Adhesion aspects in MEMS-NEMS
By: edited by S. H. Kim, M. T. Dugger and K. L. Mittal
Publisher: Brill; Extenza Turpin [distributor]; CRC Press
Published: 2010
Place of publication: Leiden; Boston; Biggleswade
Language: eng
Number of pages: 409
ISBN-13: 9789004190948
Subjects: Nanoelectromechanical systems; Microelectromechanical systems; Surfaces (Technology); Adhesion
Notes: Includes bibliographical references.