Sputtering by Particle Bombardment III
Subtitle: Characteristics of Sputtered Particles, Technical Applications
Publisher: Springer; Behrisch R
Published: Sep 20, 2013
Format: paperback
Number of pages: 436
ISBN-13: 9783662311042
Notes: Source title: Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)