Silicon nitride in electronics
By: V.I. Belyi ... [et al.].
Contributors: Belyĭ, V. I. 1938-; Rzhanov, Anatoliĭ Vasilʹevich.
Series: Materials science monographs ;; 34
Publisher: Elsevier
Published: 1988
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 263
Subjects: Microelectronics -- Materials.; Silicon nitride.
Notes: Includes bibliographies and index.