Fundamental studies of a gas-jet enhanced sputtering system and its applications
By: by Hyo-Jin Kim.
Published: 1989
Language: eng
Number of pages: 199
Subjects: Sputtering (Physics).; Glow discharges.; Atomic spectroscopy -- Instruments.
Notes: Typescript (photocopy).

Thesis (Ph. D.)--Oregon State University, 1989.

Includes bibliographical references.