MEMS
Subtitle: design and fabrication
By: edited by Mohamed Gad-el-Hak.
Contributors: Gad-el-Hak, Mohamed, 1945-
Series: Mechanical engineering series; Mechanical engineering series (Boca Raton, Fla.)
Publisher: CRC/Taylor & Francis Group
Published: 2005
Place of publication: Boca Raton, FL
Language: eng
Subjects: Microelectromechanical systems -- Design and construction; Microfabrication
Notes: Includes bibliographical references and index.