Integrated circuit metrology, inspection, and process control VII
Subtitle: 2-4 March 1993, San Jose California
By: Michael T. Postek, chair/editor; sponsored and published by SPIE -- the International Society for Optical Engineering.
Contributors: Postek, Michael T.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 1926
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 594
Subjects: Integrated circuits -- Inspection -- Congresses.; Integrated circuits -- Measurement -- Congresses.
Notes: Includes bibliographical references and index.