ASMC 2002
Subtitle: the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 30-May 2, Seaport Hotel, Boston, MA, USA
By: sponsored by [IEEE] Electron Devices Society ... [et al.].
Contributors: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
Publisher: IEEE; SEMI
Published: 2002
Place of publication: Piscataway, N.J; San Jose, Calif
Language: eng
Number of pages: 430
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: 2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; Advancing the science of semiconductor manufacturing excellence.; Advanced Semiconductor Manufacturing Conference and Workshop.; Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop.
Notes: Cover title.

"IEEE Catalog Number: 02CH37259"--Cover.

Includes bibliographical references.

Also available via the World Wide Web with additional title: Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop.