Low-energy ion irradiation of solid surfaces
By: Hubert Gnaser.
Series: Springer tracts in modern physics,; v. 146; Springer tracts in modern physics ;; 146.
Publisher: Springer
Published: 1999
Place of publication: Berlin; New York
Language: eng
Number of pages: 293
Subjects: Solids -- Effect of radiation on.; Ion bombardment.
Description: The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.
Notes: Includes bibliographical references (p. [259]-289) and index.