Ion implantation
By: edited by Fred H. Eisen [and] Lewis T. Chadderton.
Contributors: Eisen, Fred H., ed.; Chadderton, Lewis T., ed.
Publisher: Gordon and Breach Science Publishers
Published: 1971
Place of publication: London; New York
Language: eng
Number of pages: 464
Subjects: Ion implantation -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references.
Held May 4-7, 1970.