Optical scattering
Subtitle: measurement and analysis
By: John C. Stover.
Contributors: Society of Photo-optical Instrumentation Engineers.
Edition: 2nd ed.
Publisher: SPIE Optical Engineering Press
Published: 1995
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 321
Subjects: Light -- Scattering.
Description: As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.
Notes: Includes bibliographical references (p. 303-317) and index.