Electronics and structures for MEMS
Subtitle: 27-29 October 1999, Royal Pines Resort, Queensland, Australia
By: Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].
Contributors: Bergmann, Neil W.; Reinhold, Olaf.; Tien, Norman C.; Society of Photo-optical Instrumentation Engineers.; Institution of Radio and Electronics Engineers, Australia.; Queensland. Government State Development.; Griffith University Microelectronics Engineering Society.
Series: SPIE proceedings series ;; v. 3891; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3891.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 428
Subjects: Microelectromechanical systems -- Congresses.; Smart structures -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.