Process feasibility study in support of silicon material
Subtitle: task I
Contributors: Li, Ku-yen; Hansen, Keith C; Yaws, Carl L; United States. Dept. of Energy
Series: DOE/JPL ; 954343-14
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1977
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Silicon
Notes: Authors: Ku-Yen Li, Keith C. Hansen, Carl L. Yaws

Contract no. NAS-7-100-954343

Mar. 1979

Includes bibliographical references
Table of contents: value: Quarterly technical progress report (XIV); value: Quarterly technical progress report (IX), December 1977; value: Quarterly technical progress report (VIII); value: Quarterly technical progress report (XVI); value: Quarterly technical progress report (XII)