Nano-lithography
By: edited by Stefan Landis
Publisher: ISTE; Wiley
Published: 2011
Place of publication: London, UK; Hoboken, NJ
Language: eng
Number of pages: 325
ISBN-13: 9781848212114
Subjects: Nanotechnology; Microlithography
Work titles: Nanolithography English
Notes: Includes bibliographical references and index.
Table of contents: title: Ch. 1. X-ray lithography : fundamentals and applications; title: ch. 2. NanoImprint lithography; title: ch. 3. Lithography techniques using scanning probe microscopy; title: ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures; title: ch. 5. Patterning with self-assembling block copolymers; title: ch. 6. Metrology for lithography.