Silicon Nitride for Microelectronic Applications
Subtitle: Part 1 Preparation and Properties
By: by John T. Milek
Publisher: Springer US
Published: 1971
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] :
Number of pages: 118
ISBN-13: 9781468461640; 9781468461626
Subjects: Engineering; Computer engineering
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