IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Subtitle: theme: "Semiconductor manufacturing." May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA.
Contributors: Semiconductor Equipment and Materials Institute.; IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.; Institute of Electrical and Electronics Engineers.
Publisher: Institue of Electrical and Electronics Engineers; IEEE Services Center [distributor]
Published: 1989
Place of publication: New York, NY; Piscataway, NJ
Language: eng
Number of pages: 136
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor industry -- Congresses.
Other titles: 1989 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.; Semiconductor manufacturing.; International Semiconductor Manufacturing Science Symposium.
Notes: "IEEE catalog number 89CH2699-7"--Verso t.p.

Cosponsored by IEEE/SEMI and IEEE Components, Hybrids, & Manufacturing Technology Society, and the Electron Devices Society.

Title on cover and spine: 1989 IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Caption title.

Includes bibliographical references.