Surface modification by plasma-surface interactions
Subtitle: proceedings of the Workshop on Surface Modification by Plasma-Surface Interactions, Princeton, N.J, USA, May 1-2, 1986
By: Editors A. R. Kraus, H. F. Dylla.
Contributors: Kraus, A. R.; Dylla, H. F.
Series: Nuclear instruments and methods in physics research -- Vol.B23 no.4
Publisher: North-Holland
Published: 1987
Place of publication: Amsterdam
Language: eng