Optiko-ėlektronnye metody avtomatizirovannogo kontroli͡a︡ topologii izdeliĭ mikroėlektroniki
By: E.K. Chekhovich.
Edition: Nauch. izd.
Publisher: "Nauka i tekhnika"
Published: 1989
Place of publication: Minsk
Language: rus
Number of pages: 212
Subjects: Microelectronics.; Optoelectronic devices.; Topology.
Notes: Includes bibliographical references.
At head of title: Akademii͡a︡ nauk Belorusskoĭ SSR. Institut ėlektroniki.