Integrated circuit metrology, inspection, and process control VII
Subtitle: 2-4 March 1993, San Jose, California
By: Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Postek, Michael T.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 1926.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1926.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 594
ISBN-13: 9780819411600
Subjects: Integrated circuits -- Inspection -- Congresses; Integrated circuits -- Measurement -- Congresses; Integrated circuits -- Congresses; Mensuration -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.