Oborudovanie poluprovodnikovogo proizvodstva
By: pod redakt͡s︡ieĭ P.N. Maslennikova.
Contributors: Maslennikov, P. N.
Publisher: "Radio i svi͡a︡zʹ"
Published: 1981
Place of publication: Moskva
Language: rus
Number of pages: 355
Subjects: Semiconductor industry -- Equipment and supplies.
Notes: Bibliography: p. 330-333.