Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California
By: J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison.
Contributors: Narayan, J.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1190; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1190.
Publisher: SPIE
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 221
Subjects: Semiconductor industry -- Laser use in -- Congresses.; Lasers -- Industrial applications -- Congresses.; Semiconductors -- Etching -- Congresses.; Annealing of crystals -- Congresses.
Notes: Includes bibliographical references and index.