Development of ellipsometric microscopy as a quantitative high-resolution technique for the investigation of thin films at glass-water and silicon-air interfaces
By: Felix Linke
Series: Schriften des Forschungszentrums Jülich -- Bd. 23
Publisher: Forschungszentrum Jülich
Published: 2004
Place of publication: Jülich
Language: eng
Number of pages: 133
Subjects: Ellipsometry; Thin films; Analysis; Thin film devices
Notes: Includes bibliographical references (p.126-130).