Photon, beam and plasma assisted processing
Subtitle: proceedings of Symposium R on photon, beam and plasma assisted processing fundamentals and device technology of the 1988 E-MRS Spring Conference, Strasbourg, France, 31 May -  2 June 1988
By: guest editors: I.W. Boyd and E.F. Krimmel.
Contributors: Boyd, I. W.; Krimmel, E. F.; European Materials Research Society. Spring Conference
Series: Applied surface science -- vol. 36
Publisher: North Holland
Published: 1989
Place of publication: Amsterdam
Language: eng