Microelectronics manufacturing science and technology
By: Pallab K. Chatterjee, Purnendu K. Mozumder, guest editors.
Contributors: Chatterjee, Pallab K.; Mozumder, Purnendu K.
Series: IEEE transactions on semiconductor manufacturing -- vol.7 (2)
Publisher: Instituteof Electrical and Electronics Engineers
Published: 1994
Place of publication: New York
Language: eng
Notes: Special issue.