Laser applications in microelectronic and optoelectronic manufacturing VI
Subtitle: 22-24 January 2001, San Jose, USA
By: Malcolm C. Gower ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Gower, M. 1946-; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4274; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4274.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 506
Subjects: Microelectronics industry -- Congresses; Lasers -- Industrial applications -- Congresses; Manufacturing processes -- Congresses; Optoelectronics industry -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.