MEMS
Subtitle: A Practical Guide of Design, Analysis, and Applications
Edition: 1 edition
Publisher: Springer
Published: April 1, 2006
Language: eng
Format: Hardcover
Number of pages: 900
ISBN-13: 9783540211174
Subjects: Electronics engineering; Electricity; Nanotechnology; Optics; Microelectromechanical Systems; Micromachining; Microsystems; Microtechnology; Reference; Technology / Electronics / Microelectronics; Technology & Industrial Arts