Microelectromechanical systems for aerodynamics applications
By: Mehran Mehregany, Russell G. DeAnna, Eli Reshotko.
Contributors: DeAnna, Russell G.; Reshotko, Eli.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 107320.; Army Research Laboratory technical report -- ARL-TR-1113.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1996
Place of publication: [Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Micromachining.; Microminiaturized electronic devices.; Integrated circuits.; Systems integration.; Multiplexing.; Low cost.; Technology utilization.; Actuators.
Notes: Shipping list no.: 98-0558-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.