Measurement techniques for high-resistivity detector-grade silicon
Subtitle: progress report, July 1, 1982 to June 30, 1983
By: R.D. Larrabee and J.R. Lowney ; prepared for Electronics Technology and Devices Laboratory.
Contributors: Lowney, J. R. 1946-; Electronics Technology and Devices Laboratory (U.S.); United States. National Bureau of Standards.
Series: NBSIR -- 83-2792.; NBSIR -- 2792.
Publisher: The Laboratory; Order from National Technical Information Service
Published: 1983
Place of publication: Fort Monmouth, N.J; [Springfield, Va
Language: eng
Number of pages: 16
Subjects: Silicon -- Measurement.
Notes: "U.S. Department of Commerce, National Bureau of Standards."

Distributed to depository libraries in microfiche.

"December 1983."

Includes bibliographical references.

82-JAK-06.