Processing of films for high Tc superconducting electronics
Subtitle: 10-12 October 1989, Santa Clara, California
By: T. Venkatesan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.
Contributors: Venkatesan, T.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1187; Proceedings of SPIE--the International Society for Optical Engineering ;; v.1187.
Publisher: SPIE
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 367
Subjects: Thin film devices -- Congresses.; High temperature superconductors -- Congresses.
Notes: Includes bibliographical references and index.
On t.p. "c" is subscript.