Plasma-surface interactions and processing of materials
Subtitle: [proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988]
By: edited by Orlando Auciello ... [et al.].
Contributors: Auciello, Orlando, 1945-
Series: NATO ASI series. Series E, Applied sciences ;; vol. 176; NATO ASI series.; no. 176.
Publisher: Kluwer Academic Publishers; Springer
Published: 1990
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 557
Subjects: Surfaces (Technology) -- Congresses; Materials -- Effect of radiation on -- Congresses; Microelectronics -- Materials -- Effect of radiation on -- Congresses; Plasma etching -- Congresses
Notes: Includes bibliographical references.