Photo-initiated deposition and etching of materials relevant to semiconductor devices
By: J. Haigh and M.R. Aylett.
Contributors: Aylett, M. R.
Series: Progress in quantum electronics -- v. 12, no. 1; Progress in quantum electronics -- v. 12, pt. 1.
Publisher: Pergamon Press
Published: 1987
Place of publication: Oxford [Oxfordshire]; New York
Language: eng
Number of pages: 85
Subjects: Semiconductors.
Notes: Title from cover.

Bibliography: p. 77-85.