Plasma deposited thin films
By: editors, J. Mort, F. Jansen.
Contributors: Mort, J.; Jansen, F. Ph. D.
Publisher: CRC Press
Published: 1986
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 245
Subjects: Thin film devices.; Vapor-plating.; Plasma engineering.
Notes: Includes bibliographies and index.