Chemical vapor deposition for microelectronics
Subtitle: principles, technology, and applications
By: by Arthur Sherman.
Series: Materials science and process technology series
Publisher: Noyes Publications
Published: 1987
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 215
Subjects: Vapor-plating.; Integrated circuits -- Design and construction.
Notes: Includes bibliographies and index.