Metal Impurities in Silicon-Device Fabrication
Edition: 2nd rev. edition
Publisher: Springer
Published: March 15, 2000
Language: eng
Format: Hardcover
Number of pages: 268
ISBN-13: 9783540642138
Subjects: Materials science; Semi-conductors & super-conductors; Silicon; Physics; Semiconductor Physics; Semiconductors; Science; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - General; Material Science; Technology / Optics; Contamination (Technology); Defects; Inclusions
First sentence: The increasingly complexity and miniaturization of modern integrated circuits requires higher yields and hence a decreasing density of defects in the electrically active zone of a silicon device.
Notes: Springer Series in Materials Science