Introductory MEMS
Subtitle: fabrication and applications
By: Thomas M. Adams, Richard A. Layton
Contributors: Layton, Richard A.
Publisher: Springer
Published: 2010
Place of publication: New York
Language: eng
Number of pages: 444
ISBN-13: 9780387095103; 9780387095110
Subjects: Microelectromechanical systems; Electronic apparatus and appliances; MEMS; Transducers
Notes: Includes bibliographical references and index.
Table of contents: title: 1. Introduction; title: 2. The substrate and adding material to it; title: 3. Creating and transferring patterns- photolithography; title: 4. Creating structures - micromachining; title: 5. Solid mechanics; title: 6. Thinking about modeling; title: 7. MEMS transducers; title: 8. Piezoresistive transducers; title: 9. Capacitive transducers; title: 10. Piezoelectric transducers; title: 11. Thermal transducers; title: 12. Introduction to microfluidics; title: 13. Microfabrication laboratories.