Characterization and metrology for ULSI technology 2000
Subtitle: International Conference,Gaithersburg, Maryland, 26-29, June 2000
By: editors  David G. Seiler ... [et al.].
Contributors: Seiler, David G.; International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)
Series: AIP Conference Proceedings -- vol. 550; AIP conference proceedings -- no. 550.
Publisher: American Institute of Physics
Published: 2000
Place of publication: Melville, N.Y
Language: eng
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.; Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Genres: Congresses.; Congresses; Software.
Notes: "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from June 26 to June 29, 2000"--Pref.

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