Multicomponent and multilayered thin films for advanced microtechnologies
Subtitle: techniques, fundamentals, and devices
By: edited by Orlando Auciello and Jürgen Engemann.
Contributors: Auciello, Orlando, 1945-; Engemann, Jürgen.; North Atlantic Treaty Organization. Scientific Affairs Division.; NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany)
Series: NATO ASI series. Series E, Applied sciences ;; vol. 234; NATO ASI series.; no. 234.
Publisher: Kluwer Academic
Published: 1993
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 633
Subjects: Thin film devices -- Congresses; Thin films -- Congresses
Notes: Includes bibliographical references and index.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad Windsheim, Germany, September 21-October 2, 1992"--T.p. verso.