Sixth International Vacuum Microelectronics Conference : technical digest, Newport, Rhode Island, July 12-15, 1993.
Contributors: IEEE Electron Devices Society.
Publisher: Institute of Electrical and Electronic Engineers
Published: 1993
Place of publication: [S.l.]
Language: eng
Number of pages: 177
Subjects: Microelectronics -- Congresses.; Vacuum technology -- Congresses.
Other titles: 6th International Vacuum Microelectronics Conference.; IVMC '93.
Notes: Cover title.

At head of title: IVMC '93.

"IEEE, Electron Devices Society."--Cover.

"IEEE Cat. no. 93TH04903."--P. ii.