Novel silicon based technologies
By: edited by R.A. Levy.
Contributors: Levy, Roland A. 1944-; North Atlantic Treaty Organization. Scientific Affairs Division.
Series: NATO ASI series. Series E, Applied sciences ;; vol. 193; NATO ASI series.; no. 193.
Publisher: Kluwer Academic
Published: 1991
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 277
Subjects: Integrated circuits -- Materials -- Congresses.; Silicon crystals -- Congresses.; Silicon-on-insulator technology -- Congresses.
Notes: Includes bibliographical references and index.
"Proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies, Boca Raton, Florida, U.S.A., 17-28 July, 1989"--T.p. verso.
"Published in cooperation with NATO Scientific Affairs Division."