Metal impurities in silicon-device fabrication
By: Klaus Graff.
Series: Springer series in materials science ;; 24; Springer series in materials science ;; v. 24.
Publisher: Springer-Verlag
Published: 1995
Place of publication: Berlin; New York
Language: eng
Number of pages: 216
Subjects: Semiconductors -- Defects.; Silicon -- Inclusions.; Silicon -- Defects.; Contamination (Technology)
Notes: Includes bibliographucal references (p. 201-214) and index.