LIGA and its Applications (Advanced Micro and Nanosystems)
Contributors: Volker Saile (Editor); Ulrike Wallrabe (Editor); Osamu Tabata (Editor); Jan G. Korvink (Editor); Oliver Brand (Series Editor); Gary K. Fedder (Series Editor); Christofer Hierold (Series Editor)
Publisher: Wiley-VCH
Published: July 21, 2008
Language: eng
Format: Hardcover
Number of pages: 456
ISBN-13: 9783527316984
Subjects: Biotechnology; Electronics & Communications Engineering; Production engineering; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Technology / Electronics / Microelectronics; Electronics - Microelectronics