Rapid thermal annealing of amorphous hydrogenated carbon (a-C:H) films
By: Samuel A. Alterovitz, John J. Pouch, and Joseph D. Warner.
Contributors: Pouch, John J.; Warner, Joseph D.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 89859.
Publisher: National Aeronautics and Space Administration; For sale by the National Technical Information Service
Published: 1987
Place of publication: [Washington, D.C.]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Thermodynamics.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1987. 1 microfiche.