Advances in resist materials and processing technology XXVII
Subtitle: 22-24 February 2010, San Jose, California, United States
By: Robert D. Allen, Mark H. Somervell, editors ; sponsored by SPIE ; cooperating organization, SEMATECH Inc. (United States)
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7639
Publisher: SPIE, $c c2010.
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819480538
Notes: Includes bibliographical references.