Micro-electro-mechanical systems (MEMS)--2001
Subtitle: presented at the 2001 ASME International Mechanical Engineering Congress and Exposition : November 11-16, 2001, New York, New York
By: sponsored by the MEMS Subdivision, ASME ... [et al.] ; edited by Abraham P. Lee ... [et al.].
Contributors: Lee, Abraham P.; American Society of Mechanical Engineers. MEMS Subdivision.; International Mechanical Engineering Congress and Exposition (2001 : New York, N.Y.)
Series: MEMS ;; vol. 3; MEMS (Series) (American Society of Mechanical Engineers) ;; v. 3.
Publisher: American Society of Mechanical Engineers
Published: 2001
Place of publication: New York, N.Y
Language: eng
Number of pages: 892
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Other titles: MEMS--2001
Notes: Includes bibliographic references and author index.