Ion beam assisted film growth
By: edited by Tadatsugu Itoh.
Contributors: Itoh, Tadatsugu.
Series: Beam modification of materials ;; 3
Publisher: Elsevier
Published: 1989
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 439
Subjects: Thin films, Multilayered.; Ion bombardment.; Sputtering (Physics); Semiconductor films.
Notes: Includes bibliographies and indexes.