Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
By: editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions.
Contributors: Meyyappan, M.; Economou, D. J. 1958-; Butler, S. W. 1963-; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting.
Series: Proceedings ; v. 97-9; Proceedings (Electrochemical Society) ;; v. 97-9.
Publisher: Electrochemical Society
Published: 1997
Place of publication: Pennington, NJ
Language: eng
Number of pages: 347
Subjects: Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.; Semiconductor industry -- Production control -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Part of the 191st Meeting of the Electrochemical Society"--P. iii.