Hf-Based High-k Dielectrics
Subtitle: Process Development, Performance Characterization, and Reliability (Synthesis Lectures on Solid State Materials and Devices)
Publisher: Morgan & Claypool Publishers
Published: June 6, 2005
Language: eng
Format: Paperback
Number of pages: 100
ISBN-13: 9781598290042
Subjects: Power generation & distribution; Technology; Science/Mathematics; Kim Young-Hee and Jack C. Lee; Science / General; Solid State Physics; Engineering - Electrical & Electronic; Dielectrics; Hafnium oxide; Integrated circuits; Reliability
First sentence: For the past few decades semiconductor technology has been led by conventional scaling.