Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E:)
Contributors: M. Gentili (Editor); Carlo Giovannella (Editor); Stefano Selci (Editor)
Edition: 1 edition
Publisher: Springer
Published: April 30, 1994
Language: eng
Format: Hardcover
Number of pages: 228
ISBN-13: 9780792327943
Subjects: Condensed matter physics (liquids & solids); Science; Material Science; Technology & Industrial Arts; Electronic Engineering (Specific Aspects); Physics; Science/Mathematics; Nanotechnology; Microlithography; Electronics - Circuits - Printed; Science / Physics; Congresses; Integrated circuits; Molecular electronics