Advanced lithography.
Contributors: Institute of Physics (Great Britain). Electronics Group.
Series: IOP short meetings series -- no.10.
Publisher: IOP Publishing
Published: 1988
Place of publication: Bristol
Language: eng
Number of pages: 92
Subjects: Lithography, Electron beam -- Congresses.; Microelectronics -- Congresses.; Photolithography -- Congresses.; X-ray spectroscopy -- Congresses.
Notes: "Proceedings of a one-day meeting of the Electronics Group of the Institute of Physics, 10 February, 1988, Rutherford Appleton Laboratory."

Includes bibliographical references.