Electron-Beam Interactions with Solids
Subtitle: Application of the Monte Carlo Method to Electron Scattering Problems (Springer Tracts in Modern Physics)
Edition: 1 edition
Publisher: Springer
Published: June 11, 2004
Language: eng
Format: Hardcover
Number of pages: 106
ISBN-13: 9783540006527
Subjects: Atomic & molecular physics; States of matter; Theoretical methods; Scattering; Monte Carlo method; Science; Technology & Industrial Arts; Science/Mathematics; General; Nuclear Energy; Physics; Electron Beams; Electron Scattering; Monte Carlo; Reference-General; Science-Physics; Technology / Material Science; Technology / Nuclear Energy; Electron Microscopes & Microscopy; Electrons
First sentence: Studies of low-energy backscattered electrons, secondary electrons and absorbed electron depth distribution, have all been of great interest for many analytical techniques.
Description: The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.