Enabling technology for MEMS and nanodevices
By: edited by  H. Baltes ... [et al.]
Contributors: Baltes, H.
Series: Advanced micro & nanosystems -- v. 1
Publisher: Wiley-VCH
Published: 2004
Place of publication: Weinheim, Germany
Language: eng
Number of pages: 427
Subjects: Microelectromechanical systems; Microelectronics; Nanotechnology
Notes: Includes bibliographical references and index