Ion implantation
By: [by] G. Dearnaley [and others]
Contributors: Dearnaley, G.
Series: Defects in crystalline solids,; v. 8
Publisher: North-Holland Pub. Co.; American Elsevier
Published: 1973
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 802
Subjects: Ion implantation.
Notes: Includes bibliographies.