"Chōhakumaku zairyō sekkei gijutsu no kaihatsu ni kansuru kenkyū"
Subtitle: 21-seiki o hiraku sentan kinō hakumaku o mezahite : seika hōkokusho.
Contributors: Japan. Kagaku Gijutsuchō. Kenkyū Kaihatsukyoku.
Publisher: Kagaku Gijutsuchō Kenkyū Kaihatsukyoku
Published: 1998
Place of publication: Tōkyō
Language: jpn
Subjects: Thin film devices -- Design and construction.
Notes: Cover title.

"Dai 1-ki Heisei 6-nendo--Heisei 8-nendo."

"Dai II-ki Heisei 9-nendo--Heisei 10-nendo."

Includes bibliographical references.