Processing of poly-Si electrodes for charge-coupled devices
By: John W. Sherohman and Fred D. Cook.
Contributors: Cook, Fred D., 1929-; United States. Dept. of Energy.; Lawrence Livermore Laboratory.
Series: UCID ; 17995; UCID -- 17995.
Publisher: Dept. of Energy, Lawrence Livermore Laboratory; for sale by the National Technical Informaion Service]
Published: 1978
Place of publication: [Livermore, Calif.]; [Springfield, Va
Language: eng
Number of pages: 11
Subjects: Electrodes.; Silicon.
Notes: Prepared for U.S. Department of Energy under contract no. W-7405-Eng-48.

At head of title: Lawrence Livermore Laboratory.

Dec. 6, 1978.

Includes bibliographical references.