Handbook of semiconductor silicon technology
By: edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
Contributors: O'Mara, William C.; Herring, Robert B.; Hunt, Lee P.
Publisher: Noyes Publications
Published: 1990
Place of publication: Park Ridge, N.J
Language: eng
Number of pages: 795
Subjects: Semiconductors -- Handbooks, manuals, etc.; Silicon crystals -- Handbooks, manuals, etc.
Description: This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.
Notes: Includes bibliographical references and index.