Plasma Properties, Deposition, and Etching (Materials Science Forum Vols. 140-142)
Contributors: S. A. Alterovitz (Editor)
Publisher: Trans Tech Publications
Published: June 1994
Language: eng
Format: Hardcover
Number of pages: 749
ISBN-13: 9780878496709
Subjects: Materials science; Plasma Physics; Mechanics - Dynamics - General; Physical Properties Of Materials; Science; Science/Mathematics