Optical microlithography VI
Subtitle: 4-5 March 1987, Santa Clara, California
By: Harry L. Stover, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Stover, Harry L.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 772
Publisher: SPIE
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 292
Subjects: Microlithography -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Other titles: Optical microlithography 6.; Optical microlithography six.
Notes: Includes bibliographies and index.