1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC 97 proceedings : September 10-12, 1997, Cambridge, Massachusetts
By: [sponsored jointly by Semiconductor Equipment and Materials International (SEMI) and the Institute of Electrical and Electronics Engineers (IEEE)].
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: Institute of Electrical and Electronics Engineers; SEMI
Published: 1997
Place of publication: [New York, N.Y.]; Mountain View, Calif
Language: eng
Number of pages: 460
Subjects: Process control -- Congresses.; Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Other titles: Quest for semiconductor manufacturing excellence: leading the charge into the 21st century; 1997 Proceedings, IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC); ASMC 97; 1997 Advanced Semiconductor Manufacturing Conference and Workshop; 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Notes: "IEEE catalog number 97CH36089"--T.p. verso.

Includes bibliographical references.