Defects in microelectronic materials and devices
By: Daniel Fleetwood, Sokrates T. Pantelides, and Ronald D. Schrimpf.
Contributors: Pantelides, Sokrates T.; Schrimpf, Ronald Donald.
Publisher: CRC Press
Published: 2008
Place of publication: Boca Raton, FL
Language: eng
ISBN-13: 9781420043761
Subjects: Microelectronics -- Materials -- Testing; Metal oxide semiconductor field-effect transistors -- Testing; Integrated circuits -- Defects
Notes: Includes bibliographical references and index.