Plasma processing of materials
Subtitle: scientific opportunities and technological challenges
By: Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Publisher: National Academy Press; National Academies Press
Published: 1991
Place of publication: Washington, D.C
Language: eng
Number of pages: 75
Subjects: Plasma engineering.; Microelectronics -- Materials -- Effect of radiation on.; Surfaces (Technology)