Ion Implantation into Semiconductors, Oxides and Ceramics (European Materials Research Society Symposia Proceedings)
Contributors: J.K.N. Lindner (Editor); B.G. Svensson (Editor); P.L.F. Hemment (Editor); H.A. Atwater (Editor)
Edition: 1 edition
Publisher: Elsevier Science
Published: March 1, 1999
Language: eng
Format: Hardcover
Number of pages: 454
ISBN-13: 9780080436135
Subjects: Ceramics & glass technology; Chemical physics; Materials science; Semi-conductors & super-conductors; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering (General); Engineering - General; General; Science / Physics; Reference; Congresses; Effect of radiation on; Ion implantation; Semiconductor doping; Semiconductors