Optical microlithography and metrology for microcircuit fabrication
Subtitle: proceedings, ECO2, 27-28 April, 1989, Paris, France
By: Michel J. Lacombat, Steve Wittekoek, chairs/editors.
Contributors: Lacombat, Michel J.; Wittekoek, Steve.; European Physical Society.; European Federation for Applied Optics.; Society of Photo-optical Instrumentation Engineers.; Association nationale de la recherche technique.
Series: SPIE proceedings series ;; v. 1138; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1138.
Publisher: SPIE
Published: 1989
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 206
Subjects: Integrated circuits -- Design and construction -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and index.
"The Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering; cooperating organizations, ANRT--Association nationale de la recherche technique ... [et al.]."