Handbook of plasma immersion ion implantation and deposition
By: edited by André Anders
Contributors: Anders, André
Publisher: Wiley
Published: 2000
Place of publication: New York
Language: eng
Number of pages: 736
Subjects: Ion implantation; Ion bombardment -- Industrial applications; Plasma (Ionized gases) -- Industrial applications; Metals -- Surfaces; Metals -- Finishing
Notes: "A Wiley-Interscience publication."

Includes bibliographical references and index