Evolution of silicon materials characterization
Subtitle: lessons learned for improved manufacturing
By: W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology.
Contributors: National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division.
Series: Semiconductor measurement technology; NIST special publication ;; 400-92
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1993
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 211
Subjects: Semiconductor wafers -- Standards.; Electronics -- Materials -- Testing.; Silicon.
Notes: Includes bibliographical references (p. 23-25)
"July 1993."