Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxide-Schichten für Silizium-Dünnschicht-solarzellen
By: Jürgen Hüpkes.
Contributors: Forschungszentrum Jülich. Institut für Photovoltaik.
Series: Schriften des Forschungszentrums Jülich. Reihe Energietechnik -- Bd. 52 = -- Schriften des Forschungszentrums Jülich. Energy technology -- v. 52; Schriften des Forschungszentrums Jülich -- Bd. 52.
Publisher: Forschungszentrum Jülich, Zentralbibliothek
Published: 2006
Place of publication: Jülich
Language: ger
Number of pages: 170
ISBN-13: 9783893364350
Subjects: Sputtering (Physics); Zinc oxide thin films.; Aluminum coating.; Solar cells -- Materials.; Silicon solar cells.; Doped semiconductors.
Other titles: Texturierte ZnO:Al-Schicht für [mu]c-Si:H-Solarzellen; Investigation of the reactive sputtering process for preparation of aluminum doped zinc oxide films for silicon thin film solar cells
Notes: At head of title: Forschungszentrum Jülich GmbH, Institut für Photovoltaik.

Includes bibliographical references (p. 155-168).

Text in German, with abstracts in German and English.