Materials, integration and technology for monolithic instruments
Subtitle: symposium held March 29-30, 2005, San Francisco, California, USA
By: editors: Jeremy A. Theil ... [et al.].
Contributors: Theil, Jeremy A.; Materials Research Society. Meeting; Symposium on Materials, Integration and Technology for Monolithic Instruments (2005 : San Francisco, Calif.)
Series: Materials Research Society symposium proceedings -- v. 869; Materials Research Society symposia proceedings -- v. 869
Publisher: Materials Research Society
Published: 2005
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 171
Subjects: Semiconductors -- Design and construction -- Congresses.; Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Thin films -- Congresses.; Metallic films -- Congresses.; Metallizing -- Congresses.
Genres: Congresses.
Notes: "... papers from Symposium D, 'Materials, Integration and Technology for Monolithic Instruments,' held March 29-30 at the 2005 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes.