Reliability of MEMS (Advanced Micro and Nanosystems)
Contributors: Osamu Tabata (Editor); Toshiyuki Tsuchiya (Editor); Oliver Brand (Series Editor); Gary K. Fedder (Series Editor); Christofer Hierold (Series Editor); Jan G. Korvink (Series Editor)
Publisher: Wiley-VCH
Published: February 15, 2008
Language: eng
Format: Hardcover
Number of pages: 324
ISBN-13: 9783527314942
Subjects: Electronics engineering; Materials science; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Technology / Material Science; Material Science