IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: theme, "World class manufacturing" : ASMC '90 proceedings.
Contributors: Semiconductor Equipment and Materials International.; IEEE Electron Devices Society.; IEEE Components, Hybrids, and Manufacturing Technology Society.
Publisher: Institute of Electrical and Electronics Engineers; IEEE Service Center [distributor]
Published: 1990
Place of publication: New York; Piscataway, NJ
Language: eng
Number of pages: 164
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Genres: Congresses.
Other titles: Advanced Semiconductor Manufacturing Conference and Workshop.; ASMC '90 proceedings.
Notes: "September 11-12, 1990, Danvers, Massachusetts ... sponsored by SEMI, IEEE Electron Devices Society, Components, Hybrids, and Manufacturing Technology Society"--Cover.

"IEEE catalog number 90CH2902-5"--T.p. verso.

Includes bibliographical references.