Physics and technology of high-k gate dielectrics 5
By: S. Kar ... [et al.].
Contributors: Kar, S. 1942-; Electrochemical Society. Meeting; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics and Photonics Division.
Series: ECS transactions -- vol. 11, no. 4
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, NJ
Language: eng
Number of pages: 660
ISBN-13: 9781566775700
Subjects: Gate array circuits -- Congresses; Dielectrics -- Congresses
Genres: Congresses
Notes: "Fifth International Symposium on High Dielectric Constant Materials and Gate Stacks, held in Washington, DC from October 8 to 10, 2007 ... held during its 212th Meeting"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Sponsoring Divisions: Dielectric Science and Technology Division, Electronics and Photonics Division.

Includes bibliographical references and index.