Mems, Moems, And Micromachining
Subtitle: 29-30 April 2004, Strasbourg, France (Proceedings of S P I E)
Contributors: Hakan Urey (Editor); Ayman El-Fatatry (Editor)
Publisher: SPIE-International Society for Optical Engine
Published: August 31, 2004
Language: eng
Format: Paperback
Number of pages: 438
ISBN-13: 9780819453785
Subjects: Electronics engineering; Technology; Technology & Industrial Arts; Science/Mathematics; Mechanical; Electronics - Microelectronics; Congresses; Microelectromechanical systems; Micromachining; Optoelectronic devices