Introduction to microelectromechanical systems engineering
By: Nadim Maluf, Kirt Williams
Contributors: Williams, Kirt
Edition: 2nd ed
Series: Microelectromechanical systems series
Publisher: Artech House
Published: 2004
Place of publication: Boston
Language: eng
Number of pages: 283
Subjects: Microelectromechanical systems
Notes: Includes bibliographical references and index