Thin Film Materials for Large Area Electronics (European Materials Research Society Symposia Proceedings)
Publisher: Elsevier Science
Published: March 1, 1999
Language: eng
Format: Hardcover
Number of pages: 287
ISBN-13: 9780080436074
Subjects: Semi-conductors & super-conductors; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - Electrical & Electronic; Engineering - General; Physics; Science / Physics; Material Science; Congresses; Liquid crystal displays; Materials; Silicon crystals; Thin film devices
First sentence: Hydrogenated microcrystalline silicon (c-Si:H) prepared from silane and hydrogen mixture using plasma enhanced chemical vapor deposition (PECVD) at low temperature is an attractive material for a variety of applications such as thin film transistors and thin film solar cells.