Oborudovanie ionnoĭ implantat͡s︡ii
By: V.V. Simonov ... [et al.].
Contributors: Simonov, V. V.
Edition: Proizvodstvennoe izd.
Publisher: "Radio i svi͡a︡zʹ"
Published: 1988
Place of publication: Moskva
Language: rus
Number of pages: 182
Subjects: Ion implantation.
Notes: Bibliography: p. 179-[181]