Emerging semiconductor technology
Subtitle: a symposium
By: sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
Contributors: Gupta, D. C.; Langer, Paul H.; ASTM Committee F-1 on Electronics.; Symposium on Semiconductor Processing (4th : 1986 : San Jose, Calif.)
Series: ASTM special technical publication ;; 960
Publisher: American Society for Testing and Materials
Published: 1987
Place of publication: Philadelphia, PA
Language: eng
Number of pages: 704
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Notes: Includes bibliographies and indexes.
Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."