MEMS/MOEMS technologies and applications II
Subtitle: 10-12 November, 2004, Beijing, China
By: Zhichun Ma, Guofan Jin, Xuyuan Chen, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
Contributors: Ma, Zhichun.; Jin, Guofan.; Chen, Xuyuan.; Society of Photo-optical Instrumentation Engineers.; Zhongguo guang xue xue hui.; Australian Optical Society.; Guo jia zi ran ke xue ji jin wei yuan hui (China)
Series: SPIE proceedings series ;; v. 5641; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5641.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 364
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.
Genres: Congresses.
Other titles: MOEMS technologies and applications
Notes: Includes bibliographical references and author index.