Wei mi na mi qi jian ce shi ji shu
Subtitle: Micro-Nanometer Devices Measuring Technology
By: Zhang Wendong deng bian zhu
Edition: Di 1 ban
Series: Wei mi na mi ji shu cong shu. MEMS yu wei xi tong xi lie
Publisher: Guo fang gong ye chu ban she
Published: 2012
Place of publication: Beijing Shi
Language: chi
Number of pages: 259
ISBN-13: 9787118078978
Subjects: Nanotechnology; Microelectronics; Measurement
Other titles: Micro-Nanometer Devices Measuring Technology
Notes: Includes bibliographical references.

Abstract and table of contents also in English.