MOEMS and miniaturized systems III
Subtitle: 27-29 January 2003, San Jose, California, USA
By: James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA).
Contributors: Smith, James H.; Krulevitch, Peter A.; Lakner, Hubert K.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 4983; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4983.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 368
Subjects: Microelectromechanical systems -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optics, Adaptive -- Congresses.; Optical scanners -- Congresses.
Genres: Congresses.
Other titles: Microelectromechanical systems and miniaturized systems III
Notes: Includes bibliographical references and index.