16th Annual Symposium on Photomask Technology and Management
Subtitle: Proceedings, 18-20 September 1996, Redwood City, California (16th Annual Bacus Symposium on Photomask Technology & Manage)
Contributors: Gilbert V. Sheldon (Editor); James A. Reynolds (Editor)
Publisher: SPIE-International Society for Optical Engine
Published: December 1996
Language: eng
Format: Hardcover
Number of pages: 596
ISBN-13: 9780819422828