Nanoscaled semiconductor-on-insulator materials, sensors and devices
Subtitle: selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine
By: edited by Alexei N. Nazarov and Jean-Pierre Raskin
Contributors: Nazarov, A. N. (Alexei N.); Raskin, J.-P. (Jean-Pierre), 1971-
Series: Advanced materials research -- v. 276
Publisher: Trans Tech Publications; Distributed in the Americas by Trans Tech Publications
Published: 2011
Place of publication: Durnten-Zurich, Switzerland; Enfield, NH
Language: eng
Number of pages: 206
ISBN-13: 9783037851784
Subjects: Nanoelectromechanical systems; Congresses; Semiconductors; Silicon-on-insulator technology; Nanotechnology
Notes: Includes bibliographical references and index.