Laser applications in microelectronic and optoelectronic manufacturing VII
Subtitle: 26-29 January 2009, San Jose, California, United States
By: Michel Meunier ... [et al.], editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7201; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7201.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819474476
Notes: Includes bibliographical references and index.