Post-Processing Techniques for Integrated MEMS
Publisher: Artech House Publishers
Published: October 31, 2005
Language: eng
Format: Hardcover
Number of pages: 234
ISBN-13: 9781580539012
Subjects: Electronics engineering; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - General; Engineering - Electrical & Electronic; Microelectromechanical systems
First sentence: Microelectromechanical systems (MEMS) is an enabling technology that implements techniques similar to traditional integrated circuit fabrication processes to realize highly miniaturized devices that can ultimately integrate a number of functions including mechanics, electronics, optics, and fluidics on a single silicon chip [1-7].