Diffusion barriers in semiconductor contact metallization
By: Hannu Kattelus
Contributors: Valtion teknillinen tutkimuskeskus; Teknillinen korkeakoulu
Series: Publications (Valtion teknillinen tutkimuskeskus) -- 48
Publisher: Technical Research Centre of Finland
Published: 1988
Place of publication: Espoo
Language: eng
ISBN-13: 9789513831202
Notes: Thesis (doctoral)--Helsinki University of Technology, 1988.