Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography
Subtitle: proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah
By: edited by Jorgen Schou, Pieter Kruit, Dale E. Newbury ; managing editors, Ram A. Sharma and Om Johari.
Contributors: Johari, Om; Kruit, Pieter.; Newbury, Dale E.; Schou, Jørgen.; Sharma, Ram A.
Series: Scanning microscopy supplement -- 4 (1990); Scanning microscopy -- 4.
Publisher: Scanning Microscopy International
Published: 1990
Place of publication: AMF O'Hare, IL
Language: eng
Number of pages: 370
Subjects: Electron beams -- Congresses.; Scanning electron microscopes -- Congresses.
Notes: Issued as "Scanning microscopy, supplement 4, 1990."

Includes bibliographical references.