Characterisation of different single and multilayer films using phase modulated spectroscopic ellipsometry
By: by N.C. Das, D. Bhattacharyya, and S. Thakur.
Contributors: Bhabha Atomic Research Centre.
Publisher: Bhabha Atomic Research Centre
Published: 1998
Place of publication: Mumbai
Language: eng
Format: Microform
Number of pages: 29
Subjects: Thin films, Multilayered.
Notes: Microfiche. New Delhi : Library of Congress Office ;  Washington, D.C. : Library of Congress Photoduplication Service, 1999. 1 microfiche. Master microform held by: DLC.
Includes bibliographical references (p. 28-29).
At head of title: Government of India, Atomic Energy Commission.
"BARC/1998/E/013".