Photomask And Next-generation Lithography Mask Technology XII
Publisher: SPIE-International Society for Optical Engine
Published: June 30, 2005
Language: eng
Format: Paperback
Number of pages: 1048
ISBN-13: 9780819458537
Subjects: Electronics - Circuits - General; Optics; Technology; Technology & Industrial Arts; Congresses; Integrated circuits; Masks; Masks (Electronics); X-ray lithography; Science/Mathematics