Digest of papers, XEL '1997
Subtitle: 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography, July 13-15, 1997, Pacifico Yokohama, Yokohama.
Contributors: Nihon Gakujutsu Shinkōkai.
Publisher: Japan Society for the Promotion of Sciences?
Published: 1997
Place of publication: [Tokyo
Language: eng
Subjects: Lithography, Electron beam -- Congresses.; Ultraviolet radiation -- Industrial applications -- Congresses.; X-ray lithography -- Congresses.
Genres: Congresses.
Other titles: 1997 International Workshop on X-ray and Extreme Ultraviolet Lithography
Notes: Digest of papers to be presented at the conference.

Cover title.

"Sponsored by, Japan Society for the Promotion of Science, number 145 Committee, Japan Technology Transfer Association ; organized by XEL'97 Organizing Committee ..."

Includes bibliographical references.