Sensor Technology 2001
Subtitle: Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001
By: edited by Miko Elwenspoek
Publisher: Springer Netherlands
Published: 2001
Place of publication: Dordrecht
Language: eng
Format: [electronic resource] :
Number of pages: 200
ISBN-13: 9789401038416; 9789401008402
Subjects: Surfaces (Physics); Optical materials; Computer engineering; Machinery
Other titles: Proceedings of the Sensor Technology Conference 2001, Enschede, The Netherlands, 14-15 May 2001
Description: The interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and incorporation of sensors in complete microsystems has begun to take shape. These proceedings report the newest results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication. Audience: This book will be of interest to engineers active in the field of sensors, sensor systems, microsystems, and M(O)EMS.
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