Proceedings of the Seventh Symposium on Automated Integrated Circuits Manufacturing
By: edited by Vaughn E. Akins, Hiroyuki Harada.
Contributors: Akins, Vaughn E.; Harada, Hiroyuki.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings / the Electrochemical Society ;; v. 92-8; Proceedings (Electrochemical Society) ;; v. 92-8.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 283
Subjects: Integrated circuits -- Design and construction -- Data processing -- Congresses.; Electronic industries -- Automation -- congresses.; Semiconductors -- Design and construction -- Data processing -- Congresses.
Other titles: Automated integrated circuits manufacturing.
Notes: Includes bibliographical references and indexes.
"Electronics and Dielectric Science and Technology divisions."