Purazuma ionbīmu to nanotekunorojī
Subtitle: Ion beam and plasma process for nanotechnology
By: kanshū Kamijō Eiji.
Contributors: Kamijō. Eiji, 1935-
Edition: Fukyūban
Series: CMC tekunikaru raiburarī -- 252
Publisher: CMC
Published: 2007
Place of publication: Tōkyō
Language: jpn
Number of pages: 316
ISBN-13: 9784882319153
Subjects: Plasma (Ionized gases); Ion bombardment.; Nanotechnology.
Other titles: Ion beam and plasma process for nanotechnology
Work titles: Purazuma ionbīmu ōyō to nanotekunorojī.
Notes: First ed. published as: Purazuma ionbīmu ōyō to nanotekunorojī. 2002.

Includes bibliographical references.

In Japanese.