Low-energy sputterings with the Monte Carlo program ACAT
By: Yasunori Yamamura and Yoshiyuki Mizuno.
Contributors: Mizuno, Yoshiyuki, 1937-
Series: IPPJ-AM ;; 40
Publisher: Institute of Plasma Physics, Nagoya University
Published: 1985
Place of publication: Nagoya, Japan
Language: eng
Number of pages: 58
Subjects: Sputtering (Physics) -- Measurement -- Data processing.; Angular distribution (Nuclear physics) -- Measurement -- Data processing.; Ions -- Measurement -- Data processing.; Monte Carlo method -- Computer programs.
Notes: Includes bibliographical references.