Microelectronic device technology II
Subtitle: 23-24 September, 1998, Santa Clara, California
By: David Burnett, Dirk Wristers, Toshiaki Tsuchiya, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].
Contributors: Burnett, David.; Wristers, Dirk.; Tsuchiya, Toshiaki.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series ;; v. 3506; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3506.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 356
Subjects: Semiconductors -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Other titles: Microelectronic device technology 2; Microelectronic device technology two
Notes: Includes bibliographical references and author index.