Microelectronics processing
Subtitle: chemical engineering aspects
By: Dennis W. Hess, editor, Klavs F. Jensen, editor.
Contributors: Hess, Dennis W.; Jensen, Klavs F., 1952-
Series: Advances in chemistry series,; 221
Publisher: American Chemical Society
Published: 1989
Place of publication: Washington, DC
Language: eng
Number of pages: 547
Subjects: Microelectronics -- Materials.; Integrated circuits -- Design and construction.; Surface chemistry.
Notes: Includes bibliographical references.