Engineering thin films and nanostructures with ion beams
By: edited by Emile Knystautas.
Contributors: Knystautas, Emile J.
Series: Optical engineering -- 92; Optical engineering (Marcel Dekker, Inc.) -- v. 92.
Published: 2005
Place of publication: Boca Raton, FL : Taylor & Francis, c2005
Language: eng
Number of pages: 574
Subjects: Thin films.; Nanostructures.; Ion bombardment -- Industrial applications.
Notes: Includes bibliographical references and index.