Microfabricated systems and MEMS V
Subtitle: proceedings of the international symposium
By: editors, P.J. Hesketh ... [et al.]
Contributors: Hesketh, P. J.; Electrochemical Society.; Electrochemical Society. Sensor Division.; Electrochemical Society. Dielectric Science & Technology.; Electrochemical society. Electronics Division.
Series: Proceedings ;; v. 2000-19.; Proceedings (Electrochemical Society) ;; v. 2000-19.
Publisher: Electrochemical Society, Inc.
Published: 2000
Place of publication: Pennington, NJ
Language: eng
Number of pages: 258
Subjects: Microelectromechanical systems -- Congresses.; Microstructure -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
"Microfabricated Systems and MEMS-V Symposium held in Phoenix, October 2000"--Pref.
"Sensor, Dielectric Science & Technology, and Electronics Divisions."