The MEMS Handbook
Edition: 1 edition
Publisher: CRC
Published: September 27, 2001
Language: eng
Format: Hardcover
Number of pages: 1368
ISBN-13: 9780849300776
Subjects: Science/Mathematics; Microelectronics; Mechanical Engineering (Specific Aspects); Technology; Technology & Industrial Arts; Nanotechnology; Engineering - Electrical & Electronic; Technology / Electronics / Microelectronics; Engineering - Mechanical; Electronics - Microelectronics; Handbooks, manuals, etc; Mechanical engineering