Sputtering by Particle Bombardment
Subtitle: Sputtering of Alloys and Compounds , Electron and Neutron Sputtering, Surf. (Topics in Applied Physics)
Publisher: Springer
Published: November 1983
Language: eng
Format: Hardcover
Number of pages: 385
ISBN-13: 9780387125930
Subjects: Particle Physics; Solid State Physics; Science; Effect of radiation on; Solids; Sputtering (Physics); Surfaces (Physics)