Sputtering threshold energies of heavy ions
By: Maris A. Mantenieks.
Contributors: NASA Glenn Research Center.
Series: NASA/TM -- 1999-209273.; NASA technical memorandum -- 209273.
Publisher: National Aeronautics and Space Administration, Glenn Research Center; National Technical Information Service, distributor
Published: 1999
Place of publication: [Cleveland, Ohio]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Heavy ions.; Threshold voltage.; Sputtering.; Electric potential.; Molybdenum.; Xenon.
Notes: Shipping list no.: 2000-0131-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1999] 1 microfiche.