Piezoelectric multilayer beam bending actuators
Subtitle: static and dynamic behavior and aspects of sensor integration
By: R.G. Ballas.
Series: Microtechnology and MEMS
Publisher: Springer
Published: 2007
Place of publication: Berlin; New York
Language: eng
Number of pages: 358
ISBN-13: 9783540326410
Subjects: Piezoelectric devices; Piezoelectric ceramics; Actuators
Notes: Includes bibliographical references and index.