Micromechanical Sensors Actuators and Systems
Subtitle: Presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 (Dsc (Series), Vol. 32.)
Contributors: D. Cho (Editor); American Society of Mechanical Engineers Dynamic Systems and Control Division (Corporate Author)
Publisher: Amer Society of Mechanical
Published: August 1991
Language: eng
Format: Paperback
Number of pages: 362
ISBN-13: 9780791808634
Subjects: Science/Mathematics; Microelectronics; Microelectromechanical systems; Actuators; Congresses; Detectors