Excimer lasers
Subtitle: applications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts
By: James A. Greer, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Greer, James A.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1835; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1835.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 222
Subjects: Excimer lasers -- Congresses.
Notes: Includes bibliographical references and index.