Chemical vapor deposition growth
By: by R. P. Ruth ... [et al.]
Contributors: Ruth, R. P. 1925-; California Institute of Technology, Pasadena. Jet Propulsion Laboratory; Rockwell International. Electronics Research Center; United States. National Aeronautics and Space Administration
Series: DOE/JPL ; 954372-6
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1977
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Silicon
Notes: Work performed under contract no. NAS-7-100-954372 for the Jet Propulsion Laboratory, California Institute of Technology, by agreement between NASA and DoE

Contract no. 954372

"Rockwell International, Electronics Research Center, Electronic Devices Division."

Oct. 1978

Includes bibliographical references
Table of contents: title: Final report covering period December 29, 1975, to August 31, 1977