IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany
By: sponsored by the IEEE Robotics and Automation Society ; in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.
Contributors: American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Baden-Württemberg (Germany). Wirtschaftsministerium.; IEEE Robotics and Automation Society.
Publisher: Institute of Electrical and Electronics Engineers; IEEE Service Center
Published: 1998
Place of publication: [New York, N.Y.]; Piscataway, NJ
Language: eng
Number of pages: 666
Subjects: Actuators -- Congresses.; Detectors -- Congresses.; Electromechanical devices -- Congresses.; Microelectronics -- Congresses.
Other titles: 1998 IEEE Micro Electro Mechanical Systems; Eleventh Annual International Workshop on Micro Electro Mechanical Systems; 11th Annual International Workshop on Micro Electro Mechanical Systems; Investigation of micro structures, sensors, actuators, machines and systems; Micro Electro Mechanical Systems; MEMS 98
Notes: "IEEE catalog number 98CH36176."

Includes bibliographical references and indexes.