Advances in resist technology and processing V
Subtitle: 29 February-2 March, 1988, Santa Clara, California
By: Scott A. MacDonald, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: MacDonald, Scott A.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 920
Publisher: International Society for Optical Engineering
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 449
Subjects: Photoresists -- Congresses.
Notes: Includes bibliographies and index.