Microsystems engineering
Subtitle: metrology and inspection III : 23-25 June, 2003, Munich, Germany
By: Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).
Contributors: Gorecki, Christophe.; European Optical Society.; Wissenschaftliche Gesellschaft Lasertechnik.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5145; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5145.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 210
Subjects: Quality control -- Optical methods -- Congresses; Optical detectors -- Industrial applications -- Congresses; Microelectronics -- Congresses; Microelectromechanical systems -- Congresses; Interferometry -- Congresses; Mensuration -- Congresses
Genres: Congresses.
Other titles: Metrology and inspection
Notes: Includes bibliographical references and author index.