Poly-SiGe for MEMS-above-CMOS Sensors
Publisher: Springer; Brand: Springer
Published: Jul 17, 2013
Format: hardcover
Number of pages: 199
ISBN-13: 9789400767980
Notes: Source title: Poly-SiGe for MEMS-above-CMOS Sensors (Springer Series in Advanced Microelectronics)