Homogeneous reactions of hydrocarbons, silane, and chlorosilanes in radiofrequency plasmas at low pressures
By: Reuven Avni ... [et al.]
Contributors: Avni, Reuven; United States. National Aeronautics and Space Administration. Scientific and Technical Information Branch
Series: NASA technical paper -- 2301
Publisher: National Aeronautics and Space Administration, Scientific and Technical Information Branch; For sale by the National Technical Information Service]
Published: 1984
Place of publication: Washington, D.C; [Springfield, Va
Language: eng
Number of pages: 10
Subjects: Plasma chemistry; Polymers
Notes: Distributed to depository libraries in microfiche

"April 1984"--Cover

STAR category 23

Includes bibliographical references