Nanoparticle Engineering for Chemical-Mechanical Planarization
Subtitle: Fabrication of Next-Generation Nanodevices
Publisher: CRC; CRC Press
Published: November 17, 2008
Language: eng
Format: Hardcover
Number of pages: 224
ISBN-13: 9781420059113
Subjects: Material Science; Technology / Material Science; Chemistry - Industrial & Technical; Electronics - Microelectronics; Technology; Technology & Industrial Arts; Science/Mathematics