System for the growth of bulk SiC crystals by modified CVD techniques
Subtitle: final report
By: Andrew J. Steckl, principal investigator.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA contractor report -- NASA CR-200136.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1994
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Crystal growth.; Crystal structure.; Film thickness.; Silicon carbides.; Silicon films.; Single crystals.; Substrates.; Thin films.; Vapor deposition.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 96-0513-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1996] 1 microfiche.