Semiconductor industry
Subtitle: wafer fab exhaust management
By: J. Michael Sherer
Publisher: Taylor & Francis
Published: 2005
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 194
Subjects: Semiconductor wafers -- Design and construction; Semiconductor industry -- Environmental aspects; Volatile organic compounds -- Environmental aspects; Air -- Purification -- Technological innovations
Notes: Includes bibliographical references and index