ULSI process integration II
Subtitle: proceedings of the international symposium
By: editors,  C.L. Claeys ... [et al.].
Contributors: Claeys, Cor L.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings -- v. 2001-2; Proceedings (Electrochemical Society) -- v. 2001-2.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 614
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses
Genres: Congresses.
Notes: "Contains papers that were presented at the second international symposium on ULSI Process Integration held in Washington, D.C. on March 24-31, 2001 as part of the 199th Meeting of the Electochemical Society."--pref.

"Electronics Division."

Previous conference entered under title.

Includes bibliographical references and indexes.