Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
Edition: 1 edition
Publisher: Springer
Published: June 30, 2001
Language: eng
Format: Hardcover
Number of pages: 228
ISBN-13: 9780792373612
Subjects: Semi-conductors & super-conductors; Scanning probe microscopy; Engineering - Electrical & Electronic; Technology; Microelectronics; Technology & Industrial Arts; Microlithography; Science/Mathematics; Integrated Circuits; Electronics - Circuits - Printed; Material Science; Technology / Electronics / Circuits / General; Technology / Electronics / Circuits / Printed; Technology : Engineering - Electrical & Electronic; Technology : Material Science; Design and construction; Electronics - Circuits - Integrated; Electronics - Microelectronics
First sentence: Semiconductor lithography is the patterning process used to define the structures that make up integrated circuits (ICs).