A software program for aiding the analysis of ellipsometric measurements, simple models
By: J. F. Marchiando.
Contributors: National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-83.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology
Published: 1989
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 246
Subjects: Ellipsometry -- Data processing.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 92-0325-M.

Paper version no longer for sale by the Supt. of Docs.

"July 1989."

Includes bibliographical references (p. 244-246).

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1991] 3 microfiches : negative.