Rapid Thermal and Integrated Processing II
Subtitle: Symposium Held April 12-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Contributors: J. Kiefer Elliott (Contributor)
Publisher: Materials Research Society
Published: September 1993
Language: eng
Format: Hardcover
Number of pages: 423
ISBN-13: 9781558991996
Subjects: Technology; Electronics - Semiconductors; Semiconductor doping; Semiconductors; Technology & Industrial Arts; Vapor-plating; Science/Mathematics; Reference; Congresses; Heat treatment