Handbook of silicon wafer cleaning technology
By: edited by Karen A. Reinhardt, Werner Kern.
Contributors: Reinhardt, Karen A.; Kern, Werner, 1925-
Edition: 2nd ed.
Series: Materials science & process technology series; Materials science and process technology series
Publisher: William Andrew
Published: 2008
Place of publication: Norwich, NY
Language: eng
Number of pages: 718
ISBN-13: 9780815515548
Subjects: Silicon-on-insulator technology
Notes: Includes bibliographical references and index.