Integration of advanced micro- and nanoelectronic devices--critical issues and solutions
Subtitle: symposia held April 13-16, 2004, San Francisco, California, U.S.A.
By: editors: J. Morais ... [et al.].
Contributors: Morais, J.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings ;; v. 811; Materials Research Society symposia proceedings ;; v. 811.
Publisher: Materials Research Society
Published: 2004
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 471
Subjects: Microelectronics -- Equipment and supplies -- Congresses.; Nanotechnology -- Congresses.; Nanostructured materials -- Design and construction -- Congresses.; Ferroelectric devices -- Congresses.
Genres: Congresses.
Other titles: High-k insulators and ferroelectrics for advanced microelectronic devices; Integration challenges in next-generation oxide-based nanoelectronics
Notes: Includes bibliographical references and indexes.
"This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv.