The deposition of amorphous silicon films by the technique of magnetron sputtering
By: H. Arenz... [et al.].
Contributors: Arenz, H.
Series: Energy
Publisher: Commissionof the European Communities
Published: 1988
Place of publication: Luxembourg
Language: eng
Notes: EUR 11613 EN.

Blow-up from microfiche original.

At head of t.p.: Commission of the European Communities.

At foot of t.p.: Directorate-General Science, Research and Development.