Electrolytic in-process dressing (ELID) techologies
Subtitle: fundamentals and applications
By: editors, Hitoshi Ohmori, Ioan D. Marinescu, Kazutoshi Katahira
Publisher: Taylor & Francis
Published: 2011
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 249
ISBN-13: 9781439800362
Subjects: Polishing; Finishing; Semiconductor wafers; Electrolytic grinding; Semiconductors
Notes: Includes bibliographical references and index.