Handbook of Microlithography, Micromachining and Microfabrication (Materials and Devices Series)
Publisher: INSPEC, Inc.
Published: September 30, 2004
Language: eng
Format: Hardcover
Number of pages: 1476
ISBN-13: 9780852969106
Subjects: Circuits & components; Instruments & instrumentation engineering; Materials science; Semi-conductors & super-conductors; Manufacturing; Technology & Industrial Arts; Reference; Electronics - Circuits - Printed; Engineering - Electrical & Electronic; Handbooks & Manuals