Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems
Subtitle: MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center.
Contributors: IEEE Robotics and Automation Society.; Micromachine Center (Japan)
Publisher: Institute of Electrical and Electronics Engineers
Published: 2000
Place of publication: Piscataway N.J
Language: eng
Number of pages: 810
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Thirteenth annual International Conference on Micro Electro Mechanical systems; MEMS 2000; 2000 IEEE Micro Electro Mechanical Systems; Micro Electro Mechanical Systems
Notes: Also available via the World Wide Web with additional title: Micro Electro Mechanical Systems, 2000, MEMS 2000, the Thirteenth Annual International Conference on.
Includes bibliographical references and index.
"IEEE Catalog Number:  00CH36308".