1997 2nd International Workshop on Statistical Metrology
Subtitle: IWSM, June 8, 1997, Kyoto
By: sponsored by IEEE Electron Devices Society ; in cooperation with Japan Society of Applied Physics ... [et al.].
Contributors: IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.
Publisher: IEEE
Published: 1997
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 124
Subjects: Semiconductors -- Characterization -- Statistical methods -- Congresses.; Semiconductors -- Measurement -- Statistical methods -- Congresses.
Other titles: 2nd International Workshop on Statistical Metrology; International Workshop on Statistical Metrology
Notes: "IEEE Cat. No. 97TH8246."

Includes bibliographical references.
Table of contents: value: Session I. Statistical device characterization; value: Session II. Variation statistics on circuit; value: Session III. Process & equipment simulation/calibration; value: Session IV. Defect inspection; value: Session V. SPC & yield modeling.