Metrology-based control for micro-manufacturing
Subtitle: 24-25 January 2001, San Jose [Calif.], USA
By: Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Tobin, Kenneth W.; Lakhani, Fred.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4275; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4275.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 156
Subjects: Surfaces (Technology) -- Measurement -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Metrology -- Congresses.; Optoelectronic devices -- Industrial applications -- Congresses.; Lasers -- Industrial applications -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.