Silicon nitride and silicon dioxide thin insulating films
Subtitle: proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
By: editors M. Jamal Deen ... [et al.] ;  Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].
Contributors: Deen, M. Jamal.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (4th : 1997 : Montreal, Quebec)
Series: Proceedings / Electrochemical Society ;; v. 97-10; Proceedings (Electrochemical Society) ;; v. 97-10.
Publisher: Electrochemical Society
Published: 1997
Place of publication: Pennington, New Jersey
Language: eng
Number of pages: 588
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.
Notes: Includes bibliographic references and indexes.