Proceedings of the Fourth Symposium on Automated Integrated Circuits Manufacturing
By: edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.
Contributors: Anthony, Joseph B.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 89-2; Proceedings (Electrochemical Society) ;; v. 89-2.
Publisher: Electrochemical Society
Published: 1989
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 312
Subjects: Integrated circuits -- Design and construction -- Data processing -- Congresses.
Other titles: Proceedings of the 4th Symposium on Automated Integrated Circuits Manufacturing.; Automated integrated circuits manufacturing.
Notes: Includes bibliographies and indexes.
Spine title: Automated integrated circuits manufacturing.
[Co-sponsored by] Electronics and Dielectrics and Insulation Divisions.