Thin Films Material Technology
Subtitle: Sputtering of Compound Materials
Edition: 1 edition
Publisher: Springer
Published: September 23, 2004
Language: eng
Format: Hardcover
Number of pages: 518
ISBN-13: 9783540211181
Subjects: Semi-conductors & super-conductors; Electricity; Electronics - Microelectronics; Industrial Technology; Sputtering Systems; Structural Control; Technology / Material Science; Thin Films; Technology & Industrial Arts