Lasers in microlithography
Subtitle: 2-3 March 1987, Santa Clara, California
By: Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Contributors: Ehrlich, Daniel J.; Tsao, Jeffrey Y.; Batchelder, John Samuel.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 774
Publisher: The Society
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 192
Subjects: Lasers -- Industrial applications -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and index.
Errata slip inserted.
Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors.