Micro electro mechanical system design
By: James J. Allen
Series: Mechanical engineering -- 192
Publisher: Taylor & Francis
Published: 2005
Place of publication: Boca Raton
Language: eng
Format: [electronic resource] /
ISBN-13: 9781420027754
Subjects: Microelectromechanical systems; Engineering design; Design and construction
Other titles: ENGnetBASE.
Notes: Includes bibliographical references and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.