Plazmennoe anodirovanie
Subtitle: fizika, tekhnika, primenenie v mikroėlektronike
By: V.P. Parkhutik, V.A. Labunov.
Contributors: Labunov, V. A.
Publisher: "Navuka i tėkhnika"
Published: 1990
Place of publication: Minsk
Language: rus
Number of pages: 279
Subjects: Microelectronics.; Plasma etching.
Notes: Includes bibliographical references (p. 252-[276]).
"Nauchnoe izdanie"--Colophon.