IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Subtitle: June 15-16, 1992, San Francisco, CA USA.
Contributors: Semiconductor Equipment and Materials Institute.; IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1992
Place of publication: New York, N.Y
Language: eng
Number of pages: 146
Subjects: Semiconductors -- Design and construction -- Congresses.
Other titles: ISMSS.; 1992 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
Notes: "ISMSS."

"IEEE Catalog Number 92CH3161-7."

On cover and spine: 1992 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Co-sponsored by Semiconductor Equipment and Materials International (SEMI), The Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology (CHMT) Society.

Includes bibliographical references.