Handbook of VLSI microlithography
Subtitle: principles, technology, and applications
By: edited by William B. Glendinning, John N. Helbert.
Contributors: Glendinning, William B.; Helbert, John N.
Series: Materials science and process technology series
Publisher: Noyes Publications
Published: 1991
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 649
Subjects: Integrated circuits -- Very large scale integration.; Microlithography.
Notes: Includes bibliographical references and index.