Handbook of Silicon Semiconductor Metrology
Publisher: CRC
Published: June 29, 2001
Language: eng
Format: Hardcover
Number of pages: 896
ISBN-13: 9780824705060
Subjects: Electricity, magnetism & electromagnetism; Semi-conductors & super-conductors; Semiconductors; Electronic Measurements; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - Electrical & Electronic; Technology / Electronics / General; Inspection; Measurement
First sentence: Metrology is an exciting field that requires a background in both semiconductor fabrication (process) and measurement technology and physics.