MOEMS and miniaturized systems V
Subtitle: 25-26 January 2005, San Jose, California, USA
By: Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA).
Contributors: El-Fatatry, Ayman.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 5719; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5719.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 190
Subjects: Microelectromechanical systems -- Congresses; Miniature electronic equipment -- Congresses; Micromechanics -- Congresses; Optics, Adaptive -- Congresses; Optical scanners -- Congresses
Genres: Congresses.
Other titles: MOEMS and miniaturized systems 5; MOEMS and miniaturized systems five
Notes: Includes bibliographical references and author index.