Reliability, testing, and characterization of MEMS/MOEMS III
Subtitle: 26-28 January, 2004, San Jose, California, USA
By: Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Tanner, Danelle Mary, 1952-; Ramesham, Rajeshuni.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5343; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5343.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 312
Subjects: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.