Mems/Nems
Subtitle: Handbook Techniques and Applications Design Methods,  Fabrication Techniques,  Manufacturing Methods,  Sensors and Actuators,  Medical Applications and MOEMS
Publisher: Springer
Published: Aug 23, 2016
Format: paperback
Number of pages: 2112
ISBN-13: 9781489977397
Notes: Source title: Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS