Principles of optical lithography
Subtitle: the science of microfabrication
By: Chris Mack.
Publisher: Wiley
Published: 2007
Place of publication: Chichester, West Sussex, England; Hoboken, NJ, USA
Language: eng
ISBN-13: 9780470018934; 9780470727300
Subjects: Integrated circuits -- Design and construction; Microlithography -- Industrial applications
Notes: Includes bibliographical references and index.