MEMS 2005 Miami
Subtitle: 18th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Miami Beach, Florida, USA, January 30-February 3, 2005
By: sponsored by IEEE and the Robotics and Automation Society.
Contributors: Institute of Electrical and Electronics Engineers.; IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 2005
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 886
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Micro electro mechanical systems; Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.
Notes: Includes bibliographical references and indexes.
"IEEE Catalog Number: 05CH37610"--T.p.
Also issued online with additional title: Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.