Gate stack and silicide issues in silicon processing
Subtitle: symposium held April 25-27, 2000, San Francisco, California, U.S.A.
By: editors: L.A. Clevenger ... [et al.].
Contributors: Clevenger, L. A.
Series: Materials Research Society symposium proceedings -- v. 611; Materials Research Society symposia proceedings -- v. 611.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Integrated circuits, Ultra large scale integration -- Materials -- Congresses.; Silicides -- Congresses.; Gate array circuits -- Congresses.; Electric leakage -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indices.