Gas-Phase and Surface Chemistry in Electronic Materials Processing
Subtitle: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate)
Contributors: F. T. J. Smith (Contributor)
Publisher: Materials Research Society
Published: May 1994
Language: eng
Format: Hardcover
Number of pages: 556
ISBN-13: 9781558992337
Subjects: Surface chemistry; Science; Congresses; Science/Mathematics; Surfaces; SCI013000; SCI; Chemistry - General; Electronics; Materials