Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700⁰C
By: K. Miyoshi ... [et al.].
Contributors: Miyoshi, Kazuhisa.; Lewis Research Center.; American Society of Mechanical Engineers.; International Conference on Wear of Materials (1989 : Denver, Colo.)
Series: NASA technical memorandum -- 101377.
Publisher: Lewis Research Center, NASA; National Technical Information Service, distributor
Published: 1989
Place of publication: Cleveland, Ohio; [Springfield, Va
Language: eng
Format: Microform
Subjects: Adhesion.; Deposition.; Friction.; Silicon nitrides.; Temperature effects.; Thin films.; Wear.
Notes: "International Conference on Wear of Materials sponsored by the American Society of Mechanical Engineers, Denver, Colorado, April 9-13, 1989."

Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1989] 1 microfiche.