Rapid thermal and other short-time processing technologies III
Subtitle: proceedings of the International Symposium
By: editors, P.J. Timans  ... [et al.].
Contributors: Timans, P. J.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. High Temperature Materials Divisions.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 2002-11.; Proceedings (Electrochemical Society) ;; v. 2002-11.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, NJ
Language: eng
Number of pages: 478
Subjects: Integrated circuits -- Design and construction -- Congresses.; Manufacturing processes -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Sponsoring divisions, Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions".
"The international symposium on Rapid Thermal and Other Short-Time Processing Technologies III was held from May 13 through May 16, 2002 in Philadelphia, Pennsylvania as part of the Centennial (201st) Meeting of the Electrochemical Society"--Pref.