Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
By: W. Murrary Bullis, S. Perkowitz, D.G. Seoler.
Contributors: Perkowitz, S.; Seiler, David G.
Series: Semiconductor measurement technology; NIST Special Publication ;
Publisher: U.S. Department of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1995
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Subjects: Semiconductors -- Characterization.; Optical measurements.; Compound semiconductors.
Notes: Includes bibliographical references.
"December 1995."