Advanced metallization for future ULSI
Subtitle: symposium held April 8-11, 1996, San Francisco, California, U.S.A.
By: editors, K.N. Tu ... [et al.].
Contributors: Tu, K. N. 1937-; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings ;; v. 427; Materials Research Society symposia proceedings ;; v.427.
Publisher: Materials Research Society
Published: 1996
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 597
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Metallizing -- Congresses.; Metallic films -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Notes: Includes bibliographical references and indexes.
Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996.