Holographic microscopy for the determination of failure mechanisms in monolithic circuits
By: by Raoul F. van Ligten.
Contributors: Framingham Research Laboratory.; Electronics Research Center (U.S.)
Series: NASA contractor report, NASA CR-1394; NASA contractor report ;; NASA CR-1394.
Publisher: National Aeronautics and Space Administration; for sale by the Clearinghouse for Federal Scientific and Technical Information, Springfield, Va.
Published: 1969
Place of publication: [Washington]
Language: eng
Number of pages: 49
Subjects: Integrated circuits -- Testing.; Holographic interferometry.
Notes: Bibliography: p. 49.
"Prepared under contract no. NAS 12-584 by American Optical Corporation, Framingham Research Laboratory, Framingham Centre, Mass., for Electronics Research Center."