Rapid thermal processing of electronic materials
Subtitle: symposium held April 21-23, 1987, Anaheim California, U.S.A.
By: editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.
Contributors: Wilson, Syd R.; Powell, Ronald A.; Davies, D. Eirug.
Series: Materials Research Society Symposia proceedings ;; v. 92
Publisher: Materials Research Society
Published: 1987
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 485
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.; Rapid thermal processing -- Congresses.
Notes: Includes bibliographies and indexes.