Advanced interconnects for ULSI technology
By: [edited by] Mikhail Baklanov, Paul S. Ho, Ehrenfried Zschech
Publisher: Wiley
Published: 2012
Place of publication: Hoboken, NJ
Language: eng
Number of pages: 608
ISBN-13: 9780470662540
Subjects: TECHNOLOGY & ENGINEERING / Electronics / Circuits / VLSI & ULSI; Integrated circuits; Ultra large scale integration; Interconnects (Integrated circuit technology)
Description: "This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
Notes: Includes bibliographical references and index.