Predictive Simulation of Semiconductor Processing
Subtitle: Status and Challenges (Springer Series in Materials Science)
Contributors: Jarek Dabrowski (Editor); Eicke R. Weber (Editor)
Edition: 1 edition
Publisher: Springer
Published: June 24, 2004
Language: eng
Format: Hardcover
Number of pages: 490
ISBN-13: 9783540204817
Subjects: Semi-conductors & super-conductors; Technology; Science/Mathematics; Nanostructures; Science; Technological innovations; Superconductors & Superconductivity; Semiconductors; Electronics - Semiconductors; Physics; Technology / Nanotechnology; Microelectronics; Simulation methods
First sentence: The unprecedented success of the "silicon revolution" has demonstrated that a new microelectronic technology can be developed and the existing one optimized in a straightforward way: by experimenting with processing parameters during production.