Introduction to microelectronic fabrication
By: Richard C. Jaeger.
Edition: 2nd ed.
Series: Modular series on solid state devices ;; v. 5; Modular series on solid state devices (Upper Saddle River, N.J.) ;; v. 5.
Publisher: Prentice Hall
Published: 2002
Place of publication: Upper Saddle River, N.J
Language: eng
Number of pages: 316
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Textbooks.
Genres: Textbooks.
Notes: Includes bibliographical references and index.