IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: theme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts.
Contributors: Institute of Electrial and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: Institute of Electrical and Electronics Engineers; IEEE Service Center [distributor]
Published: 1995
Place of publication: New York; Piscataway, NJ
Language: eng
Number of pages: 391
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Other titles: 1995 Advanced Semiconductor Manufacturing Conference and Workshop; Semiconductor manufacturing, economic solutions for the 21st century
Notes: Includes bibliographical references.
PRIORITY 2.
"IEEE catalog number 95CH35811"--T.p. verso.