Noble-gas ion bombardment on clean silicon surfaces
Subtitle: studied using ellipsometry and desorption
By: Antonius Hendricus Maria Holtslag
Contributors: Technische Hogeschool Twente
Publisher: [s.n.]
Published: 1986
Place of publication: [s.l.]
Language: eng
Number of pages: 183
Notes: Auteursnaam op omslag: Toon Holtslag.

Thesis (doctoral)--Technische Hogeschool Twente, 1986.

Met samenvatting in het Nederlands. - Met lit. opg.