Micro electro mechanical systems
Subtitle: an investigation of micro structures, sensors, actuators, machines, and systems : proceedings
By: IEEE, Fort Lauderdale, Florida, February 7-10, 1993 ; sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.)
Publisher: Institute of Electrical and Electronics Engineers; IEEE Service Center
Published: 1993
Place of publication: [New York]; Piscataway, NJ
Language: eng
Number of pages: 294
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Other titles: IEEE micro electro mechanical systems workshop.; IEEE micro electro mechanical systems.
Notes: Includes bibliographical references and index.
"1993 IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.
"IEEE catalog number 93CH3265-6."
Title on spine: IEEE Micro Electro Mechanical Systems Workshop.