Lithography for VLSI
By: edited by Norman G. Einspruch, R.K. Watts.
Contributors: Einspruch, Norman G.; Watts, R. K. 1939-
Series: VLSI electronics ;; v. 16
Publisher: Academic Press
Published: 1987
Place of publication: Orlando
Language: eng
Number of pages: 361
Subjects: Integrated circuits -- Very large scale integration.; Printed circuits.; Lithography.
Notes: Includes bibliographies and index.