Fotorezisty-diffuzanty v poluprovodnikovoĭ tekhnologii
By: otvetstvennyĭ redaktor A.V. Elʹt͡s︡ov ; [Elena Grigorʹevna Guk ... et al.].
Contributors: Elʹt͡s︡ov, A. V.; Guk, Elena Grigorʹevna.; Fiziko-tekhnicheskiĭ institut im. A.F. Ioffe.
Publisher: "Nauka," Leningradskoe otd-nie
Published: 1984
Place of publication: Leningrad
Language: rus
Number of pages: 115
Subjects: Semiconductors.; Photoresists.
Notes: Includes bibliographies.
At head of title: Akademii͡a︡ nauk SSSR. Ordena Lenina Fiziko-tekhnicheskiĭ institut imeni A.F. Ioffe.