Photon-assisted processing of surfaces and thin films
Subtitle: proceedings of Symposium B on Photon-Assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994
By: edited by J. Dieleman, U.K.P. Biermann, P. Hess.
Contributors: Dieleman, J.; Biermann, U. K. P.; Hess, P.
Series: European Materials Research Society symposia proceedings ;; v. 47
Publisher: Elsevier
Published: 1995
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 632
Subjects: Surfaces (Technology) -- Congresses.; Lasers -- Industrial applications -- Congresses.; Photon beams -- Industrial applications -- Congresses.; Plasma etching -- Congresses.; Plasma-enhanced chemical vapor deposition -- Congresses.
Notes: Includes bibliographical references and indexes.
"Reprinted from Applied surface science 86 (1-4)"--T.p. verso.