Scaling Issues and Design of MEMS
Publisher: Wiley-Interscience
Published: March 14, 2008
Language: eng
Format: Hardcover
Number of pages: 244
ISBN-13: 9780470016992
Subjects: Electronics engineering; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Engineering (General); Technology / Electronics / Microelectronics; Electronics - Microelectronics; Design and construction; Microelectromechanical systems