Micro system technologies '94
Subtitle: 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994
By: Herbert Reichl, Anton Heuberger (editors).
Contributors: Reichl, H.; Heuberger, A.; Ausstellungs-Messe-Kongress-GmbH.; MESAGO Messe & Kongress GmbH.; Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration.
Publisher: vde-Verlag
Published: 1994
Place of publication: Berlin
Language: eng
Number of pages: 1212
Subjects: Microelectronics -- Congresses.; Electronic circuit design -- Data processing -- Congresses.; Electronic packaging -- Congresses.; Microelectronics -- Materials -- Congresses.; High technology -- Congresses.
Notes: Organized by AMK Berlin, Ausstellungs-Messe-Kongress, MESAGO Messe & Kongress GmbH and FhG IZM, Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration.

Includes bibliographical references.