An introduction to semiconductor microtechnology
By: D.V. Morgan, K. Board.
Contributors: Board, K.
Publisher: Wiley
Published: 1983
Place of publication: Chichester [West Sussex]; New York
Language: eng
Number of pages: 167
Subjects: Semiconductors -- Design and construction.
Notes: Bibliography: p. 157-158.
"A Wiley-Interscience publication."
Includes index.