Integrated circuit metrology, inspection, and process control
Subtitle: [papers]
By: Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California.
Contributors: Monahan, Kevin M.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 775.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 329
Subjects: Integrated circuits -- Inspection -- Congresses.
Notes: Includes bibliographies and index.