Novel materials and processes for advanced CMOS
Subtitle: symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
By: editors, Mark I. Gardner ... [et al.].
Contributors: Gardner, Mark I.; Materials Research Society.
Series: Materials Research Society symposium proceedings ;; v. 745; Materials Research Society symposia proceedings ;; v. 745.
Publisher: Materials Research Society
Published: 2003
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 384
Subjects: Metal oxide semiconductors -- Materials -- Congresses.; Metal oxide semiconductors, Complementary -- Materials -- Congresses.; Nanostructured materials -- Congresses.; Gate array circuits -- Materials -- Congresses.; Dielectrics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Papers presented at Symposium N, "Novel Materials and Processes for Advanced CMOS," held ... at the 2002 MRS Fall Meeting"--P. xiii.