Ion implantation technology--96
Subtitle: proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996
By: editors Emi Ishidida [sic] ... [et al.].
Contributors: Ishida, Emi.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1996
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 832
Subjects: Semiconductors -- Congresses.; Ion implantation -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographical references and index.
"96TH8182"--Cover.