Photon, Beam and Plasma Enhanced Processing, 1987 (Symposia proceedings / European Materials Research Society)
Contributors: Van Tran Nguyen (Editor); A. Golanski (Editor); E. F. Krimmel (Editor)
Publisher: Materials Research Society
Published: November 1987
Language: eng
Format: Paperback
Number of pages: 701
ISBN-13: 9782868830616
Subjects: Silicon-on-insulator technology; Semiconductors; Physical Properties Of Materials; Thin film devices; Silicon-on-insulator technolog; Congresses; Design an construction; Design and construction