1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: theme--Semiconductor manufacturing: meeting the challenges of the global marketplace : ASMC 97 : proceedings : September 23-25, 1998, Boston, Massachusetts.
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: IEEE
Published: 1998
Place of publication: Piscataway, New Jersey
Language: eng
Number of pages: 482
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: Semiconductor manufacturing: meeting the challenges of the global marketplace.; ASMC 98.; Advanced Semiconductor Manufacturing Conference and Workshop.
Notes: "IEEE Catalog Number 98CH36168"verso of T.p.

Includes bibliographical references.