Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.
Series: Standard reference materials; NIST special publication ;; 260-114
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1991
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 33
Subjects: Microscopes -- Calibration -- Standards.; Integrated circuits -- Masks -- Measurement.; Chromium -- Spectra -- Standards.
Notes: Includes bibliographical references (p. 11-12).
"Issued January 1991."