Smart sensors, actuators, and MEMS III
Subtitle: 2-4 May 2007, Maspalomas, Gran Canaria, Spain
By: Thomas Becker, Carles Cané, N. Scott Barker, editors.
Contributors: Becker, Thomas.; Cané, Carles.; Barker, N. Scott
Series: Proceedings of SPIE -- v. 6589
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819467171
Subjects: Microelectromechanical systems -- Congresses.; Microtechnology -- Congresses.; Actuators -- Industrial applications -- Congresses.; Detectors -- Industrial applications -- Congresses.; Scanning systems -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.