Maikuro nano denshi bīmu sōchi ni okeru shinkū gijutsu
By: chosha Yoshimura Nagamitsu. 
Edition: Shohan
Publisher: Enu Tī Esu
Published: 2003
Place of publication: Tōkyō
Language: jpn
Number of pages: 338
Subjects: Vacuum technology; Vacuum metallurgy; Vacuum microelectronics
Notes: Errata slip inserted.

Includes bibliographical references and indexes.