Multilayer Integrated Film Bulk Acoustic Resonators
By: by Yafei Zhang, Da Chen
Contributors: Chen, Da; SpringerLink (Online service)
Publisher: Springer Berlin Heidelberg; Imprint: Springer
Published: 2013
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
ISBN-13: 9783642317767
Subjects: Thin Films Surfaces and Interfaces; Engineering; Nanotechnology and Microengineering; Surfaces (Physics); Solid state physics