Digital holography for MEMS and microsystem metrology
By: edited by Anand Asundi
Publisher: Wiley
Published: 2011
Place of publication: Chichester, West Sussex, U.K; Hoboken, N.J
Language: eng
ISBN-13: 9780470978696
Subjects: Microelectromechanical systems; Holographic testing; Measurement; Image processing; Microelectronics; Digital techniques
Notes: Includes bibliographical references and index.