Digest of papers, 1989
Subtitle: 2nd MicroProcess Conference, July 2-5, 1989, Kobe, Japan
By: sponsored by The Japan Society of Applied Physics in cooperation with American Vacuum Society, IEEE Electron Devices Society.
Contributors: Ōyō Butsuri Gakkai.; American Vacuum Society.; IEEE Electron Devices Society.
Publisher: Japan Society of Applied Physics
Published: 1989
Place of publication: Tokyo
Language: eng
Number of pages: 213
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.; Microprocessors -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction
Other titles: MicroProcess Conference :; 2nd MicroProcess Conference digest of papers 1989; 1989 2nd MicroProcess Conference; Second MicroProcess Conference digest of papers 1989
Notes: Includes bibliographical references.