Micro-electro-mechanical systems--2006
Subtitle: presented at 2006 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2006, Chicago, Illinois, USA
By: sponsored by the Micro-Electro-Mechanical Systems Division, ASME.
Contributors: American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division.; International Mechanical Engineering Congress and Exposition (2006 : Chicago, Ill.)
Series: MEMS -- vol. 8; MEMS (Series) (American Society of Mechanical Engineers) -- v. 8.
Publisher: ASME
Published: 2007
Place of publication: New York, N.Y
Language: eng
Number of pages: 715
ISBN-13: 9780791847756
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.