Silicon science and advanced micro-device engineering I
Subtitle: selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
By: edited by Osamu Hanaizumi and Masafumi Unno
Contributors: Hanaizumi, Osamu; Unno, Masafumi; Gunma Daigaku. International Education and Research Center for Silicon Science; Gunma Daigaku. Advanced Technology Research Center; International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryū-shi, Japan)
Series: Key engineering materials -- v. 459; Key engineering materials -- v. 459.
Publisher: Trans Tech Publications
Published: 2011
Place of publication: Stafa-Zurich; Enfield, NH
Language: eng
Number of pages: 282
ISBN-13: 9780878492176
Subjects: Silicon; Nanostructures; Congresses; Microelectronics
Other titles: 5th International Symposium on Silicon Science; Fifth International Symposium on Silicon Science; International Symposium on Silicon Science; 1st International Conference on Advanced Micro-Device Engineering; First International Conference on Advanced Micro-Device Engineering; International Conference on Advanced Micro-Device Engineering; ISSS & AMDE 2009; ISSS 2009; AMDE 2009
Notes: Includes bibliographical references and indexes.