Silicides for VLSI applications
By: S.P. Murarka.
Publisher: Academic Press
Published: 1983
Place of publication: New York
Language: eng
Number of pages: 200
Subjects: Silicides.; Electronics -- Materials.; Integrated circuits -- Very large scale integration.
Other titles: Silicides for V.L.S.I. applications.
Notes: Bibliography: p. 177-186.
Includes indexes.