Growth kinetics, electrical characterization and reliability study of Sub-5 nm gate dielectrics
By: Tanya Nigam
Contributors: Katholieke Universiteit te Leuven (1970- )
Published: 1999
Language: eng
Number of pages: 181
Notes: Thesis (doctoral)--Katholieke Universiteit te Leuven (1970- ), 1999.

Description based on print version record.