Dopant imaging and profiling of wide bandgap semiconductor devices
By: Marco Buzzo
Edition: 1st ed.
Series: Series in microelectronics -- v. 180
Publisher: Hartung-Gorre
Published: 2007
Place of publication: Konstanz
Language: eng
Number of pages: 143
Subjects: Wide gap semiconductors; Semiconductor doping; Silicon carbide
Notes: "Reprint of Diss. ETH no. 16756"--T.p. verso.

Abstract also in Italian.