Materials Modification by Energetic Atoms and Ions
Subtitle: Symposium Held April 28-30, 1992, San Francisco, California, USA (Materials Research Society Symposium Proceedings)
Contributors: Stephen M. Rossnagel (Contributor)
Publisher: Materials Research Society
Published: August 1992
Language: eng
Format: Hardcover
Number of pages: 405
ISBN-13: 9781558991637
Subjects: Semiconductors; Science/Mathematics; Plasma etching; Congresses; Electronic Circuits; Etching; Ion bombardment