Gas-phase and surface chemistry in electronic materials processing
Subtitle: symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
By: editors, T.J. Mountziaris ... [et al.].
Contributors: Mountziaris, Triantafillos John.; Materials Research Society.
Series: Materials Research Society symposium proceedings ;; v. 334; Materials Research Society symposia proceedings ;; v. 334.
Publisher: Materials Research Society
Published: 1994
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 556
Subjects: Electronics -- Materials -- Surfaces -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and indexes.