Microelectromechanical Systems-- Materials and Devices IV
Subtitle: symposium held November 29-December 3, [2010] Boston, Massachusetts, U.S.A.
By: editors, Frank W. DelRio ... [et al.].
Contributors: DelRio, Frank W.; Materials Research Society
Series: Materials Research Society symposium proceedings -- v. 1299; Materials Research Society symposia proceedings -- v. 1299.
Publisher: Materials Research Society; Cambridge University Press
Published: 2011
Place of publication: Warrendale, Pa; New York, NY
Language: eng
Number of pages: 207
ISBN-13: 9781605112763
Subjects: Silicon; Microelectromechanical systems; Materials; Congresses; Nanostructured materials; Thin films
Notes: Papers presented at Symposium S, "Microelectromechanical Systems--Materials and Devices IV," held at the 2010 MRS Fall Meeting in Boston, Mass.

Includes bibliographical references and indexes.