Proceedings of the Ninth Symposium on Plasma Processing
By: edited by G.S. Mathad, D.W. Hess
Contributors: Mathad, G. S.; Hess, Dennis W.; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Electronics Division
Series: Proceedings -- v. 92-18; Proceedings (Electrochemical Society) -- 92-18
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 654
Copyright date: 1992
Subjects: Semiconductors; Etching; Congresses; Plasma etching
Other titles: Plasma processing.
Notes: "Dielectric Science and Technology and Electronics Divisions."

Spine title: Plasma processing.

Includes bibliographical references and indexes.