Fundamentals of microfabrication
Subtitle: the science of miniaturization
By: Marc J. Madou.
Edition: 2nd ed.
Publisher: CRC Press
Published: 2002
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 723
Subjects: Microelectronics.; Integrated circuits -- Design and construction.; Microelectromechanical systems -- Design and construction.; Machining.; Microelectronic packaging.; Lasers -- Industrial applications.
Notes: Includes bibliographical references and index.