Fundamental Aspects of Ultrathin Dielectrics on Si-Based (NATO Science Partnership Sub-Series: 3:)
Contributors: Eric Garfunkel (Editor); Evgeni Gusev (Editor); Alexander Vul' (Editor)
Edition: 1 edition
Publisher: Springer
Published: March 31, 1998
Language: eng
Format: Paperback
Number of pages: 520
ISBN-13: 9780792350088
Subjects: Semi-conductors & super-conductors; Engineering - Electrical & Electronic; Technology & Industrial Arts; Electronics - Semiconductors; Technology / Optics