Mathematical analysis of partial differential equations modeling electrostatic MEMS
By: Pierpaolo Esposito, Nassif Ghoussoub, Yujin Guo.
Contributors: Ghoussoub, Nassif.; Guo, Yujin.
Series: Courant lecture notes -- 20
Publisher: American Mathematical Society
Published: 2010
Place of publication: Providence, R.I
Language: eng
ISBN-13: 9780821849576
Subjects: Microelectromechanical systems -- Mathematical models; Mathematical analysis
Notes: Includes bibliographical references and index.