusion rate
Notes: "Reprint of Diss. ETH no. 19255"--T.p. verso.

Includes bibliographical references (p. 85-90).