Analytical techniques for semiconductor materials and process characterization
Subtitle: proceedings of the satellite symposium to ESSDERC 89 Berlin
By: edited by Bernd O. Kolbesen, Daniel V. Mc Caughan, Wilfried Vandervorst ; [sponsored by the] Electronics Division.
Contributors: Kolbesen, Bernd O.; Mc Caughan, Daniel V.; Vandervorst, Wilfried.; Electrochemical Society. Electronics Division.; European Solid State Device Research Conference (19th : 1989 : Berlin, Germany); Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation (1989 : Berlin, Germany)
Series: Proceedings / Electrochemical Society ;; v. 90-11; Proceedings (Electrochemical Society) ;; v. 90-11.
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 364
Subjects: Semiconductors -- Analysis -- Congresses.
Notes: Includes bibliographical references and indexes.
"Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii.