Fizika submikronnoĭ litografii
By: K.A. Valiev.
Publisher: "Nauka," Glav. red. fiziko-matematicheskoĭ lit-ry; "Nauka," Glav. red. fiziko-matematicheskoĭ lit-ry
Published: 1990
Place of publication: Moskva
Language: rus
Number of pages: 527
Subjects: Integrated circuits -- Design and construction.; Lithography.
Notes: Includes bibliographical references.
"Nauchnoe izdanie"--Verso t.p.