Mems 2003: IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Subtitle: Kyoto, Japan, January 19-23, 2
Publisher: Institute of Electrical & Electronics Enginee
Published: January 2003
Language: eng
Format: Hardcover
Number of pages: 711
ISBN-13: 9780780377448
Subjects: Electronics engineering; Mechanical engineering; Electronics - General; Technology & Industrial Arts