Advances in mirror technology for X-ray, EUV lithography, laser and other applications II
Subtitle: 5 August 2004, Denver, Colorado, USA
By: Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, WA
Language: eng
Number of pages: 194