The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements
By: J.R. Ehrstein, M.C. Croarkin.
Contributors: Croarkin, M. C. 1934-; National Institute of Standards and Technology (U.S.)
Edition: 1999 ed.
Series: NIST special publication -- 260-131.; Standard reference materials
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1999
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Format: Microform
Number of pages: 106
Subjects: Silicon.; Silicon -- Electric properties.
Other titles: Certification of one hundred millimeter diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements.
Notes: "Supercedes NIST special publication 260-131, August 1997."

Shipping list no.: 99-0777-M.

"Issued June 1999."

Includes bibliographical references (p. 44-45).

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1999] 2 microfiches : negative.