Antireflecting-Chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Series: Standard reference materials; NIST Publication ;; 260-117
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 1992
Place of publication: Gaithersburg, Md
Language: eng
Number of pages: 37
Notes: PRIORITY 2.