Rapid thermal processing for future semiconductor devices
Subtitle: proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
By: edited by Hisashi Fukuda.
Contributors: Fukuda, Hisashi.
Publisher: Elsevier
Published: 2003
Place of publication: Amsterdam; Boston; London
Language: eng
Number of pages: 150
Subjects: Rapid thermal processing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references.