Sistema dli͡a programmiroemoĭ mikroobrabotki sfokusirovannym ionnym puchkom
By: A.N. Dubrovin ... [et al.]
Series: Preprint -- 89-50; Preprint (Institut i͡adernoĭ fiziki SO AN SSSR) -- 89-50
Publisher: In-t i͡adernoĭ fiziki SO AN SSSR
Published: 1989
Place of publication: Novosibirsk
Language: rus
Number of pages: 19
Notes: Includes bibliographical references (p. 19)