Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing
Subtitle: Symposium Held April 27-29, 1992, San Francisco, Cal (Materials Research Society Symposium Proceedings)
Contributors: Masataka Hirose (Contributor)
Publisher: Materials Research Society
Published: September 1992
Language: eng
Format: Hardcover
Number of pages: 529
ISBN-13: 9781558991545
Subjects: Surface preparation; Congresses; Crystal growth; Semiconductors; Science/Mathematics