Micron and submicron integrated circuit metrology
Subtitle: August 22-23, 1985, San Diego, California
By: Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.
Contributors: Monahan, Kevin M.; University of Arizona. Optical Sciences Center.; University of Rochester. Institute of Optics.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 565
Publisher: SPIE--International Society for Optical Engineering
Published: 1985
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 223
Subjects: Integrated circuits -- Measurement -- Congresses.; Integrated circuits -- Testing -- Congresses.
Notes: Includes bibliographies.