Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI
By: edited by Wayne Greene ... [et al. ; sponsored by the] Dielectric Science and Technology and Electronics divisions.
Contributors: Greene, Wayne, 1965-; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Interconnection and Contact Metallization for ULSI Symposium (1991 : Phoenix, Ariz.)
Series: Proceedings / Electrochemical Society ;; v. 92-6; Proceedings (Electrochemical Society) ;; v. 92-6.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 382
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Microelectronic packaging -- Congresses.; Lithography -- Congresses.; Metallizing -- Congresses.
Other titles: Patterning science and technology II.; Interconnection and contact metallization for ULSI.; Patterning science and technology and interconnection and contact metallization for ULSI.
Notes: Includes bibliographical references and index.
Spine title: Patterning science and technology and interconnection and contact metallization for ULSI.
"The Second International Symposium on Patterning Science and Technology was presented at the fall meeting of the Electrochemical Society, October 13-17, 1991 in Phoenix, AZ"--P. iii.
"These papers were presented in the Interconnection and Contact Metallization for ULSI Symposium at the 180th ECS Meeting held Oct. 13-18, 1991 in Phoenix, AZ"--P. iv.