Electron-beam technology in microelectronic fabrication
By: edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Contributors: Brewer, George Raymond, 1922-; Ballantyne, J. P.
Publisher: Academic Press
Published: 1980
Place of publication: New York
Language: eng
Number of pages: 362
Subjects: Microelectronics.; Lithography, Electron beam.
Notes: Includes bibliographies and index.