MEMS and microsystems
Subtitle: design and manufacture
By: Tai-Ran Hsu.
Publisher: McGraw-Hill
Published: 2002
Place of publication: Boston
Language: eng
Number of pages: 436
Subjects: Microelectronics; Microelectromechanical systems; Microelectronic packaging
Notes: Includes bibliographical references (p. 427-431) and index.