Sputtering by particle bombardment
By: edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
Contributors: Behrisch, Rainer.; Andersen, Hans Henrik.
Series: Topics in applied physics ;; v. 47, 52, 64
Publisher: Springer-Verlag
Published: 1981
Place of publication: Berlin; New York
Language: eng
Number of pages: 281
Subjects: Sputtering (Physics); Solids -- Effect of radiation on.; Surfaces (Physics) -- Effect of radiation on.
Other titles: Particle bombardment.
Notes: Includes bibliographical references and indexes.
Table of contents: title: 1. Physical sputtering of single-element solids; title: 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography; title: 3. Characteristics of sputtered particles, technical applications.