Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96)
By: Marc Heyns (editor), Marc Meuris & Paul Mertens (co-editors).
Contributors: Heyns, Marc.; Meuris, Marc.; Mertens, Paul.
Edition: 1st. ed.
Publisher: Acco
Published: 1996
Place of publication: Leuven
Language: eng
Number of pages: 349
Subjects: Semiconductor wafers -- Cleaning -- Congresses.; Silicon -- Surfaces -- Congresses.; Contamination control -- Congresses.
Genres: Congresses.
Other titles: Ultra clean processing of silicon surfaces
Notes: Includes bibliographical references and index.