MEMS 2002
Subtitle: the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Las Vegas, Nevada, USA, January 20-24, 2002
By: sponsored by IEEE and the Robotics and Automation Society.
Contributors: Institute of Electrical and Electronics Engineers.; IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 2002
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 736
Subjects: Microelectromechanical systems -- Congresses
Genres: Congresses.
Other titles: Micro electro mechanical systems; MEMS 2002
Notes: Includes bibliographical references and author index.
"IEEE Catalog Number: 02CH37266."