RTP 2001
Subtitle: 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska
By: D.P. DeWitt ... [et al.], editors.
Contributors: DeWitt, David P., 1934-; Institute of Electrical and Electronics Engineers.
Publisher: IEEE]; RTP Conference
Published: 2001
Place of publication: [Piscataway, New Jersey
Language: eng
Number of pages: 326
Subjects: Semiconductors -- Heat treatment. -- Congresses.; Rapid thermal processing -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Defects. -- Congresses.
Genres: Congresses.
Other titles: Advanced thermal processing of semiconductors
Notes: Includes bibliographical references.
"IEEE Catalog Number: 01EX513"--T.p. verso.