Handbook of thin film process technology
By: editors, David A. Glocker, S. Ismat Shah.
Contributors: Glocker, David A.; Shah, S. Ismat.; Westwood, William D. 1937-
Publisher: Institute of Physics Pub.
Published: 1995
Place of publication: Bristol, UK; Philadelphia
Language: eng
Subjects: Thin films -- Handbooks, manuals, etc; Surfaces (Technology) -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc.
Other titles: Thin film process technology; Reactive sputtering.
Notes: Includes bibliographical references and indexes.
Accompanied by : 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 18 p. (looseleaf in envelope) : ill. ; 30 cm.
Accompanied by : 98/2 Recipes for optical materials /editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) (looseleaf in envelope) : ill. ; 31 cm.