Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
By: J.C. Marshall and R.L. Mattis.
Contributors: Mattis, Richard L.; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-90.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 1992
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 140
Subjects: Integrated circuits -- Evaluation.
Notes: Distributed to depository libraries in microfiche.

Paper version no longer for sale by the Supt. of Docs.

Shipping list no.: 92-2218-M.

"April 1992."

Includes bibliographical references (p. 41-42).

Microfiche. [Washington, D.C.?] : Supt. of Docs. U.S. G.P.O., [1992] 2 microfiches : negative.