Handbook of VLSI microlithography
Subtitle: principles, technology, and applications
By: [edited] by John Helbert.
Contributors: Helbert, John N.
Edition: 2nd ed.
Publisher: Noyes Publications/William Andrew Pub.
Published: 2000
Place of publication: Norwich, NY
Language: eng
Subjects: Integrated circuits -- Very large scale integration; Microlithography
Notes: Includes bibliographical references and index.