Plasma Assisted Low Temperature Semiconductor Wafer Bonding
Series: Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, 621
Publisher: Uppsala Universitet
Published: June 2001
Language: eng
Format: Paperback
Number of pages: 37
ISBN-13: 9789155449933
Subjects: Electricity; Electronics - Semiconductors; Semiconductor Physics; Semiconductors; Technology; Science/Mathematics