Proceedings of the Fifth Symposium on Automated Integrated Circuits Manufacturing
By: edited by Vaughn Akins ; assistant editors, Hiroyuki Harada, Robert Miller, Mihir Parikh.
Contributors: Akins, Vaughn E.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 90-3; Proceedings (Electrochemical Society) ;; v. 90-3.
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 288
Subjects: Integrated circuits -- Design and construction -- Data processing -- Congresses.; Electronic industries -- Automation -- Congresses.
Other titles: Proceedings of the 5th Symposium on Automated Integrated Circuits Manufacturing.; Automated integrated circuits manufacturing.
Notes: Includes bibliographical references and indexes.
Spine title: Automated integrated circuits manufacturing.
"[Co-sponsored by] Electronics and Dielectrics and Insulation divisions."