Laser applications in microelectronic and optoelectronic manufacturing II
Subtitle: 10-12 February, 1997, San Jose, California
By: Jan J. Dubowski, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Dubowski, J. J.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2991; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2991.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 294
Subjects: Microelectronics -- Congresses.; Lasers -- Industrial applications -- Congresses.; Manufacturing processes -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.
Notes: Includes bibliographical references and author index.