Micromachining and microfabrication process technology V
Subtitle: 20-22 September, 1999, Santa Clara, California
By: James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].
Contributors: Smith, James H.; Karam, Jean-Michel.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series ;; v. 3874; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3874.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 434
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.