Materials Issues in Silicon Integrated Circuit Processing
Subtitle: Symposium Held April 15-18, 1986, Palo Alto, California, U.S.A. (Materials Research Socie)
Publisher: Materials Research Society
Published: September 1986
Language: eng
Format: Hardcover
Number of pages: 535
ISBN-13: 9780931837371
Subjects: Integrated Circuits; Materials; Congresses; Microelectronics