Oberflächentechnologie mit Niederdruckplasmen
Subtitle: Beschichten und Strukturieren in der Mikrotechnik
By: Gerhard Franz.
Edition: 2., völlig neubearbeitete Aufl.
Publisher: Springer-Verlag
Published: 1994
Place of publication: Berlin; New York
Language: ger
Number of pages: 434
Subjects: Plasma (Ionized gases); Plasma (Ionized gases) -- Industrial applications.; Low temperature plasmas.; Plasma engineering.; Plasma etching.
Notes: Includes bibliographical references (p. 397-416) and index.