Micro system technologies 98
Subtitle: 6th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998
By: Herbert Reichl, Ernst Obermeier, editors.
Contributors: Obermeier, Ernst.; Reichl, H.; MESAGO Messe & Kongress GmbH.; Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration.
Publisher: VDE-Verlag
Published: 1998
Place of publication: Berlin
Language: eng
Number of pages: 756
Subjects: Electronic circuit design -- Data processing -- Congresses.; Electronic packaging -- Congresses.; High technology -- Congresses.; Microelectronics -- Congresses.; Microelectronics -- Materials -- Congresses.
Genres: Congresses.
Notes: Organized by MESAGO, FhG IZM.

Includes bibliographical references and index.