Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films
By: John J. Pouch, Samuel A. Alterovitz, and Joseph D. Warner.
Contributors: Alterovitz, Samuel A.; Warner, Joseph D.; Lewis Research Center.
Series: NASA technical memorandum -- 87258.
Publisher: National Aeronautics and Space Administration, Lewis Research Center
Published: 1986
Place of publication: [Cleveland, Ohio
Language: eng
Format: Microform
Subjects: Amorphous semiconductors.; Boron nitride.; Amorphous materials.; Boron nitrides.; Carbon.; Dielectrics.; Plasma diodes.; Semiconductor devices.
Notes: Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1986. 1 microfiche.