Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
Subtitle: Fundamental Mechanisms And Application To Ic Interconnect Technology
Publisher: Springer
Published: Feb 23, 2014
Format: paperback
Number of pages: 243
ISBN-13: 9781461354246
Notes: Source title: Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms And Application To Ic Interconnect Technology