Puchki raspyli︠a︡i︠u︡shchikh ionov
Subtitle: poluchenie i primenenie
By: A.P. Semenov
Publisher: Izd-vo BNT︠S︡ SO RAN
Published: 1999
Place of publication: Ulan-Udė
Language: rus
Number of pages: 207
Subjects: Ion bombardment; Sputtering (Physics)
Other titles: Sputtering ion beams
Notes: Includes bibliographical references (p. 186-206).

Summary also in English.