Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption
By: Aslan Baghdadi, Robert I. Scace, and E. Jane Walters, editors.
Contributors: Baghdadi, Aslan.; Scace, Robert I.; Walters, E. Jane.
Series: NIST special publication -- 400-82; Semiconductor measurement technology
Publisher: National Institute of Standards and Technology
Published: 1989
Place of publication: Washington, D.C
Language: eng