Analytic analysis of ellipsometric errors
By: Deane Chandler-Horowitz.
Series: Semiconductor measurement technology; NBS special publication ;; 400-78
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1986
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 32
Subjects: Ellipsometry -- Data processing.; FORTRAN (Computer program language)
Notes: Bibliography: p. 11.
"Issued May 1986."