Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films
By: Guangyao Meng ... [et al.].
Contributors: Meng, Guangyao.; United States. National Aeronautics and Space Administration.
Series: [NASA contractor report] -- NASA-CR-203704.; NASA contractor report -- NASA CR-203704.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1993
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Organometallic compounds.; Vaporizing.; Metalorganic chemical vapor deposition.; Superconducting films.; Thin films.; High temperature.
Notes: Shipping list no.: 99-0173-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.