Micro electro mechanical systems
Subtitle: an investigation of micro structures, sensors, actuators, machines, and robots : proceedings
By: IEEE, Napa Valley, California, 11-14, February 1990 ; sponsored by the IEEE Robotics and Automation Society, and in cooperation with the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; IEEE Workshop on Micro Electro Mechanical Systems (3rd : 1990 : Napa Valley, Calif.)
Publisher: IEEE
Published: 1990
Place of publication: New York, NY
Language: eng
Number of pages: 226
Subjects: Electromechanical devices -- Congresses.; Miniature objects -- Congresses.; Microelectronics -- Congresses.; Robotics -- Congresses.
Other titles: IEEE micro electro mechanical systems workshop.
Notes: Includes bibliographical references and indexes.
Papers presented at the third IEEE Workshop on Micro Electro Mechanical Systems.
"IEEE catalog number 90CH2832-4."
Title on spine: IEEE micro electro mechanical systems workshop.