MEMS/MOEMS components and their applications IV
Subtitle: 22-23 January 2007, San Jose, California, USA
By: Srinivas A. Tadigadapa, Reza Ghodssi, Albert K. Henning, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Ghodssi, Reza.; Tadigadapa, Srinivas A.; Henning, Albert Karl.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE -- v. 6464; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6464.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819465771
Subjects: Microelectromechanical systems -- Congresses; Optoelectronic devices -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.