CVD
Subtitle: main concepts, applications and restrictions
By: Blagica Bliznakovska and Milosav Miloševski ; in cooperation with Stefan Krawczynski, Christoph Meixner and Horst-Reiner Kötter.
Contributors: Milošveski, Milosav.; Krawczynski, S.; Meixner, Christoph.; Kötter, H.
Series: Scientific series of the International Bureau,; v. 17
Publisher: Forschungszentrum Jülich GmbH, Zentralbibliothek
Published: 1993
Place of publication: Jülich
Language: eng
Number of pages: 40
Subjects: Chemical vapor deposition.
Notes: Includes bibliographical references (p. 37-40).