Optomechatronic systems control III
Subtitle: 8-10 October 2007, Lausanne, Switzerland
By: Sergej Fatikow ... [et al.], editors ; organized by Ecole Polytechnique Fédérale de Lausanne (Switzerland) ; sponsored by LIST--Laboratoire d'Intégration des Systèmes et des Technologies, CEA (France) ... [et al.] ; cooperating organizations FSRM--Fondation Suisse pour la Recherche en Microtechnique (Switzerland) [and] SPIE ; published by SPIE
Contributors: Society of Photo-optical Instrumentation Engineers; École polytechnique fédérale de Lausanne; France. Commissariat à l'énergie atomique. Laboratoire d'intégration des systèmes et des technologies; Fondation suisse pour la recherche en microtechnique
Series: Proceedings of SPIE -- v. 6719; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6719.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819468673
Subjects: Microelectromechanical systems; Photonics; Congresses; Design and construction; Nanostructured materials; Mechatronics; Optical storage devices; Optoelectronic devices
Notes: Includes bibliographical references and author index.