Handbook of critical dimension metrology and process control
By: Kevin M. Monaham, editor.
Contributors: Monahan, Kevin M.; Society of Photo-optical Instrumentation Engineers.
Series: Critical reviews of optical science and technology ;; v. CR52
Publisher: SPIE Optical Engineering Press
Published: 1994
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 358
Subjects: Electronic industries -- Production control -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.; Integrated circuits -- Measurement -- Congresses.
Notes: Includes bibliographical references.
Proceedings of a conference held 28-29 September 1993 Monterey, California.