Ion Implantation Technology: Ht2002 Proceedings : 2002 14th International Conference on Ion Implantation Technology Proceedings 
Subtitle: Taos, New Mexico, Usa, ... September 2002 (IEEE Conference Proceedings)
Contributors: Bob Brown (Editor); Terry L. Alford (Editor); Mike Nastasi (Editor); Michael C. Vella (Editor)
Publisher: Ieee
Published: December 2001
Language: eng
Format: Paperback
Number of pages: 856
ISBN-13: 9780780371552
Subjects: Circuits & components; Reference; Technology; Science/Mathematics