Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
Subtitle: 5-7 December 2007, Canberra, Australia
By: Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)
Contributors: Society of Photo-optical Instrumentation Engineers; Australian National University; Australian National University. Research School of Physical Sciences; University of Adelaide. Centre for Biomedical Engineering
Series: Proceedings of SPIE -- v. 6800; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6800.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819469717
Notes: Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.

Includes bibliographical references and index.