Opredelenie bezopasnykh tekhnologicheskikh usloviĭ smeshenii͡a shikht dli͡a SVS-proizvodstva
By: A.L. Pivt͡sov, V.I. Rozenband, E.V. Chernenko
Contributors: Rozenband, V. I.; Chernenko, E. V. (Evgeniĭ Vasilʹevich); Institut strukturnoĭ makrokinetiki (Akademii͡a nauk SSSR)
Publisher: In-t strukturnoĭ makrokinetiki AN SSSR
Published: 1990
Place of publication: Chernogolovka
Language: rus
Number of pages: 16
Notes: Title from cover.

"Preprint."

At head of title: Akademii͡a nauk SSSR. Institut strukturnoĭ makrokinetiki.

Includes bibliographical references (p. 12)