Metrology for submicrometer devices and circuits
By: W. Murray Bullis.
Series: Semiconductor measurement technology; NBS special publication ; 400-61; NBS special publication ;; 400-61.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1980
Place of publication: Washington, D.C
Language: eng
Number of pages: 34
Subjects: Integrated circuits -- Testing.; Integrated circuits -- Measurement.; Semiconductors -- Testing.; Semiconductors -- Measurement.
Notes: Includes bibliographical references.
"Issued June 1980."