Silicon front-end junction formation technologies
Subtitle: symposium held April 2-4, 2002, San Francisco, California, U.S.A
By: editors, Daniel F. Downey ... [et al.].
Contributors: Downey, Daniel F.
Series: Materials Research Society symposium proceedings -- v. 717; Materials Research Society symposia proceedings -- v. 717.
Publisher: Materials Research Society
Published: 2002
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 312
Subjects: Semiconductors -- Junctions -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.