Rare-earth implanted MOS devices for silicon photonics
Subtitle: microstructural, electrical and optoelectronic properties
By: Lars Rebohle, Wolfgang Skorupa
Contributors: Skorupa, Wolfgang
Series: Springer series in materials science -- 142; Springer series in materials science -- v. 142.
Publisher: Springer
Published: 2010
Place of publication: Heidelberg
Language: eng
Number of pages: 173
ISBN-13: 9783642144462
Subjects: Metal oxide semiconductors
Notes: Includes bibliographical references (p. 159-170) and index.