Ion-beam-based nanofabrication
Subtitle: symposium held April 10-12, 2007, San Francisco, California, U.S.A
By: editors, Daryush ILA ... [et al.].
Series: Materials Research Society symposium proceedings -- v.1020.
Publisher: Materials Res Soc; Materials Research Society
Published: 2007
Place of publication: United States
Language: eng
Number of pages: 239