Chemical-Mechanical Planarization--Integration, Technology and Reliability
Subtitle: Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Publisher: Materials Research Society
Published: January 2005
Language: eng
Format: Hardcover
Number of pages: 302
ISBN-13: 9781558998209
Subjects: Electronics - General; Engineering (General); Technology & Industrial Arts