Thin Films: Stresses and Mechanical Properties IX 
Subtitle: Materials Research Society Symposium Proceedings (Materials Research Society Symposia Proceedings, V. 695.)
Contributors: Cengiz S. Ozkan (Editor); L. B. Freund (Editor); Huajian Gao (Editor); Robert C. Cammarata (Editor)
Publisher: Materials Research Society
Published: May 2002
Language: eng
Format: Hardcover
Number of pages: 511
ISBN-13: 9781558996311
Subjects: Electronics - Semiconductors; Technology & Industrial Arts; Congresses; Mechanical properties; Thin films; Science/Mathematics