Techniques and Challenges for 300 mm Silicon
Subtitle: Processing, Characterization, Modelling and Equipment (European Materials Research Society Symposia Proceedings)
Contributors: H. Richter (Editor); P. Wagner (Editor); G. Ritter (Editor)
Publisher: Elsevier Science
Published: September 1, 1999
Language: eng
Number of pages: 206
ISBN-13: 9780080436098