Microelectronics technology and process integration
Subtitle: 20-21 October 1994, Austin, Texas
By: Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Chen, Fusen E.; Murarka, S. P.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2335; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2335.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 290
Subjects: Integrated circuits -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Notes: Includes bibliographical references and author index.