Microelectronics processing
Subtitle: inorganic materials characterization
By: Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
Contributors: Casper, L. A.; American Chemical Society. Division of Industrial and Engineering Chemistry.
Series: ACS symposium series,; 295
Publisher: American Chemical Society
Published: 1986
Place of publication: Washington, DC
Language: eng
Number of pages: 443
Subjects: Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographies and indexes.