Rapid thermal annealing/chemical vapor deposition and integrated processing
Subtitle: symposium held April 25-28, 1989, San Diego, California, U.S.A.
By: editors, David Hodul ... [et al.].
Contributors: Hodul, David.
Series: Materials Research Society symposium proceedings ;; v. 146; Materials Research Society symposia proceedings ;; v. 146.
Publisher: Materials Research Society
Published: 1989
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 494
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.; Vapor plating -- Congresses.; Rapid thermal processing -- Congresses.
Notes: Includes bibliographical references.