Semiconductor microlithography VI
Subtitle: March 30-31, 1981, San Jose, California
By: Jim Dey, editor.
Contributors: Dey, Jim.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 275
Publisher: SPIE--the International Society for Optical Engineering
Published: 1981
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 221
Subjects: Semiconductors -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and indexes.