Electron beam testing technology
By: edited by John T.L. Thong.
Contributors: Thong, John T. L.
Series: Microdevices
Publisher: Plenum Press
Published: 1993
Place of publication: New York
Language: eng
Number of pages: 462
Subjects: Semiconductors -- Testing; Electron beams -- Industrial applications; Scanning electron microscopes
Notes: Includes bibliographical references and index.