Vacuum mechatronics
Subtitle: first international workshop, Santa Barbara, CA, 1989
By: editors, Steven E. Belinski ... [et al.].
Contributors: Belinski, Steven E.; American Vacuum Society.; International Vacuum Mechatronics Workshop (1st : 1989 : University of California, Santa Barbara)
Series: American Vacuum Society series ;; 7; Conference proceedings ;; no. 192; AIP conference proceedings ;; no. 192.
Publisher: American Institute of Physics
Published: 1989
Place of publication: New York
Language: eng
Number of pages: 167
Subjects: Vacuum technology -- Congresses.; Mechatronics.
Notes: Includes bibliographical references.
Papers presented at the First International Vacuum Mechatronics Workshop, held Feb. 2-3, 1989 at the University of California, Santa Barbara.