NEMS/MEMS technology and devices
Subtitle: selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore
By: edited by Lynn Khine and Julius M. Tsai
Contributors: Khine, Lynn; Tsai, Julius M.
Series: Advanced materials research -- v. 254; Advanced materials research -- v. 254.
Publisher: Trans Tech; Trans Tech Pubn
Published: 2011
Place of publication: Durnten-Zurich; Enfield, NH
Language: eng
Number of pages: 229
ISBN-13: 9783037851456
Subjects: Nanoelectromechanical systems; Microelectromechanical systems; Congresses
Notes: Includes bibliographical references and indexes.