Micro- and nano-electronics 2003
Subtitle: 6-10 October 2003, Zvenigorod, Russia
By: Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.].
Contributors: Valiev, Kamilʹ Akhmetovich.; Orlikovskiĭ, A. A.; Society of Photo-optical Instrumentation Engineers.; Society of Photo-optical Instrumentation Engineers. Russian Chapter.; Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a︡ akademii͡a︡ nauk); Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ.
Series: SPIE proceedings series,; v. 5401; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5401.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 762
Subjects: Microelectronics -- Congresses.; Nanotechnology -- Congresses.; Lithography -- Congresses.; Photonics -- Materials -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
"Selected papers ... ICMNE-2003"--P. xvii.