Micromachining technology for micro-optics and nano-optics III
Subtitle: 25-27 January 2005, San Jose, California, USA
By: Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA).
Contributors: Johnson, Eric G.; Nordin, Gregory P.; Suleski, Thomas J., 1969-; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: Proceedings of SPIE
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 282
Subjects: Victoria and Albert Museum.; Integrated optics -- Congresses.; Miniature electronic equipment -- Design and construction -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Micromachining technology for micro-optics.
Notes: Includes bibliographical references and author index.
First conference has title: Micromachining technology for micro-optics.