Mikromechanik
Subtitle: Mikrofertigung mit Methoden der Halbleitertechnologie
By: Anton Heuberger (Hrsg.).
Contributors: Heuberger, A.
Publisher: Springer-Verlag
Published: 1989
Place of publication: Berlin; New York
Language: ger
Number of pages: 501
Subjects: Semiconductors -- Design and construction.; Micromechanics.
Notes: Includes bibliographical references.
Includes index.