Chemistry and lithography
By: Uzodinma Okoroanyanwu
Contributors: Society of Photo-optical Instrumentation Engineers
Series: Press monograph -- 192
Publisher: SPIE Press; SPIE--The International Society for Optical Engineering
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 861
ISBN-13: 9780819475626
Subjects: Technical Chemistry; Lithography
Notes: Includes bibliographical references and index.