Precision surface metrology
Subtitle: August 23-24, 1983, San Diego, California
By: James C. Wyant, chairman/editor.
Contributors: Wyant, James C.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 429
Publisher: SPIE--the International Society for Optical Engineering
Published: 1983
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 207
Subjects: Glass -- Surfaces -- Measurement -- Congresses.; Interferometry -- Congresses.; Optical measurements -- Congresses.
Notes: Includes bibliographies and index.