Beam technologies for integrated processing
Subtitle: report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Publisher: National Academy Press
Published: 1992
Place of publication: Washington, D.C
Language: eng
Number of pages: 89
Subjects: Microelectronics industry.; Molecular beams -- Industrial applications.; Microelectronics -- Materials.; Plasma-enhanced chemical vapor deposition -- Industrial applications.
Description: xii, 89 p. : 28 cm
Notes: Includes bibliographical references.
"NMAB-461."