Problemy litografii v mikroėlektronike
By: otvetstvennyĭ redaktor toma T.M. Makhviladze.
Contributors: Makhviladze, T. M.
Series: Trudy Instituta obshcheĭ fiziki ;; t. 8
Publisher: Izd-vo "Nauka"
Published: 1987
Place of publication: Moskva
Language: rus
Number of pages: 149
Subjects: Printed circuits -- Design and construction.; Lithography.
Notes: Includes bibliographical references.
At head of title: Akademii͡a︡ nauk SSSR.