Interactions of low energy oxygen ions with silicon surfaces
By: Stanislav Stefanov Todorov
Published: 1987
Language: eng
Number of pages: 278
Subjects: Silicon; Silicon oxide; Oxygen ions; Oxidation
Notes: Typescript (photocopy).

"88-9432."

Thesis (Ph. D.)--Columbia University, 1987.

Bibliography: leaves 267-278.

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1988. 1 microfilm reel. 35 mm.