Rapid thermal and other short-time processing technologies
Subtitle: proceedings of the international symposium
By: editors, Fred Roozeboom ... [et al.].
Contributors: Roozeboom, Fred.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. High Temperature Materials Division.; Electrochemical Society. Meeting
Series: Proceedings -- v. 2000-9; Proceedings (Electrochemical Society) -- v. 2000-9.
Publisher: Electrochemical Society
Published: 2000
Place of publication: Pennington, N.J
Language: eng
Number of pages: 462
Subjects: Integrated circuits -- Design and construction -- Congresses.; Rapid thermal processing -- Congresses.; Manufacturing processes -- Congresses.
Genres: Congresses.
Notes: "Electronics, Dielectric Science and Technology, and High Temperature Divisions."

"The international symposium on Rapid Thermal and Other Short-Time Processing Technologies I was held from May 14 through May 18, 2000 in Toronto, Canada as part of the 197th Meeting of the Electrochemical Society"--Pref.

Includes bibliographical references and indexes.