Crystalline defects and contamination
Subtitle: their impact and control in device manufacturing : proceedings of the Satellite Symposium to ESSDERC 93, Grenoble, France
By: edited by Bernd O. Kolbesen ... [et al.].
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; European Solid State Device Research Conference (23rd : 1993 : Grenoble, France); Symposium on Crystalline Defects and Contamination (1993 : Grenoble, France)
Series: Proceedings ;; v. 93-15; Proceedings (Electrochemical Society) ;; v. 93-15.
Publisher: Electrochemical Society; Electrochemical Society, Incorporated
Published: 1993
Place of publication: Pennington, NJ
Language: eng
Number of pages: 283
Subjects: Integrated circuits -- Very large scale integration -- Congresses.; Crystals -- Defects -- Congresses.
Notes: Includes bibliographical references and indexes.
"Electronics Division."
"Presented at the Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' held in Grenoble, France, on September 17th, 1993"--Pref.