Proceedings of the Sixth Symposium on Plasma Processing
By: edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho.
Contributors: Mathad, G. S.; Schwartz, G. C.; Gottscho, R. A.
Series: Proceedings / The Electrochemical Society, Inc -- v. 87-6.; Proceedings (Electrochemical Society) -- v. 87-6.
Publisher: Electrochemical Society
Published: 1987
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 754
Subjects: Plasma engineering -- Congresses.
Other titles: Plasma processing.
Notes: Spine title: Plasma processing.

Includes bibliographies and indexes.