Pulsed and Pulsed Bias Sputtering
Subtitle: Principles and Applications
Edition: 1 edition
Publisher: Springer
Published: September 30, 2003
Language: eng
Format: Hardcover
Number of pages: 176
ISBN-13: 9781402075438
Subjects: Semi-conductors & super-conductors; Physics; Electronics - Semiconductors; Science; Technology & Industrial Arts; Thin films; Science/Mathematics; Engineering - General; Material Science; Science : Physics; Technology / Engineering / General; Technology / Optics; Technology : Material Science; Cathode sputtering (Plating process); General; Cathode sputtering (Plating pr
First sentence: This monograph is a guide for those interested in improving sputter-based thin film technology through the use of a pulse-based technology.