Shinkū hakumaku tsurezuregusa
By: Kinbara Akira
Edition: Shohan
Publisher: Agune Gijutsu Sentā
Published: 2013
Place of publication: Tōkyō-to Minato-ku
Language: jpn
Number of pages: 183
ISBN-13: 9784901496667
Subjects: Thin film devices; Design and construction; Vacuum technology
Notes: Includes bibliographical references (page 175) and index.