Microelectronic manufacturing yield, reliability, and failure analysis II
Subtitle: 16-17 October, 1996, Austin, Texas
By: Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributors: Ali Keshavarzi.; Prasad, Sharad.; Hartmann, Hans-Dieter.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2874; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2874.
Publisher: SPIE
Published: 1996
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 372
Subjects: Microelectronics -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Notes: Includes bibliographic references and author index.