Microcircuit engineering 80
Subtitle: proceedings of the International Conference on Microlithography, September 30, October 1-2, 1980, Amsterdam, the Netherlands
By: edited by Roel P. Kramer ; organised by Delft University of Technology.
Contributors: Kramer, Roel P.; Technische Hogeschool Delft.
Publisher: Delft University Press
Published: 1981
Place of publication: Delft
Language: eng
Number of pages: 566
Subjects: Integrated circuits -- Congresses.; Photolithography -- Congresses.
Notes: Includes bibliographical references and index.