Proceedingsof the Symposium on Silicon Nitride Thin Insulating Films
By: edited by Vikram J. Kapoor, Herman J. Stein ; (sponsored by) Dielectrics and Insulation and Electronics Divisions.
Contributors: Kapoor, Vikram J.; Stein, Herman J.; Electrochemical Society. Dielectrics and Insulating Division.; Electrochemical Society. Electronics Division.
Series: Proceedings -- v. 83-8; Proceedings (Electrochemical Society) -- v. 83-8.
Publisher: Electrochemical Society
Published: 1983
Place of publication: Pennington, N.J. (10 S. Main St., Pennington 08534-2696)
Language: eng
Number of pages: 519
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.
Notes: Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.

Includes bibliographical references and index.