CVD-metod
Subtitle: khimicheskoe parofaznoe osazhdenie
By: V.G. Syrkin
Publisher: "Nauka"
Published: 2000
Place of publication: Moskva
Language: rus
Number of pages: 495
ISBN-13: 9785020016835
Subjects: Electronic circuit design; Chemical vapor deposition
Other titles: Khimicheskoe parofaznoe osazhdenie; CVD method
Notes: Includes bibliographical references (p. 467-[491]).

Summary also in English.