Intelligent integrated microsystems
Subtitle: 19-21 April, 2006, Kissimmee, Florida, USA
By: Ravindra A. Athale, John C. Zolper, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Athale, Ravindra A.; Zolper, J. C.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE -- 6232; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6232.
Publisher: SPIE
Published: 2006
Place of publication: Bellingham, Wash
Language: eng
Subjects: Microelectromechanical systems -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.