Tekhnologii mikroėlektroniki
Subtitle: khimicheskoe osazhdenie iz gazovoĭ fazy
By: V. Kireev, A. Stoli︠a︡rov
Contributors: Stoli︠a︡rov, A. (Aleksandr)
Series: Mir ėlektroniki
Publisher: Tekhnosfera
Published: 2006
Place of publication: Moskva
Language: rus
Number of pages: 190
Subjects: Microelectronics; Materials; Precipitation (Chemistry)
Notes: Includes bibliographical references.