Microelectronic manufacturing yield, reliability, and failure analysis
Subtitle: 25-26 October 1995, Austin, Texas
By: Gopal Rao, Massimo Piccoli, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Rao, Gopal K.; Piccoli, Massimo.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2635; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2635.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 284
Subjects: Microelectronics -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Notes: Includes bibliographic references and index.