Materials Issues in Vacuum Microelectronics
Subtitle: Symposium Held April 13-16, 1998, San Francisco, California, U.S.A (Materials Research Society Symposium Proceedings)
Contributors: Wei Zhu (Editor); Lawrence S. Pan (Editor); Thomas E. Felter (Editor); Christopher Holland (Editor)
Publisher: Materials Research Society
Published: September 1998
Language: eng
Format: Hardcover
Number of pages: 207
ISBN-13: 9781558994157
Subjects: Microelectronics; Technology & Industrial Arts; Field emission cathodes; Vacuum Technology; Technology; Science/Mathematics; Ion implantation; Electronics - General; Vacuum microelectronics; Thin films; Electronics - Microelectronics; Congresses