Micromachined thin-film sensors for SOI-CMOS co-integration
By: by Jean Laconte, Denis Flandre, Jean-Pierre Raskin
Contributors: Flandre, Denis; Raskin, J.-P. (Jean-Pierre), 1971-
Publisher: Springer
Published: 2011
Place of publication: New York; London
Language: eng
ISBN-13: 9781441939579
Subjects: Complementary Metal oxide semiconductors; Gas flow; Silicon-on-insulator technology; Thin film devices