Silicon device processing
Subtitle: proceedings.
By: Charles P. Marsden, editor.
Contributors: Marsden, Charles P., ed.; American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics.
Series: National Bureau of Standards special publication 337; NBS special publication ;; 337.
Publisher: U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1970
Place of publication: Washington
Language: eng
Number of pages: 457
Subjects: Silicon -- Congresses.
Notes: Includes bibliographical references.
"A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."