Ultraviolet Spectroscopy and UV Lasers (Practical Spectroscopy)
Contributors: Prabhakar Misra (Editor); Mark A. Dubinskii (Editor)
Edition: 1st edition
Publisher: CRC
Published: January 15, 2002
Language: eng
Format: Hardcover
Number of pages: 584
ISBN-13: 9780824706685
Subjects: Applied optics; Chemical spectroscopy, spectrochemistry; Ultraviolet radiation; Light; Laser Technology; Spectroscopy; Science; Science/Mathematics; Microscopes & Microscopy; Chemistry - Analytic; General; Science / Chemistry / Technical & Industrial; Ultraviolet spectroscopy; Lasers; Laser beams
First sentence: The relentless drive of the semiconductor industry to smaller device dimensions continues to present new challenges for all the enabling fabrication technologies, and in particular to microlithography.