Cleaning technology in semiconductor device manufacturing
Subtitle: proceedings of the seventh international symposium
By: editors, J. Ruzyllo ... [et al.].
Contributors: Rużyłło, Jerzy.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting; International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (7th : 2001 : San Francisco, Calif.)
Series: Proceedings ;; v. 2001-26; Proceedings (Electrochemical Society) ;; v. 2001-26.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, NJ
Language: eng
Number of pages: 374
Subjects: Semiconductor wafers -- Cleaning -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Electronics Division."
"The Seventh International Symposium on Cleaning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting  of the Electrochemical Society in San Francisco in September 2001."--Preface.