Handbook of silicon semiconductor metrology
By: edited by Alain C. Diebold
Publisher: Marcel Dekker
Published: 2001
Place of publication: New York
Language: eng
Format: [electronic resource] /
ISBN-13: 9780203904541
Subjects: Semiconductors; Inspection; Measurement
Other titles: ENGnetBASE.
Notes: Includes bibliographical references and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.