Advanced Microlithography
Subtitle: An Introduction to Nanostructure Science
Publisher: Wiley-VCH
Published: November 1, 2002
Language: eng
Format: Hardcover
Number of pages: 350
ISBN-13: 9783527296316
Subjects: Mechanical Engineering & Materials; Electricity; Engineering - Electrical & Electronic; Material Science; Technology / Material Science; Technology; Technology & Industrial Arts; Science/Mathematics