Modeling of film deposition for microelectronic applications
By: edited by Stephen Rossnagel
Contributors: Rossnagel, Stephen M
Series: Thin films -- v. 22; Thin films (San Diego, Calif.) -- v. 22
Publisher: Academic Press
Published: 1996
Place of publication: San Diego
Language: eng
Number of pages: 291
Subjects: Thin films -- Computer simulation
Notes: Includes bibliographical references and indexes
Table of contents: title: Michael J. Brett, Steven K. Dew, and Tom J. Smy; title: Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi; title: Michael J. Brett, Steven K. Dew, and Tom J. Smy -- S. Hamaguchi -- C.-C.Fang, [et al.]; title: Michael J. Brett, Steven K. Dew, and Tom J. Smy-- S. Hamaguchi-- C.-C.Fang, [et al.]-- Timothy S. Cale and Vadali Mahadev