Deposition and Growth
Subtitle: Limits for Microelectronics (Aip Conference Proceedings)
Publisher: AIP Press
Published: August 1988
Language: eng
Format: Hardcover
Number of pages: 388
ISBN-13: 9780883183670
Subjects: Electricity, magnetism & electromagnetism; Power utilization & applications; Science; Electrical Properties Of Materials; Surface Physics; Science/Mathematics; Thin films; Electronics - General; General; Congresses; Materials; Microelectronics