Metallization
Subtitle: performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California
By: Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Gildenblat, Gennady Sh.; Schwartz, Gary P.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1596; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1596.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 159
Subjects: Integrated circuits -- Very large scale integration -- Reliability -- Congresses; Metallic films -- Congresses; Vapor-plating -- Congresses; Integrated circuits -- Very large scale integration -- Testing -- Congresses; Metallizing -- Congresses
Notes: Includes bibliographical references and index.