Scientific wet process technology for innovative LSI/FPD manufacturing
By: editor, Tadahiro Ohmi.
Contributors: Ohmi, Tadahiro, 1939-
Publisher: Taylor & Francis
Published: 2006
Place of publication: Boca Raton
Language: eng
Subjects: Semiconductors -- Design and construction.; Semiconductors -- Cleaning.; Integrated circuits -- Design and construction.
Notes: Includes bibliographical references and index.