Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity
By: Jeannette Benavides
Series: NASA technical paper -- 3697
Publisher: National Aeronautics and Space Administration, Goddard Space Flight Center; National Technical Information Service, distributor
Published: 1997
Place of publication: Greenbelt, Md; Springfield, Va
Language: eng
Format: [microform] /
Notes: Shipping list no.: 99-0723-M.