Ion implantation techniques
Subtitle: lectures given at the International Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation, Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
By: editors, H. Ryssel and H. Glawischnig.
Contributors: Ryssel, H.; Glawischnig, H.; International Ion Implantation School (1982 : Berchtesgaden, Germany); International Conference on Ion Implantation, Equipment and Techniques, ((4th : 1982 : Berchtesgaden, Germany)
Series: Springer series in electrophysics -- v. 10
Publisher: Springer-Verlag
Published: 1982
Place of publication: Berlin; New York
Language: eng
Subjects: Ion implantation -- Addresses, essays, lectures.; Semiconductor doping -- Addresses, essays, lectures.
Notes: Includes bibliographies and index.