Models and simulation of deposition processes with CVD apparatus
Subtitle: theory and applications
By: Juergen Ernst Geiser
Publisher: Nova Science Publishers
Published: 2009
Place of publication: Hauppauge, N.Y. , USA
Language: eng
Number of pages: 140
ISBN-13: 9781606923252
Notes: Includes index.

Includes bibliographical references (p. 129-137) and indexes.