Design and Manufacturing of Active Microsystems
By: edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach
Contributors: Burisch, Arne; Hesselbach, Jürgen; SpringerLink (Online service)
Series: Microtechnology and MEMS
Publisher: Springer-Verlag Berlin Heidelberg
Published: 2011
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
ISBN-13: 9783642129025; 9783642129032
Subjects: Engineering; Structural control (Engineering); Nanotechnology