EMC 2000
Subtitle: 17th European Mask Conference on Mask Technology for Integrated Circuits and Micro-components : lectures held at the GMM-Conference, November 13-14, 2000 in Munich-Unterhaching, Germany
By: conference chairperson, Uwe Behringer ; organizer, VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) ; in cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe) ... [et al.].
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; SEMI-Europe.
Series: GMM-Fachbericht,; 32
Publisher: VDE-Verlag
Published: 2000
Place of publication: Berlin
Language: eng
Number of pages: 201
Subjects: Integrated circuits -- Masks -- Congresses; Microlithography -- Congresses; X-ray lithography -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references.