Microelectromechanical systems
Subtitle: advanced materials and fabrication methods
By: Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Publisher: National Academy Press
Published: 1997
Place of publication: Washington, DC
Language: eng
Number of pages: 61
Subjects: Microelectronics -- Materials.; Microelectromechanical systems -- Design and construction.
Notes: Includes bibliographical references (p. 51-55).