Advanced microelectronic processing techniques
Subtitle: 28-30 November 2000, Singapore
By: H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].
Contributors: Harrison, H. Barry.; Wee, Andrew T. S.; Gupta, Subhash, 1955-; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.
Series: SPIE proceedings series ;; v. 4227; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4227.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 212
Subjects: Semiconductor wafers -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Characterization -- Congresses.; Epitaxy -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
Errata p. tipped in.