17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Subtitle: proceedings : 13-14 November 2000, Munich, Germany
By: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering.
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4349; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4349.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 192
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Other titles: Mask technology for integrated circuits and microcomponents
Notes: Includes bibliographic references and author index.