Silicon-on-insulator technology
Subtitle: materials to VLSI
By: by Jean-Pierre Colinge.
Edition: 3rd ed.
Publisher: Kluwer Academic Publishers
Published: 2004
Place of publication: Boston
Language: eng
Number of pages: 366
Subjects: Semiconductors; Silicon-on-insulator technology; Integrated circuits -- Very large scale integration -- Materials
Notes: Includes bibliographical references and index.