Ion implantation technology-94
Subtitle: proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994
By: editors, Salvatore Coffa ... [et al.].
Contributors: Coffa, S.
Publisher: North-Holland
Published: 1995
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 1012
Subjects: Semiconductors -- Congresses.; Ion implantation -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographical references and index.
"Part 1 (pp. 1-440) reprinted from: Nuclear instruments and methods in physics research, Section B: Beam interactions with materials and atoms, vol. B96, 1-2"--t.p. verso.