Instrumentation, metrology, and standards for nanomanufacturing
Subtitle: 29-30 August 2007, San Diego, California, USA
By: Michael T. Postek, John A. Allgair, editors.
Contributors: Postek, Michael T.; Allgair, John.; SPIE (Society).
Series: Proceedings of SPIE -- v. 6648; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6648.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819467966
Subjects: Nanostructured materials -- Congresses; Microfabrication -- Congresses; Nanotechnology -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.