Development of Si[1-x]Ge[x] technology for microwave sensing applications
By: Rafael A. Mena ... [et al.].
Contributors: Mena, Rafael A.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 106157.; NASA technical memorandum -- 106157.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1993
Place of publication: [Washington, DC]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Silicon alloys.; Ellipsometry.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 93-1213-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1993] 1 microfiche.