Microelectronic test pattern NBS-4
By: W. Robert Thurber and Martin G. Buehler ; Electronic Technology Division, Institute for Applied Technology
Contributors: Buehler, Martin G , joint author; Institute for Applied Technology (U.S.). Electronic Technology Division; United States. Defense Advanced Research Projects Agency; United States. National Bureau of Standards
Series: Semiconductor measurement technology; NBS special publication ; 400-32; NBS special publication -- 400-32
Publisher: Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1978
Place of publication: Washington
Language: eng
Number of pages: 79
Subjects: Microelectronics; Silicones -- Testing
Notes: Activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards

Prepared by Electronic Technology Division Institute for Applied Technology

Issued April 1978

Includes bibliographical references