Chō daikōkei shirikon wēha no chō seimitsu keijō sokutei, hyōka gijutsu no kenkyū
Contributors: Nihon Aruminyūmu Kyōkai
Series: Hitetsu kinzokukei zairyō no kiso bussei tō ni kakawaru dētabēsu no seibi; Heisei 10-nendo sokkōteki chiteki kiban seibi chōsa itaku hōkokusho
Publisher: Shinkinzoku Kyōkai; Nihon Aruminyūmu Kyōkai
Published: 2000
Place of publication: [Tokyo]
Language: jpn
Subjects: Semiconductor wafers
Other titles: Shirikon dētabēsu-shu
Notes: Cover title.

"Hi 99-7."

Includes bibliographical references.