Laser-assisted plasma etching
By: William M. Holber
Published: 1987
Language: eng
Number of pages: 152
Subjects: Plasma etching; Lasers in plasma research
Notes: Typescript (photocopy).

"87-10,190."

Thesis (Ph. D.)--Columbia University, 1987.

Includes bibliographical references.

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1987. 1 microfilm reel. 35 mm.