MOEMS
Subtitle: Micro-Opto-Electro-Mechanical Systems (SPIE Press Monograph Vol. PM126)
Publisher: SPIE Publications
Published: April 2005
Language: eng
Format: Hardcover
Number of pages: 636
ISBN-13: 9780819450210
Subjects: Applied optics; Precision instruments manufacture; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - General; Electronics - Optoelectronics; Electronics - Microelectronics; Microelectromechanical systems; Microfabrication; Optoelectronic devices