Beam injection assessment of microstructures in semiconductors
Subtitle: BIAMS 2000 : proceedings of the 6th International Workshop on Beam Injection Assessment of Mictrostructures in Semiconductors held in Fukuoka, Japan, November 12-16, 2000
By: editors: Hajime Tomokage and Takashi Sekiguchi.
Series: Diffusion and defect data--solid state data.; Pt. B, Solid state phenomena,; v. 78-79; Diffusion and defect data.; v. 78-79.
Publisher: Scitec Publications
Published: 2001
Place of publication: Uetikon-Zuerich, Switzerland
Language: eng
Number of pages: 441
Subjects: Semiconductors -- Testing -- Congresses.; Semiconductors -- Microscopy -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.