Database needs for modeling and simulation of plasma processing
By: Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Contributors: National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Series: The compass series; Compass series (Washington, D.C.)
Publisher: National Academy Press
Published: 1996
Place of publication: Washington, D.C
Language: eng
Number of pages: 64
Subjects: Semiconductors -- Design and construction -- Congresses.; Plasma engineering -- Databases -- Congresses.; Plasma engineering -- Computer simulation -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references.