Optical metrology roadmap for the semiconductor, optical, and data storage industries
Subtitle: 30-31 July 2000, San Diego, USA
By: Ghanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Al-Jumaily, Ghanim A.; Duparré, Angela.; Singh, Bhanwar.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4099; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4099.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 328
Subjects: Optoelectronics -- Congresses.; Optical measurements -- Industrial applications -- Congresses.; Surfaces (Technology) -- Measurement -- Congresses.; Optoelectronic devices -- Industrial applications -- Congresses.; Information retrieval -- Technological innovations -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.