Advanced processing of semiconductor devices
Subtitle: 23-25 March, 1987, Bay Point, Florida
By: Sayan D. Mukherjee editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Contributors: Mukherjee, Sayan D.; Metallurgical Society (U.S.); Society of Photo-optical Instrumentation Engineers.; Symposium on Advances in Semiconductors and Semiconductor Structures (1987 : Bay Point, Florida)
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 797
Publisher: The Society
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 366
Subjects: Semiconductors -- Congresses; Semiconductors -- Testing -- Congresses
Notes: The conference was one of six components of the symposium on Advances in Semiconductors and Semiconductor Structures, held in Bay Point, Florida, 23-27 March, 1987.

Includes bibliographies and index.