Advanced materials for interconnections
Subtitle: proceedings of Symposium J on Advanced Materials for Interconnections of the 1996 E-MRS Spring Conference, Strasbourg, France, June 4-7,1996
By: edited by T. Gessner, J. Torres, G. Crean.
Contributors: Gessner, T.; Torres, J.; Crean, G.; European Materials Research Society. Meeting
Series: European Materials Research Society symposia proceedings ;; v.66
Publisher: Elsevier
Published: 1997
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 451
Subjects: Microelectronics -- Materials -- Congresses.; Dielectrics -- Congresses.; Chemical vapor deopsition -- Congresses.
Notes: Includes bibliographical references and index.