Proceedings of the fourth Symposium on Plasma Processing
By: edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.
Contributors: Mathad, G. S.; Schwartz, G. C.; Smolinsky, G.
Series: Proceedings / The Electrochemical Society -- v. 83-10; Proceedings (Electrochemical Society) -- v. 83-10.
Publisher: Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
Published: 1983
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 649
Subjects: Plasma engineering -- Congresses.
Notes: Includes bibliographical references and indexes.