Guang xue tou ying bao guang wei na jia gong ji shu
By: Yao Hanmin, Hu Song, Xing Tingwen zhu
Contributors: Hu, Song, 1965-; Xing, Tingwen, 1965-
Edition: Di 1 ban
Series: Dian zi shu, li zi shu, guang zi shu wei na jia gong ji shu xi lie zhuan zhu; Dian zi shu li zi shu guang zi shu wei na jia gong ji shu xi lie zhuan zhu
Publisher: Beijing gong ye da xue chu ban she
Published: 2006
Place of publication: Beijing
Language: chi
Number of pages: 285
ISBN-13: 9787563916696
Subjects: Integrated circuits; Design and construction; Microlithography; Photonics
Notes: "Guo jia ke xue ji shu xue shu zhu zuo chu ban ji jin zi zhu"

Includes bibliographical references.