Surface Chemical Cleaning and Passivation for Semiconductor Processing
Subtitle: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Contributors: Tadahiro Ohmi (Editor)
Publisher: Materials Research Society
Published: March 1994
Language: eng
Format: Hardcover
Number of pages: 518
ISBN-13: 9781558992139
Subjects: Science/Mathematics; Technology; Physical Properties Of Materials; Chemical Properties Of Materials; Surface preparation; Semiconductors; Reference; Cleaning; Congresses; Design and construction