Soft X-ray and EUV imaging systems II
Subtitle: 31 July-1 August, 2001, San Diego, [California] USA
By: Daniel A. Tichenor, James A. Folta, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Tichenor, Daniel A.; Folta, James A.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4506; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4506.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 174
Subjects: X-ray optics -- Congresses.; Grenz rays -- Congresses.; Ultraviolet radiation -- Industrial applications -- Congresses.; X-rays -- Industrial applications -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.