IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: Proceedings 
Subtitle: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems
Publisher: Ieee
Published: March 1996
Language: eng
Format: Paperback
Number of pages: 530
ISBN-13: 9780780329850
Subjects: Electronic devices & materials; Microelectronics; Electronic Apparatus And Devices; Technology; Science/Mathematics; Congresses; Detectors; Electronics - General; Actuators; Electromechanical devices