Sputtering by Particle Bombardment I
Subtitle: Physical Sputtering of Single-Element Solids
Publisher: Springer; Behrisch R
Published: Aug 17, 2013
Format: paperback
Number of pages: 300
ISBN-13: 9783662308882
Notes: Source title: Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids (Topics in Applied Physics)