Ion surface interaction, sputtering and related phenomena
Subtitle: [proceedings of the International Conference on Ion Surface Interaction, Sputtering and Related Phenomena <1972, Garching>]
By: ed. by R. Behrisch ...
Contributors: International Conference on Ion Surface Interaction, Sputtering and Related Phenomena (1972, Garching, München)
Publisher: Gordon & Breach
Published: 1973
Place of publication: London
Language: eng
Number of pages: 319
ISBN-13: 9780677158501
Subjects: Ion; Oberfläche; Wechselwirkung