Surface scattering and diffraction for advanced metrology
Subtitle: 1 August 2001, San Diego, USA
By: Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Gu, Zu-Han.; Maradudin, A. A.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4447; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4447.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 164
Subjects: Surface roughness -- Measurement -- Congresses.; Diffractive scattering -- Congresses.; Optical measurements -- Congresses.; Scattering (Physics) -- Congresses.; Metrology -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.