SiO2 in Si microdevices
By: Manabu Itsumi.
Series: Springer series in materials science -- 56.; Springer series in materials science -- v. 56.
Publisher: Kodansha; Springer
Published: 2002
Place of publication: Tokyo; Berlin; New York
Language: eng
Number of pages: 322
Subjects: Integrated circuits -- Very large scale integration -- Design and construction; Semiconductors -- Materials; Silica
Notes: Includes bibliographical references and index.