Advances in resist technology
Subtitle: March 12-13, 1984, Santa Clara, California
By: C. Grant Willson, chairman/editor.
Contributors: Willson, C. G. 1939-; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 469.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1984
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 195
Subjects: Photoresists -- Congresses.; Lithography -- Congresses.; Microelectronics -- Congresses.