Handbook of Microlithography, Micromachining and Microfabrication
Subtitle: Handbook of Microlithography (Materials and Devices Series, 1)
Publisher: Institution of Electrical Engineers
Published: February 1997
Language: eng
Format: Hardcover
Number of pages: 776
ISBN-13: 9780852969069
Subjects: Circuits & components; Instruments & instrumentation engineering; Materials science; Semi-conductors & super-conductors; Reference; Technology & Industrial Arts; Electricity; Engineering - Electrical & Electronic; Manufacturing; Handbooks & Manuals