Excimer beam applications
Subtitle: 6 September 1988, Boston, Massachusetts
By: Anthony N. Pirri, Bernhard P. Piwczyk, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Applied Optics Laboratory, New Mexico State University ... [et al.].
Contributors: Pirri, Anthony N.; Piwczyk, Bernhard P.; Society of Photo-optical Instrumentation Engineers.; New Mexico State University. Applied Optics Laboratory.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 998
Publisher: SPIE--The International Society for Optical Engineering
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 128
Subjects: Excimer lasers -- Congresses.
Notes: Includes bibliographies and index.