Silicon science and advances micro-device engineering II
Subtitle: selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan
By: edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura
Contributors: International Conference on Advanced Micro-Device Engineering
Series: Key engineering materials -- v. 497; Key engineering materials -- v. 497.
Publisher: Trans Tech
Published: 2012
Place of publication: Durnten-Zurich, Switzerland
Language: eng
Number of pages: 312
ISBN-13: 9783037852859
Subjects: Silicon; Congresses; Nanostructures; Mechatronics; Microtechnology
Other titles: Selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan
Description: This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter--
Notes: Includes bibliographical references and index.
Table of contents: title: Chapter 1: Material science; title: Chapter 2: Chemical science and techology; title: Chapter 3: Nano-science and technology; title: Chapter 4: Photonics device and technology; title: Chapter 5: Novel measurement and system technology; title: Chapter 6: Information and communication engineering.