Hakumakuka gijutsu
By: Wasa Kiyotaka, Hayakawa Shigeru cho.
Contributors: Hayakawa, Shigeru, 1925-
Edition: Dai 3-han
Publisher: Kyōritsu Shuppan Kabushiki Kaisha
Published: 2002
Place of publication: Tōkyō
Language: jpn
Number of pages: 316
Subjects: Thin film devices -- Design and construction.
Notes: Includes bibliographical references and index.