Stress-related problems in process simulation
By: Stefan Zelenka
Edition: 1st ed.
Series: Series in microelectronics -- v. 117
Publisher: Hartung-Gorre
Published: 2001
Place of publication: Konstanz
Language: eng
Number of pages: 139
Subjects: Semiconductors; Design and construction; Computer simulation
Notes: Originally presented as the author's thesis (Swiss Federal Institute of Technology), Diss. ETH No. 14220.

Includes bibliographical references (p. 131-138).

Summary in German.