Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.; Center for Manufacturing Engineering (U.S.)
Series: Standard reference materials; NIST special publication -- 260-114; Standard reference materials; NIST special publication -- 260-114.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1991
Place of publication: Gaithersburg, Md; Washington, DC
Language: eng
Format: Microform
Number of pages: 33
Subjects: Integrated circuits -- Design and construction -- Standards.; Microscopy -- Calibration -- Standards.; Microscopes -- Calibration -- Standards.; Optical measurements -- Standards.
Notes: "Issued January 1991."

"Center for Manufacturing Engineering, National Laboratory, National Institute of Standards and Technology."

Includes bibliographical references (p. 11-12).

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 1991. 1 microfiche : negative.