Diffuzionnye prot͡sessy v tonkoplenochnykh metallicheskikh sistemakh
By: Aleshin A.N., Bokshteĭn B.S., Kurkin P.V.
Contributors: Bokshteĭn, B. S. (Boris Samuilovich); Kurkin, P. V.; Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Rossiĭskai͡a akademii͡a nauk)
Publisher: IKhFCh RAN
Published: 1992
Place of publication: Chernogolovka
Language: rus
Number of pages: 47
Subjects: Metallic films; Diffusion
Notes: At head of title: Rossiĭskai͡a akademii͡a nauk. Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov.

"Preprint."

Cover title.

Includes bibliographical references (p. 38-47)