Proceedings of the Symposium on Microstructures and Microfabricated Systems IV
By: editors Peter J. Hesketh, Henry Hughes, Wayne E. Bailey.
Contributors: Hughes, Henry G.; Hesketh, P. J.; Bailey, Wayne E.; Electrochemical Society. Meeting.
Series: Proceedings ;; 98-14; Proceedings (Electrochemical Society) ;; 98-14.
Publisher: Electrochemical Society
Published: 1998
Place of publication: Pennington, NJ
Language: eng
Number of pages: 270
Subjects: Microelectronics -- Congresses.; Microstructure -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Other titles: Microstructures and fabricated systems IV; Microstructures and fabricated systems 4
Notes: Includes bibliographical references and index.
Symposium held during the 194th  Meeting of the Electrochemical Society, November 1-16th, 1998, Boston, Massachusetts.