Lithographic and micromachining techniques for optical component fabrication II
Subtitle: 3-4 August, 2003, San Diego, California, USA
By: Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Kley, Ernst-Bernhard.; Herzig, Hans Peter.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5183; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5183.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 208
Subjects: Optical instruments -- Design and construction -- Congresses.; Lenses -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.