Proceedings
Subtitle: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990
By: sponsored by the IEEE Robotics and Automation Society ; and in cooperation with the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1990
Place of publication: [New York?]
Language: eng
Number of pages: 226
Subjects: Electromechanical devices -- Congresses; Miniature objects -- Congresses; Robotics -- Congresses
Other titles: Micro electro mechanical systems.; 1990 IEEE Micro Electro Mechanical Systems.
Notes: Papers presented at the third IEEE Workshop on Micro Electro Mechanical Systems.

"IEEE catalog number 90CH2832-4."

On cover and spine: 1990 IEEE Micro Electro Mechanical Systems.

Includes bibliographical references and indexes.