Issledovanie prot͡sessa gazofaznogo fotostimulirovannogo lazerno-khimicheskogo osazhdenii͡a iz karbonilov perekhodnykh metallov
Subtitle: preprint
By: N.A. Kislov
Contributors: Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Published: 1988
Place of publication: Chernogolovka
Language: rus
Number of pages: 19
Notes: Cover title.

At head of title: Akademii͡a nauk SSSR. Institut problem teknologii mikroėlektroniki i osobochistykh materialov.

Includes bibliographical references (p. 20)