Technological advances in micro and submicro photofabrication imagery
Subtitle: [seminar], August 21-23, 1974, San Diego, California
By: editors, J.M. Graf, William Converse.
Contributors: Graf, J. M.; Converse, William.
Series: Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 55; Proceedings of the Society of Photo-optical Instrumentation Engineers ;; v. 55.
Publisher: Society of Photo-optical Instrumentation Engineers
Published: 1975
Place of publication: Palos Verdes Estates, Calif
Language: eng
Number of pages: 136
Subjects: Microelectronics -- Congresses.; Masks (Electronics) -- Congresses.
Notes: Includes bibliographical references.
Page 136 blank for "Notes."