Photonic MEMS devices
Subtitle: design, fabrication and control
By: Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
Series: Optical science and engineering series -- 136
Publisher: CRC Press
Published: 2009
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 483
ISBN-13: 9781420045680
Subjects: Microelectromechanical systems; Photonics
Notes: Includes bibliographical references and index.