Lasers in microelectronic manufacturing
Subtitle: 10-11 September 1991, San Jose, California
By: Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Braren, Bodil.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1598; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1598.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 240
Subjects: Microelectronics -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.