Interlayer dielectrics for semiconductor technologies
By: edited by: S.P. Murarka, M.Eizenberg, A.K. Sinha.
Contributors: Eizenberg, M.; Murarka, S. P.; Sinha, A. Krishna, 1941-
Publisher: Elsevier Academic Press
Published: 2003
Place of publication: London
Language: eng
Number of pages: 444