Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
By: edited by Vik J. Kapoor, William D. Brown ; [sponsored by the] Dielectic Science and Technology and Electronics Divisions.
Contributors: Kapoor, Vikram J.; Brown, William D., 1943-; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.
Series: Proceedings / Electrochemical Society ;; v. 94-16; Proceedings (Electrochemical Society) ;; v. 94-16.
Publisher: Electrochemical Society)
Published: 1994
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2696
Language: eng
Number of pages: 625
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.
Other titles: Silicon nitride and silicon dioxide thin insulating films.
Notes: Includes bibliographies and indexes.