Chemical vapor deposition of refractory metals and ceramics
Subtitle: symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
By: editors, Theodore M. Besmann, Bernard M. Gallois.
Contributors: Besmann, Theodore M.; Gallois, Bernard M.; Materials Research Society.
Series: Materials Research Society symposium proceedings, 02729172 ;; v. 168; Materials Research Society symposia proceedings ;; v. 168.
Publisher: Materials Research Society
Published: 1990
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 399
Subjects: Refractory coating -- Congresses.; Vapor-plating -- Congresses.
Notes: Includes bibliographical references and indexes.