High energy ion implantation
Subtitle: proceedings of symposium C: Highenergy ion implantation of the E-MRS 1991 Spring Meeting, Strasbourg, France, May 28-30, 1991
By: guest editors S.U. Campisano, J. Gyulai.
Contributors: Campisano, S. U.; Gyulai, J.
Series: Nuclear instruments and methods in physics research -- vol.B62 (3)
Publisher: Elsevier
Published: 1992
Place of publication: Amsterdam
Language: eng