Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)
Publisher: Springer
Published: March 3, 2005
Language: eng
Number of pages: 414
ISBN-13: 9780387233109
First sentence: To satisfy demands for detecting chemicals in the environment and for real time monitoring of chemical processes, ever more sophisticated sensors, often able to operate under harsh conditions, are required to detect a rapidly growing range of chemical species.