Handbook of Plasma Processing Technology
Subtitle: Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)
Publisher: Noyes Publications
Published: January 1, 1990
Language: eng
Format: Hardcover
Number of pages: 523
ISBN-13: 9780815512202
Subjects: Technology: General Issues; Semiconductors; Materials For Engineering; Technology & Industrial Arts; Technology; Science/Mathematics; Plasma etching; Physics; Engineering - Mechanical; Engineering - Chemical & Biochemical; Handbooks & Manuals; Etching; Plasma engineering
First sentence: The driving force for the rapid development of plasma based processing over the past 15 years has been the microelectronics industry and in particular, the fabrication of silicon integrated circuits.