MEMS
Subtitle: introduction and fundamentals
By: edited by Mohamed Gad-El-Hak.
Contributors: Gad-el-Hak, Mohamed, 1945-
Edition: 2nd ed.
Series: Mechanical engineering series; The MEMS handbook; Mechanical engineering series (Boca Raton, Fla.)
Publisher: CRC/Taylor & Francis
Published: 2006
Place of publication: Boca Raton
Language: eng
Subjects: Microelectromechanical systems; Microelectronics; Nanotechnology
Notes: One of three parts whose previous edition was a published as a single volume.

Includes bibliographical references and index.