Handōtai seizō sōchi yōgo jiten
By: Nihon Handōtai Seizō Sōchi Kyōkai = Terminological dictionary of semiconductor equipment / Semiconductor Equipment Association of Japan
Edition: Dai 6-han
Publisher: Nikkan Kōgyō Shinbunsha
Published: 2006
Place of publication: Tōkyō
Language: jpn
Number of pages: 564
ISBN-13: 9784526057403
Subjects: Semiconductor production equipment; Dictionaries; Japanese; Semiconductors; Japanese language; English; English language
Other titles: Terminological dictionary of semiconductor equipment
Notes: Includes indexes.