Materials and device characterization in micromachining II
Subtitle: 20-21 September 1999, Santa Clara, California
By: Yuli Vladimirsky, Craig R. Friedrich, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].
Contributors: Vladimirsky, Yuli.; Friedrich, Craig.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series,; v. 3875; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3875.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 256
Subjects: Micromachining -- Congresses.; Electromechanical devices -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.