Physical Chemistry of, in and on Silicon
By: by Gianfranco Cerofolini, Laura Meda
Contributors: Meda, Laura
Series: Springer Series in Materials Science -- 8; Springer series in materials science -- 8.
Publisher: Springer Berlin Heidelberg
Published: 1989
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
Number of pages: 122
ISBN-13: 9783642735066; 9783642735042
Subjects: Physical organic chemistry; Surfaces (Physics); Optical materials
Description: This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.
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Table of contents: title: Contents: Silicon; title: Silicon Phases; title: Equilibrium Defects; title: Impurities; title: Dopants; title: Defect-Impurity Interactions; title: The High Density Limit; title: Surfaces and Interfaces; title: Gettering; title: Device Processing; title: References; title: Acronyms and Abbreviations; title: Subject Index.