Proceedings of the Workshop on Silicides and Metals for VLSI Applications V, 11-14 May 1987, San Juan Bautista, California
By: special editor for the proceedings: Michael D. Strathman; sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and the American Vacuum Society.
Contributors: American Institute of Physics; American Vacuum Society; University of California, Berkeley; Workshop on Silicides and Metals for VLSI Applications (5th : 1987 : San Juan Bautista, Calif.)
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1987
Place of publication: New York
Number of pages: 1759
Subjects: Integrated circuits -- Large scale integration -- Congresses
Notes: Includes bibliographical references.

Source: Journal of vacuum science & technology B, 2nd ser., v.5, no.6, Nov/Dec. 1987, p.[1657]-1759

1:SERIALS Journal of vacuum science & technology