Silicon-on-insulator and buried metals in semiconductors
Subtitle: symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
By: editors, James C. Sturm ... [et al.].
Contributors: Sturm, James C.
Series: Materials Research Society symposium proceedings,; v. 107; Materials Research Society symposia proceedings ;; v. 107.
Publisher: Materials Research Society
Published: 1988
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 524
Subjects: Semiconductors -- Design and construction -- Congresses.; Ion implantation -- Congresses.; Silicon-on-insulator technology.
Notes: Includes bibliographies and indexes.