In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing
Subtitle: 19-21 May, 1999, Edinburgh, Scotland
By: Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.
Contributors: Amberiadis, Kostas.; European Optical Society.; Society of Photo-optical Instrumentation Engineers.; European Commission. Directorate-General XII, Science, Research, and Development.; Scottish Enterprise.; Sira Technology Centre (U.K.); Institution of Electrical Engineers.
Series: Proceedings EurOpt series; Proceedings / SPIE--the International Society for Optical Engineering ;; v. 3743; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3743.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 344
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses; Semiconductors -- Design and construction -- Congresses; Manufacturing processes -- Congresses; Microelectronics -- Materials -- Congresses
Genres: Congresses.
Notes: Includes bibliographic references and author index.