Proceedings
Subtitle: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992
By: W. Benecke, H.-C. Petzold (eds.) ; sponsored by the IEEE Robotics and Automation Society and in cooperation with the German IEEE Section.
Contributors: Benecke, W.; Petzold, H.-C.; IEEE Robotics and Automation Society.; Institute of Electrical and Electronics Engineers. German Section.
Publisher: IEEE
Published: 1992
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 240
Subjects: Electromechanical devices -- Congresses.; Miniature objects -- Congresses.; Microelectronics -- Congresses.; Robotics -- Congresses.
Other titles: MEMS '92.; 1992 IEEE Micro Electro Mechanical Systems.; Micro Electro Mechanical Systems.; IEEE Micro Electro Mechanical Systems.
Notes: "IEEE Catalog Number 92CH3093-2."

"... 5th IEEE Workshop on Micro Electro Mechanical Systems (MEMS '92)"--p. iii.

On cover and spine: 1992 IEEE Micro Electro Mechanical Systems.

Includes bibliographical references.