Microstructures, sensors, and actuators
Subtitle: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Dallas, Texas, November 25-30, 1990
By: sponsored by the Dynamic Systems and Control Division, the Fluids Engineering Division, and the Heat Transfer Divsion, ASME ; edited by D. Cho ... [et al.].
Contributors: Cho, D.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; American Society of Mechanical Engineers. Fluids Engineering Division.; American Society of Mechanical Engineers. Heat Transfer Division.; American Society of Mechanical Engineers. Winter Meeting
Series: DSC ;; vol. 19; DSC (Series) ;; v. 19.
Publisher: American Society of Mechanical Engineers
Published: 1990
Place of publication: New York, N.Y
Language: eng
Number of pages: 197
Subjects: Microelectronics -- Congresses.; Micromechanics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Notes: Includes bibliographical references.