Ion implantation
By: Heiner Ryssel and Ingolf Ruge ; translated by Jerome-Allan Buckman and Heiner Ryssel.
Contributors: Ruge, Ingolf.
Publisher: Wiley
Published: 1986
Place of publication: Chichester; New York
Language: eng
Number of pages: 459
Subjects: Ion implantation.; Semiconductors.
Notes: Bibliography: p. 429-453.
Translation of: Ionenimplantation.
"A Wiley-Interscience publication."
Includes index.