1997 2nd International Symposium on Plasma Process-Induced Damage, Pip
Subtitle: 13-14 May 1997, Monterey, California, USA
Contributors: American Vacuum Society (Corporate Author); Oyo Butsuri Gakkai (Corporate Author)
Publisher: Northern California Chapter of the American V
Published: January 1998
Language: eng
Format: Hardcover
Number of pages: 259
ISBN-13: 9780965157711
Subjects: Electronics - Semiconductors; Semiconductor wafers; Defects; Semiconductors; Technology & Industrial Arts; Science/Mathematics; Plasma etching; Effect of radiation on; Congresses