MEMS technologies for millimeter wave devices and circuits
By: editors, R. Plana, A. Müller, D. Dascălu
Series: Series in micro and nanoengineering -- 5; Series in micro and nanoengineering -- v. 5.
Publisher: Editura Academiei Române
Published: 2004
Place of publication: București
Language: eng
Number of pages: 210
Subjects: Microelectromechanical systems; Congresses; Millimeter wave devices
Other titles: Tehnologii de tip MEMS pentru dispozitiveși circuite pentru unde milimetrice; Nanoscience and nanoengineering
Notes: Extended and revised papers from the MEMSWAVE workshop, held in Toulouse, 2004.

Includes bibliographical references.