Micro-Nano-Integration ; 7th GMM-Workshop
Subtitle: 22-23 Oct. 2018
Contributors: Verband der Elektrotechnik, Elektronik, Informationstechnik; VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik; Institute of Electrical and Electronics Engineers
Publisher: [VDE Verlag]
Published: 2018
Place of publication: Berlin, Germany
Language: eng
ISBN-13: 9781523126729; 9783800747894
Subjects: Nanostructures; Congresses; Microelectronics; Congrès; Microélectronique
Other titles: 7th GMM-Workshop Micro-Nano-Integration; Mikro-Nano-Integration 2018
Notes: Conference venue information taken from conference website.

Conference location: Dortmund, Germany.

Includes bibliographical references.
Table of contents: title: Posterblock 1.; title: 01. Penetrating Nanoelectrodes for an Electrical Cell Interface on CMOS ASIC --; title: 02. Fluorescent E-beam and Photolithographic Resists for Upconversion --; title: 03. Adding CNT-based Functionality to MEMS: A Technology Demonstration for Strain and IR Sensors on Wafer Scale --; title: 04. Rapid Micro-Nano-Integration of Single Silicon Nanowiresin 2D-Sensors Arrays using Automated Software Tools --; title: 05. New Concept for Post-CMOS Pellistor Integration --; title: 06. Analysis and Similation of Super-Hydrophobic Layers of Microfluidic Applications --; title: 07 Electrochemical Deposition of Reactive Material Systems for Assembly and Packaging Applications --; title: 08. Combining Nanoimprint Lithography, Electroplating and Microstructuring Techniques to Fabricate 3D Nanostructured Multielectrode Arrays for Biological Applications -- Posterblock 2.; title: 09. Low Power Miniaturized Tunnel Magnetoresistive (TMR) Sensors for Industry 4.0 Applications --; title: 10. Mesoscopic Optics --; title: 11. Combining Top-down Bottom-up Lithographic and Galvanic Manufacturing Techniques for the Generation of Dynamic and Reversible Surfaces --; title: 12. Y2O3 Sol-Gel Passivation Layer for Solution-Processed Metal-Oxide Thin Film Transistors --; title: 13. Thin Film ALD Materials as Functional Layer for 3D-Integrated Metal Oxide Gas-Sensors --; title: 14. Fabrication of Polymeric Micro-Optical Components with Integrated Nano-Topography for Advanced Photonic Applications --; title: 15. Performance Analysis of CuO Nanoparticle-Based Thin-Film Transistors --; title: 16. Effective Conversion Processes of Metal-Oxide Precursors for the Reduction of the Conversion Temperature in Solution Processed Metal-Oxide Thin-Film Transistors --; title: 17. Influence of the Electrode Material on the Performance of BTBT-Based Thin-Film Transistors --; title: 18. Applications of Ion-Track Etched Polymer Membranes in Micro-Nano-Integration.