Process and equipment control in microelectronic manufacturing II
Subtitle: 30-31 May 2001, Edinburgh, UK
By: Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK).
Contributors: Fallon, Martin.; Society of Photo-optical Instrumentation Engineers.; Scottish Enterprise.; European Optical Society.; Institution of Electrical Engineers.
Series: SPIE proceedings series,; v. 4405; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4405.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 158
Subjects: Microelectronics industry -- Production control -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Microelectronics -- Materials -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and index.