Lazernye tekhnologii v mikroėlektronike
By: V.P. Veĭko, S.M. Metev.
Contributors: Metev, S. M.
Publisher: Izd-vo Bolgarskoĭ akademii nauk
Published: 1991
Place of publication: Sofii͡a︡
Language: rus
Number of pages: 363
Subjects: Microelectronics.; Lasers -- Industrial applications.
Other titles: Laser technologies in microelectronics.; Lazernite tekhnologii v mikroelektronikata.
Notes: Includes bibliographical references (p. 343-361).
Title on added t.p.: Laser technologies in microelectronics.
Title in colophon: Lazernite tekhnologii v mikroelektronikata.
On p. preceding t.p.: Sofiĭskiĭ universitet im. Klimenta Okhridskogo. Leningradskiĭ institut tochnoĭ mekhaniki i optiki.
Summary also in English.