3-dimensional process simulation
By: J. Lorenz (ed.)
Contributors: Lorenz, Jürgen.
Publisher: Springer-Verlag
Published: 1995
Place of publication: Wien; New York
Language: eng
Number of pages: 196
Subjects: Process control -- Computer simulation -- Congresses.
Other titles: 3D process simulation; Three dimensional process simulation
Notes: "This volume contains the Proceedings of the International 'Workshop on 3D Process Simulation' which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on 'Simulation of Semiconductor Devices and Processes' (SISDEP '95)"--P. v.

Includes bibliographical references and index.