EPM '89
Subtitle: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4-8, 1989, Dresden, GDR : abstracts.
Publisher: s.n.
Published: 1989
Place of publication: [S.l
Language: eng
Subjects: Semiconductors -- Surfaces -- Congresses.; Ion implantation -- Congresses.; Particle beams -- Congresses.
Other titles: Energy pulse and particle beam modification of materials.
Notes: Includes bibliographical references and index.
Cover title.