The control of stoichiometry in epitaxial semiconductor structures
Subtitle: interfacial chemistry, property relations : a workshop reivew
By: by Klaus J. Bachmann.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA contractor report -- NASA CR-199716.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1995
Place of publication: [Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Crystal structure.; Epitaxy.; Semiconductor devices.; Semiconductors (Materials); Stoichiometry.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 96-0197-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.