Advances in mirror technology for X-ray, EUV lithography, laser and other applications
Subtitle: 7-8 August 2003, San Diego, California, USA
By: Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Khounsary, Ali M.; Dinger, Udo.; Ota, Kazuya.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5193; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5193.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 222
Subjects: Mirrors -- Design and construction -- Congresses; Lasers -- Mirrors -- Design and construction -- Congresses; Optical coatings -- Congresses; Optical radiometry -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.