MEMS/NEMS
Subtitle: handbook techniques and applications
By: edited by Cornelius T. Leondes
Contributors: Knovel (Firm)
Publisher: Springer
Published: 2006
Place of publication: New York
Language: eng
ISBN-13: 9781601194565
Copyright date: 2006
Subjects: Microelectromechanical systems; Design and construction; Nanotechnology
Other titles: MEMS/NEMS handbook
Notes: Includes bibliographical references and index.

Electronic reproduction. Norwich, N.Y. : Knovel, 2007. System requirements: Adobe Acrobat Reader. Available via the World Wide Web. Access restricted to users at licensed institutions.
Table of contents: title: v. 1. Design methods; title: v. 2. Fabrication techniques; title: v. 3. Manufacturing methods; title: v. 4. Sensors and actuators; title: v. 5. Medical applications and MOEMS.