Diagnostic techniques for semiconductor materials processing
Subtitle: symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
By: editors, O.J. Glembocki ... [et al.].
Contributors: Glembocki, O. J.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings ;; v. 324; Materials Research Society symposia proceedings ;; v. 324.
Publisher: Materials Research Society
Published: 1994
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 505
Subjects: Semiconductors -- Testing -- Congresses.
Notes: Includes bibliographical references and indexes.
Papers presented at the symposium held as part of the 1993 Fall Meeting of the Materials Research Society in Boston, Mass.