Plasma processing
Subtitle: symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
By: editors, J.W. Coburn, R.A. Gottscho, D.W. Hess.
Contributors: Coburn, J. W., 1932-; Gottscho, R. A.; Hess, Dennis W.; Materials Research Society.
Series: Materials Research Society symposia proceedings,; v. 68
Publisher: Materials Research Society
Published: 1986
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 463
Subjects: Plasma engineering -- Congresses.
Notes: Includes bibliographies and indexes.