MicroProcess '96
Subtitle: digest of papers : the 9th International MicroProcess Conference, July 8-11, 1996, Kitakyushu, Japan
By: sponsored by the Japan Society of Applied Physics in cooperation with IEEE Electron Devices Society ... [et al.].
Contributors: IEEE Electron Devices Society.; Ōyō Butsuri Gakkai.
Published: 1996
Place of publication: Bunkyo-ku, Tokyo Business Center for Academic Societies Japan
Language: eng
Number of pages: 268
Subjects: Lasers -- Industrial applications -- Congresses.; Microelectronics -- Congresses.; Microlithography -- Congresses.; Plasma engineering -- Congresses.
Other titles: MicroProcess Ninety-six; Digest of papers MicroProcess '96; Digest of papers MicroProcess Ninety-six
Notes: Includes bibliographical references and index.