Atomic layer deposition of metal films
Subtitle: from precursor synthesis to film deposition
By: by Zhengwen Li
Published: 2007
Language: eng
Number of pages: 222
Subjects: Thin film devices; Design and construction; Metallic films; Surface chemistry
Notes: Thesis advisor: Professor Roy G. Gordon.

Thesis (Ph.D., Dept. of Chemistry and Chemical Biology)--Harvard University, 2007.

Includes bibliographical references.