Microprocesses and nanotechnology 2002
Subtitle: digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan
By: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
Contributors: Okazaki, Shinji.; IEEE Electron Devices Society; Ōyō Butsuri Gakkai.; American Vacuum Society.
Publisher: Business Center for Academic Societies Japan
Published: 2002
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 341
Subjects: Integrated circuits -- Very large scale integration -- Design and construction. -- Congresses; Lithography -- Congresses; Nanotechnology -- Congresses; Microelectronics -- Congresses
Genres: Congresses.
Notes: Includes advertising material.

Conference number extrapolated.

Chair, organizing committee, Dr. Shinji Okazaki.

Includes bibliographic references and author index.

Also available via the World Wide Web.