MAM '97, abstracts booklet
Subtitle: European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997.
Contributors: International Union for Vacuum Science, Technique and Applications.; France. Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle.; IEEE Electron Devices Society.
Publisher: Société française du vide
Published: 1997
Place of publication: Paris, France
Language: eng
Number of pages: 221
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Metallizing -- Congresses.; Semiconductor-metal boundaries -- Congresses.
Other titles: Materials for advanced metallization
Notes: Includes bibliographical references and index.
"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. p.
"Supplément à la revue no 283"--Cover.