Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
By: V.K. Popov, S.N. I͡A︡chmenëv.
Contributors: I͡A︡chmenëv, S. N.
Series: Biblioteka tekhnologa radioėlektronnoĭ apparatury; Biblioteka tekhnologa radioėlektronnoĭ apparatury (Radio i svi͡a︡zʹ (Firm))
Publisher: "Radio i svi͡a︡zʹ"
Published: 1985
Place of publication: Moskva
Language: rus
Number of pages: 125
Subjects: Microelectronics.; Lithography, Electron beam.; Ion beam lithography.
Notes: Bibliography: p. 124-[126]