study of the angular distribution and preferential sputtering of multicomponent materials
By: by Steven M. Frank.
Published: 1989
Language: eng
Number of pages: 104
Subjects: Sputtering (Physics)
Notes: Typescript.

Thesis (Ph. D.)--Washington State University, 1989.

Includes bibliographical references.

WSU:Another copy on microfilm, no. 6833.

WSU:"Department of Chemistry."