Dian zi shu bao guang wei na jia gong ji shu
By: Gu Wenqi zhu bian ; Gu Wenqi [et al.] deng zhu
Series: Dian zi shu, li zi shu, guang zi shu wei na jia gong ji shu xi lie zhuan zhu
Publisher: Beijing gong ye da xue chu ban she
Published: 2004
Place of publication: Beijing
Language: chi
Number of pages: 310
ISBN-13: 9787563913008
Subjects: Electron beam Lithography; Ion beam lithography; Electron beams; Ion bombardment
Other titles: Dianzishu baoguang weina jiagong jishu
Notes: Includes bibliographical references.