Doping engineering for front-end processing
Subtitle: symposium held March 25-27, 2008, San Francisco, California, U.S.A.
By: editors, B.J. Pawlak ... [et al.].
Contributors: Materials Research Society. Meeting Symposium E.
Series: Materials Research Society symposium proceedings -- v. 1070; Materials Research Society symposia proceedings -- v. 1070.
Publisher: Materials Research Society
Published: 2008
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 319
ISBN-13: 9781605110400
Subjects: Semiconductor doping; Semiconductors; Processing; Congresses; Materials
Notes: "This volume contains papers presented at Symposium E, 'Doping engineering for front-end processing,' held March 25-27, 2008 at the 2008 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes.