Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V
Subtitle: 24-25 August 2011, San Diego, California, United States
By: Michael T. Postek, Victoria A. Coleman, editors ; sponsored by SPIE; technical cosponsor, National Institute of Standards and Technology (United States)
Contributors: SPIE (Society); National Institute of Standards and Technology (U.S.)
Series: Proceedings of SPIE -- v. 8105; Proceedings of SPIE--the International Society for Optical Engineering -- v. 8105.
Publisher: SPIE
Published: 2011
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819487155
Subjects: Nanostructured materials; Microfabrication; Congresses; Nanotechnology
Other titles: Instrumentation, metrology, and standards for nanomanufacturing IV.
Notes: Previous conference titled: Instrumentation, metrology, and standards for nanomanufacturing IV.

Includes bibliographical references.