Semiconductor Manufacturing Technology Workshop
Subtitle: Mar. 22-26, 1993, Hsinchu, Taiwan, R.O.C.
By: [sponsored by] IEEE Electron Devices Society,IEEE Control Systems Society [and others]
Contributors: Lee, Si-Chen; Lu, C. Y.; Guo li Taiwan da xue. Department of Electrical Engineering; Gong ye ji shu yan jiu yuan; IEEE Electron Devices Society; IEEE Control Systems Society
Publisher: ERSO, ITRI?
Published: 1993
Place of publication: Hsinchu, Taiwan?]
Language: eng; chi
Subjects: Semiconductor industry; Congresses; Semiconductors; Design and construction; Process control; Semiconductor storage devices; Miniature electronic equipment; Production control; Microelectronics; Research; Industrial Research; Laboratories; Management
Other titles: 1993 SMT Workshop.; Nineteen ninety-three SMT Workshop.
Notes: Title page and cover in Chinese and English.

Jointly organized by the Electrical Engineering Department of National Taiwan University and the Electronics Research & Service Organization of Industrial Technology Research Institute. Cf. pref.

Pref. signed: Si-Chen Lee, workshop chairman; C.Y. Lu, workshop co-chairman.
Table of contents: title: [v. 1] Preface. Symposium agenda. Symposium organization. pt. 1. ULSI technology challenge towards 21st century (keynote speech) / C.Y. Lu. An introduction to basic principles of production / Shu Li. pt. 2. Manufacturing logistics (keynote speech) / Hiromitsu Takeuchi. Hierarchical production control / Shi-Chung Chang. pt. 3. Manufacturing operations (keynote speech) / Hong Jen Wu. Statistical process control in semiconductor manufacturing : a drive towards six sigma / Chih-Chun Hu. pt. 4. Equipment engineering : cornerstone of competitive manufacturing (keynote speech) / Chih-Yung Shu. Design for performance and manufacturability in IC process integration / Konrad K. Young. Technology development and transfer criteria and practice / Konrad K. Young. pt. 5. Research directions in semiconductor manufacturing (keynote speech) / Costas J. Spanos. Information system for modern semiconductor fab. / William Wang. Strategies for fab. automation / Jen-Shih Jessi Niou; title: [v. 2] R & D line management / Katalin Voros.