Measurement assurance for dimensional measurements on integrated-circuit photomasks
By: Carroll Croarkin, Ruth N. Varner
Contributors: Varner, Ruth N; Center for Applied Mathematics (U.S.). Statistical Engineering Division
Series: NBS technical note -- 1164
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by Supt. of Docs., U.S. G.P.O.
Published: 1982
Place of publication: Washington, D.C
Language: eng
Number of pages: 44
Subjects: Optical instruments -- Calibration; Integrated circuits -- Masks -- Measurement
Notes: "Statistical Engineering Division, Center for Applied Mathematics, National Bureau of Standards."

"Issued August 1982."

Includes bibliographical references