Soft X-ray and EUV imaging systems
Subtitle: 3-4 August 2000, San Diego, USA
By: Winfried M. Kaiser, Richard H. Stulen, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Kaiser, Winfried M.; Stulen, R. H.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4146; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4146.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 178
Subjects: Grenz rays -- Congresses.; Ultraviolet radiation -- Industrial applications -- Congresses.; X-rays -- Industrial applications -- Congresses.; X-ray optics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.