Microsystem technology and microrobotics
By: S. Fatikow, U. Rembold.
Contributors: Rembold, Ulrich.
Publisher: Springer
Published: 1997
Place of publication: Berlin; New York
Language: eng
Number of pages: 408
Subjects: Electromechanical devices -- Design and construction; Microfabrication; Robotics
Notes: Includes bibliographical references (p. [366]-401) and index.