Microelectronic applications of chemical mechanical planarization
By: edited by Yuzhuo Li.
Contributors: Li, Yuzhuo.
Publisher: John Wiley
Published: 2007
Place of publication: Hoboken, N.J
Language: eng
ISBN-13: 9780471719199
Subjects: Integrated circuits -- Design and construction; Chemical mechanical planarization; Microelectronics -- Materials
Notes: "Wiley Interscience."

Includes bibliographical references.