CMOS Cantilever Sensor Systems
Subtitle: Atomic Force Microscopy and Gas Sensing Applications
By: by D. Lange, O. Brand, H. Baltes
Contributors: Brand, O.; Baltes, H.
Series: Microtechnology and Mems; Microtechnology and Mems
Publisher: Springer Berlin Heidelberg
Published: 2002
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
Number of pages: 143
ISBN-13: 9783642077289; 9783662050606
Subjects: Engineering; Nanotechnology
Description: This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
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Table of contents: title: From the contents: Introduction; title: Design Considerations; title: Cantilever Beam Resonators; title: Resonant Gas Sensors; title: Force Sensors for Parallel Scanning Atomic Force Microscopy; title: Conclusions and Outlook.