Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)
Edition: 1 edition
Publisher: Springer
Published: September 25, 2006
Language: eng
Format: Hardcover
Number of pages: 263
ISBN-13: 9783540236740
Subjects: Mathematics and Science; Physical chemistry; Science/Mathematics; Optics; Science; Chemistry - Physical & Theoretical; Nuclear Physics; Implanted shallow junctions; Ion ranges; Ion-modified materials; Science / Nuclear Physics; Slicing silicon; PHYSICS; Ion implantation
First sentence: Ion beam processing of materials results from the introduction of atoms into the surface layer of a solid substrate by bombardment of the solid with ions in the electron-volt to mega-electron-volt energy range.