Integrated optical micromachined pressure sensors with spectrally encoded output and temperature compensation
Subtitle: final report : NASA grant NAG 3-1774
By: by Gregory N. De Brabander, Glenn Beheim, and Joseph T. Boyd.
Contributors: Beheim, Glenn.; Boyd, J. T.; United States. National Aeronautics and Space Administration.
Series: [NASA contractor report] -- 112547.; NASA contractor report -- NASA CR-112547.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1997
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Pressure sensors.; Optical measuring instruments.; Mach-Zehnder interferometers.; Waveguides.; Broadband.; Optical fibers.; Micromachining.
Notes: Shipping list no.: 99-0707.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.