Ultrathin oxides in metal-oxide-silicon structures
Subtitle: defects and characterization
By: Lars-Åke Ragnarsson
Contributors: Chalmers tekniska högskola
Series: Technical report / School of Electrical and Computer Engineering, Chalmers University of Technology, Göteborg, Sweden -- 367; Doktorsavhandlingar vid Chalmers tekniska högskola -- 1511
Publisher: Chalmers tekniska högsk.
Published: 1999
Place of publication: Göteborg
Language: eng
Number of pages: 70
ISBN-13: 9789171978127
Notes: Härtill 7 uppsatser.

Thesis (doctoral)--Chalmers University of Technology, 1999.