Materials issues in vacuum microelectronics
Subtitle: symposium held April 13-16, 1998, San Francisco, California, U.S.A.
By: editors, Wei Zhu ... [et al.].
Contributors: Zhu, Wei, 1963-
Series: Materials Research Society symposium proceedings ;; v. 509; Materials Research Society symposia proceedings ;; v. 509.
Publisher: Materials Research Society; Cambridge University Press
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 207
Subjects: Vacuum microelectronics -- Congresses.; Thin films -- Congresses.; Field emission cathodes -- Congresses.; Ion implantation -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.