Reliability, packaging, testing, and characterization of MEMS/MOEMS IV
Subtitle: 24-25 January 2005, San Jose, California, USA
By: Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA).
Contributors: Tanner, Danelle Mary, 1952-; Ramesham, Rajeshuni.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 5716; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5716.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 220
Subjects: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Other titles: Reliability, testing and characterization of MEMS/MOEMS.
Notes: Includes bibliographical references and author index.
Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS