Characterization and metrology for ULSI technology
Subtitle: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March, 2003
By: editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].
Contributors: Seiler, David G.; National Institute of Standards and Technology (U.S.)
Series: AIP conference proceedings -- v. 683; AIP conference proceedings -- no. 683.
Publisher: American Institute of Physics
Published: 2003
Place of publication: Melville, N.Y
Language: eng
Number of pages: 818
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.; Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Genres: Congresses.; Congresses; Software.
Notes: Includes bibliographical references and index.