Silicon nitride for microelectronic applications
By: [by] John T. Milek.
Series: Handbook of electronic materials, v. 3, 6; Handbook of electronic materials ;; v. 3, etc.
Publisher: IFI/Plenum
Published: 1971
Place of publication: New York
Language: eng
Subjects: Microelectronics -- Materials.; Silicon nitride.
Notes: Includes bibliographies.
Table of contents: title: pt. 1. Preparation and properties.; title: pt. 2. Applications and devices.