Mikrostrukturirovanie tonkikh plenok
By: otvetstvennyĭ redaktor toma A.A. Orlikovskiĭ.
Contributors: Orlikovskiĭ, A. A.
Series: Trudy FTIAN,; t. 2; Trudy FTIAN ;; t. 2.
Publisher: "Nauka"
Published: 1991
Place of publication: Moskva
Language: rus
Number of pages: 110
Subjects: Thin films.; Microelectronics.
Notes: Includes bibliographical references.
Abstract and table of contents also in English.
"Nauchnoe izdanie"--Verso of t.p.