Special issue on contributions from the 1992 Advanced Semiconductor Manufacturing Conference and Workshop and the 1992 International Semiconductor Manufacturing Science Symposium
By: guest editor Gary C. Cheek.
Contributors: Cheek, Gary C.; International Semiconductor Manufacturing Sciences Symposium (1992)
Series: IEEE transactions on semiconductor manufacturing -- vol.6 (2)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1993
Place of publication: New York
Language: eng