Science and Technology of Semiconductor Surface Preparation
Subtitle: Symposium Held April 1-3, 1997, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 477.)
Publisher: Materials Research Society
Published: January 1998
Language: eng
Format: Hardcover
Number of pages: 545
ISBN-13: 9781558993815
Subjects: Technology; Surface preparation; Reference; Technology & Industrial Arts; Science/Mathematics; Surfaces; Electronics - Semiconductors; Cleaning; Congresses; Semiconductors