Micro-electro-mechanical systems--2004
Subtitle: presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California
By: sponsored by the Micro-Electro-Mechanical Systems Division, ASME.
Contributors: International Mechanical Engineering Congress and Exposition (2004 : Anaheim, Calif.)
Series: MEMS -- vol. 6; MEMS (Series) (American Society of Mechanical Engineers) -- v. 6.
Publisher: ASME
Published: 2004
Place of publication: New York, N.Y
Language: eng
Number of pages: 512
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.