Heisei 20-nendo kijun ninshō kenkyū kaihatsu jigyō (MEMS debaisu kikō zairyō no tokusei keisoku hyōka hōhō ni kansuru hyōjunka) seika hōkokusho
Contributors: Maikuromashin Sentā
Publisher: Maikuromashin Sentā
Published: 2009
Place of publication: [Tokyo]
Language: jpn
Number of pages: 192
Subjects: Microelectromechanical systems; Testing; Standards
Other titles: Kijun ninshō kenkyū kaihatsu jigyō (MEMS debaisu kikō zairyō no tokusei keisoku hyōka hōhō ni kansuru hyōjunka) seika hōkokusho; MEMS debaisu kikō zairyō no tokusei keisoku hyōka hōhō ni kansuru hyōjunka
Notes: Cover title.

"Heisei 20-nendo Keizai Sangyōshō itaku jigyō seika"

Includes bibliographical references.

One report in English, with summaries also in English.