Micro electro mechanical systems (MEMS)
Subtitle: technology, fabrication processes, and applications
By: editors, Britt Ekwall and Mikkel Cronquist.
Contributors: Ekwall, Britt.; Cronquist, Mikkel.
Publisher: Nova Science Publishers
Published: 2009
Place of publication: Hauppauge, N.Y
Language: eng
ISBN-13: 9781608764747
Subjects: Microelectromechanical systems
Notes: Includes bibliographical references and index.