Advances in resist technology and processing III
Subtitle: March 10-11, 1986, Santa Clara, California
By: C. Grant Wilson, chairman/editor.
Contributors: Wilson, C. Grant.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 631.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1986
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 346
Subjects: Photoresists -- Congresses.
Notes: Includes bibliographies and index.