MEMS/MOEMS components and their applications II
Subtitle: 24-25 January 2005, San Jose, California, USA
By: Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA).
Contributors: Henning, Albert Karl.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: Proceedings of SPIE,; v. 5717; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5717.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 242
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.