OSA proceedings on soft-x-ray projection lithography
Subtitle: proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California
By: edited by Jeffrey Bokor ; sponsored by Optical Society of America ; supported by Air Force Office of Scientific Research.
Contributors: Bokor, Jeffrey.; Optical Society of America.; United States. Air Force. Office of Scientific Research.; Topical Meeting on Soft-X-Ray Projection Lithography (1991 : Monterey, Calif.)
Series: OSA proceedings -- vol. 12; OSA proceeding series -- v. 12.
Publisher: Optical Society of America
Published: 1991
Place of publication: Washington, D.C
Language: eng
Number of pages: 152
Subjects: X-ray lithography -- Congresses.
Other titles: Soft-X-Ray Projection Lithography.
Notes: Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography.

Includes bibliographical references.