Micromachining and Microfabrication Process Technology XI (Proceedings of SPIE)
Contributors: Mary Ann Maher (Editor); Harold D. Stewart (Editor); Jung-Chih Chiao (Editor)
Publisher: SPIE-International Society for Optical Engine
Published: January 21, 2006
Language: eng
Format: Paperback
Number of pages: 1
ISBN-13: 9780819461513
Subjects: Semi-conductors & super-conductors; Technology; Technology & Industrial Arts; Science/Mathematics; Technical & Manufacturing Industries & Trades; Engineering - General