Two- and three-dimensional methods for inspection and metrology V
Subtitle: 11-12 September 2007, Boston, Massachusetts, USA
By: Peisen S. Huang, editor ; sponsored and published by by SPIE
Contributors: Society of Photo-optical Instrumentation Engineers
Series: Proceedings of SPIE -- v. 6762; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6762.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819469229
Notes: Includes bibliographical references and author index.