Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
By: edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
Contributors: Garfunkel, Eric L.; Dideikin, Arthur; SpringerLink (Online service)
Series: NATO Science for Peace and Security Series B: Physics and Biophysics
Publisher: Springer Science+Business Media B.V.
Published: 2010
Place of publication: Dordrecht
Language: eng
Format: [electronic resource] /
ISBN-13: 9789048138050; 9789048138074
Subjects: Mechanics; Engineering; Mechanical engineering; Microreactors; Chemistry; Microwaves