Laser Microfabrication
Subtitle: Thin Film Processes and Lithography
Contributors: Daniel J. Ehrlich (Editor); Jeffrey Y. Tsao (Editor)
Publisher: Academic Press
Published: May 28, 1989
Language: eng
Format: Hardcover
Number of pages: 587
ISBN-13: 9780122334306
Subjects: Laser technology; Printing & reprographic technology; Microlithography; Lasers; Technology & Industrial Arts; Science/Mathematics; Thin film devices; Chemistry - Clinical; Industrial Technology; Science / Chemistry / Clinical; Design and construction; Industrial applications