Micromechanics and MEMS
Subtitle: classic and seminal papers to 1990
By: edited by William S. Trimmer.
Contributors: Trimmer, W.; Institute of Electrical and Electronics Engineers.
Publisher: IEEE Press
Published: 1997
Place of publication: New York
Language: eng
Number of pages: 701
Subjects: Microelectronics.; Microelectromechanical systems.; Actuators.
Notes: Includes bibliographical references and index.
"A selected reprint volume."