Nanofabrication technologies and device integration
Subtitle: 13-14 April 1994, Lindau, FRG
By: Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering.
Contributors: Karthe, Wolfgang.; Commission of the European Communities. Directorate-General for Science, Research, and Development.; European Optical Society.; Society of Photo-optical Instrumentation Engineers.
Series: EurOpt series; SPIE proceedings series ;; v. 2213; Proceedings EurOpt series.; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2213.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 334
Subjects: Nanotechnology -- Congresses.; Integrated optics -- Congresses.; Optical instruments -- Design and construction -- Congresses.
Notes: Includes bibliographical references and author index.