Rapid Thermal Processing (European Materials Research Society Symposia Proceedings)
Contributors: A. Slaoui (Editor); R.K. Singh (Editor); T. Theiler (Editor); J.C. Muller (Editor)
Publisher: Elsevier Science
Published: March 1, 1999
Language: eng
Format: Hardcover
Number of pages: 356
ISBN-13: 9780080436128
Subjects: Materials science; Other manufacturing technologies; Semi-conductors & super-conductors; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - General; Material Science; Technology / Material Science; Congresses; Design and construction; Integrated circuits; Rapid thermal processing; Semiconductor doping; Ultra large scale integration