Femtosecond-laser microstructuring of silicon
Subtitle: dopants and defects
By: by Michael Anthony Sheehy
Published: 2004
Language: eng
Number of pages: 95
Subjects: Silicon; Femtochemistry
Notes: Thesis advisors: Cynthia Friend.

Thesis (Ph.D., Dpt. of Chemistry and Chemical Biology)--Harvard University, 2004.

Includes bibliographical references.