Semiconductor measurement technology
Subtitle: a bibliography of NBS publications for the years 1962-1986
By: edited by Jane Walters.
Contributors: Walters, Jane.; United States. National Bureau of Standards.
Series: NBSIR -- 87-3522.; NBSIR -- 3522.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; Order from National Technical Information Service]
Published: 1987
Place of publication: [Washington, D.C.]; [Springfield, VA
Language: eng
Number of pages: 118
Subjects: Semiconductors -- Measurement -- Bibliography.; Integrated circuits -- Bibliography.
Notes: Distributed to depository libraries in microfiche.

"February 1987."

Includes indexes.