Tochnye i avtomodel'nye reshenii͡a kineticheskogo uravnenii͡a dli͡a kaskadnogo prot͡sessa
Subtitle: preprint
By: D.L. Maslov
Contributors: Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Published: 1989
Place of publication: Chernogolovka
Language: rus
Number of pages: 18
Notes: Cover title.

At head of title: Akademii͡a nauk SSSR. Institut problem teknologii mikroėlektroniki i osobochistykh materialov.

Includes bibliographical references (p. 19)