OSA proceedings on soft x-ray projection lithography
Subtitle: proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California
By: edited by Andrew M. Hawryluk and Richard H. Stulen ; sponsored by the Optical Society of America.
Contributors: Hawryluck, Andrew M.; Stulen, R. H.; Optical Society of America.
Series: OSA proceedings on ;; v. 18; OSA proceedings of ;; v. 18
Publisher: The Society
Published: 1993
Place of publication: Washington, D.C
Language: eng
Number of pages: 226
Subjects: X-ray lithography -- Congresses.
Other titles: Soft x-ray projection lithography.
Notes: Includes bibliographical references and index.
Spine title: Soft x-ray projection lithography.
"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy"