Experimental performance of a micromachined heat flux sensor
By: S. Stefanescu, R.G. DeAnna, M. Mehregany.
Contributors: DeAnna, R. G.; Mehregany, M.; Lewis Research Center.
Series: NASA technical memorandum -- 107517.; ARL-MR -- 363.
Publisher: National Aeronautics and Space Administration, Lewis Research Center; National Technical Information Service, distributor
Published: 1998
Place of publication: [Cleveland, Ohio]; Springfield, VA
Language: eng
Format: Microform
Subjects: Micromachining.; Miniaturization.; Fabrication.; Polyimides.; Thin films.
Notes: Shipping list no.: 99-0384-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1998] 1 microfiche.