Plasma processing for VLSI
By: edited by Norman G. Einspruch, Dale M. Brown.
Contributors: Einspruch, Norman G.; Brown, Dale M.
Series: VLSI electronics ;; v. 8
Publisher: Academic Press
Published: 1984
Place of publication: New York
Language: eng
Number of pages: 527
Subjects: Integrated circuits -- Very large scale integration.; Plasma (Ionized gases) -- Industrial applications.
Notes: Includes bibliographies and index.