Proceedings of VLSI Technology Workshop on Key Technologies for 0.5 [mu]m Manufacturing
Subtitle: May 27, 1991
By: organizers: T. Nishimura, C.R. Viswanathan, S.S. Wong.
Contributors: Nishimura, Tadashi.; Viswanathan, Chand R.; Wong, S. S.
Publisher: The Japan Society of Applied Physics, The IEEE Electron Device Society
Published: 1991
Place of publication: [S.l.]
Language: eng
Number of pages: 211
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Notes: On cover: 1991 VLSI Technology Symposium Oiso.

On cover: 1191 Symposium on VLSI Technology (May 28-30, 1991).

Includes bibliographical references.