Fourth IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing
Subtitle: [proceedings]
By: sponsored by IEEE Electron Devices Society ... [et al.].
Contributors: IEEE Electron Devices Society.
Publisher: Institute of Electrical and Electronics Engineers; Additional copies may be purchased from IEEE Service Center
Published: 1995
Place of publication: [New York, N.Y.]; Piscataway, NJ
Language: eng
Number of pages: 294
Subjects: Electronic industries -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Computer integrated manufacturing systems -- Congresses.; Confocal microscopy -- Congresses.; Semiconductor wafers -- Congresses.
Other titles: International Symposium on Seminconductor Manufacturing; Fourth Internatioal Symposium on Semiconductor Manufacturing; Proceedings 1996
Notes: Cover title.
"IEEE catalog number 95CH35841"--Spine.
Table of contents: value: session 1. Global manufacturing issues; value: session 2. Process & manufacturing I; value: session 3. Yield management & defect controls; value: session 4. Scheduling & real time management; value: Poster session; value: session 5. Manufacturing and the environment; value: session 6. Equipment & manufacturing; value: session 7. Logistics & fab performance; value: session 8. Process & manufacturing II.