Optical microlithographic technology for integrated circuit fabrication and inspection
Subtitle: 2-3 April 1987, The Hague, The Netherlands
By: Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.].
Contributors: Stover, Harry L.; Wittekoek, Steven.; Association nationale de la recherche technique.
Series: Proceedings / SPIE ;; v. 811; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 811.
Publisher: SPIE-the International Society for Optical Engineering
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 211
Subjects: Integrated circuits -- Design and construction -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographies and index.