Defects and diffusion in silicon processing
Subtitle: symposium held April 1-4, 1997, San Francisco, California, U.S.A.
By: editors, Tomas Diaz de la Rubia ... [et al.].
Contributors: Diaz de la Rubia, Tomas.
Series: Materials Research Society symposium proceedings,; v. 469; Materials Research Society symposia proceedings ;; v. 469.
Publisher: Materials Research Society
Published: 1997
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 541
Subjects: Semiconductors -- Defects -- Congresses.; Semiconductor doping -- Congresses.; Silicon crystals -- Defects -- Congresses.
Notes: Includes bibliographical references and index.