Laser Processing of Thin Films and Microstructures
Subtitle: Oxidation, Deposition and Etching of Insulators
By: by Ian W. Boyd
Series: Springer Series in Materials Science -- 3; Springer series in materials science -- 3.
Publisher: Springer Berlin Heidelberg
Published: 1987
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
Number of pages: 320
ISBN-13: 9783642831386; 9783642831362
Subjects: Physics
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