Fabrication of micrometer line width SAW filters using direct optical projection
By: W.J. Kearns, A.J. Slobodnik
Contributors: Slobodnik, Andrew J.
Series: Instrumentation Papers -- no. 225; Instrumentation papers -- no. 225
Publisher: United States Air Force, Air Force Systems Command, Air Force Cambridge Research Laboratories, Microwave Physics Laboratory
Published: 1975
Place of publication: Hanscom AFB, [Bedford], Mass
Language: eng
Number of pages: 12
Subjects: Acoustic surface wave devices
Description: Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications and electronic sensing applications. This system and a typical 320 MHz (1.26 micrometer line width) SAW filter are described in detail.
Notes: "AFCRL-TR-75-0055."

"Microwave Physics Laboratory Project 634B."

"28 January 1975."

Cover title.

Includes bibliographical references (p. 12).