Atomic layer deposition applications 2
By: editors A. Londergan ... [et al.].
Contributors: Electrochemical Society. Meeting.; Electrochemical Society. Dielectric Science and Technology Division.
Series: ECS transactions -- v. 3, no.15
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, N.J
Language: eng
Number of pages: 288
ISBN-13: 9781566775427
Subjects: Chemical vapor deposition -- Congresses; Vapor-plating -- Congresses
Genres: Congresses
Notes: "Second Symposium on Atomic Layer Deposition Applications was held on October 29 through November 1, 2006 in the Moon Palace Resort, Cancun, Mexico as part of the 210th meeting of the Electrochemical Society"--P. iii.

Sponsoring Division: Dielectric Science & Technology.

Includes bibliographical references and index.