Cantilever-Based CMOS Nano-Electro-Mechanical Systems
Format: Hardcover
Number of pages: 150
ISBN-13: 9783540431435
Subjects: Technology; Microscopy; Metal Oxide Semiconductors (Mos); Technology & Industrial Arts; Physics; Microscopes & Microscopy; Microelectromechanical systems; Metal oxide semiconductors, Co; Nanostructures; Atomic force microscopy; Science/Mathematics; Technical & Manufacturing Trades; Electronics - Semiconductors
First sentence: The term nanotechnology was coined in 1981 [1], and originally referred to what is also called molecular nanotechnology or molecular engineering.