Micro-electro-mechanical systems
Subtitle: MEMS -- 2001 : presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York
By: sponsored by the MEMS subdivision, ASME ... [et al.] ; edited by Abraham P. Lee ... [et al.]
Contributors: Lee, Abraham P.; American Society of Mechanical Engineers. Microelectromechanical Systems Subdivision.; American Society of Mechanical Engineers.
Series: MEMS -- v. 3.; MEMS (Series) (American Society of Mechanical Engineers) -- vol. 3.
Publisher: American Society of Mechanical Engineers
Published: 2001
Place of publication: New York, N.Y
Language: eng
Number of pages: 892
Subjects: Microelectronics -- Congresses.; Electromechanical devices -- Congresses.
Genres: Congresses.
Notes: "This is the 12th anniversary MEMS related symposia have been offered at the  International Mechanical Engineering Congress and Exposition, IMECE.  This is also the third consecutive year that the proceeding is coordinated and published under the auspices of the newly formed ASME subdivision of MEMS ..."--Foreword.