Fundamental gas-phase and surface chemistry of vapor-phase deposition II and Process control, diagnostics and modeling in semiconductor manufacturing IV
Subtitle: proceedings of the international symposium
By: editors, M.T. Swihart, M.D. Allendorf, M. Meyyappan
Contributors: Swihart, Mark T.; Allendorf, Mark Donald; Meyyapan, M.; Electrochemical Society. High Temperature Materials Division; Electrochemical Society. Dielectric Science and Technology Division
Series: Proceedings -- v. 2001-13.; Proceedings (Electrochemical Society) -- v. 2001-13.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 508
ISBN-13: 9781566773195
Subjects: Surface chemistry; Chemical vapor deposition; Congresses; Ionized gases
Notes: "High Temperature Materials and Dielectric Science and Technology Divisions."

Includes bibliographical references and index.