Digest of papers
Subtitle: Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
By: sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
Contributors: IEEE Electron Devices Society; Ōyō Butsuri Gakkai; American Vacuum Society
Publisher: Japan Society of Applied Physics
Published: 2004
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 349
Subjects: Microfabrication; Congresses; Integrated circuits; Very large scale integration; Design and construction; Lithography; Nanotechnology; Microelectronics
Notes: "IEEE Catalog Number: 04EX934"--T.p. verso.

Includes bibliographical references and author index.