Vakuumbeschichtung: Band 1
Subtitle: Plasmaphysik, Plasmadiagnostik, Analytik (VDI-Buch)
Contributors: Gerhard Kienel (Editor); Hartmut Frey (Editor)
Edition: 1 edition
Publisher: Springer
Published: February 14, 1997
Language: ger
Format: Hardcover
ISBN-13: 9783540622659
Subjects: Chemical & Biochemical; Industrial Engineering; Material Science; 3184013111; Technology / Engineering / Industrial; Technology & Industrial Arts