Materials & Process Integration for MEMS (Microsystems)
Edition: 1 edition
Publisher: Springer
Published: August 31, 2002
Language: eng
Format: Hardcover
Number of pages: 300
ISBN-13: 9781402071751
Subjects: Materials science; Science/Mathematics; Mechanical Engineering (Specific Aspects); Microelectronics; Technology; Technology & Industrial Arts; Electronics - Microelectronics; Engineering - Electrical & Electronic; Engineering - Mechanical; Technology / Material Science; Microelectromechanical systems
First sentence: Piezoelectric thin film actuation and sensing are useful in devices requiring large output forces, low noise, or high frequency operation (see [1] for a review).