Cost and performance in integrated circuit creation
Subtitle: 27-28 February 2003, Santa Clara, California, USA
By: Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Wong, Alfred Kwok-Kit.; Monahan, Kevin M.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5043; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5043.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 186
Subjects: Integrated circuits -- Design and construction -- Costs -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction -- Costs -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.