Opticheskie osnovy kontaktnoĭ fotolitografii
By: G.N. Berezin, A.V. Nikitin, R.A. Suris.
Series: Massovai͡a︡ biblioteka inzhenera "Ėlektronika" ;; vyp. 33; Massovai͡a︡ biblioteka inzhenera "Ėlektronika" ;; 33
Publisher: "Radio i svi͡a︡zʹ"
Published: 1982
Place of publication: Moskva
Language: rus
Number of pages: 102