Plasma assisted processes for microelectronic applications
By: Claes Nender
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 137
Publisher: Uppsala Universitet
Published: 1988
Place of publication: Uppsala
Language: eng
Number of pages: 21
ISBN-13: 9789155421991
Subjects: Plasma etching; Plasma engineering; Microelectronics
Notes: Thesis (doctoral)--Uppsala University, 1988.

Includes bibliographical references (p. 21)