Mesh generation algorithms for three-dimensional semiconductor process simulation
By: Luis Villablanca.
Series: Series in microelectronics ;; v. 97
Publisher: Hartung-Gorre
Published: 2000
Place of publication: Konstanz
Language: eng
Number of pages: 103
Subjects: Semiconductors -- Design and construction -- Computer simulation.; Finite element method.
Notes: Includes bibliographical references (p. 97-102).