Defects in high-k gate dielectric stacks
Subtitle: nano-electronic semiconductor devices
By: edited by Evgeni Gusev.
Contributors: Gusev, Evgeni.
Series: NATO science series -- v. 220
Publisher: Springer
Published: 2006
Place of publication: Dordrecht
Language: eng
Number of pages: 492
Subjects: Gate array circuits -- Congresses; Dielectrics -- Congresses; Semiconductors -- Defects -- Congresses
Genres: Congresses.
Notes: "Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon.

Includes bibliographical references and indexes