Crystalline defects and contamination: Their impact and control in device manufacturing 
Subtitle: proceedings of the Satellite Symposium to ESSDERC 93, Grenoble, France (Proceedings)
Contributors: Bernd O. Kolbesen (Other Contributor); Electrochemical Society (Other Contributor)
Publisher: Electrochemical Society
Published: 1993
Language: eng
Format: Paperback
Number of pages: 283
ISBN-13: 9781566770590
Subjects: Logic Design; Computer Bks - General Information