Advances in Resist Technology and Processing VIII
Subtitle: Proceedings, 4-5 March 1991 San Jose, California (Spie Proceedings Series, Vol 1466)
Publisher: SPIE-International Society for Optical Engine
Published: June 1991
Language: eng
Format: Paperback
Number of pages: 679
ISBN-13: 9780819405654
Subjects: Material Science; Optical Lithography; Technology & Industrial Arts; Science/Mathematics