Microrobotics and microsystem fabrication
Subtitle: 16-17 October 1997, Pittsburgh, Pennsylvania
By: Armin Sulzmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, NIST--National Institute of Standards and Technology, CIMS--Coalition for Intelligent Manufacturing Systems, [and] A-CIMS--Academic Coalition for Intelligent Manufacturing Systems.
Contributors: Sulzmann, Armin.; Society of Photo-optical Instrumentation Engineers.; National Institute of Standards and Technology (U.S.); Coalition for Intelligent Manufacturing Systems.; Academic Coalition for Intelligent Manufacturing Systems.
Series: SPIE proceedings series ;; v. 3202; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3202.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 238
Subjects: Robotics -- Congresses.; Microelectromechanical systems -- Congresses.; Microfabrication -- Congresses.
Notes: Includes bibliographical references and index.