Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation
Subtitle: Symposium Held April 17-19, 1995, San Francisco, California, ... Research Society Symposium Proceedings)
Contributors: Michael Liehr (Editor); Marc Heyns (Editor); Masataka Hirose (Editor); Harold Parks (Editor)
Publisher: Materials Research Society
Published: September 1995
Language: eng
Format: Hardcover
Number of pages: 411
ISBN-13: 9781558992894
Subjects: Electronics - Semiconductors; Science; Design and construction; Digital Integrated Circuit Design; Synthetic Detergents; Semiconductors; Technology & Industrial Arts; Manufacturing processes; Science/Mathematics; Integrated circuits; Chemistry - General; Cleaning; Congresses