Handbook of physical vapor deposition (PVD) processing
Subtitle: film formation, adhesion, surface preparation and contamination control
By: by Donald M. Mattox.
Publisher: Noyes Publications
Published: 1998
Place of publication: Westwood, N.J
Language: eng
Number of pages: 917
Subjects: Physical vapor deposition -- Handbooks, manuals, etc.
Genres: Handbooks, manuals, etc.
Description: This book covers all aspects of Physical Vapor Deposition (PVD) process technology, from the characterization and preparation of the substrate material to post deposition processing. It emphasizes the aspects of the process flow critical to economical deposition of films that can meet the required performance specifications.
Notes: Includes bibliographical references and index.