Niederdruckplasmen und Mikrostrukturtechnik
Edition: 3. Aufl. edition
Publisher: Springer
Published: March 8, 2004
Language: ger
Format: Hardcover
Number of pages: 543
ISBN-13: 9783540407652
Subjects: Material Science; Nuclear Physics; Optics; Mikroelektronik; Mikrotechnologie; Plasmaphysik; Technology / Optics; Technology & Industrial Arts