Microelectronic device and multilevel interconnection technology
Subtitle: 25-26 October 1995, Austin, Texas
By: Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributors: Chen, Ih-Chin.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2636; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2636.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 326
Subjects: Microelectronics -- Congresses.
Notes: Includes bibliographic references and index.