Materials issues in novel Si-based technology
Subtitle: symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.
By: editors, William G. En ... [et al.].
Contributors: En, William G.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings ;; v. 686; Materials Research Society symposia proceedings ;; v. 686.
Publisher: Materials Research Society
Published: 2002
Place of publication: Warrendale, PA
Language: eng
Number of pages: 280
Subjects: Silicon -- Optical properties -- Congresses.; Semiconductors -- Materials -- Congresses.; Integrated circuits -- Materials -- Congresses.; Logic circuits -- Congresses.; Dielectrics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi.