Rapid thermal processing
Subtitle: symposium held December 2-4, 1985, Boston, Massachusetts, USA
By: editors, Thomas O. Sedgwick, Thomas E. Seidel, Bor-Yeu Tsaur.
Contributors: Sedgwick, Thomas O.; Seidel, Thomas E.; Tsaur, Bor-Yeu.
Series: Materials Research Society symposia proceedings,; v. 52
Publisher: Materials, Research Society
Published: 1986
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 484
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographies and index.