Optical characterization techniques for high-performance microelectronic device manufacturing
Subtitle: 20 October 1994, Austin, Texas
By: Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Mathur, Jagdish P.; Lowell, John.; Chen, Ray T.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2337; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2337.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 202
Subjects: Semiconductors -- Design and construction -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Testing -- Optical methods -- Congresses.; Integrated circuits -- Testing -- Optical methods -- Congresses.; Optical pattern recognition -- Congresses.
Description: vii, 202 p. : 28 cm
Notes: Includes bibliographical references and author index.