Reduced thermal processing for ULSI
By: edited by Roland A. Levy.
Contributors: Levy, Roland A. 1944-; North Atlantic Treaty Organization. Scientific Affairs Division.; NATO Advanced Study Institute on Reduced Thermal Processing for ULSI (1988 : Boca Raton, Fla.)
Series: NATO ASI series. Series B, Physics ;; vol. 207; NATO ASI series.; v. 207.
Publisher: Plenum Press
Published: 1989
Place of publication: New York
Language: eng
Number of pages: 438
Subjects: Integrated circuits -- Ultra large scale integration -- Heat treatment -- Congresses.
Notes: Includes bibliographical references.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso.