Microlithography Science and Technology
Edition: 1st edition
Publisher: CRC
Published: May 1, 1998
Language: eng
Format: Hardcover
Number of pages: 800
ISBN-13: 9780824799533
Subjects: Applied optics; Circuits & components; Optics; Masks; Metal Oxide Semiconductors (Mos); Technology; Technology & Industrial Arts; Microlithography; Science/Mathematics; Metal oxide semiconductors, Complementary; Electronics - Circuits - Printed; Engineering - General; Technology / Lasers; Electronics - Circuits - Integrated; Design and construction; Industrial applications; Integrated Circuits; Metal oxide semiconductors, Co
First sentence: Microlithography is a manufacturing process for producing highly accurate, microscopic, two-dimensional patterns in a photosensitive resist material.