Microelectronic manufacturing yield, reliability, and failure analysis III
Subtitle: 1-2 October, 1997, Austin, Texas
By: Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society.
Contributors: Ali Keshavarzi.; Prasad, Sharad.; Hartmann, Hans-Dieter.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3216; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3216.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 198
Subjects: Microelectronics -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Notes: Includes bibliographic references and index.