Chemical-Mechanical Polishing 2000
Subtitle: fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.
By: editors, Rajiv K. Singh ... [et al.].
Contributors: Singh, R. K.
Series: Materials Research Society symposium proceedings -- v. 613.; Materials Research Society symposia proceedings -- v. 613.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Electrolytic polishing -- Congresses; Grinding and polishing -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and indexes.