Chemical vapour deposition
Subtitle: an integrated engineering design for advanced materials
By: Yongdong Xu, Xiu-Tian Yan
Contributors: Yan, Xiu-Tian
Series: Engineering materials and processes; Engineering materials and processes
Publisher: Springer
Published: 2009
Place of publication: London; New York
Language: eng
Number of pages: 342
ISBN-13: 9781848828933; 9781848828940
Subjects: Chemical vapor deposition; Coating processes