Nano- and microelectromechanical systems
Subtitle: fundamentals of nano- and microengineering
By: Sergey Edward Lyshevski
Series: Nano- and microscience, engineering, technology, and medicine series
Publisher: CRC Press
Published: 2001
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 338
Subjects: Microelectromechanical systems
Description: "Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
Notes: Includes bibliographical references and index