10th annual Symposium on Microlithography
Subtitle: September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
By: sponsored by Bacus International.
Contributors: Bacus International (Firm); Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- v. 1496; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1496.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 315
Subjects: Microlithography -- Congresses.
Other titles: Tenth annual Symposium on Microlithography.
Notes: Includes bibliographical references and index.