MEMS/NEMS
Subtitle: handbook techniques and applications
By: edited by Cornelius T. Leondes.
Contributors: Leondes, Cornelius T.
Publisher: Springer
Published: 2006
Place of publication: New York
Language: eng
ISBN-13: 9780387245201
Subjects: Microelectromechanical systems -- Design and construction; Nanotechnology
Other titles: MEMS/NEMS handbook
Notes: Includes bibliographical references and index.
Table of contents: title: v. 1. Design methods; title: v. 2. Fabrication techniques; title: v. 3. Manufacturing methods; title: v. 4. Sensors and actuators; title: v. 5. Medical applications and MOEMS.