Ion Implantation in semiconductors, 1976
By: edited by Fred Chernow and James A. Borders and David K. Brice.
Contributors: Chernow, Fred.; Borders, James A.; Brice, David K.
Publisher: Plenum Press
Published: 1977
Place of publication: New York
Language: eng
Number of pages: 754
Subjects: Ion implantation -- Congresses.; Semiconductors -- Effect of radiation on -- Congresses.
Notes: Includes bibliographical references and index.