Surface and Interface Analysis of Microelectronic Materials Processing and Growth
Contributors: Fred H. Pollak (Editor)
Series: Spie Proceedings, Vol 1186
Publisher: SPIE-International Society for Optical Engine
Published: April 1990
Format: Paperback
Number of pages: 201
ISBN-13: 9780819402226
Subjects: Electronics - Microelectronics; Electronic Components; Optical Engineering; Technology & Industrial Arts; Science/Mathematics