Optical microlithography IV
Subtitle: March 13-14, 1985, Santa Clara, California
By: Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
Contributors: Stover, Harry L.; International Society for Hybrid Microelectronics.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 538
Publisher: SPIE--the International Society for Optical Engineering
Published: 1985
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 260
Subjects: Microlithography -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Other titles: Optical microlithography 4.; Optical microlithography four.
Notes: Includes bibliographies.