Microprocesses and Nanotechnology 2000
Subtitle: digest of papers : 2000 International Microprocesses and Nanotechnology Conference : July 11-13, 2000, Tokyo, Japan
By: sponsored by the Japan Society of Applied Physics ... [et al.].
Contributors: Ōyō Butsuri Gakkai.
Publisher: Business Center for Academic Societies Japan
Published: 2000
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 306
Subjects: Microfabrication -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.
"IEEE Catalog No. 00EX387 ; JSAP Cat. No. 001225"--verso of T.p.