Rapid thermal processing of semiconductors
By: Victor E. Borisenko, Peter J. Hesketh.
Contributors: Hesketh, P. J.
Series: Microdevices; The language of science
Publisher: Plenum Press
Published: 1997
Place of publication: New York
Language: eng
Number of pages: 358
Subjects: Semiconductors -- Design and construction; Rapid thermal processing
Notes: Includes bibliographical references (p. 301-353) and index.