The physics of micro/nano-fabrication
By: Ivor Brodie and Julius J. Muray
Contributors: Muray, Julius J.
Series: Microdevices; Microdevices
Publisher: Springer
Published: 1992
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 650
ISBN-13: 9781475767759; 9781441932211
Subjects: Microelectronics; Thin-film circuits
Description: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Notes: Includes bibliographical references and indexes.
Table of contents: title: 1. Preliminary Survey; title: 2. Particle Beams: Sources, Optics, and Interactions; title: 3. Plasmas: Physics and Chemistry; title: 4. Layering Technologies; title: 5. Pattern Generation; title: 6. Microcharacterization; title: 7. Limits to Nanofabrication; title: Appendixes; title: Author Index.