A software program for aiding the analysis of ellipsometric measurements, simple models
By: J.F. Marchiando.
Series: Semiconductor measurement technology; NIST special publication ;; 400-83
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1989
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 246
Subjects: Ellipsometry -- Data processing.
Notes: Includes bibliographical references (p. 244-246).
"July 1989."