Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
By: James D. Patterson.
Contributors: Langley Research Center.
Series: NASA technical paper -- 3702
Publisher: National Aeronautics and Space Administration, Langley Research Center; Available from National Technical Information Service
Published: 1997
Place of publication: Hampton, Va; Springfield, Va
Language: eng
Number of pages: 93
Subjects: Fabry-Perot interferometers.; Microelectromechanical systems.; Silicon -- Mechanical properties.; Silicon -- Optical properties.
Notes: "September 1997."

"Performing organization report number L-17646"--Report documentation page.

Includes bibliographical references.

Prepared by NASA Langley Research Center for National Aeronautics and Space Administration WU 274-00-97-01