Ion Implantation
Subtitle: Basics to Device Fabrication (The International Series in Engineering and Computer Science)
Edition: 1 edition
Publisher: Springer
Published: December 31, 1994
Language: eng
Format: Hardcover
Number of pages: 408
ISBN-13: 9780792395201
Subjects: Industrial Chemistry & Manufacturing Technologies; States of matter; Science/Mathematics; Electronic Apparatus And Devices; Technology; Technology & Industrial Arts; Semiconductor doping; Chemistry - Inorganic; Electronics - Semiconductors; Material Science; Science-Chemistry - Inorganic; Technology / Electronics / Semiconductors; Technology / Material Science; Technology-Material Science; Design and construction; Ion implantation; Semiconductors