Fundamental aspects of ultrathin dielectrics on Si-based devices
By: edited by Eric Garfunkel, Evgeni Gusev, and Alexander Vul'.
Contributors: Garfunkel, Eric L.; Gusev, E. L.; Vul', Alexander.; North Atlantic Treaty Organization. Scientific Affairs Division.; NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding (1997 : St. Petersburg, Russia)
Series: NATO science series. Partnership sub-series 3, High technology ;; vol. 47; NATO science series.; v. 47.
Publisher: Kluwer Academic Publishers
Published: 1998
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 507
Subjects: Silicon-on-insulator technology -- Congresses; Dielectric films -- Congresses
Notes: Includes bibliographical references and index.
"Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997"--T.p. verso.
"Published in cooperation with NATO Scientific Affairs Division."