Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption
By: Aslan Baghdadi, Robert I. Scace, and E. Jane Walters, editors.
Contributors: Baghdadi, A.; Scace, Robert I.; Walters, E. Jane.; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication ;; 400-82
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1989
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 168
Subjects: Silicon -- Measurement -- Databases.; Silicon -- Measurement -- Statistical methods.; Oxygen -- Measurement -- Databases.; Oxygen -- Measurement -- Statistical methods.; Infrared spectroscopy -- Databases.; Infrared spectroscopy -- Statistical methods.
Notes: Includes bibliographical references.
"July 1989."