Modeling MEMS and NEMS
Publisher: CRC
Published: November 26, 2002
Language: eng
Format: Hardcover
Number of pages: 384
ISBN-13: 9781584883067
Subjects: Electronics engineering; Mathematical modelling; Technical design; Technology; Mathematical models; Mechanical Engineering (Specific Aspects); Microelectronics; Technology & Industrial Arts; Science/Mathematics; Applied; Engineering - Electrical & Electronic; Engineering - Mechanical; Technology / Electronics / Microelectronics; Electronics - General; Electronics - Microelectronics; Microelectromechanical systems
First sentence: These days there is tremendous interest in micro- and nanoelectromechanical systems (MEMS and NEMS) technology.