2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014)
Subtitle: San Francisco, California, USA, 26-30 January 2014
Contributors: IEEE Computer Society
Publisher: IEEE
Published: 2014
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 1292
ISBN-13: 9781479935109
Subjects: Microelectromechanical systems; Congresses
Notes: IEEE Catalog Number: CFP14MEM-POD

Includes bibliographical references and index.