Thin Film Materials Technology
Subtitle: Sputtering of Compound Materials
Publisher: Noyes Publications
Published: September 2003
Language: eng
Format: Hardcover
Number of pages: 432
ISBN-13: 9780815514831
Subjects: Science/Mathematics; Thin films; Handbooks & Manuals; Cathode sputtering (Plating process); Technology; Technology & Industrial Arts; Industrial Technology; Electronics - Microelectronics; Engineering - Electrical & Electronic; Technology / Electronics / Semiconductors; Cathode sputtering (Plating pr
First sentence: Thin films are fabricated by the deposition of individual atoms on a substrate.