MEMS/NEMS technology and applications
Subtitle: 2008 International Conference on Optical Instruments and Technology  : 16-19 November 2008, Beijing, China
By: Zhaoying Zhou ... [et al.], editors ; sponsored by CIS-China Instrument and Control Society, SPIE
Contributors: Zhou, Zhaoying; SPIE (Society)
Series: Proceedings of SPIE -- 7159; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7159.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819474032
Other titles: 2008 International Conference on Optical Instruments and Technology
Notes: Includes bibliographical references and index.