Si Front-End Processing
Subtitle: Physics and Technology of Dopant-Defect Interactions (Materials Research Society Symposium Proceedings)
Contributors: Hans-Joachim L. Gossmann (Editor); T. E. Haynes (Editor); M. E. Law (Editor); A. N. Larsen (Editor); S. Odanaka (Editor)
Publisher: Materials Research Society
Published: September 1999
Language: eng
Format: Hardcover
Number of pages: 298
ISBN-13: 9781558994751
Subjects: Science/Mathematics; Silicon; Electronics - Semiconductors; Semiconductors; Technology & Industrial Arts; Technology; Semiconductor doping; Material Science; Congresses; Design and construction