Enabling Technologies for MEMS and Nanodevices (Advanced Micro and Nanosystems)
Contributors: Henry Baltes (Editor); Oliver Brand (Editor); Gary K. Fedder (Editor); Christofer Hierold (Editor); Jan G. Korvink (Editor); Osamu Tabata (Editor)
Publisher: Wiley-VCH
Published: September 3, 2004
Language: eng
Format: Hardcover
Number of pages: 439
ISBN-13: 9783527307463
Subjects: Chemistry; Mechanical Engineering & Materials; Science/Mathematics; Technology; Technology & Industrial Arts; Material Science; Technology / Material Science; Microelectromechanical systems; Microelectronics; Nanotechnology