Micromechanical sensors, actuators, and systems
Subtitle: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991
By: sponsored by the Dynamic Systems and Control Division, the Heat Transfer Division, and the Advanced Energy Systems Division, ASME ; edited by D. Cho ... [et al.].
Contributors: Cho, D.; American Society of Mechanical Engineers. Winter Meeting; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; American Society of Mechanical Engineers. Heat Transfer Division.; American Society of Mechanical Engineers. Advanced Energy Systems Division.
Series: DSC ;; vol. 32; DSC (Series) ;; v. 32.
Publisher: ASME
Published: 1991
Place of publication: New York, N.Y
Language: eng
Number of pages: 362
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Notes: Includes bibliographical references and index.