Growth and Transport in Nanostructured Materials
Subtitle: Reactive Transport in PVD, CVD, and ALD
Publisher: Springer
Published: Dec 01, 2016
Format: paperback
Number of pages: 140
ISBN-13: 9783319246703
Notes: Source title: Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD (SpringerBriefs in Materials)