Handbook of sputter deposition technology
Subtitle: principles, technology, and applications
By: by Kiyotaka Wasa and Shigeru Hayakawa.
Contributors: Hayakawa, Shigeru, 1925-
Series: Materials science and process technology series
Publisher: Noyes Publications
Published: 1992
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 304
Subjects: Cathode sputtering (Plating process); Thin films.
Notes: Includes bibliographical references and index.