Remote plasma deposition of hydrogenated amorphous silicon
Subtitle: plasma processes, film growth and material properties
By: Wilhelmus Mathijs Marie Kessels
Contributors: Technische Universiteit Eindhoven
Publisher: Technische Universiteit Eindhoven
Published: 2000
Place of publication: Eindhoven]
Language: eng
Number of pages: 161
ISBN-13: 9789038615790
Subjects: Plasma engineering
Notes: Vita.

Summaries in English and Dutch.

Thesis (doctoral)--Technische Universiteit Eindhoven, 2000.

Includes bibliographical references.