Smart sensors, actuators, and MEMS IV
Subtitle: 4-6 May 2009, Dresden, Germany
By: Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE ... [et al.].
Contributors: SPIE Europe; SPIE (Society); VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Series: Proceedings of SPIE -- v. 7362; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7362.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819476364
Subjects: Microelectromechanical systems; Scanning systems; Congresses; Actuators; Detectors; Industrial applications; Microtechnology
Other titles: Smart sensors, actuators, and MEMS 4; Smart sensors, actuators, and MEMS four
Notes: Includes bibliographical references and index.