Microlithography
Subtitle: science and technology
By: edited by Kazuaki Suzuki, Bruce W. Smith.
Contributors: Suzuki, Kazuaki.; Smith, Bruce W., 1959-
Edition: 2nd ed.
Series: Optical science and engineering -- 126.; Optical science and engineering (Boca Raton, Fla.) -- 126.
Publisher: CRC Press
Published: 2007
Place of publication: Boca Raton
Language: eng
Number of pages: 848
ISBN-13: 9780824790240
Subjects: Microlithography -- Industrial applications.; Integrated circuits -- Masks.; Metal oxide semiconductors, Complementary -- Design and construction.; Manufacturing processes.
Notes: Includes bibliographical references and index.