Tekhnologicheskie problemy mikroėlektroniki
By: otvetstvennye redaktory toma T.M. Makhviladze, A.V. Rakov.
Contributors: Makhviladze, T. M.; Rakov, A. V.
Series: Trudy Instituta obshcheĭ fiziki,; t. 14
Publisher: "Nauka"
Published: 1988
Place of publication: Moskva
Language: rus
Number of pages: 169
Subjects: Integrated circuits -- Design and construction.
Notes: Includes bibliographical references.