Opticheskie metody kontroli͡a︡ integralʹnykh mikroskhem
Subtitle: sostoi͡a︡nie i perspektivy sovershenstvovanii͡a︡
By: pod redakt͡s︡ieĭ L.G. Dubit͡s︡kogo ; [avtory I͡U︡.S. Vartani͡a︡n ... et al.].
Contributors: Dubit͡s︡kiĭ, L. G.; Vartani͡a︡n, I͡U︡. S.
Series: Massovai͡a︡ biblioteka inzhenera Ėlektronika ;; 32; Massovai͡a︡ biblioteka inzhenera "Ėlektronika" ;; 32.
Publisher: "Radio i svi͡a︡zʹ"
Published: 1982
Place of publication: Moskva
Language: rus
Number of pages: 134
Subjects: Integrated circuits -- Testing.; Optical instruments.
Notes: Includes bibliographical references.