Tribology issues and opportunities in MEMS
Subtitle: proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997
By: edited by Bharat Bhushan)
Contributors: Bhushan, Bharat, 1949-
Publisher: Kluwer Academic
Published: 1998
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 655
Subjects: Tribology -- Congresses.
Notes: Includes bibliographical references and index.