Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May - 1 June 1984, Tarrytown, N.Y.
By: special editor for the proceedings: J. Kelly.
Contributors: American Institute of Physics; American Vacuum Society; International Symposium on Electron, Ion, and Photon Beams (1984 : Tarrytown, N.Y.)
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1985
Place of publication: New York
Number of pages: 463
Subjects: Electron beams -- Congresses; Ion bombardment -- Congresses; Photon beams -- Congresses
Notes: Includes bibliographical references and author index.

Source: Journal of vacuum science & technology B, ser.2, v.3, no.1, Jan/Feb. 1985, p.29-463

1:SERIALS Journal of vacuum science & technology