Silicon Nitride for Microelectronic Applications
Subtitle: Part 2 Applications and Devices
By: by John T. Milek
Publisher: Springer US
Published: 1972
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] :
Number of pages: 117
ISBN-13: 9781461596110; 9781461596097
Subjects: Engineering; Computer engineering
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