1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC 99 proceedings : September 8-10, 1999, Boston, Massachusetts, USA
By: [co-sponsored by Semiconductor Equipment and Materials International (SEMI), Institute of Electrical and Electronics Engineers, Inc. (IEEE) ... et al.].
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: IEEE; SEMI
Published: 1999
Place of publication: Piscataway, N.J; Mountain View, Calif
Language: eng
Number of pages: 455
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Genres: Congresses.
Other titles: Advanced Semiconductor Manufacturing Conference and Workshop; 10 years of advancing the science of semiconductor manufacturing excellence.
Notes: "10 Years of Advancing the Science of Semiconductor Manufacturing Excellence."

"IEEE Catalog Number 99CH36295"--p. iii.

Includes bibliographic references.