Semiconductor silicon 2002
Subtitle: proceedings of the Ninth International Symposium on Silicon Materials Science and Technology
By: editors, H.R. Huff, L. Fabry, S. Kishino.
Contributors: Huff, Howard R.; Fábry, László.; Kishino, S.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; v. 2002-2; Proceedings (Electrochemical Society) ;; v. 2002-2.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, N.J
Language: eng
Number of pages: 1074
Subjects: Semiconductors -- Congresses.; Silicon -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
"... contains papers presented at the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia ... Sponsored by the Electronics Division of the Electrochemical Society ..."--Pref.