Micro-electro-mechanical systems (MEMS)--2002
Subtitle: presented at the 2002 ASME International Mechanical Engineering Congress and Exposition : November 17-22, 2002, New Orleans, Louisiana
By: co-sponsored by the MEMS Subdivision, ASME ... [et al.].
Contributors: American Society of Mechanical Engineers. MEMS Subdivision.; International Mechanical Engineering Congress and Exposition (2002 : New Orleans, La.)
Series: MEMS ;; vol. 4; MEMS (Series) (American Society of Mechanical Engineers) ;; v. 4.
Publisher: American Society of Mechanical Engineers
Published: 2002
Place of publication: New York, N.Y
Language: eng
Number of pages: 631
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Other titles: MEMS--2002
Notes: Includes bibliographical references and author index.