The Ninth Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996
By: sponsored by the IEEE Robotics and Automation Society.
Contributors: IEEE Robotics and Automation Society.
Publisher: IEEE Service Center
Published: 1996
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 528
Subjects: Electromechanical devices -- Congresses.; Miniature objects -- Congresses.; Microelectronics -- Congresses.; Robotics -- Congresses.
Other titles: Investigation of micro structures, sensors, actuators, machines and systems; 1996 IEEE Micro Electro Mechanical Systems
Notes: "IEEE catalog number 96CH35856."

At head of title: Proceedings, IEEE.

Includes bibliographical references and indexes.