Surface Characterization for Computer Disc Wafers
Subtitle: 28 January 1999, San Jose, California (Proceedings of Spie--the International Society for Optical Engineering, 3619.)
Publisher: Society of Photo Optical
Published: March 1999
Language: eng
Format: Paperback
Number of pages: 136
ISBN-13: 9780819430892
Subjects: Electronics & Communications Engineering; General Theory of Computing; Surface chemistry & adsorption; Congresses; Data disk drives; Electroluminescent display sys; Semiconductor wafers; Surfaces (Technology); Science/Mathematics