Micromechanics and nanoscale effects
Subtitle: MEMS, multi-scale matrials [sic] and micro-flows
By: edited by Vasyl Michael Harik and Li-Shi Luo.
Contributors: Harik, Vasyl Michael.; Luo, Li-Shi.
Series: ICASE/LaRC interdisciplinary series in science and engineering -- v. 10.
Publisher: Kluwer Academic
Published: 2004
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 240
Subjects: Microelectronics; Microelectromechanical systems; Actuators
Notes: Includes bibliographical references and index.