Microsystems metrology and inspection
Subtitle: 15-16 June 1999, Munich, Germany
By: Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.].
Contributors: Gorecki, Christophe.
Series: Proceedings EurOpt series; SPIE proceedings series,; v. 3825; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3825.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 186
Subjects: Microelectronics -- Congresses; Microelectromechanical systems -- Congresses; Optical instruments -- Industrial applications -- Congresses; Interferometry -- Congresses; Mensuration -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.