Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
By: editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society].
Contributors: Rużyłło, Jerzy.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 97-35; Proceedings (Electrochemical Society) ;; v. 97-35.
Publisher: Electrochemical Society
Published: 1998
Place of publication: Pennington, NJ
Language: eng
Number of pages: 650
Subjects: Semiconductor wafers -- Cleaning -- Congresses.
Other titles: Cleaning technology in semiconductor device manufacturing
Notes: Includes bibliographical references and indexes.
"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface.