IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
Contributors: Semiconductor Equipment and Masterials International.
Publisher: Institute of Electrical and Electronics Engineers; May be purchased from IEEE Service Center
Published: 1991
Place of publication: New York; Piscataway, NJ
Language: eng
Number of pages: 212
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Genres: Congresses.
Notes: "Sponsored by Semiconductor Equipment and Materials International ... [et al.]. Held in conjunction with SEMICON/East 91"--Cover.

IEEE catalog number 91-CH3042-9"--T.p. verso.

Includes bibliographical references.