Ion beams
Subtitle: with applications to ion implantation
By: Robert G. Wilson, George R. Brewer.
Contributors: Brewer, George Raymond, 1922- joint author.
Edition: Reprint ed. with corrections.
Publisher: R. E. Krieger Pub. Co.
Published: 1979
Place of publication: Huntington, N.Y
Language: eng
Number of pages: 500
Subjects: Ion implantation.; Semiconductors.; Microelectronics.
Notes: Includes bibliographies and index.
Reprint of the ed. published by Wiley, New York.