Run-to-Run Control in Semiconductor Manufacturing
Contributors: James Moyne (Editor); Enrique Del Castillo (Editor); Arnon M. Hurwitz (Editor)
Publisher: CRC
Published: November 30, 2000
Language: eng
Format: Hardcover
Number of pages: 368
ISBN-13: 9780849311789
Subjects: Production Engineering; Semi-conductors & super-conductors; Semiconductors; Manufacturing; Technology & Industrial Arts; Technology; Semiconductor industry; Science/Mathematics; Electronics - Semiconductors; Engineering - Electrical & Electronic; Technology / Engineering / Electrical; Design and construction; Electronic packaging; Production control
First sentence: Advanced process control, or APC, has evolved rapidly in the semiconductor industry during the 1980s and 1990s, with R2R control emerging as the first technologically viable product of that evolution.