Understanding MEMS
Subtitle: principles and applications
By: Luis Castañer
Publisher: John Wiley & Sons
Published: 2015
Place of publication: Chichester, UK; Hoboken, New Jersey
Language: eng
ISBN-13: 9781119055426
Subjects: Microelectromechanical systems
Notes: Includes bibliographical references and index.
Table of contents: title: Scaling of forces; title: Elasticity; title: Bending of microstructures; title: Piezoresistance and piezoelectricity; title: Electrostatic driving and sensing; title: Resonators; title: Microfluidics and electrokinetics; title: Thermal devices; title: Fabrication.