Design and process integration for microelectronic manufacturing II
Subtitle: 26-28 February 2003, Santa Clara, California, USA
By: Alexander Starikov, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Starikov, Alexander, 1952-; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5042; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5042.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 418
Subjects: Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control -- Congresses.
Genres: Congresses.
Other titles: Design, process integration, and characterization for microelectronics.
Notes: Includes bibliographical references and index.
2002 conference proceedings titled: Design, process integration, and characterization for microelectronics.