Correlation of EBIC and SWBXT imaged defects and epilayer growth pits in 6H-SiC Schottky diodes
By: C.M. Schnabel ... [et al.].
Contributors: Schnabel, C. M.; NASA Glenn Research Center.
Series: [NASA technical memorandum] -- NASA/TM-2000-209648.; NASA technical memorandum -- 209648.
Publisher: National Aeronautics and Space Administration, Glenn Research Center; National Technical Information Service, distributor
Published: 2000
Place of publication: [Cleveland, Ohio]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Correlation.; Synchrotrons.; Topography.; Beam currents.; Electron beams.; Schottky diodes.; Crystal defects.
Notes: Shipping list no.: 2000-0603-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 2000] 1 microfiche.