Analytical and diagnostic techniques for semiconductor materials, devices and processes
Subtitle: joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
By: editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division.
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; Society of Photo-optical Instrumentation Engineers.; Electrochemical Society. Meeting; Denki Kagaku Kyōkai (Japan). Fall Meeting; Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices (1999 : Honolulu, Hawaii); European Solid State Device Research Conference (29th : 1999 : Leuven, Belgium)
Series: ECS proceedings ;; v. 99-16; SPIE ;; v. 3895; Proceedings (Electrochemical Society) ;; v. 99-16.; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3895.
Publisher: Electrochemical Society
Published: 1999
Place of publication: Pennington, N.J
Language: eng
Number of pages: 552
Subjects: Semiconductors -- Analysis -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
ALTECH 99 was held Sept. 16-17, 1999, jointly with ESSDERC 99, the 29th European Solid State Device Research Conference, and the ECS Symposium on Diagnostic Techniques for Semiconductor Materials and Devices was held as part of the 1999 Joint International Meeting, 196th Meeting of the Electrochemical Society and the 1999 Fall Meeting of the Electrochemical Society of Japan, Honolulu, Hawaii, Oct. 17-22.
"Published in cooperation with the International Society for Optical Engineering."