ITM-prozessierte CoSi2-Kontakte für grossintegrierte CMOS-Schaltungen
By: Ludwig Niewöhner.
Series: Fortschritt-Berichte VDI. Reihe 9, Elektronik,; Nr. 122; Fortschritt-Berichte der VDI-Zeitschriften.; Nr. 122.
Publisher: VDI-Verlag
Published: 1991
Place of publication: Düsseldorf
Language: ger
Number of pages: 112
Subjects: Metal oxide semiconductors, Complementary.; Integrated circuits -- Design and construction.; Electronic packaging.
Notes: Includes bibliographical references (108-112).