Micromachining technology for micro-optics and nano-optics
Subtitle: 28-29 January 2003, San Jose, California, USA
By: Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Johnson, Eric G.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Washington, USA
Language: eng
Number of pages: 262
Subjects: Integrated optics -- Congresses.; Miniature electronic equipment -- Design and construction -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microelectromechanical systems -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Other titles: Micromachining technology for micro-optics.
Notes: Includes bibliographical references and index.
Earlier conference has title: Micromachining technology for micro-optics.