Optical/laser microlithography II
Subtitle: 1-3 March 1989, San Jose, California
By: Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Lin, Burn Jeng, 1942-; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 1088
Publisher: SPIE--the International Society for Optical Engineering
Published: 1989
Place of publication: Bellingham, Wash., U.S.A
Language: eng
Number of pages: 572
Subjects: Microlithography -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references.