Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011
Subtitle: symposium held April 25-29, 2011, San Francisco, California, U.S.A.
By: editors, Mikhail R. Baklanov ... [et al.].
Contributors: Baklanov, Mikhail R.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings -- v. 1335; Materials Research Society symposia proceedings -- v. 1335.
Publisher: Materials Research Society; Cambridge University Press
Published: 2012
Place of publication: Warrendale, Penn; Cambridge; New York
Language: eng
Number of pages: 127
ISBN-13: 9781605113128
Subjects: Materials; Congresses; Nanoelectronics; Very large scale integration; Microelectronics; Integrated circuits; Interconnects (Integrated circuit technology)
Notes: "Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California"--P. ix.

Includes bibliographical references and indexes.