Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon
By: G.A. Candela ... [et al.].
Contributors: Candela, G. A.; National Institute of Standards and Technology (U.S.)
Series: Standard reference materials; NIST special publication ;; 260-109
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1988
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 37
Subjects: Ellipsometry -- Evaluation -- Mathematical models.; Refractive index.; Silica.; Silicon.
Notes: Includes bibliographical references.
"Issued October 1988."