Plasma Processing of Materials
Subtitle: Scientific Opportunities and Technological Challenges
Publisher: National Academy Press
Published: December 1991
Language: eng
Format: Paperback
Number of pages: 75
ISBN-13: 9780309045971
Subjects: Technology: General Issues; Engineering - Mechanical; Physical Properties Of Materials; Plasma Physics; Technology & Industrial Arts; Effect of radiation on; Materials; Microelectronics; Plasma engineering; Surfaces (Technology); Science/Mathematics