Micromachined devices and components III
Subtitle: 29 September 1997, Austin, Texas
By: Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology.
Contributors: Chau, Kevin.; French, Patrick J.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: SPIE proceedings series ; v. 3224; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3224.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 382
Subjects: Electromechanical devices -- Congresses.; Micromechanics -- Congresses.; Micromachining -- Congresses.
Other titles: Micromachined devices and components 3; Micromachined devices and components three
Notes: Includes bibliographical references and index.