Investigations on silicon microelectronic and micromechanic devices
By: by Jonas Tirén
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 198
Publisher: Uppsala University; Distributor, Almquist and Wiksell International
Published: 1989
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 36
Subjects: Silicon; Microelectronics; Micromechanics
Notes: Thesis (doctoral)--Uppsala University, 1989.

Includes bibliographical references (p. 35)