Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics
Subtitle: Symposium held April 5-9, 2010, San Francisco, California
By: editors, Johann W. Bartha ... [et al.].
Contributors: Bartha, Johann W. (Johann Wolfgang); Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings -- v. 1249; Materials Research Society symposium proceedings -- v. 1249.
Publisher: Materials Research Society
Published: 2010
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 342
ISBN-13: 9781605112268
Subjects: Nanoelectronics; Chemical mechanical planarization; Congresses; Microelectronics
Notes: "Symposium E, 'Chemical Mechanical Planarization as a Semiconductor Technology Enabler--2010,' held April 5-9 at the 2010 MRS Spring Meeting in San Francisco, California ..."--Pref.

Includes bibliographical references and indexes.