The impact of lasers on semiconductor processing
Subtitle: a strategic report analyzing the VLSI/ULSI impact on semiconductor processing equipment.
Contributors: Draper, Otto.
Edition: 1st ed.
Publisher: Electronic Trend Publications
Published: 1985
Place of publication: Cupertino, CA
Language: eng
Subjects: Integrated circuits industry -- United States.; Lasers -- Industrial applications.
Notes: Authors: Art Elsea and Otto Draper.
Includes index.