Atomic layer deposition for nanotechnology
Subtitle: an enabling process for nanotechnology fabrication
By: by Arthur Sherman.
Publisher: Ivoryton Press
Published: 2008
Place of publication: Ivoryton, Conn
Language: eng
Number of pages: 239
ISBN-13: 9780981466347
Subjects: Chemical vapor deposition; Epitaxy; Microelectronics; Nanotechnology
Notes: Includes bibliographical references and index.