EUV, X-ray, and neutron optics and sources
Subtitle: 21-23 July 1999, Denver, Colorado
By: Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: MacDonald, Carolyn Ann.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3767; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3767.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 394
Subjects: X-ray optics -- Congresses; Lithography, Electron beam -- Congresses; Ion beam lithography -- Congresses; Neutron sources -- Congresses
Genres: Congresses.
Other titles: Extreme ultraviolet, X-ray, and neutron optics and sources
Notes: Includes bibliographical references and index.