Nanolithography and patterning techniques in microelectronics (Woodhead Publishing in Materials)
Publisher: CRC
Published: October 11, 2005
Language: eng
Format: Hardcover
Number of pages: 409
ISBN-13: 9780849334474
Subjects: Civil Engineering, Surveying & Building; Science/Mathematics; Technology; Technology & Industrial Arts; Electronics - Microelectronics; Nanotechnology; Technology / Nanotechnology; Industrial Technology; Microlithography