Device and process technologies for MEMS, microelectronics, and photonics III
Subtitle: 10-12 December 2003, Perth, Australia
By: Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia).
Contributors: Chiao, Jung-Chih.; Society of Photo-optical Instrumentation Engineers.; University of Western Australia.; Defence Science and Technology Organisation (Australia)
Series: SPIE proceedings series,; v. 5276; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5276.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 566
Subjects: Microelectromechanical systems -- Congresses.; Photonics -- Congresses.; Photomechanical processes -- Congresses.; Photolithography -- Congresses.
Genres: Congresses.
Other titles: Device and process technologies for MEMS and microelectronics.
Notes: Includes bibliographical references and index.