Environmental issues with materials and processes for the electronics and semiconductor industries
Subtitle: proceedings of the fourth international symposium
By: editor, L. Mendicino.
Contributors: Mendicino, L.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: Proceedings -- v. 2001-6.; Proceedings (Electrochemical Society) -- v. 2001-6.
Publisher: Electrochemical Society, Inc.
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 212
Notes: "The Fourth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 199th Meeting of the Electrochemical Society in Washington, DC."--Pref.

"Dielectric Science and Technology Division."

Previous Symposia entered under title.