IEEE Micro Electro Mechanical Systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and robots, Salt Lake City, Utah, February 20-22, 1989 ; proceedings
By: sponsored by the IEEE Robotics and Automation Council.
Contributors: Institute of Electrical and Electronics Engineers.
Publisher: Institute of Electrical Electronics Engineers
Published: 1989
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 156
Subjects: Mechanical engineering -- Congresses.
Genres: Congresses.
Notes: IEEE Cat. No. 89TH0249-3.

Includes index and bibliographical references.