Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Subtitle: standard reference materials
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.; National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- 260-117
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; Order from National Technical Information Service
Published: 1992
Place of publication: Gaithersburg, MD; [Springfield, VA
Language: eng
Format: Microform
Subjects: Microscopes -- Calibration -- Standards.; Integrated circuits -- Masks -- Measurement.; Chromium -- Spectra -- Standards.
Other titles: Standard reference materials; Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems; Standard reference materials
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 92-2587-M.

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.