Ion Implantation : Equipment and Techniques
Subtitle: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
Publisher: Springer
Published: Jan 16, 2012
Format: paperback
Number of pages: 572
ISBN-13: 9783642691577
Notes: Source title: Ion Implantation: Equipment and Techniques : Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982