17th IEEE International Conference on Micro Electro Mechanical Systems
Subtitle: Maastricht : MEMS 2004 technical digest : January 25-29, 2004
By: [sponsored by IEEE and the Robotics and Automation Society].
Contributors: Institute of Electrical and Electronics Engineers.; IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 2004
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 868
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Maastricht MEMS 2004 technical digest; MEMS 2004 technical digest
Notes: Includes bibliographical references and indexes.
"IEEE Catalog Number: 04CH37517"--T.p. verso.
At head of title: Maastricht.