MicroProcess 89
Subtitle: proceedings of the 1989 International Symposium on MicroProcess Conference, July 2-5, 1989, Kobe, Japan
By: edited by S. Namba, T. Kitayama.
Contributors: Namba, Susumu, 1928-; Kitayama, T.
Series: JJAP series,; 3
Publisher: Publication Office, Japanese Journal of Applied Physics
Published: 1989
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 385
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.