Semiconductor materials and process technology handbook
Subtitle: for very large scale integration (VLSI) and ultra large scale integration (ULSI)
By: edited by Gary E. McGuire.
Contributors: McGuire, G. E.
Series: Materials science and process technology series
Publisher: Noyes Publications
Published: 1988
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 675
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Handbooks, manuals, etc.; Integrated circuits -- Ultra large scale integration -- Design and construction -- Handbooks, manuals, etc.
Description: A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
Notes: Includes bibliographies and index.