Ultra clean processing of semiconductor surfaces VIII
Subtitle: UCPSS 2006 : selected, peer reviewed papers from the 8th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Antwerp, Belgium, September 18-20, 2006
By: edited by Paul Mertens, Marc Meuris and Marc Heyns.
Contributors: Mertens, Paul.; Meuris, Marc.; Heyns, Marc.
Series: Solid state phenomena -- v. 134
Publisher: Trans Tech Publications
Published: 2008
Place of publication: Switzerland; United States
Language: eng
Number of pages: 390
Subjects: Semiconductors -- Surfaces -- Congresses
Notes: Includes bibliographical references and indexes.