Introduction to microsystem technology
Subtitle: a guide for students
By: Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
Contributors: Dötzel, Wolfram.
Publisher: J. Wiley & Sons
Published: 2008
Place of publication: Hoboken, NJ
Language: eng
ISBN-13: 9780470058619
Subjects: Microelectromechanical systems -- Design and construction; System design; Microelectronics
Work titles: Einführung in die Mikrosystemtechnik.
Notes: Includes bibliographical references and index.