Winter Symposium 75 on Micro-Photofabrication, February 6, 7, 1975, Palo Alto Cabana Hyatt House, Palo Alto, California
By: Society of Photographic Scientists & Engineers, Northern California Chapter.
Contributors: Society of Photographic Scientists and Engineers. Northern California Chapter.
Publisher: The Society
Published: 1975
Place of publication: Washington
Language: eng
Number of pages: 250
Subjects: Microelectronics -- Congresses.; Photolithography -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references.