Ion Implantation: Equipment and Techniques
Subtitle: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
By: edited by Heiner Ryssel, Hans Glawischnig
Contributors: Glawischnig, Hans
Series: Springer Series in Electrophysics, 0172-5734 -- 11; Springer series in electrophysics -- 11.
Publisher: Springer Berlin Heidelberg
Published: 1983
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
ISBN-13: 9783642691560
Subjects: Crystallography; Physics