Micromachining using electrochemical discharge phenomenon
Subtitle: fundamentals and application of spark assisted chemical engraving
By: Rolf Wüthrich.
Series: Micro & nano technologies
Publisher: W. Andrew; William Andrew
Published: 2009
Place of publication: Norwich, NY, USA
Language: eng
Number of pages: 181
ISBN-13: 9780815515876
Subjects: Micromachining; Electrochemical cutting; Electric discharges -- Industrial applications; Plasma etching
Notes: Includes bibliographical references.