Integrated micro-motion systems
Subtitle: micromachining, control, and applications : a collection of contributions based on lectures presented at the Third Toyota Conference, Aichi, Japan, 22-25 October 1989
By: edited by Fumio Harashima.
Contributors: Harashima, Fumio.
Publisher: Elsevier; Distributors for the U.S. and Canada, Elsevier Science Pub. Co.
Published: 1990
Place of publication: Amsterdam; New York; New York, N.Y., U.S.A
Language: eng
Number of pages: 462
Subjects: Robotics -- Congresses.; Micromachining -- Congresses.; Miniature electronic equipment -- Congresses.
Notes: Includes bibliographical references.