Micromachined devices and components VI
Subtitle: 18-19 September 2000, Santa Clara, USA
By: Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Peeters, Eric.; Paul, Oliver.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series ; v. 4176; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4176.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 282
Subjects: Electromechanical devices -- Congresses.; Micromechanics -- Congresses.; Micromachining -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.