Microprocesses and nanotechnology 2001
Subtitle: 2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers
By: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
Contributors: Ōyō Butsuri Gakkai.; IEEE Electron Devices Society.; American Vacuum Society.
Publisher: Business Center for Academic Societies Japan
Published: 2001
Place of publication: Tokyo
Language: eng
Number of pages: 318
Subjects: Microelectromechanical systems -- Design and construction -- Congresses.; Nanotechnology -- Congresses.; Microtechnology -- Congresses.; Microfabrication -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
"JSAP cat. no. AP011235; IEEE catalog no. 01EX468"--T.p. verso.