Rapid Thermal Processing
Subtitle: Symposium Held December 2-4, 1985, Boston, Massachusetts, USA (Materials Research Society Symposia Proceedings, Vol 52)
Publisher: Materials Research Society
Published: April 1986
Language: eng
Format: Hardcover
Number of pages: 484
ISBN-13: 9780931837173
Subjects: Heat treatment; Semiconductor doping; Semiconductors; Congresses