Analiz simmetrii granit͡s-predvaritel'nyǐ ėtap tekhnologicheskogo proektirovanii͡a geteroėpitaksial'nykh kompozit͡siǐ
Subtitle: preprint
By: A.V. Andreeva
Contributors: Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Published: 1989
Place of publication: Chernogolovka
Language: rus
Number of pages: 24
Notes: Cover title.

At head of title: Akademii͡a nauk SSSR. Institut problem teknologii mikroėlektroniki i osobochistykh materialov.

Includes bibliographical references (p. 24)