IEEE transactions on semiconductor manufacturing
Subtitle: a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
Contributors: IEEE Electron Devices Society; IEEE Reliability Society; IEEE Solid-State Circuits Council; Institute of Electrical and Electronics Engineers
Publisher: Institute of Electrical and Electronics Engineers
Published: 1988
Place of publication: New York, N.Y
Language: eng
Number of pages: 136
Subjects: Semiconductors; Periodicals; Design and construction
Other titles: Transactions on semiconductor manufacturing; Semiconductor manufacturing; Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing