Semiconductor Industry
Subtitle: Wafer Fab Exhaust Management
Publisher: CRC
Published: June 23, 2005
Language: eng
Format: Hardcover
Number of pages: 216
ISBN-13: 9781574447200
Subjects: Environmental Science; Mathematics and Science; Occupational / industrial health & safety; Science/Mathematics; Environmental aspects; Science; Technology & Industrial Arts; Volatile organic compounds; Semiconductor industry; Electronics - Semiconductors; Business & Economics / Facility Management; Industrial Health & Safety; Design and construction; Semiconductor wafers