MEMS Reliability
By: by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
Contributors: Da Silva, Mark G.; Shea, Herbert R.; SpringerLink (Online service)
Edition: 1.
Series: MEMS Reference Shelf
Publisher: Springer Science+Business Media, LLC
Published: 2011
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
ISBN-13: 9781441960177; 9781441960184
Subjects: Engineering; Electronics