The effect of polymer char on nitridation kinetics of silicon
By: Richmond C. Chan and Ramakrishna T. Bhatt.
Contributors: Bhatt, Ramakrishna, T.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 106664.; Army Research Laboratory memorandum report -- ARL-MR-139.
Publisher: National Aeronautics and Space Administration; U.S. Army Research Laboratory; National Technical Information Service, distributor
Published: 1994
Place of publication: [Washington, DC]; [Adelphi, Md; [Springfield, Va
Language: eng
Format: Microform
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 95-0057-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1994] 1 microfiche.