Glow discharge processes
Subtitle: sputtering and plasma etching
By: Brian Chapman.
Publisher: Wiley
Published: 1980
Place of publication: New York
Language: eng
Number of pages: 406
Subjects: Sputtering (Physics); Glow discharges.; Plasma etching.
Notes: Bibliography: p. 397-400.
"A Wiley-Interscience publication."
Includes index.