Integrated processing for micro- and optoelectronics
Subtitle: proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg, France, May 4-7, 1993
By: edited by Y.I. Nissim, A. Katz, G.W. Rubloff.
Contributors: Nissim, Yves I., 1953-; Katz, Avishay.; Rubloff, G. W.
Series: European Materials Research Society symposia proceedings ;; v. 42
Publisher: North-Holland
Published: 1994
Place of publication: Amsterdam; New York
Language: eng
Subjects: Integrated circuits industry -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Manufacturing processes -- Congresses.; Microelectronics -- Congresses.
Notes: Includes bibliographical references.
"Reprinted from: Microelectronic Engineering 25 (2-4):pp. 93-364 and Thin Solid Films 241:pp. [365]-[398]"--T.p. verso.