IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC '91 proceedings : October 21-23, 1991, Boston Massachusetts.
Contributors: Fuller, Lynn F.; Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials Institute.
Publisher: The Institute of Electrical and Electronics Engineers
Published: 1991
Place of publication: New York, N.Y
Language: eng
Number of pages: 212
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor industry -- Congresses.; Computer integrated manufacturing systems -- Congresses.
Other titles: 1991 IEEE/SEMI Advanced Manufacturing Conference & Workshop.; ASMC '91.
Notes: "IEEE Catalog Number 91CH3042-9."

On cover and spine: 1991 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop.

"The conference is sponsored by SEMI and the IEEE..."--p. iii.

Conference chairman: Lynn Fuller.

Includes bibliographical references.