Advanced metallization for devices and circuits--science, technology, and manufacturability
Subtitle: symposium held April 4-8, 1994, San Francisco, California, U.S.A.
By: editors, S.P. Murarka ... [et al.].
Contributors: Murarka, S. P.
Series: Materials Research Society symposium proceedings,; v. 337; Materials Research Society symposia proceedings ;; v. 337.
Publisher: Materials Research Society
Published: 1994
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 768
Subjects: Semiconductors -- Design and construction -- Congresses.; Metallizing -- Congresses.; Metallic films -- Congresses.
Notes: Includes bibliographical references and indexes.