Silicon Processing for the VLSI Era, Vol. 3
Subtitle: The Submicron MOSFET
Publisher: Lattice Press
Published: October 1994
Language: eng
Format: Hardcover
Number of pages: 722
ISBN-13: 9780961672157
Subjects: Engineering - Electrical & Electronic; General; Medical / Nursing
Table of contents: label: 1
title: Role of Process & Device Models in Microelectronics Technology; label: 2
title: Numerical Methods for Solving the Partial Differential Equations which Model Submicron Devices and Processes; label: 3
title: Basic MOS Physics & MOS Capacitors; label: 4
title: Long-Channel MOSFETs; label: 5
title: The Submicron MOSFET; label: 6
title: Isolation Structures in CMOS; label: 7
title: Thin Gate Oxides: Growth & Reliability; label: 8
title: Well Formation in CMOS; label: 9
title: Hot-Carrier Resistant Processing & Device Structures