Plasma diagnostics
By: edited by Orlando Auciello, Daniel L. Flamm.
Contributors: Auciello, Orlando, 1945-; Flamm, Daniel L.
Series: Plasma--materials interactions
Publisher: Academic Press
Published: 1989
Place of publication: Boston
Language: eng
Number of pages: 456
Subjects: Plasma diagnostics.
Notes: Includes bibliographies and indexes.
Table of contents: title: v. 1. Discharge parameters and chemistry; title: v. 2. Surface analysis and interactions.