Vibration control in microelectronics, optics, and metrology
Subtitle: 4-6 November 1991, San Jose, California
By: Colin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Gordon, Colin G.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1619; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1619.
Publisher: SPIE
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 369
Subjects: Optical instruments -- Vibration -- Congresses.; Vibration -- Measurement -- Congresses.
Notes: Includes bibliographical references and index.