Deep etching of silocon
By: Ivo W. Rangelow.
Publisher: Oficyna Wydawnicza Politekchniki Wrocławskiej
Published: 1996
Place of publication: Wrocław
Language: eng
Number of pages: 119
Subjects: Silicon -- Etching.; Micromachining.; Plasma etching.
Notes: Includes bibliographical references p. 113-[120]