Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
Publisher: Springer
Published: May 23, 2018
Format: paperback
Number of pages: 188
ISBN-13: 9783319882840
Notes: Source title: Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets (Springer Theses)