VLSI science and technology/1984
Subtitle: materials for high speed/high density applications : proceedings of the Second International Symposium on Very Large Scale Integration Science and Technology
By: edited by Kenneth E. Bean, George A. Rozgonyi ; assistant editors, F. Allen ... [et al.] ; [sponsored by] Electronics and Dielectrics and Insulation Divisions.
Contributors: Bean, Kenneth E.; Rozgonyi, George A.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / the Electrochemical Society ;; v. 84-7; Proceedings (Electrochemical Society) ;; v. 84-7.
Publisher: Electrochemical Society
Published: 1984
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 512
Subjects: Integrated circuits -- Very large scale integration.
Other titles: V.L.S.I. science and technology/1984.
Notes: Includes bibliographies and indexes.