Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
By: editors, D. Denton, P.J. Hesketh, H. Hughes.
Contributors: Denton, D.; Hesketh, P. J.; Hughes, Henry G.; Electrochemical Society. Sensor Division.; Electrochemical Society. Electronics Division.--; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: Proceedings ;; 95-27; Proceedings (Electrochemical Society) ;; v. 95-27
Publisher: Electrochemical Society
Published: 1995
Place of publication: Pennington, NJ
Language: eng
Number of pages: 362
Subjects: Microelectronics -- Congresses.; Microstructure -- Congresses.; Micromechanics -- Congresses.
Other titles: Microstructures and microfabricated systems II;  Microstructures and microfabricated systems 2; Microstructures and microfabricated systems two
Notes: Includes bibliographical references and indexes.
"Sensor, Electronics and Dielectric Science and Technology Divisions."
"Held at the 188th Meeting of the Electrochemical Society, October 8-13th, 1995, in Chicago"--Pref.