Modelirovanie tekhnologicheskikh prot͡s︡essov mikroėlektroniki
By: otvetstvennyĭ redaktor T.M. Makhviladze.
Contributors: Makhviladze, T. M.
Series: Trudy FTIAN,; t. 3
Publisher: "Nauka"
Published: 1992
Place of publication: Moskva
Language: rus
Number of pages: 117
Subjects: Integrated circuits -- Mathematical models.; Integrated circuits -- Design and construction -- Simulation methods.
Notes: Includes bibliographical references.
Abstract and table of contents also in English.
"Nauchnoe izdanie"--Colophon.