VLSI metallization
Subtitle: physics and technologies
By: Krishna Shenai, editor.
Contributors: Shenai, Krishna.
Series: The Artech House materials science library
Publisher: Artech House
Published: 1991
Place of publication: Boston
Language: eng
Number of pages: 529
Subjects: Electric contacts.; Semiconductor-metal boundaries.; Metallizing.
Notes: Includes bibliographical references and indexes.