Electrochemical processes in ULSI and MEMS
Subtitle: proceedings of the international symposium
By: editors, H. Deligianni ... [et al.].
Contributors: Deligianni, H. 1958-; Electrochemical Society. Meeting
Series: Proceedings -- v. 2004-17
Publisher: Electrochemical Society
Published: 2005
Place of publication: Pennington, NJ
Language: eng
Number of pages: 480
ISBN-13: 9781566774727
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses; Microelectromechanical systems -- Congresses; Electrochemistry -- Congresses
Genres: Congresses
Notes: "Papers presented at the Symposium on Electrochemical processes in ULSI and MEMS held during the spring 2004 meeting of the Electrochemical Society in San Antonio, TX. This symposium was part of the 205th meeting of the Electrochemical Society"--P. iii.

Includes bibliographic references and indexes.