Planar test structures for characterizing impurities in silicon
By: M. G. Buehler ... [et al.].
Contributors: Buehler, Martin G.
Series: Semiconductor measurement technology; National Bureau of Standards special publication ; 400-21; NBS special publication ;; 400-21.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1976
Place of publication: Washington
Language: eng
Number of pages: 25
Subjects: Semiconductors -- Testing -- Congresses.; Silicon -- Defects -- Congresses.
Notes: Includes bibliographical references.
"Presented as an invited paper ... at the Large-Scale Integration (LSI) Process Technology/Semiconductor Preparation and Characterization Session of the Electrochemical Society Meeting in Toronto, Canada on May 14, 1975."