Micronic integrated sensors
By: edited by J.L. Robert.
Contributors: Robert, J. L.; E-MRS Spring Conference (1990 : Strasbourg, France)
Series: European Materials Research Society Symposia proceedings -- v.22 (1992).
Publisher: North-Holland
Published: 1992
Place of publication: Amsterdam; London
Language: eng
Number of pages: 273
Other titles: Sensors and actuators.