Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
By: James D. Patterson.
Contributors: Langley Research Center.
Publisher: National Aeronautics and Space Administration, Langley Research Center
Published: 1997
Place of publication: Hampton, Va
Language: eng
Format: Microform
Number of pages: 93
Subjects: Microelectromechanical systems; Fabry-Perot interferometers; Silicon -- Mechanical properties; Silicon -- Optical properties
Notes: Performing organization: NASA Langley Research Center.

Includes bibliographical references.

Microfiche. [Washington, D.C.] : Supt. of Docs., USGPO 1997 2 microfiches: negative.