Lithographic and micromachining techniques for optical component fabrication
Subtitle: 29-30 July 2001, San Diego, USA
By: Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Kley, Ernst-Bernhard.; Herzig, Hans Peter.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4440; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4440.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 324
Subjects: Optical instruments -- Design and construction -- Congresses.; Lenses -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.