Surfaces, interfaces, and thin films for microelectronics
By: Eugene A. Irene
Publisher: Wiley-Interscience
Published: 2008
Place of publication: Hoboken, N.J
Language: eng
Number of pages: 515
ISBN-13: 9780470174470
Subjects: Surface chemistry; Materials; Microelectronics; Thin films; Interfaces (Physical sciences)
Notes: Includes bibliographical references and index.