Microrobotics and microassembly III
Subtitle: 29-30 October, 2001, Newton [Massachusetts] USA
By: Bradley J. Nelson, Jean-Marc Breguet, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Nelson, Bradley J.; Breguet, Jean-Marc.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4568; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4568.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 326
Subjects: Robotics -- Congresses.; Microelectromechanical systems -- Congresses.; Microfabrication -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.