Small scale structures
Subtitle: proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
By: edited by N.F. De Rooij ... [et al.].
Contributors: Rooij, N. F. de; Symposium B on Materials for Sensors: Functional Nanoscaled Structures (1995 : Strasbourg, France); Symposium E on Structure and Properties of Metallic Thin Films and Multilayers (1995 : Strasbourg, France)
Series: European Materials Research Society symposia proceedings ;; 52
Publisher: Elsevier
Published: 1996
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 556
Subjects: Materials -- Congresses.; Microstructure -- Congresses.; Thin films -- Congresses.
Notes: Includes bibliographical references and indexes.
"Reprint from Sensors and actuators A51 (1). Sensors and actuators B31 (1-2). Thin solid films 275 (1-2)"--T.p. verso.