Tekhnologicheskiĭ kontrolʹ razmerov v mikroėlektronnom proizvodstve
By: I͡U.A. Bystrov, E.A. Kolgin, B.N. Kotlet͡sov.
Contributors: Kolgin, E. A.; Kotlet͡sov, B. N.
Publisher: "Radio i svi͡azʹ"
Published: 1988
Place of publication: Moskva
Language: rus
Number of pages: 165
Subjects: Microelectronics.; Dimensions.; Physical measurements.
Notes: Bibliography: p. 162-[166].