IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: theme, "Factory of the future" : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts.
Contributors: Semiconductor Equipment and Materials International.
Publisher: Institute of Electrical and Electronics Engineers]; IEEE Service Center [distributor]
Published: 1993
Place of publication: [New York; Piscataway, NJ
Language: eng
Number of pages: 253
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Genres: Congresses.
Other titles: ASMC '93 proceedings.; Factory of the future.; 1993 IEEE/SEMI advanced semiconductor manufacturing conference & workshop.; Advanced Semiconductor Manufacturing Conference and Workshop.
Notes: "Sponsored by Semiconductor Equipment and Materials International (SEMI) ... [et al.]. Held in conjunction with SEMICON/East 93"--P. iii.

Title on cover: 1993 IEEE/SEMI advanced semiconductor manufacturing conference & workshop.

IEEE catalog number, LCCN and ISBN from label on t.p. verso.

"IEEE catalog number 93CH3337-3"--T.p. verso.

Includes bibliographical references.