Poluprovodnikovye struktury i sistemy kontroli͡a︡ tekhnologicheskikh prot͡s︡essov
Subtitle: voprosy ėlektroniki : mezhvuzovskiĭ sbornik
By: [redakt͡s︡ionnai͡a︡ kollegii͡a︡ I.F. Klistorin (otvetstvennyĭ redaktor) ... et al.].
Contributors: Klistorin, I. F.; Institutul Politekhnik "Sergeĭ Lazo."
Publisher: "Shtiint͡s︡a"
Published: 1982
Place of publication: Kishinev
Language: rus
Number of pages: 141
Subjects: Process control.; Semiconductors.
Notes: Includes bibliographies.
At head of title: Ministerstvo vysshego i srednego spet͡s︡ialʹnogo obrazovanii͡a︡ Moldavskoĭ SSR. Kishinevskiĭ politekhnicheskiĭ institut im. S. Lazo.