Electrical and material characteristics of low pressure chemical-vapor deposited tungsten films in cold wall systems
By: Rajiv V. Joshi
Published: 1991
Language: eng
Number of pages: 116
Notes: "91-27,889."

Thesis (D. Eng Sci.)--Columbia University, 1990.

Includes bibliographical references.

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1991. 1 microfilm reel ; 35 mm.