Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
By: A. Christou.
Series: Semiconductor measurement technology; NBS special publication ; 400-30; NBS special publication ;; 400-30.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1978
Place of publication: Washington
Language: eng
Number of pages: 32
Subjects: Probes (Electronic instruments); Semiconductor wafers -- Testing.
Notes: Includes bibliographical references.