Rapid Thermal and Integrated Processing III
Subtitle: Symposium Held April 4-7, 1994, San Francisco, California, U.S.A (Materials Research Society Symposium,)
Publisher: Materials Research Society
Published: September 1994
Language: eng
Format: Paperback
Number of pages: 449
ISBN-13: 9781558992429
Subjects: Electronics - Semiconductors; Reference; Technology; Technology & Industrial Arts; Chemical vapor deposition; Congresses; Heat treatment; Semiconductor doping; Semiconductors; Science/Mathematics