Diagnostic techniques for semiconductor materials processing II
Subtitle: symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
By: editors, Stella W. Pang ... [et al.].
Contributors: Pang, Stella W.
Series: Materials research Society symposium proceedings ;; v. 406; Materials Research Society symposia proceedings ;; v. 406.
Publisher: Materials Research Society
Published: 1996
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 585
Subjects: Semiconductors -- Testing -- Congresses.
Notes: Includes bibliographical references and index.