Electron beam interactions with solids for microscopy, microanalysis & microlithography
Subtitle: proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
By: edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey.
Contributors: Kyser, David F.
Publisher: Scanning Electron Microscopy, Inc.
Published: 1984
Place of publication: AMF O'Hare [Chicago], IL
Language: eng
Number of pages: 372
Subjects: Solids -- Effect of radiation on -- Congresses; Electron beams -- Congresses; Electrons -- Backscattering -- Congresses; Backscattering -- Congresses; Microlithography -- Congresses; Electron energy loss spectroscopy -- Congresses
Genres: Congresses.
Notes: Includes bibliographies and indexes.