Dielectric films for advanced microelectronics
By: edited by Mikhail Baklanov, Martin Green, and Karen Maex.
Contributors: Baklanov, Mikhail.; Green, Martin.; Maex, Karen.
Series: Wiley series in materials for electronic and optoelectronic applications
Publisher: John Wiley & Sons
Published: 2007
Place of publication: Chichester, England; Hoboken, NJ
Language: eng
Number of pages: 486
ISBN-13: 9780470013601
Subjects: Dielectric films.; Microelectronics -- Materials.
Notes: Includes bibliographical references and index.
Table of contents: title: A. Grill; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.]; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.]; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.]; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.] -- Yakov Roizin, Vladimir Gritsenko; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.] -- Yakov Roizin, Vladimir Gritsenko -- Akira Toriumi, Koji Kita; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.] -- Yakov Roizin, Vladimir Gritsenko -- Akira Toriumi, Koji Kita -- T. Conard, H. Bender, W. Vandervorst; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.] -- Yakov Roizin, Vladimir Gritsenko -- Akira Toriumi, Koji Kita -- T. Conard, H. Bender, W. Vandervorst -- Robin Degraeve ... [et al.]; title: A. Grill -- Geraud Dubois, Robert D. Miller, Willi Volksen -- David W. Gidley, Hua-Gen Peng, Richard Vallery -- Christopher L. Soles ... [et al.] -- Mikhail R. Baklanov -- J. L. Plawsky ... [et al.] -- R. J. O. M. Hoofman ... [et al.] -- Yakov Roizin, Vladimir Gritsenko -- Akira Toriumi, Koji Kita -- T. Conard, H. Bender, W. Vandervorst -- Robin Degraeve ... [et al.] -- Yasuo Nara; title: A. Grill-- Geraud Dubois, Robert D. Miller, Willi Volksen-- David W. Gidley, Hua-Gen Peng, Richard Vallery-- Christopher L. Soles ... [et al.]-- Mikhail R. Baklanov-- J. L. Plawsky ... [et al.]-- R. J. O. M. Hoofman ... [et al.]-- Yakov Roizin, Vladimir Gritsenko-- Akira Toriumi, Koji Kita-- T. Conard, H. Bender, W. Vandervorst-- Robin Degraeve ... [et al.]-- Yasuo Nara-- Yi Li, C. P. Wong.