On electron beam lithography for LSI circuit fabrication
By: by Börje Åstrand
Publisher: Royal Institute of Technology, Dept. of Applied Electronics
Published: 1979
Place of publication: Stockholm
Language: eng
Number of pages: 14
Subjects: Electron beam Lithography; Integrated circuits; Large scale integration
Notes: Thesis (doctoral)--Kungliga Tekniska Högskolan, Stockholm, 1979.

Bibliography: leaves 13-14.