Micro Mechanical Transducers
Contributors: S. Middelhoek (Editor)
Publisher: Elsevier Science
Published: September 1, 2000
Language: eng
Format: Hardcover
Number of pages: 392
ISBN-13: 9780444505583
Subjects: Electronic devices & materials; Mechanical engineering; Transducers; Microelectronics; Control Systems (Mechanical Engineering); Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Microelectronics; Technical & Manufacturing Trades; Technology / Electronics / Microelectronics; Engineering - Mechanical; Handbooks, manuals, etc; Microelectromechanical systems
First sentence: The effect of piezoresistance in germanium and silicon was discovered by C.S. Smith in 1954 [1].
Notes: Handbook of Sensors and Actuators