Micromachined devices and components V
Subtitle: 20-21 September 1999, Santa Clara, California
By: Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].
Contributors: French, Patrick J.; Peeters, Eric.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series ; v. 3876; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3876.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 304
Subjects: Electromechanical devices -- Congresses.; Micromechanics -- Congresses.; Micromachining -- Congresses.
Genres: Congresses.
Other titles: Micromachined devices and components 5; Micromachined devices and components five
Notes: Includes bibliographical references and index.