Ion implantation in semiconductors
Subtitle: science and technology : [proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974]
By: edited by Susumu Namba.
Contributors: Namba, Susumu, 1928-
Publisher: Plenum Press
Published: 1975
Place of publication: New York
Language: eng
Number of pages: 742
Subjects: Ion implantation -- Congresses.; Semiconductors -- Effect of radiation on -- Congresses.; Metals -- Effect of radiation on -- Congresses.
Notes: Includes bibliographical references and indexes.