Ionized physical vapor deposition
By: Edited by Jeffrey A. Hopwood.
Contributors: Hopwood, Jeffrey A.
Series: Thin films -- v. 27.; Thin films (San Diego, Calif.) -- v. 27.
Publisher: Academic Press
Published: 2000
Place of publication: San Diego
Language: eng
Number of pages: 253
Subjects: Thin film devices -- Design and construction.; Vapor-plating.; Thin films.
Notes: Includes bibliographical references and indexes.