Handbook of chemicals and gases for the semiconductor industry
By: Ashutosh Misra, Jeremiah D. Hogan, Russell Chorush
Contributors: Hogan, Jeremiah D; Chorush, Russell
Publisher: Wiley-VCH
Published: 2002
Place of publication: New York
Language: eng
Number of pages: 363
Subjects: Chemicals -- Handbooks, manuals, etc; Semiconductors -- Materials -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc
Notes: Includes bibliographical references and index