Excimer lasers, optics, and applications
Subtitle: 12-13 February 1997, San Jose, California
By: Harry Shields, Peter E. Dyer, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering,
Contributors: Shields, Harry.; Dyer, Peter E.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering,; v. 2992; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2092.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 160
Subjects: Excimer lasers -- Congresses.; Excimer lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.