MEMS/NEMS
Subtitle: micro electro mechanical systems/nano electro mechanical systems
By: edited by Cornelius T. Leondes.
Contributors: Leondes, Cornelius T.
Publisher: Springer
Published: 2005
Place of publication: New York
Language: eng
Subjects: Microelectromechanical systems -- Design and construction.; Nanotechnology.
Notes: Includes bibliographical references and index.
Table of contents: value: v. 1. Design methods in MEMS/NEMS; value: v. 2. Fabrication techniques for MEMS/NEMS; value: v. 3. Manufacturing methods in MEMS/NEMS; value: v. 4. Sensors and actuators in MEMS/NEMS; value: v. 5. Medical applications of MEMS/NEMS and MOEMS (micro optical electro mechanical systems)