Instrumentation, metrology, and standards for nanomanufacturing III
Subtitle: 3-5 August 2009, San Diego, California, United States
By: Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States)
Contributors: National Institute of Standards and Technology (U.S.); SPIE (Society)
Series: Proceedings of SPIE -- v. 7405; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7405.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819476951
Notes: Includes bibliographical references and author index.