Ion implantation
Subtitle: equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
By: editors, H. Ryssel and H. Glawischnig.
Contributors: Ryssel, Heiner, 1941-; Glawischnig, H. 1939-; International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
Series: Springer series in electrophysics ;; v. 11
Publisher: Springer-Verlag
Published: 1983
Place of publication: Berlin; New York
Language: eng
Number of pages: 556
Subjects: Ion implantation -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographical references and index.