Proceedings of the VLSI Workshop on Metrology for Process Control and IC Packaging
Subtitle: May 10 1988
By: organizers: C.R. Viswanathan, R. Togei.
Contributors: Viswanathan, Chand R.; Togei, R.; IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.; Symposium on VLSI Technology.
Publisher: IEEE Electron Device Society; Japan Society of Applied Physics
Published: 1988
Place of publication: [New York]; [Japan]
Language: eng
Number of pages: 145
Subjects: Integrated circuits -- Very large scale integration -- Congresses; Integrated circuits -- Very large scale integration -- Measurement -- Congresses; Electronic packaging -- Congresses
Other titles: The VLSI Workshop on Metrology for Process Control and IC Packaging
Notes: Cover title.

Title on added t.p.: The VLSI Workshop on Metrology for Process Control and IC Packaging, May 10 1988, Marriott Hotel, San Diego, CA.

On Cover: 1988 Symposium on VLSI Technology (May 11-13, 1988)