Integrated circuit metrology II
Subtitle: May 3-4, 1984, Arlington, Virginia
By: Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards.
Contributors: Nyssonen, Diana.; United States. National Bureau of Standards.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 480
Publisher: SPIE--the International Society for Optical Engineering
Published: 1984
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 172
Subjects: Integrated circuits -- Congresses; Mensuration -- Congresses
Other titles: Integrated circuit metrology 2.; Integrated circuit metrology two.
Notes: Includes bibliographical references and index.