Epitaxial silicon technology
By: edited by B. Jayant Baliga.
Contributors: Baliga, B. Jayant, 1948-
Publisher: Academic Press
Published: 1986
Place of publication: Orlando
Language: eng
Number of pages: 328
Subjects: Semiconductors -- Design and construction.; Silicon crystals -- Growth.; Epitaxy.; Silicon-on-insulator technology.
Notes: Includes bibliographies and index.
Table of contents: title: Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose; title: Silicon molecular beam epitaxy / Subramanian S. Iyer; title: Silicon liquid phase epitaxy / B. Jayant Baliga; title: Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev; title: Silicon-on-insulator epitaxy / Hon Wai Lam.