Advanced short-time thermal processing for Si-based CMOS devices
Subtitle: proceedings of the international symposium
By: editors, Fred Roozeboom ... [et al.].
Contributors: Electrochemical Society. Electronics Division; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. High Temperature Materials Division; Electrochemical Society. Meeting
Series: Proceedings -- v. PV 2003-14; Proceedings (Electrochemical Society) -- v. PV 2003-14.
Publisher: Electrochemical Society
Published: 2003
Place of publication: Pennington, NJ
Language: eng
Number of pages: 480
Subjects: Semiconductors; Congresses; Heat treatment; Rapid thermal processing
Notes: "Electronics, Dielectric Science and Technology, and High Temperature Materials divisions."

Includes bibliographical references and indexes.