Materials for Mechanical and Optical Microsystems
Subtitle: Symposium Held December 4-5, 1996, Boston, Massachusetts, U.S.A (Materials Research Society Symposium Proceedings)
Contributors: Michael L. Reed (Editor); Miko Elwenspoek (Editor); S. Johansson (Editor); E. Obermeier (Editor); H. Fujita (Editor); Y. Uenishi (Editor)
Publisher: Materials Research Society
Published: June 1997
Language: eng
Format: Hardcover
Number of pages: 242
ISBN-13: 9781558993488
Subjects: Electronics - General; Microelectronics; Congresses; Applied Electromagnetics; Technology; Technology & Industrial Arts; Materials; Science/Mathematics; Electronics - Microelectronics; Electromechanical devices; Thin films