Ion implantation range and energy deposition distributions
By: David K. Brice.
Contributors: Winterbon, K. Bruce, joint author.
Publisher: Plenum Press
Published: 1975
Place of publication: New York
Language: eng
Subjects: Ion implantation.
Notes: Includes bibliographical references.
Vol. 2 by K. B. Winterbon.
Vol. 2 chiefly tables.
Table of contents: value: v. 1. High incident ion energies.; value: v. 2. Low incident ion energies.