Chemical-Mechanical Polishing 2001--Advances and Future Challenges
Subtitle: Volume 671 (Materials Research Society symposium proceedings)
Contributors: S. V. Babu (Editor); K. C. Cadien (Editor)
Publisher: Materials Research Society
Published: January 2001
Language: eng
Format: Hardcover
Number of pages: 304
ISBN-13: 9781558996076
Subjects: Technical & Manufacturing Trades; Technology & Industrial Arts