Characterization and metrology for ULSI technology, 2000
Subtitle: international conference, Gaithersburg, Maryland, 26-29 June 2000
By: editors, David G. Seiler ... [et al.].
Contributors: Seiler, David G.; International Conference on Characterization and Metrology for ULSI Technology (2000 : Gaithersburg, Md.)
Series: AIP conference proceedings -- 550; AIP conference proceedings -- no. 550.
Publisher: American Institute of Physics
Published: 2001
Place of publication: Melville, NY
Language: eng
Number of pages: 708
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses; Integrated circuits -- Ultra large scale integration -- Congresses -- Software
Genres: Congresses.; Software.
Notes: "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology (NIST) from June 26 through June 29, 2000."--Pref.

Includes bibliographical references and indexes.