MEMS linear and nonlinear statics and dynamics
By: by Mohammad I. Younis
Series: Microsystems -- 20
Publisher: Springer
Published: 2010
Place of publication: New York; London
Language: eng
Number of pages: 453
ISBN-13: 9781441960191; 9781441960207
Subjects: Microelectromechanical systems; Statics; Dynamics; Mathematical models
Notes: Includes bibliographical references and index.