Electron Beam Interactions With Solids for Microscopy, Microanalysis, and Microlithography
Subtitle: Proceedings of the First Pfefferkorn Conference
Publisher: Scanning Microscopy Intl
Published: June 1984
Language: eng
Format: Hardcover
Number of pages: 372
ISBN-13: 9780931288302
Subjects: Solids; Backscattering; Science/Mathematics; Congresses; Effect of radiation on; Electron beams; Electrons