Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Subtitle: 13-14 August 2012, San Diego, California, United States
By: Michael T. Postek, Victoria A. Coleman, Ndubuisi G. Orji, editors ; sponsored and published by SPIE
Contributors: Postek, Michael T., editor; Coleman, Victoria Anne, 1981- editor; Orji, Ndubuisi George, editor; SPIE (Society)
Series: Proceedings of SPIE -- volume 8466; SPIE optics + photonics
Publisher: SPIE
Published: 2012
Place of publication: Bellingham, Washington, USA
Language: eng
ISBN-13: 9780819491831
Subjects: Nanostructured materials; Microfabrication; Congresses; Nanotechnology
Other titles: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors 6; Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors sixth
Notes: "SPIE optics + photonics" --cover.

Includes bibliographical references and index.