Semiconductor cleaning technology, 1989
Subtitle: proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
By: edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo ... [et al.] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions.
Contributors: Rużyłło, Jerzy.; Novak, Richard E.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 90-9; Proceedings (Electrochemical Society) ;; v. 90-9.
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ (10 South Main St., Pennington 08534-2896)
Language: eng
Number of pages: 399
Subjects: Semiconductor wafers -- Cleaning -- Congresses.
Notes: Includes bibliographical references and indexes.
"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii.