Design, test, integration and packaging of MEMS/MOEMS 2001
Subtitle: 25-27 April 2001, Cannes, France
By: Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.].
Contributors: Courtois, B.; Centre national de la recherche scientifique (France)
Series: SPIE proceedings series ;; v. 4408; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4408.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 558
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.; Micromachining -- Congresses.; Microelectronic packaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.