Ultra-clean Technology Handbook
Publisher: CRC
Published: June 29, 1993
Language: eng
Format: Hardcover
Number of pages: 944
ISBN-13: 9780824787530
Subjects: Other Technologies; Water supply & treatment; Science/Mathematics; Process Engineering; Water Purification; Technology; Technology & Industrial Arts; Water Supply; Chemistry - Industrial & Technical; Engineering - Industrial; Nature / Water Supply; Engineering - Civil; Cleaning; Manufacturing processes
First sentence: Current emphasis is focused on a semiconductor technology capable of handling fine processing, for 0.1-1.0 um pattern formation, for example, or the formation of thin films of 10 nm or less, and of improving the yield of such fine-geometry devices.