Kinetic study of Si(NH)  synthesis via low temperature vapor phase reaction of SiCl  and NH  in a fluidized bed reactor
By: by Chia-Chang Hsu.
Published: 1994
Language: eng
Number of pages: 57
Subjects: Silicon compounds -- Reactivity.; Fluidized reactors.
Notes: Typescript (photocopy)

Thesis (M.S.)--Oregon State University, 1994.

Includes bibliographical references (leaves 51-52)