Poluchenie ėpitaksialʹnykh struktur kremnii͡a︡ s kontroliruemym primesnym profilem
By: V.V. Kharchenko.
Publisher: Izd-vo "Fan" Uzbekskoĭ SSR
Published: 1989
Place of publication: Tashkent
Language: rus
Number of pages: 167
Subjects: Semiconductors.; Silicon -- Additives.
Notes: Includes bibliographical references (p. 157-[166]).
At head of title: Akademii͡a︡ nauk Uzbekskoĭ SSR. T͡S︡entralʹnoe proektno-konstruktorskoe i tekhnologicheskoe bi͡u︡ro nauchnogo priborostroenii͡a︡.