2001 6th International Symposium on Plasma- and Process-Induced Damage
Subtitle: May 13-15, 2001, Monterey, California, USA
By: Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel (editors)
Publisher: Northern California Chapter of the American Vacuum Society
Published: 2001
Place of publication: Santa Clara, CA
Language: eng
Number of pages: 128
Subjects: Semiconductor wafers -- Congresses.; Semiconductors -- Effect of radiation on -- Congresses.; Plasma radiation -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Description: International Symposium on Plasma Process-Induced Damage (6th 2001 Monterey, Calif.)
Notes: Includes bibliographical references and index.
"P²ID"--Cover.
"IEEE Catalog Number (softbound) 01TH8538 ; IEEE Catalog Number (CD-ROM) 01TH8538C"--T.p. verso.