Instrumentation, metrology, and standards for nanomanufacturing IV
Subtitle: 2-4 August 2010, San Diego, California, United States
By: Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, National Institute of Standards and Technology (United States)
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7767; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7767.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819482631
Subjects: Nanostructured materials; Microfabrication; Congresses; Nanotechnology
Notes: Includes bibliographical references and index.