Microelectromechanical Structures for Materials Research
Subtitle: Symposium Held April 15-16, 1998 , San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 518.)
Publisher: Materials Research Society
Published: June 1998
Language: eng
Format: Hardcover
Number of pages: 248
ISBN-13: 9781558994249
Subjects: Technology; Research; Material Science; Technology & Industrial Arts; Science/Mathematics; Equipment and supplies; Electronics - Microelectronics; Congresses; Materials; Microelectromechanical systems