MicrocircuitEngineering 89
Subtitle: proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England
By: edited by H. Ahmed ... (et al.).
Contributors: Ahmed, H. 1936-
Publisher: Elsevier; Ohmsha; Distributors for the United States and Canada, Elsevier Science Pub. Co
Published: 1990
Place of publication: Amsterdam; New York; Tokyo; New York, N.Y., U.S.A
Language: eng
Number of pages: 708
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and index.