Micro-electro-mechanical systems (MEMS)--2003
Subtitle: presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C.
By: co-sponsored by the MEMS Subdivision, ASME ... [et al.] ; organized by Kimberly Turner ... [et al.].
Contributors: Turner, Kimberly Lynn, 1973-; American Society of Mechanical Engineers. MEMS Subdivision.; International Mechanical Engineering Congress and Exposition (2003 : Washington, D.C.)
Series: MEMS ;; vol. 5; MEMS (Series) (American Society of Mechanical Engineers) ;; v. 5.
Publisher: American Society of Mechanical Engineers
Published: 2003
Place of publication: New York, N.Y
Language: eng
Number of pages: 737
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Other titles: MEMS--2003
Notes: Includes bibliographical references and author index.