Semiconductor micromachining
By: edited by S.A. Campbell,  H.J. Lewerenz.
Contributors: Campbell, S. A.; Lewerenz, H.- J.
Publisher: Wiley
Published: 1998
Place of publication: Chichester, England; New York
Language: eng
Subjects: Semiconductors -- Design and construction.; Micromachining.; Microfabrication.
Notes: Includes bibliographical references and index.
Table of contents: title: v. 1. Fundamental electrochemistry and physics; title: v. 2. Techniques and industrial applications.