Semiconductor measurement technology.
Contributors: United States. National Bureau of Standards.
Edition: Rev. Mar. 1982.
Series: NBS list of publications -- 72.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards
Published: 1982
Place of publication: Washington, D.C
Language: eng
Number of pages: 55
Subjects: Semiconductors -- Thermal properties.; Semiconductors -- Measurement.
Notes: Cover title.

Includes bibliographical references.