Ion implantation technology
Subtitle: IIT2002 : 2002 International Conference on Ion Implantation Technology : proceedings : Taos, New Mexico, USA, 22-27 September, 2002
By: editors, Bob Brown ... [et al.] ; IEEE.
Contributors: Brown, B.; Institute of Electrical and Electronics Engineers.
Publisher: IEEE
Published: 2003
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 725
Subjects: Semiconductors -- Congresses.; Ion implantation -- Congresses.; Semiconductor doping -- Congresses.
Genres: Congresses.
Other titles: IIT 2002; 2002 International Conference on Ion Implantation Technology
Notes: "IEEE Catalog Number 02EX432 (softbound) ; 02EX505C (CD-ROM)"--T.p. verso.

Conference number inferred.

Includes bibliographical references and author index.

Also available via the World Wide Web.