Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays
Subtitle: 8-9 August 1996, Denver, Colorado
By: John C. Stover, chair/editor.
Contributors: Stover, John C.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 2862; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2862.
Publisher: SPIE-The International Society for Optical Engineering
Published: 1996
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 188
Subjects: Semiconductor wafers -- Measurement -- Congresses.; Surface roughness -- Measurement -- Congresses.; Flatness measurement -- Congresses.
Notes: Includes bibliographical references and index.