Reliability, testing, and characterization of MEMS/MOEMS II
Subtitle: 27-29 January 2003, San Jose, California, USA
By: Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Ramesham, Rajeshuni.; Tanner, Danelle Mary, 1952-; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 4980; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4980.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 334
Subjects: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.