12th IEEE International Conference on Advanced Thermal Processing of Semiconductors
Subtitle: RTP 2004 : September 28-30, 2004, Hilton Portland & Executive Tower, Portland, OR
By: J. Gelpey ... [et al.], editors ; IEEE, Electron Devices Society.                                                .
Contributors: Gelpey, Jeffrey C.; IEEE Electron Devices Society
Publisher: IEEE
Published: 2004
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 206
Subjects: Semiconductors; Congresses; Heat treatment; Rapid thermal processing; Semiconductor doping; Defects
Other titles: RTP 2004; Advanced thermal processing of semiconductors
Notes: "IEEE Catalog Number: 03EX847"--T.p. verso.

"IEEE Catalog Number: 04EX847"--P. 4 of cover.

Includes bibliographical references.