Micro process engineering
Subtitle: fundamentals, devices, fabrication, and applications
By: volume editor : Norbert Kockmann.
Contributors: Kockmann, Norbert.
Series: Advanced micro & nanosystems : -- 5.
Publisher: Wiley-VCH; John Wiley [distributor]]
Published: 2006
Place of publication: Weinheim; [Chichester
Language: eng
Number of pages: 507
Subjects: Production engineering.; Microtechnology.
Notes: Includes bibliographical references and index.