Prozesstechnologie
Subtitle: Fertigungsverfahren für integrierte MOS-Schaltungen
By: G. Schumicki, P. Seegebrecht ; unter Mitarbeit von N. Bündgens ... [et al.].
Contributors: Seegebrecht, P.
Series: Mikroelektronik
Publisher: Springer-Verlag
Published: 1991
Place of publication: Berlin; New York
Language: ger
Number of pages: 497
Subjects: Metal oxide semiconductors -- Design and construction.
Notes: Includes bibliographical references (p. [469]-488).
Includes index.