Elektronenmikroskopische Querschnittsabbildung von Interfaces und Heterostrukturen in Halbleitern
By: Heinz Bartsch ... [et al.].
Contributors: Bartsch, Heinz.
Series: Beiträge zur Forschungstechnologie,; Bd. 15
Publisher: Akademie-Verlag
Published: 1987
Place of publication: Berlin
Language: ger
Number of pages: 84
Subjects: Semiconductors -- Surfaces.; Electron microscopy -- Technique.; Materials -- Microscopy.; Epitaxy.
Notes: Bibliography: p. 75-79.
Table of contents and summary in German, English, and Russian.
Includes index.