Manufacturing process control for microelectronic devices and circuits
Subtitle: 20-21 October 1994, Austin, Texas
By: Anant G. Sabnis, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Sabnis, Anant G.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2336; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2336.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 250
Subjects: Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Process control -- Congresses.
Notes: Includes bibliographical references and index.