Nucleation of damage centres during ion implantation of silicon
By: by Lewis T. Chadderton.
Series: Risö report ;; no. 236
Publisher: Atomenergikommissionen, Forsøgsanlæg Risø, (Gjellerups Boghandel)
Published: 1970
Place of publication: Risø
Language: eng
Number of pages: 25
Subjects: Silicon crystals.; Crystals -- Defects.; Nucleation.
Notes: Includes bibliographical references.
Cover title.