1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: theme--the quest for semiconductor manufacturing excellence: leading the charge into the 21st century, September 10-12, 1997, Cambridge, Massachusetts : ASMC 97 proceedings.
Contributors: Semiconductor Equipment and Materials International.; Institute of Electrical and Electronics Engineers.
Publisher: IEEE Service Center; SEMI
Published: 1997
Place of publication: Piscataway, NJ; Mountain View, CA
Language: eng
Number of pages: 460
Subjects: Semiconductors -- Design and construction -- Congresses; Process control -- Congresses; Production management -- Congresses
Genres: Congresses.
Other titles: 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; ASMC 97 proceedings.
Notes: "IEEE catalog number 97CH36089"--T.p. verso.

Includes bibliographical references.