Microcantilevers for Atomic Force Microscope Data Storage
By: by Benjamin W. Chui
Series: Microsystems -- 1; Microsystems -- 1
Publisher: Springer US
Published: 1999
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 148
ISBN-13: 9781461372622; 9781461549833
Subjects: Systems engineering; Computer engineering; Engineering; Computer science
Description: Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations. Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback). The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.
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