Microcircuit Engineering 90
Subtitle: proceedings of the International Conference on Microlithography, September 18-20, 1990, Leuven, Belgium
By: edited by G. Declerck, L. Van den hove, F. Coopmans
Contributors: Declerck, G.; Vandenhove, L.; Coopmans, F.; Microcircuit Engineering (Conference) (1990 : Louvain, Belgium)
Series: Microelectronic engineering -- v. 13, nos. 1-4
Publisher: Elsevier; Distributors for the United States and Canada, Elsevier Science Pub. Co.
Published: 1991
Place of publication: Amsterdam; New York; New York, N.Y., U.S.A
Language: eng
Number of pages: 573
Copyright date: 1991
Subjects: Microelectronics; Congresses; Microlithography
Notes: Includes bibliographical references and index.