Avtomatizirovannoe proektirovanie liniĭ i komplektov oborudovanii͡a︡ poluprovodnikovogo i mikroėlektronnogo proizvodstva
By: V.V. Sysoev.
Publisher: "Radio i svi͡a︡zʹ"
Published: 1982
Place of publication: Moskva
Language: rus
Number of pages: 118
Subjects: Electronic industries -- Equipment and supplies.
Notes: Bibliography: p. 114-[117]