Silicon front-end junction formation--physics and technology
Subtitle: symposium held April 13-15, 2004, San Francisco, California, U.S.A.
By: editors: Peter Pichler ... [et al.].
Contributors: Pichler, P.; Materials Research Society. Meeting; Symposium on Silicon Front-End Junction Formation--Physics and Technology (2004 : San Francisco, Calif.)
Series: Materials Research Society symposium proceedings ;; v. 810; Materials Research Society symposia proceedings ;; v. 810.
Publisher: Materials Research Society
Published: 2004
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 494
Subjects: Semiconductors -- Junctions -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv.