Microsystems engineering
Subtitle: metrology and inspection : 20-21 June 2001, Munich, Germany
By: Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).
Contributors: Gorecki, Christophe.; Jüptner, Werner P. O.; Kujawińska, Małgorzata.; European Optical Society.; Wissenschaftliche Gesellschaft Lasertechnik.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4400; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4400.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 176
Subjects: Quality control -- Optical methods -- Congresses.; Optical detectors -- Industrial applications -- Congresses.; Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Interferometry -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.