Ab initio molecular dynamics simulation of diffusion in silicon
By: Beat Sahli.
Edition: 1st ed.
Series: Series in microelectronics -- v. 181
Publisher: Hartung-Gorre
Published: 2007
Place of publication: Konstanz
Language: eng
Number of pages: 189
Subjects: Silicon -- Diffusion rate; Molecular dynamics -- Simulation methods
Notes: "Reprint of Diss. ETH no. 16888"--T.p. verso.

Includes bibliographical references (p. 183-187).

Summary also in German.