Internal stresses and microstructure of layer/substrate assemblies
Subtitle: analysis of TiC and TiN coatings chemically vapour deposited on various substrates
By: door Willem Gerrit Sloof.
Publisher: Delft University Press
Published: 1996
Place of publication: Delft, Netherlands
Language: eng
Number of pages: 173
Subjects: Thin films.; Coatings -- Testing.; Microstructure.; Titanium carbide.; Titanium nitride.
Other titles: Analysis of TiC and TiN coatings chemically vapour deposited on various substrates.; Inwendige spanningen en microstructur van laag/substraat samenstellingen.
Notes: Includes vita.

Thesis (doctoral)--Technische Universiteit Delft, 1996.

Includes bibliographical references.

Dutch summary.