RF sputtered silicon and hafnium nitrides as applied to 440C steel
By: A. Grill and P.R. Aron
Contributors: Aron, Paul R; Lewis Research Center
Series: NASA technical memorandum -- 86862
Publisher: Lewis Research Center
Published: 1984
Place of publication: Cleveland, Ohio
Language: eng
Format: Microform
Subjects: Silicon nitride
Notes: "March 1984."

"N84-32536"--Microfiche header

Bibliography: p. 10-11

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1984. 1 microfiche ; 11 x 15 cm