2001 Microelectromechanical Systems Conference
Subtitle: Berkeley, California, Usa, 24-26 August 2001
Publisher: Ieee
Published: December 2001
Language: eng
Format: Paperback
Number of pages: 116
ISBN-13: 9780780372245
Subjects: Electronics - Microelectronics; Engineering - Mechanical; Mechanical Engineering (Specific Aspects); Microelectronics; Technology; Congresses; Microelectromechanical systems; Science/Mathematics