Materials and processes for submicron technologies
Subtitle: proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 1998
By: edited by J.M. Martinez-Duart, R. Madar, R.A. Levy.
Contributors: Martinez-Duart, J. M.; Madar, R.; Levy, Roland A. 1944-; European Materials Research Society. Meeting
Series: European Materials Research Society symposia proceedings ;; v. 89
Publisher: Elsevier
Published: 1999
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 1175
Subjects: Microstructure -- Congresses.; Semiconductors -- Congresses.; Electron transport -- Congresses.
Genres: Congresses.
Other titles: Solid state electronics.
Notes: Includes bibliographical references.
Repr. from Solid state electronics, v.43/6.