Proceeding of the Workshop on Refractory Metals and Silicides for VLSI III, 13-16 May 1985, San Juan Bautista, California
By: special editor for the proceedings: Michael D. Strathman; sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley. and the American Vacuum Society.
Contributors: American Institute of Physics; American Vacuum Society; University of California, Berkeley; Workshop on Refractory Metals and Silicides for VLSI (3rd : 1985 : San Juan Bautista, Calif.)
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1985
Place of publication: New York
Number of pages: 1724
Subjects: Integrated circuits -- Large scale integration -- Congresses
Notes: Includes bibliographical references.

Source: Journal of vacuum science & technology, B, v.3, no.6, Nov-Dec. 1985, p.1653-1724

1:SERIALS Journal of vacuum science & technology