Micro electro mechanical system design
By: James J. Allen.
Series: Mechanical engineering -- 192.; Mechanical engineering (Taylor & Francis) -- 192.
Publisher: Taylor & Francis
Published: 2005
Place of publication: Boca Raton
Language: eng
Number of pages: 465
Subjects: Microelectromechanical systems -- Design and construction; Engineering design
Other titles: ENGnetBASE.
Notes: Includes bibliographical references and index.