Effect of various gas mixtures on plasma cleaned ceramics
By: by M. D. Smith
Contributors: Bendix Corporation. Kansas City Division. Communications Services; United States. Dept. of Energy
Edition: Rev
Series: BDX ; 613-2107 (Rev.)
Publisher: Dept. of Energy; for sale by the National Technical Information Service]
Published: 1979
Place of publication: [Washington]; [Springfield, Va
Language: eng
Number of pages: 12
Subjects: Ceramics -- Cleaning; Plasma (Ionized gases); Active oxygen
Notes: Prepared for the U.S. Dept. of Energy under contract no. DE-AC04-76-DP00613

"Communications Services, Bendix, Kansas City Division."

Final report; March 1979