Micromachines as Tools for Nanotechnology (Microtechnology and MEMS)
Edition: 1 edition
Publisher: Springer
Published: August 13, 2003
Language: eng
Format: Hardcover
Number of pages: 212
ISBN-13: 9783540008569
Subjects: Computers; Technology & Industrial Arts; Science/Mathematics; Industrial Engineering; Physics; Medical / Biotechnology; Technology / Nanotechnology; General; Microelectromechanical systems; Nanotechnology