Advances in Resist Technology and Processing IX
Subtitle: 9-10 March 1992 San Jose, California (Proceedings of S P I E)
Publisher: SPIE-International Society for Optical Engine
Published: June 1992
Language: eng
Format: Paperback
Number of pages: 684
ISBN-13: 9780819408273
Subjects: Applied optics; Technical & Manufacturing Trades; Optical Lithography; Technology & Industrial Arts; Science/Mathematics