A FORTRAN program for analysis of data from microelectronic test structures
By: Richard L. Mattis.
Contributors: National Engineering Laboratory (U.S.); United States. National Bureau of Standards
Series: Semiconductor measurement technology; NBS special publication -- 400-75
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1984
Place of publication: Washington, D.C
Language: eng
Format: Microform
Subjects: Microelectronics -- Testing -- Computer programs.; FORTRAN (Computer program language)
Notes: "National Engineering Laboratory, National Bureau of Standards."

"Issued July 1983."

CODEN: XNBSAV.

Includes bibliographical references.

Microfiche. [Washington, D.C.] : SUPTDOCS/GPO, 1984. 1 microfiche ; 11 x 15 cm.