Micro-optics and lithography
By: Maria Kufner and Stefan Kufner.
Contributors: Kufner, Stefan.
Publisher: VUBPress
Published: 1997
Place of publication: Brussels, Belgium
Language: eng
Number of pages: 206
Subjects: Integrated optics.; Optical interconnects.; Microlithography.; Integrated circuits -- Masks.
Notes: Includes bibliographical references and index.