Three new sensors and a special structure based on micromachining of silicon
By: by Göran Stemme
Contributors: Chalmers tekniska högskola
Series: Doktorsavhandlingar vid Chalmers tekniska högskola -- ny ser., nr. 609; Technical report / School of Electrical and Computer Engineering, Chalmers University of Technology -- no. 171; Technical report (Chalmers Tekniska Högskola. Institutien for elektronfysk i och onsala rymdobservatorium) -- no. 171
Publisher: School of Electrical and Computer Engineering, Chalmers University of Technology
Published: 1987
Place of publication: Göteborg, Sweden
Language: eng
Subjects: Silica; Thermal properties; Silicon; Polyimides; Chemical detectors
Notes: Series statement stamped on cover.

Added title page in Swedish and abstract in English inserted.

Thesis (doctoral)--Chalmers Tekniska Högskola, 1987.

Includes bibliographical references.