IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC '92 proceedings : September 30 - October 1, 1992, Cambridge, Massachusetts.
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials Institute.
Publisher: IEEE
Published: 1992
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 230
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor industry -- Congresses.; Computer integrated manufacturing systems -- Congresses.
Other titles: 1992 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; ASMC '92 proceedings.
Notes: "IEEE Catalog No. 92CH3182-3".

On cover and spine: 1992 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Includes bibliographical references.