Materials Science of Microelectromechanical Systems (Mems) Devices III: Symposium Held November 27-28, 2000, Boston, Massachusetts, U.S.A (Symposium Proceedings Series Volume 657)
Contributors: Harold G. Kahn (Editor); M. Judy (Editor); S. M. Spearing (Editor); M. P. Deboer (Editor)
Publisher: Materials Research Society
Published: July 2001
Language: eng
Format: Hardcover
Number of pages: 348
ISBN-13: 9781558995673
Subjects: Electronics - General; Technology & Industrial Arts; Congresses; Materials; Microelectromechanical systems; Science/Mathematics