Spectroscopic characterization techniques for semiconductor technology III
Subtitle: 14-15 March 1988, Newport Beach, California
By: Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
Contributors: Glembocki, O. J.; Pollak, Fred H.; Ponce, Fernando.; Optical Society of America.; Society of Photo-optical Instrumentation Engineers.; Metallurgical Society (U.S.)
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 946
Publisher: SPIE
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 234
Subjects: Semiconductors -- Testing -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographies and index.