Fundamentals of semiconductor processing technologies
By: by Badih El-Kareh ; graphics and layout, Richard J. Bombard.
Publisher: Kluwer Academic Publishers
Published: 1995
Place of publication: Boston
Language: eng
Number of pages: 599
Subjects: Semiconductors -- Design and construction; Manufacturing processes
Other titles: Fundamentals of semiconductor processing technologies.
Notes: Includes bibliographical references and index.
Cover title: Fundamentals of semiconductor processing technologies.