Data analysis and modeling for process control III
Subtitle: 23 February, 2006, San Jose, California, USA
By: Iraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc.
Contributors: Emami, Iraj.; Tobin, Kenneth W.; International SEMATECH.
Series: Proceedings of SPIE -- v. 6155; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6155.
Publisher: SPIE
Published: 2006
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819461988
Subjects: Manufacturing processes -- Mathematical models -- Congresses; Manufacturing processes -- Automatic control -- Congresses; Intelligent control systems -- Mathematical models -- Congresses; Process control -- Mathematical models -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.