In situ real time characterization of thin films
Subtitle: edited by Orlando Auciello, Alan R. Krauss
Contributors: Auciello, Orlando, 1945-; Krauss, Alan Robert
Publisher: Wiley
Published: 2001
Place of publication: New York
Language: eng
Number of pages: 263
Subjects: Thin films
Notes: "A Wiley-Interscience publication."

Includes bibliographical references