9th International Conference on Advanced Thermal Processing of Semiconductors
Subtitle: RTP 2001 : September 25-29, 2001, Hilton Anchorage, Alaska
By: D.P. DeWitt [and others], editors
Contributors: DeWitt, David P., 1934-2005
Publisher: RTP Conference
Published: 2001
Place of publication: Place of publication not identified]
Language: eng
Number of pages: 326
Copyright date: 2001
Subjects: Semiconductors; Heat treatment; Congresses; Rapid thermal processing; Semiconductor doping; Defects
Other titles: RTP 2001; Advanced Thermal Processing of Semiconductors 9th International Conference on RTP 2001.
Notes: "IEEE Catalog Number: 02EX513"--T.p. verso.

Includes bibliographical references.