Microfabrication and nanomanufacturing
By: [edited by] Mark J. Jackson.
Contributors: Jackson, Mark J.
Publisher: Taylor & Francis
Published: 2005
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 401
Subjects: Microelectronics.; Integrated circuits -- Design and construction.; Microelectromechanical systems -- Design and construction.
Notes: Includes bibliographical references and index.