Lithography in Microelectronics (Proceedings of the Institute of General Physics of the Academy of Sciences of the USSR)
Contributors: T. M. Makhviladze (Editor); Al Peabody (Translator)
Publisher: Nova Science Publishers
Published: July 1989
Language: eng
Format: Hardcover
Number of pages: 207
ISBN-13: 9780941743303
Subjects: Applied optics; Circuits & components; Electronics - Microelectronics; Integrated Circuits; Optical Lithography; Technology & Industrial Arts; Science/Mathematics