Surface chemical cleaning and passivation for semiconductor processing
Subtitle: symposium held April 13-15, 1993, San Francisco, California, U.S.A.
By: editors, Gregg S. Higashi, Eugene A. Irene, Tadahiro Ohmi.
Contributors: Higashi, Gregg S.; Irene, Eugene A.; Ohmi, Tadahiro, 1939-; Materials Research Society. Meeting Symposium Y.
Series: Materials Research Society symposium proceedings ;; v. 315; Materials Research Society symposia proceedings ;; v. 315.
Publisher: Materials Research Society
Published: 1993
Place of publication: Pittsburgh, PA
Language: eng
Number of pages: 518
Subjects: Semiconductors -- Design and construction -- Congresses.; Surface preparation -- Congresses.; Semiconductors -- Cleaning -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and index.