MEMS and NEMS
Subtitle:  Systems, Devices, and Structures
Publisher: CRC
Published: January 18, 2002
Language: eng
Format: Hardcover
Number of pages: 480
ISBN-13: 9780849312625
Subjects: Electronics & Communications Engineering; Science/Mathematics; Mechanical Engineering (Specific Aspects); Microelectronics; Technology; Technology & Industrial Arts; Electronics - Microelectronics; Engineering - Electrical & Electronic; Engineering - Mechanical; Technology / Nanotechnology; Microelectromechanical systems
First sentence: Nano- and microelectromechanics, optoelectronics, as well as nano- and microfabrication have accomplished phenomenal growth over the past few years due to rapid advances in theoretical developments, experimental results (using state-of-the-art measurement and instrumentation hardware), high-performance computer-aided design software and computationally efficient environments.