Werkstoffe der Mikrotechnik
Subtitle: Basis für neue Produkte : Tagung Berlin, 12. und 13. Oktober 1989.
Series: VDI Berichte,; 796; VDI-Berichte ;; 796.
Publisher: VDI Verlag
Published: 1989
Place of publication: Düsseldorf
Language: ger
Number of pages: 385
Subjects: Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographical references.