SiO2 and its interfaces
Subtitle: symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.
By: editors, S.T. Pantelides, G. Lucovsky.
Contributors: Pantelides, Sokrates T.; Lucovsky, G.
Series: Materials Research Society symposium proceedings,; v. 105; Materials Research Society symposia proceedings ;; v. 105.
Publisher: Materials Research Society
Published: 1988
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 329
Subjects: Microelectronics -- Materials -- Congresses.; Silicon -- Congresses.
Notes: Includes bibliographies and indexes.
On t.p. "2" is subscript.