Microlithographic techniques in IC fabrication
Subtitle: 25-26 June, 1997, Singapore
By: Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
Contributors: Yoon, Soon-Fatt.; Yu, Raymond.; Mack, Chris A.; Society of Photo-optical Instrumentation Engineers.; Society of Photo-optical Instrumentation Engineers. Singapore Chapter; Institute of Physics, Singapore.; Society of Photo-optical Instrumentation Engineers. Japan Chapter
Series: SPIE proceedings series ;; v. 3183; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3183.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 264
Subjects: Microlithography -- Industrial applications -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Inspection -- Congresses.; Process control -- Congresses.
Notes: Includes bibliographic references and author index.