Smart materials fabrication and materials for micro-elctro-mechanical systems
Subtitle: symposium held April 28-30, 1992, San Francisco, California, U.S.A.
By: editors, A. Peter Jardine ... [et al.].
Contributors: Jardine, A. Peter.
Series: Materials Research Society symposium proceedings,; v. 276; Materials Research Society symposia proceedings ;; v. 276.
Publisher: Materials Research Society
Published: 1992
Place of publication: Philadelphia, Pa
Language: eng
Number of pages: 317
Subjects: Smart materials -- Congresses.; Electromechanical devices -- Materials -- Congresses.; Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographical references and indexes.