Silicon integrated circuits
By: edited by Dawon Kahng.
Contributors: Kahng, Dawon.
Series: Applied solid state science.; 2
Publisher: Academic Press
Published: 1981
Place of publication: New York
Language: eng
Subjects: Metal oxide semiconductors.; Semiconductors storage devices.; Integrated circuits.
Notes: Includes bibliographies and indexes.
Table of contents: title: pt. A. Physics of the MOS transistor / John R. Brews. Nonvolatile memories / Yoshio Nishi and Hisakazu Iizuka. The properties of silicon-on-sapphire substrates, devices, and integrated circuits / Alfred C. Ipri; title: pt. B. Physics and chemistry of impurity diffusion and oxidation of silicon / Richard B. Fair. Silicon power field controlled devices and integrated circuits / B. Jayant Baliga; title: pt. C. Transient thermal processing of silicon / G.K. Celler and T.E. Seidel. Reactive ion-beam etching and plasma deposition techniques using electron cyclotron resonance plasmas / Seitaro Matsua. Physics of VLSI processing and process simulation / W. Fichtner.