Studies of the reactive sputtering process and CVD of diamond thin films
By: Tomas Nyberg
Contributors: Uppsala universitet
Series: Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology -- 329; Acta Universitatis Upsaliensis -- 329
Publisher: Acta Universitatis Upsaliensis
Published: 1997
Place of publication: Uppsala
Language: eng
Number of pages: 43
ISBN-13: 9789155441067
Subjects: Diamond thin films; Chemical vapor deposition
Notes: Thesis (doctoral)--Uppsala University, 1997.

Includes bibliographical references.