[Sputter process investigation]
Subtitle: final technical report
By: John R. Williams, Michael J. Bozack, and Albert T. Fromhold.
Contributors: Bozack, Michael J.; Fromhold, A. T.; United States. National Aeronautics and Space Administration.
Series: [NASA contractor report] -- NASA CR-193946.; NASA contractor report -- NASA CR-193946.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1994
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 94-0859-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1994] 1 microfiche.

Subtitle found in format: [material and environment interaction processes investigation] :