Scanning probe lithography
By: by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate.
Contributors: Guarini, Kathryn Wilder.; Quate, Calvin F., 1923-
Series: Microsystems -- v. 7.; Microsystems (Series) -- v. 7.
Publisher: Kluwer Academic Publishers
Published: 2001
Place of publication: Boston
Language: eng
Number of pages: 195
Subjects: Integrated circuits -- Design and construction; Microlithography; Scanning probe microscopy
Notes: Includes bibliographical references and index.