Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I
By: edited by Dennis N. Schmidt ; assistant editors, David Reedy, Alex Schwarz.
Contributors: Schmidt, Dennis N.; Reedy, David.; Schwarz, Alex.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings / The Electrochemical Society, Inc. ;; v. 92-21; Proceedings (Electrochemical Society) ;; v. 92-21.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, N.J
Language: eng
Number of pages: 501
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductors -- Defects -- Congresses.
Other titles: Contamination control and defect reduction in semiconductor manufacturing I.
Notes: Includes bibliographical references and indexes.
"Electronics and Dielectric Science and Technology Divisions."
Spine title: Contamination control and defect reduction in semiconductor manufacturing I.