Education in microelectronics and MEMS
Subtitle: 28-29 October 1999, Royal Pines Resort, Queensland, Australia
By: Fred Payne, Ash M. Parameswaran, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].
Contributors: Payne, Fred.; Parameswaran, Ash M.; Society of Photo-optical Instrumentation Engineers.; Institution of Radio and Electronics Engineers, Australia.; Queensland. Government State Development.; Griffith University Microelectronics Engineering Society.
Series: SPIE proceedings series ;; v. 3894; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3894.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 178
Subjects: Microelectronics -- Congresses.; Microelectronics -- Study and teaching -- Congresses.; Microelectromechanical systems -- Study and teaching -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.