Silicon processing for the VLSI era
By: Stanley Wolf, Richard N. Tauber.
Contributors: Tauber, Richard N.
Edition: 2nd ed.
Publisher: Lattice Press
Published: 2002
Place of publication: Sunset Beach, Calif
Language: eng
Subjects: Semiconductors -- Etching.; Integrated circuits -- Very large scale integration.; Silicon.
Notes: Includes bibliographies and indexes.
Table of contents: title: v. 1. Process technology