Micromachined devices and components IV
Subtitle: 21-22 September, 1998, Santa Clara, California
By: Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: French, Patrick J.; Chau, Kevin.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ; v. 3514; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3514.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 440
Subjects: Electromechanical devices -- Congresses.; Micromechanics -- Congresses.; Micromachining -- Congresses.
Other titles: Micromachined devices and components 4; Micromachined devices and components four
Notes: Includes bibliographical references and author index.