Ion implantation in semiconductors
By: proceedings of the 11. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects, [held] May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany ; edited by I. Ruge and J. Graul.
Contributors: Ruge, I.; Graul, J.
Publisher: Springer-Verlag
Published: 1971
Place of publication: Berlin [etc.]
Language: eng
Number of pages: 506