Thin film materials, processes and reliability
By: editor G.S. Mathad.
Contributors: Mathad, G. S.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 216
Subjects: Thin film devices -- Design and construction -- Congresses; Thin films -- Congresses
Notes: Includes bibliographical references.