Rapid Thermal and Integrated Processing
Subtitle: Symposium Held April 30-May 3, 1991, Anaheim California, U.S.A. (Materials Research Society Symposium Proceedings)
Publisher: Materials Research Society
Published: September 1991
Language: eng
Format: Hardcover
Number of pages: 503
ISBN-13: 9781558991187
Subjects: Electronics - Semiconductors; Semiconductors; Thermal Properties Of Materials; Technology & Industrial Arts; Congresses; Heat treatment; Semiconductor doping; Vapor-plating; Science/Mathematics