Laser assisted deposition, etching, and doping
Subtitle: January 26-27, 1984, Los Angeles, California
By: Susan D. Allen, chairman/editor.
Contributors: Allen, Susan D.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 459
Publisher: SPIE--the International Society for Optical Engineering
Published: 1984
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 139
Subjects: Lasers -- Industrial applications -- Congresses.; Coating processes -- Congresses.; Semiconductors -- Etching -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographies and index.