Ion Implantation Technology 2012 : 
Subtitle: Proceedings of the 19th International Conference on Ion Implantation Technology
Publisher: American Institute of Physics
Published: Feb 11, 2013
Format: paperback
Number of pages: 460
ISBN-13: 9780735411081
Notes: Source title: Ion Implantation Technology 2012:: Proceedings of the 19th International Conference on Ion Implantation Technology (AIP Conference Proceedings)