Functional integration of opto-electro-mechanical devices and systems
Subtitle: 24-25 January 2001, San Jose, USA
By: Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Descour, Michael R.; Rantala, Juha T.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4284; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4284.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 152
Subjects: Optoelectronic devices -- Congresses.; Microelectromechanical systems -- Congresses.; Microelectronic packaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.