Chemical perspectives of microelectronic materials II
Subtitle: symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
By: editors, L.V. Interrante ... [et al.].
Contributors: Interrante, Leonard V., 1939-
Series: Materials Research Society symposium proceedings,; v. 204; Materials Research Society symposia proceedings ;; v. 204.
Publisher: Materials Research Society
Published: 1991
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 584
Subjects: Microelectronics -- Materials -- Congresses.; Semiconductors -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and indexes.