Process and equipment control in microelectronic manufacturing
Subtitle: 19-20 May, 1999, Edinburgh, Scotland
By: Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.
Contributors: Yallup, Kevin.; Narasimhan, Murali K.; European Optical Society.; Society of Photo-optical Instrumentation Engineers.; European Commission. Directorate-General XII, Science, Research, and Development.
Series: Proceedings EurOpt series; Proceedings / SPIE--the International Society for Optical Engineering ;; v. 3742; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3742.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 206
Subjects: Microelectronics industry -- Production control -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Microelectronics -- Materials -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.