2001 Microelectromechanical Systems Conference
Subtitle: MEMS 2001 : 24-26 August 2001 Berkeley, California, USA
By: technical co-sponsorship by IEEE Circuits and Systems Society.
Contributors: IEEE Circuits and Systems Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 2002
Place of publication: Piscataway NJ
Language: eng
Number of pages: 116
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: MEMS 2001
Notes: "IEEE Catalog Number: 01EX521"--T.p. verso.

Includes bibliographical references.