MEMS/MOEMS
Subtitle: advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium
By: Uwe F. W. Behringer ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society ... [et al.].
Contributors: Behringer, Uwe F. W.; Society of Photo-optical Instrumentation Engineers.; European Optical Society.
Series: Proceedings of SPIE,; v. 4945; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4945.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 203
Subjects: Microelectromechanical systems -- Technological innovations -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Optical communications -- Technological innovations -- Congresses.; Microelectronic packaging -- Technological innovations -- Congresses.; Mechatronics -- Congresses.
Genres: Congresses.
Other titles: MEMS, MOEMS; Advances in photonic communications, sensing, metrology, packaging and assembly
Notes: Includes bibliographical references and author index.