Microcircuit Engineering 80
Subtitle: proceedings of the International Conference on Microlithography, September 30, October 1-2, 1980, Amsterdam, The Netherlands
By: edited by Roel P. Kramer ; organised by Delft University of Technology.
Contributors: Kramer, Roel P.; Technische Hogeschool Delft.
Publisher: The University
Published: 1981
Place of publication: Delft
Language: eng
Number of pages: 566
Subjects: Microelectronics -- Congresses; Lithography, Electron beam -- Congresses
Notes: Includes bibliographies and index.