Ultra clean processing of semiconductor surfaces XII
Subtitle: selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium
By: edited by Paul Mertens, Marc Meuris and Marc Heyns
Contributors: Mertens, Paul, editor; Meuris, Marc, editor; Heyns, Marc, editor
Series: Solid State Phenomena -- Volume 219; Diffusion and defect data -- v. 219.
Publisher: TTP
Published: 2015
Place of publication: Pfaffikon, Switzerland
Language: eng
Number of pages: 331
ISBN-13: 9783038352426
Subjects: Surfaces; Semiconductors; Congresses
Notes: Includes bibliographical references at the end of each chapters and indexes.