Ionized-cluster beam deposition and epitaxy
By: by Toshinori Takagi.
Publisher: Noyes Publications
Published: 1988
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 231
Subjects: Thin film devices -- Design and construction.; Epitaxy.
Notes: Bibliography: p. 218-228.
Includes index.