Device and process technologies for microelectronics, MEMS, and photonics IV
Subtitle: 12-14 December 2005, Brisbane, Australia
By: Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Queensland University of Technology (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)
Contributors: Society of Photo-optical Instrumentation Engineers; Queensland University of Technology; University of Adelaide; University of Adelaide. Centre for Biomedical Engineering
Series: Proceedings of SPIE -- v. 6037; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6037.
Publisher: SPIE
Published: 2006
Place of publication: Bellingham, Wash
Language: eng
Notes: Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.

Includes bibliographical references and index.