Silicon epitaxy
By: volume editors, Danilo Crippa, Daniel L. Rode, Maurizio Masi.
Contributors: Crippa, Danilo.; Rode, Daniel L.; Masi, Maurizio.
Series: Semiconductors and semimetals -- v. 72
Publisher: Academic Press
Published: 2001
Place of publication: San Diego
Language: eng
Number of pages: 491
Subjects: Semiconductors -- Design and construction; Silicon crystals -- Growth; Epitaxy
Notes: Includes bibliographical references and index.