Low cost silicon array project
Subtitle: experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process
Contributors: United States. Dept. of Energy
Series: DOE/JPL ; 954334-12; DRD ; no. SE-6
Publisher: Dept. of Energy; for sale by the National Technical Information Service]
Published: 1979
Place of publication: [Washington]; [Springfield, Va
Language: eng
Subjects: Silane; Pyrolysis; Semiconductors
Notes: "DRL no. 81."

Contract no. NAS-7-100-954334
Table of contents: value: Quarterly progress report, July - Sept. 1979; value: Quarterly progress report, April; value: June 1979