Microelectronics manufacturability, yield, and reliability
Subtitle: 20-21 October 1994, Austin, Texas
By: Barbara Vasquez, Hisao Kawasaki, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Vasquez, Barbara.; Kawasaki, Hisao.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2334; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2334.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 348
Subjects: Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Reliability -- Congresses.
Notes: Includes bibliographical references and index.