Ellipsometric and channeling studies on ion-implanted silicon
By: (by) T. Lohner (and others).
Contributors: Lohner, T.; International Conference on Ion Beam Modification of Materials (1980 : Albany, N.Y.)
Series: KFKI -- 1980-64
Publisher: Central Research Institute for Physics
Published: 1980
Place of publication: Budapest
Language: eng
Number of pages: 13
Notes: Presented at the International Conference on Ion Beam Modification of Materials, Albany, N.Y., July 14-18, 1980.