Beam injection assessment of defects in semiconductors
Subtitle: international workshop, Meudon-Bellevue, France, 18-19-20 July, 1988
Series: Colloque de physique -- C6-1989; Colloque de physique -- 1989, c6; Revue de physique appliquée -- t. 24
Publisher: Editions de physique
Published: 1989
Place of publication: Les Ulis, France
Language: eng
Number of pages: 192
Subjects: Semiconductors; Defects; Congresses; Testing; Particle beams
Notes: Includes bibliographical references.