Frontiers of characterization and metrology for nanoelectronics
Subtitle: 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007
By: editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].
Contributors: Seiler, David G.; National Institute of Standards and Technology (U.S.)
Series: AIP conference proceedings -- v. 931; AIP conference proceedings -- no. 931.
Publisher: American Institute of Physics
Published: 2007
Place of publication: Melville, N. Y
Language: eng
Number of pages: 578
ISBN-13: 9780735404410
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses; Nanoelectronics -- Congresses
Genres: Congresses.
Other titles: International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Notes: "All papers have been peer-reviewed."

Previous conferences entitled: International Conference on Characterization and Metrology for ULSI Technology.

Includes bibliographical references and indexes.

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