Lithography for Semiconductor Manufacturing
Subtitle: Proceedings 19-21 May 1999 Edinburgh, Scotland (Proceedings Europt Series)
Contributors: European Optical Society (Corporate Author); Chris A. MacK (Editor); Tom Stevenson (Editor)
Publisher: Society of Photo Optical; SPIE
Published: April 1999
Language: eng
Format: Paperback
Number of pages: 262
ISBN-13: 9780819432216
Subjects: Applied optics; Production engineering; Semi-conductors & super-conductors; Electronics - Microelectronics; Electronics - Optoelectronics; Technology; Congresses; Design and construction; Etching; Integrated circuits; Microlithography; Semiconductors; Science/Mathematics