Introduction to Focused Ion Beams
Subtitle: Instrumentation, Theory, Techniques and Practice
Contributors: Lucille A. Giannuzzi (Editor); Fred A. Stevie (Editor)
Publisher: Springer
Published: November 19, 2004
Language: eng
Number of pages: 358
ISBN-13: 9780387231167
First sentence: The basic FIB instrument consists of a vacuum system and chamber, a liquid metal ion source, an ion column, a sample stage, detectors, gas delivery system, and a computer to run the complete instrument as shown schematically in Figure 1.