Spectroscopic ellipsometry
Subtitle: instrumentation and applications
By: Roger Jansson
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology -dissertations- -- no 316
Publisher: Linköping University, Department of Physics and Measurement Technology
Published: 1993
Language: eng
Number of pages: 186
Notes: Thesis (doctoral)--Linköping University, 1993.