Nanoimprint lithography
Subtitle: principles, processes and materials
By: Hongbo Lan, Yucheng Ding and Hongzhong Liu
Contributors: Ding, Yucheng, 1961-; Liu, Hongzhong, 1971-
Publisher: Nova Science Publishers, Inc.
Published: 2011
Place of publication: New York
Language: eng
Number of pages: 73
ISBN-13: 9781611225013
Subjects: Nanoelectronics; Nanostructures; Microlithography
Notes: Includes bibliographical references (p. [61]-68) and index.
Table of contents: title: Principle and fundamental process for NIL; title: Variations of NIL processes; title: NIL materials; title: Prospects and challenges in NIL.