Photons and low energy particles in surface processing
Subtitle: symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A.
By: editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.
Contributors: Ashby, Carol Iris Hill, 1953-; Brannon, James H.; Pang, Stella W.
Series: Materials Research Society symposium proceedings,; v. 236; Materials Research Society symposia proceedings ;; v. 236.
Publisher: Materials Research Society
Published: 1992
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 552
Subjects: Surfaces (Technology) -- Congresses.; Plasma etching -- Congresses.; Lasers -- Industrial applications -- Congresses.; Photon beams -- Industrial applications -- Congresses.; Plasma-enhanced chemical vapor deposition -- Congresses.
Notes: Includes bibliographical references and indexes.