Control technologies for emerging micro and nanoscale systems
By: Evangelos Eleftheriou and S.O. Reza Moheimani (eds.).
Series: Lecture notes in control and information sciences -- 413; Lecture notes in control and information sciences -- 413
Publisher: Springer Verlag
Published: 2011
Place of publication: Berlin
Language: eng
Number of pages: 287
ISBN-13: 9783642221729; 9783642221736
Subjects: Microelectromechanical systems; Automatic control; Microscopy