Gate Dielectric Integrity
Subtitle: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp) (Astm Special Technical Publication// Stp)
Contributors: Dinesh C. Gupta (Editor); George Albert Brown (Editor)
Publisher: ASTM International
Published: March 1, 2000
Language: eng
Format: Paperback
Number of pages: 176
ISBN-13: 9780803126152
Subjects: Industrial Chemistry & Manufacturing Technologies; Mechanical Engineering & Materials; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; General; Gate array circuits; Integrated circuits; Materials; Reliability; Semiconductor wafers; Wafer-scale integration
Description: xi, 169 p. : 23 cm