Fabrication engineering at the micro and nanoscale
By: Stephen A. Campbell.
Contributors: Campbell, Stephen A., 1954-
Edition: 3rd ed.
Series: The Oxford series in electrical and computer engineering
Publisher: Oxford University Press
Published: 2007
Place of publication: New York, N.Y
Language: eng
ISBN-13: 9780195320176
Subjects: Semiconductors -- Design and construction
Notes: Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.

Includes bibliographical references and index.