Nanotechnology
Subtitle: Integrated Processing Systems for Ultra-precision and Ultra-fine products (Oxford Science Publications)
Contributors: Norio Taniguchi (Editor); Tsuguo Kohno (Editor); Kazuo Maruyama (Editor); Kiyoshi Iizuka (Editor); Iwao Miyamoto (Editor); Toshio Dohi (Editor)
Publisher: Oxford University Press, USA
Published: August 31, 1996
Language: eng
Number of pages: 424
ISBN-13: 9780198562832