A FORTRAN program for analysis of data from microelectronic test structures
By: Richard L. Mattis.
Contributors: United States. National Bureau of Standards.
Series: NBS special publication ;; 400-75; Semiconductor measurement technology
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1983
Place of publication: Washington, DC
Language: eng
Subjects: Microelectronics -- Computer programs.; Integrated circuits -- Design and construction -- Data processing.
Notes: Includes bibliographical references.
Distributed to depository libraries in microfiche.
"Issued July 1983."
Microfiches in pocket.
Final report.
S/N 003-003-02512-7
Item 247 (microfiche)