Nanostructure science, metrology, and technology
Subtitle: 5-7 September 2001, Gaithersburg, USA
By: Martin C. Peckerar, Michael T. Postek, Jr., chairs/editors.
Contributors: Peckerar, Martin Charles, 1946-; Postek, Michael T.; Society of Photo-optical Instrumentation Engineers.; National Institute of Standards and Technology (U.S.); United States. Office of Naval Research.
Series: SPIE proceedings series,; v. 4608; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4608.
Publisher: SPIE-the International Society for Optical Engineering
Published: 2002
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 278
Subjects: Nanotechnology -- Congresses.; Nanostructures -- Congresses.; Metrology -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Sponsored by SPIE-the International Society for Optical Engineering, National Institute of Standards and Technology (USA), Office of Naval Research (USA)."