Rapid Thermal and Other Short Time Processing
Subtitle: Proceedings of the International Symposium (Proceedings (Electrochemical Society), V. 2000-9.)
Contributors: Electrochemical Society Electronics Division (Corporate Author)
Publisher: Electrochemical Society
Published: November 2000
Language: eng
Format: Hardcover
Number of pages: 462
ISBN-13: 9781566772747
Subjects: General; Technology & Industrial Arts; Congresses; Design and construction; Integrated circuits; Manufacturing processes; Rapid thermal processing; Science/Mathematics