Ion implantation technology 2010
Subtitle: 18th International Conference on Ion Implantation Technology, IIT 2010, Kyoto, Japan, 6-11 June 2010
By: editors, Jiro Matsuo ... [et al.].
Contributors: Matsuo, Jiro
Series: AIP conference proceedings -- 1321; AIP conference proceedings -- no. 1321.
Publisher: American Institute of Physics
Published: 2010
Place of publication: Melville, N.Y
Language: eng
Number of pages: 518
ISBN-13: 9780735408760
Subjects: Congresses; Ion implantation
Other titles: 18th International Conference on Ion Implantation Technology; Eighteenth International Conference on Ion Implantation Technology; IIT 2010
Notes: Includes bibliographical references and author index.