Micro electro-mechanical systems (MEMS) technologies
Subtitle: equipment and processes : a Euspen class
By: Hans H. Gatzen.
Contributors: European Society for Precision Engineering and Nanotechnology.; 3rd International conference and 4th annual general meeting of the European Society for Precision Engineering and Nanotechnology (2002 : Eindhoven)
Series: Euspen Tutorial Notes
Publisher: Euspen
Published: 2002
Language: eng