Materials, technology and reliability for advanced interconnects--2005
Subtitle: symposium held March 28-April 1, 2005, San Francisco, California, U.S.A
By: editors, Paul R. Besser ... [et al.]
Contributors: Besser, Paul R; Materials Research Society. Meeting Symposium B
Series: Materials Research Society symposium proceedings -- v. 863; Materials Research Society symposia proceedings -- v. 863
Publisher: Materials Research Society
Published: 2005
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 411
Subjects: Semiconductors -- Materials -- Congresses; Dielectric films -- Congresses; Integrated circuits -- Materials -- Congresses; Semiconductors -- Junctions -- Congresses; Integrated circuits -- Reliability -- Congresses
Genres: Congresses
Notes: "Symposium B, 'Materials, Technology and Reliability of Advanced Interconnects,' held March 28-April 1 at the 2005 MRS Spring Meeting in San Francisco, California ..."--Pref

Previous symposium entitled : Materials, technology and reliability for advanced interconnects and low-k dielectrics

Includes bibliographical references and indexes