EMC 2004
Subtitle: 20th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components ; lectures held at the GMM conference, January 12-14, 2004 in Dresden, Germany
By: conference chairperson, Uwe Behringer ; organizer, VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM) ; in-cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe) ... [et al.].
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.
Series: GMM-Fachbericht -- 43
Publisher: VDE-Verlag
Published: 2004
Place of publication: Berlin
Language: eng
Number of pages: 254
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references.