Fiziko-khimicheskie metody obrabotki poverkhnosti poluprovodnikov
By: pod redakt͡s︡ieĭ B.D. Luft ; [avtory B.D. Luft ... et al.].
Contributors: Luft, B. D.
Publisher: "Radio i svi͡a︡zʹ"
Published: 1982
Place of publication: Moskva
Language: rus
Number of pages: 136
Subjects: Semiconductors -- Etching.
Notes: Bibliography: p. 129-[135].