Sensorgeführte Montage hybrider Mikrosysteme
By: Michael Höhn
Series: Forschungberichte IWB -- Bd. 149; IWB Forschungsberichte -- Bd. 149.
Publisher: Utz
Published: 2001
Place of publication: München
Language: ger
Number of pages: 171
Subjects: Microfabrication; Detectors; Industrial applications
Notes: Originally presented as the author's thesis (doctoral)--Technische Universität München, 2001.

Includes bibliographical references (p. 155-171).