Laser applications in microelectronic and optoelectronic manufacturing III
Subtitle: 26-28 January 1998, San Jose, California
By: Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Dubowski, J. J.; Dyer, Peter E.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3274; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3274.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 344
Subjects: Microelectronics industry -- Congresses.; Lasers -- Industrial applications -- Congresses.; Manufacturing processes -- Congresses.; Optoelectronics industry -- Congresses.
Notes: Includes bibliographical references and index.