Silicide technology for integrated circuits
By: edited by Lih J. Chen
Contributors: Chen, L. J; Institution of Electrical Engineers
Series: IEE processing series -- v. 5
Publisher: Institution of Electrical Engineers
Published: 2004
Place of publication: London
Language: eng
Number of pages: 279
Subjects: Silicides; Integrated circuits -- Materials
Notes: Includes bibliographical references and index