Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Subtitle: standard reference materials
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.; National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- 260-119; NIST special publication -- 260-119.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; Order from National Technical Information Service
Published: 1992
Place of publication: Gaithersburg, MD; [Springfield, VA
Language: eng
Format: Microform
Number of pages: 36
Subjects: Microscopes -- Calibration -- Standards.; Integrated circuits -- Masks -- Measurement.; Chromium -- Spectra -- Standards.
Other titles: Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.; Standard reference materials.
Notes: Includes bibliographical references (p. iv-ix).

Microfiche. [Washington, D.C.] : U.S. G.P.O., [1992]. 1 microfiche.