Proceedings of the First International Symposium on Electrochemical Microfabrication
By: edited by Madhav Datta, Keith Sheppard, Dexter Snyder ; [sponsored by the] Electrodeposition Division.
Contributors: Datta, Madhav.; Sheppard, Keith.; Snyder, Dexter D.; Electrochemical Society. Electrodeposition Division.
Series: Proceedings / Electrochemical Society ;; v. 92-3; Proceedings (Electrochemical Society) ;; v. 92-3.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 393
Subjects: Microelectronics -- Congresses.; Electrochemistry, Industrial -- Congresses.; Masks (Electronics) -- Congresses.; Silicon -- Congresses.; Microfabrication.
Other titles: Electrochemical microfabrication.
Notes: Includes bibliographical references and indexes.
The symposium was held Oct. 14-16, 1991, in Phoenix, Ariz.