Microelectronic Materials and Processes
By: edited by R.A. Levy
Series: NATO ASI Series, Series E: Applied Sciences, 0168-132X -- 164; NATO ASI series -- 164.
Publisher: Springer Netherlands
Published: 1989
Place of publication: Dordrecht
Language: eng
Format: [electronic resource] /
Number of pages: 1000
ISBN-13: 9789400909175
Subjects: Surfaces (Physics); Optical materials
Other titles: Proceedings of the NATO Advanced Study Institute, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986