Microfabricated Systems and MEMS VI
Subtitle: proceedings of the international symposium
By: editors, P.J. Hesketh ... [et al.].
Contributors: Hesketh, P. J.; Electrochemical Society.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 2002-6; Proceedings (Electrochemical Society) ;; v. 2002-6.
Publisher: Electrochemical Society, Inc.
Published: 2002
Place of publication: Pennington, N.J
Language: eng
Number of pages: 252
Subjects: Microelectronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
"The papers printed in this volume were presented at the Microfabricated Systems and MEMS-VI Symposium held at the 202nd Meeting of the Electrochemical Society, May 12-17th, 2002, in Philadelphia, PA."--P. iii.