Microelectromechanical systems--materials and devices II
Subtitle: symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.
By: editors, Srikar Vengallatore ... [et al.].
Contributors: Vengallatore, Srikar; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings -- v. 1139; Materials Research Society symposia proceedings -- v. 1139.
Publisher: Materials Research Society
Published: 2009
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 247
ISBN-13: 9781605111117
Notes: "This proceedings volume reports on research presented at [...] Symposium GG, 'Microelectromechanical Systems--Materials and Devices II,' which was held December 1-2 at the 2008 MRS Fall Meeting in Boston, Massachusetts"--Preface, p. xi.

Includes bibliographical references and indexes.