Processing of semiconductors
By: volume editor, Kenneth A. Jackson.
Contributors: Jackson, Kenneth A.
Series: Materials science and technology -- 16; Materials science and technology (Weinheim an der Bergstrasse, Germany) -- v. 16.
Publisher: VCH
Published: 1996
Place of publication: Weinheim; New York
Language: eng
Number of pages: 689
Subjects: Semiconductors.
Notes: Includes bibliographical references and index.
Table of contents: value: Silicon processing / J.G. Wilkes; value: Compound semiconductor processing / J.B. Mullin; value: Epitaxial growth / T.F. Kuech, M.A. Tischler; value: Photolithography / R. Leuschner, G. Pawlowski; value: Selective doping / S. Mahajan; value: Etching processes in semiconductor manufacturing / K.G. Donohoe, T.R. Turner, K.A. Jackson; value: Silicon device structures / C.-Y. Chang, S.M. Sze; value: Compound semiconductor device structures / W.E. Stanchina, J.F. Lam; value: Silicon device processing / D.-L. Kwong; value: Compound semiconductor device processing / J.M. Parsey, Jr.; value: Integrated circuit packaging / D.I. Amey; value: Interconnection systems / W.H. Knausenberger.