The Eleventh Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Baden-Württemberg (Germany). Wirtschaftsministerium.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1998
Place of publication: [New York]
Language: eng
Number of pages: 666
Subjects: Microelectromechanical systems -- Congresses.; Detectors -- Congresses.; Microactuators -- Congresses.
Other titles: Micro electro mechanical systems; Investigation of micro structures, sensors, actuators, machines and robots
Notes: Includes bibliographical references and indexes.
"IEEE catalog number 98CH36176."