Sputtering by particle bombardment.
By: edited by R. Behrisch and K. Wittmaack.
Contributors: Behrisch, Rainer.; Wittmaack, Klaus.
Series: Topics in applied physics -- vol.64
Publisher: Springer-Verlag
Published: 1991
Place of publication: Berlin; London
Language: eng
Number of pages: 410
Subjects: Sputtering (Physics)
Notes: Includes bibliographical references and indexes.