Device and process technologies for MEMS and microelectronics
Subtitle: 27-29 October 1999, Royal Pines Resort, Queensland, Australia
By: Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].
Contributors: Chau, Kevin.; Dimitrijev, Sima, 1958-; Society of Photo-optical Instrumentation Engineers.; Institution of Radio and Electronics Engineers, Australia.; Queensland. Government State Development.; Griffith University Microelectronics Engineering Society.
Series: SPIE proceedings series ;; v. 3892; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3892.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 394
Subjects: Microelectromechanical systems -- Congresses.; Photon detectors -- Design and construction -- Congresses.; Photomechanical processes -- Congresses.; Photolithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.