Structure and electronic properties of ultrathin dielectric films on silicon and related structures
Subtitle: symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A
By: editors D.A. Buchanan ... [et al.].
Contributors: Buchanan, D. A.
Series: Materials research society symposium proceedings -- v. 592; Materials Research Society symposia proceedings -- v. 592.
Publisher: Materials Research Society
Published: 2000
Place of publication: Warrendale, PA
Language: eng
Number of pages: 386
Subjects: Silicon-on-insulator technology -- Congresses.; Dielectric films -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.