Optical Microlithography II: Technology for the 1980s 
Subtitle: Proc of Microlithography Conf Held March 1983, Santa Clara, Ca (Proceedings of S P I E)
Publisher: Society of Photo Optical
Published: December 1983
Language: eng
Format: Paperback
Number of pages: 251
ISBN-13: 9780892524297
Subjects: Microlithography; Optical Engineering; Congresses; Integrated circuits; Very large scale integration