Microlithography: High Integration in Microelectronics 
Subtitle: Proceedings of the First Workshop Rio De Janeiro, Brazil Aug 28-Sept 1 1989
Publisher: World Scientific Pub Co Inc
Published: August 1990
Language: eng
Format: Hardcover
Number of pages: 230
ISBN-13: 9789810201371
Subjects: Chemistry; Electronics & Communications Engineering; Materials science; Particle & high-energy physics; Electronics - Microelectronics; Integrated Circuits; Technology