Micro-electro-mechanical systems (MEMS) 1998
Subtitle: presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California
By: edited by Liwei Lin ... [et al.] ; sponsored by the Dynamic Systems and Control Division, ASME ... [et al.].
Contributors: Lin, Liwei.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; International Mechanical Engineering Congress and Exposition (1998 : Anaheim, Calif.)
Series: DSC ;; vol. 66; DSC (Series) ;; v. 66.
Publisher: American Society of Mechanical Engineers
Published: 1998
Place of publication: New York, N.Y
Language: eng
Number of pages: 593
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Other titles: Microelectromechanical systems (MEMS)1998; MEMS 1998
Notes: Includes bibliographical references and author index.