Transport in laser microfabrication
Subtitle: fundamentals and applications
By: Costas P. Grigoropoulos.
Publisher: Cambridge University Press
Published: 2009
Place of publication: Cambridge, UK; New York
Language: eng
Number of pages: 400
ISBN-13: 9780521821728
Subjects: Lasers; Microfabrication
Notes: Includes bibliographical references and index.