Micro system technologies 92
By: 3rd International Conference on Micro, Electro, Opto, Mechanic Systems and Components, Berlin, October 21-23, 1992 ; Herbert Reichl, Editor.
Contributors: Reichl, H.
Publisher: vde-Verlag
Published: 1992
Place of publication: Berlin
Language: eng
Number of pages: 534
Subjects: Microelectronics -- Congresses.; Electronic circuit design -- Data processing -- Congresses.; Electronic packaging -- Congresses.; Microelectronics -- Materials -- Congresses.; High technology -- Congresses.
Other titles: Third International Conference on micro, electro, opto, mechanic systems and components.; 3rd International Conference on micro, electro, opto, mechanic systems and components.
Notes: Includes bibliographical references and index.