Vacuum electron and ion technologies
By: [edited by] D.S. Karpuzov
Contributors: Karpuzov, D. S.
Publisher: Nova Science Publishers
Published: 1995
Place of publication: Commack, N.Y
Language: eng
Subjects: Electron beams -- Industrial applications; Ion bombardment -- Industrial applications; Manufacturing processes; Vacuum technology; Thin films
Notes: Includes bibliographical references and index.