Laser applications in microelectronic and optoelectronic manufacturing IV
Subtitle: 25-27 January 1999, San Jose, California
By: Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR [i.e. AFOSR]--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.
Contributors: Dubowski, J. J.; United States. Air Force. Office of Scientific Research.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3618; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3618.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 534
Subjects: Microelectronics industry -- Equipment and supplies -- Congresses.; Lasers -- Industrial applications -- Congresses.; Manufacturing processes -- Congresses.; Laser ablation -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.