10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002
Subtitle: September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada
By: editors, J. Gelpey ... [et al.] ; IEEE Electron Devices Society.
Contributors: Gelpey, Jeffrey C.; IEEE Electron Devices Society.
Publisher: IEEE
Published: 2002
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 241
Subjects: Semiconductors -- Heat treatment -- Congresses.; Rapid thermal processing -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Other titles: Advanced thermal processing of semiconductors; RTP 2002
Notes: Includes bibliographical references.
"IEEE Catalog Number: 02EX574"--T.p. verso.
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