Fundamental Principles of Optical Lithography
Subtitle: The Science of Microfabrication
Publisher: Wiley-Interscience
Published: January 18, 2008
Language: eng
Format: Hardcover
Number of pages: 534
ISBN-13: 9780470018934
Subjects: Applied optics; Electronics - Circuits - General; Material Science; Technology / Material Science; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics