Process, equipment, and materials control in integrated circuit manufacturing III
Subtitle: 1-2 October 1997, Austin, Texas
By: Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.
Contributors: Ghanbari, Abe.; Toprac, Anthony J.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 3213; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3213.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 270
Subjects: Integrated circuits -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Notes: Includes bibliographic references and index.