Microelectronic device technology
Subtitle: 1-2 October 1997, Austin, Texas
By: Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society.
Contributors: Rodder, Mark.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3212; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3212.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 398
Subjects: Semiconductors -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Microelectronics -- Congresses.
Notes: Includes bibliographical references and index.