EPM 87
Subtitle: energy pulse and particle beam modification of materials : international conference held September 7-11, 1987, Dresden, G.D.R.
By: edited by Klaus Hennig.
Contributors: Hennig, Klaus.
Series: Physical research ;; v. 8
Publisher: Akademie-Verlag
Published: 1988
Place of publication: Berlin
Language: eng
Number of pages: 594
Subjects: Semiconductors -- Surfaces -- Congresses.; Ion implantation -- Congresses.; Particle beams -- Congresses.
Other titles: Energy pulse and particle beam modification of materials.
Notes: Includes bibliographical references and index.